JP2017188464A5 - - Google Patents

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JP2017188464A5
JP2017188464A5 JP2017091857A JP2017091857A JP2017188464A5 JP 2017188464 A5 JP2017188464 A5 JP 2017188464A5 JP 2017091857 A JP2017091857 A JP 2017091857A JP 2017091857 A JP2017091857 A JP 2017091857A JP 2017188464 A5 JP2017188464 A5 JP 2017188464A5
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generator
power
impedance
generators
local controller
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JP2017188464A (ja
JP6425765B2 (ja
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JP2017091857A 2011-01-04 2017-05-02 プラズマ処理負荷へのシステムレベルの電力送達 Active JP6425765B2 (ja)

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US201161429472P 2011-01-04 2011-01-04
US61/429,472 2011-01-04

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JP2016053392A Division JP6141478B2 (ja) 2011-01-04 2016-03-17 プラズマ処理負荷へのシステムレベルの電力送達

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JP2017188464A JP2017188464A (ja) 2017-10-12
JP2017188464A5 true JP2017188464A5 (cg-RX-API-DMAC7.html) 2017-11-24
JP6425765B2 JP6425765B2 (ja) 2018-11-21

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JP2013547731A Active JP5946227B2 (ja) 2011-01-04 2012-01-04 電力送達システム、電力制御システム、および、電力を送達するまたは電力制御する方法
JP2016053392A Active JP6141478B2 (ja) 2011-01-04 2016-03-17 プラズマ処理負荷へのシステムレベルの電力送達
JP2017091857A Active JP6425765B2 (ja) 2011-01-04 2017-05-02 プラズマ処理負荷へのシステムレベルの電力送達

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JP2013547731A Active JP5946227B2 (ja) 2011-01-04 2012-01-04 電力送達システム、電力制御システム、および、電力を送達するまたは電力制御する方法
JP2016053392A Active JP6141478B2 (ja) 2011-01-04 2016-03-17 プラズマ処理負荷へのシステムレベルの電力送達

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US (2) US9088267B2 (cg-RX-API-DMAC7.html)
JP (3) JP5946227B2 (cg-RX-API-DMAC7.html)
KR (1) KR101675625B1 (cg-RX-API-DMAC7.html)
WO (1) WO2012094416A1 (cg-RX-API-DMAC7.html)

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