JP2017175127A5 - - Google Patents
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- Publication number
- JP2017175127A5 JP2017175127A5 JP2017049108A JP2017049108A JP2017175127A5 JP 2017175127 A5 JP2017175127 A5 JP 2017175127A5 JP 2017049108 A JP2017049108 A JP 2017049108A JP 2017049108 A JP2017049108 A JP 2017049108A JP 2017175127 A5 JP2017175127 A5 JP 2017175127A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- layer
- forming
- peeling
- plasma treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 claims 6
- 238000009832 plasma treatment Methods 0.000 claims 6
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 claims 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000001257 hydrogen Substances 0.000 claims 2
- 229910052739 hydrogen Inorganic materials 0.000 claims 2
- 239000001272 nitrous oxide Substances 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 claims 1
- 150000002431 hydrogen Chemical class 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 229910000077 silane Inorganic materials 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016052041 | 2016-03-16 | ||
| JP2016052041 | 2016-03-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017175127A JP2017175127A (ja) | 2017-09-28 |
| JP2017175127A5 true JP2017175127A5 (enExample) | 2020-04-23 |
Family
ID=59855890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017049108A Withdrawn JP2017175127A (ja) | 2016-03-16 | 2017-03-14 | 剥離方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20170271380A1 (enExample) |
| JP (1) | JP2017175127A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7086610B2 (ja) * | 2018-01-09 | 2022-06-20 | 株式会社ジャパンディスプレイ | 表示装置 |
| CN108172543A (zh) * | 2018-01-12 | 2018-06-15 | 武汉华星光电半导体显示技术有限公司 | 一种柔性基底的剥离方法以及衬底基板 |
| CN110828505B (zh) * | 2018-07-23 | 2022-06-07 | 京东方科技集团股份有限公司 | 柔性面板的制作方法及制作装置 |
| CN113539940B (zh) * | 2021-09-17 | 2021-11-23 | 江苏茂硕新材料科技有限公司 | 一种半导体衬底的制备方法及半导体衬底 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI288443B (en) * | 2002-05-17 | 2007-10-11 | Semiconductor Energy Lab | SiN film, semiconductor device, and the manufacturing method thereof |
| US7785938B2 (en) * | 2006-04-28 | 2010-08-31 | Semiconductor Energy Laboratory Co., Ltd | Semiconductor integrated circuit, manufacturing method thereof, and semiconductor device using semiconductor integrated circuit |
| US7855153B2 (en) * | 2008-02-08 | 2010-12-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| KR102309244B1 (ko) * | 2013-02-20 | 2021-10-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
| TWI695525B (zh) * | 2014-07-25 | 2020-06-01 | 日商半導體能源研究所股份有限公司 | 剝離方法、發光裝置、模組以及電子裝置 |
-
2017
- 2017-03-09 US US15/454,292 patent/US20170271380A1/en not_active Abandoned
- 2017-03-14 JP JP2017049108A patent/JP2017175127A/ja not_active Withdrawn
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