JP2017191090A5 - - Google Patents
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- Publication number
- JP2017191090A5 JP2017191090A5 JP2017013426A JP2017013426A JP2017191090A5 JP 2017191090 A5 JP2017191090 A5 JP 2017191090A5 JP 2017013426 A JP2017013426 A JP 2017013426A JP 2017013426 A JP2017013426 A JP 2017013426A JP 2017191090 A5 JP2017191090 A5 JP 2017191090A5
- Authority
- JP
- Japan
- Prior art keywords
- hole
- introduction
- flow control
- base
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims 18
- 238000011144 upstream manufacturing Methods 0.000 claims 16
- 239000012530 fluid Substances 0.000 claims 14
- 230000000875 corresponding Effects 0.000 claims 8
- 230000001276 controlling effect Effects 0.000 claims 4
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/480,476 US10310521B2 (en) | 2016-04-07 | 2017-04-06 | Bypass unit, a base for a flow meter, a base for a flow controller, a flow meter, and a flow controller |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016077332 | 2016-04-07 | ||
JP2016077332 | 2016-04-07 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017191090A JP2017191090A (ja) | 2017-10-19 |
JP2017191090A5 true JP2017191090A5 (zh) | 2020-01-30 |
JP6819863B2 JP6819863B2 (ja) | 2021-01-27 |
Family
ID=60085827
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017013426A Active JP6819863B2 (ja) | 2016-04-07 | 2017-01-27 | バイパスユニット、流量計用ベース、流量制御装置用ベース、流量計、及び流量制御装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6819863B2 (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101993208B1 (ko) * | 2018-02-28 | 2019-06-27 | 엠케이프리시젼 주식회사 | 유량 측정 장치 |
WO2021033780A1 (ja) * | 2019-08-22 | 2021-02-25 | 株式会社サンツール | 差圧式ホットメルト接着剤流量計を装備するホットメルト接着剤塗布装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0222647Y2 (zh) * | 1985-05-09 | 1990-06-19 | ||
JPH0222648Y2 (zh) * | 1985-05-09 | 1990-06-19 | ||
JP3715920B2 (ja) * | 2001-12-26 | 2005-11-16 | シーケーディ株式会社 | 熱式流量計 |
JP6731594B2 (ja) * | 2015-10-06 | 2020-07-29 | アルメックスコーセイ株式会社 | 気体流量制御装置、気体流量計および気体流量センサ |
-
2017
- 2017-01-27 JP JP2017013426A patent/JP6819863B2/ja active Active
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