JP2017162919A - Alignment device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an alignment technique capable of suppressing swinging of an imaging part and execute positioning precisely.SOLUTION: An alignment device measures a position deviation of two objects by imaging two marks of a first mark provided to one object and a second mark provided to the other object, and aligns positions of two objects on the basis of the position deviation. An imaging part 75 images at least one of two marks in a state where movement side members (71, 72, and 73) are contacted to a surface of a fixed side member 3 and are held after the movement side members (71, 72, and 73) of a camera movement mechanism 70 is moved to at least one direction. In more detail, the second mark is imaged in the state where, for example, a Y-direction movement member 71 is contacted to the surface of a base member 3, an X-direction movement member 72 is contacted to the surface of the Y-direction movement member 71, and a Z-direction movement member 73 is contacted to the surface of the X-direction movement member 72 while being held.SELECTED DRAWING: Figure 13

Description

  The present invention relates to an alignment apparatus (such as a bonding apparatus) that aligns two objects and a technique related thereto.

  There is a technique for aligning two objects (for example, two substrates) facing each other (see Patent Documents 1 and 2, etc.). In the alignment (alignment) of the two objects, two pairs of alignment marks (alignment marks) are used.

  For example, Patent Document 1 describes the following technique.

  Specifically, the first captured image is obtained by photographing the alignment mark provided on the upper object, and the second photographed image is obtained by photographing the alignment mark provided on the lower object. Is acquired. Next, based on these two captured images, the mark positions of both alignment marks are specified, and the positional deviations (Δxa, Δya) between the alignment marks are obtained. And two objects are moved so that this position shift may be canceled.

  By the way, the horizontal position (X direction position and / or Y direction position) of the alignment mark of the upper object and the horizontal position of the alignment mark of the lower object may not necessarily be the same position. For this reason, the imaging unit may photograph the alignment mark of one object, move in the horizontal direction (X direction and / or Y direction), and photograph the alignment mark of the other object.

  In addition, the vertical position (Z-direction position) of the alignment mark of the upper object may not be sufficiently close to the vertical position of the alignment mark of the lower object. In this case, in order to ensure the in-focus state of the captured images related to both alignment marks, first, the upper alignment mark of the target object is focused, and then the focus is moved in the vertical direction (Z direction). There is a case where the position is moved, and this time, an image is taken with the alignment mark of the other object in focus.

JP 2010-267682 A JP 2011-66287 A

  In this manner, the imaging unit (camera) captures a captured image related to a certain alignment mark, and then intervenes movement in at least one of the X direction, the Y direction, and the Z direction. A photographed image related to an alignment mark different from the mark may be taken.

  By the way, as a driving mechanism for realizing such movement of the imaging unit, a moving mechanism using a ball bearing has been conventionally used. In a moving mechanism using a ball bearing, two moving members are moved through the ball bearing.

  However, when the image pickup unit is moved by such a driving mechanism (a moving mechanism using a ball bearing), the present inventor has faced the following problems. Specifically, when performing very fine alignment, there is a problem that the vibration of the imaging unit does not converge sufficiently after the imaging unit is moved and stopped.

  FIG. 26 is a diagram for explaining such vibration. More specifically, the imaging unit captures the alignment mark of the upper target object among the two target objects that are arranged to face each other in the vertical direction, and then captures the alignment mark of the lower target object. Therefore, the movement starts, moves to a predetermined position, and stops. However, even after driving is stopped and waiting for a certain period (standby period), the shaking (vibration) at the time of stopping does not converge to a predetermined accuracy. As shown in FIG. 26, the shake of the imaging unit converges only to a shake (for example, about 5 μm (micrometer)) larger than a desired accuracy (for example, 0.2 μm (micrometer)). In short, the shaking of the imaging unit remains. In the state where such shaking remains, accurate alignment is not easy. Note that this problem is significant when the waiting period is relatively short. However, the present invention is not limited to this, and the problem may occur even when the standby period is relatively long.

  In addition to the above-described situation, the above-described problem that shaking remains in accordance with the movement of the imaging unit may occur in other situations.

  Therefore, an object of the present invention is to provide an alignment technique capable of performing accurate positioning while suppressing shaking of the imaging unit.

  In order to solve the above-mentioned problem, the invention of claim 1 is an alignment apparatus that aligns two objects, and includes a first alignment mark and a second object provided on the first object. By imaging two marks with the provided second alignment mark, the measuring means for measuring the positional deviation of the two objects, and the positional deviation measured by the measuring means so as to eliminate the positional deviation Driving means for relatively moving two objects, the measuring means includes an imaging unit and a driving mechanism for moving the imaging unit, and the driving mechanism includes a stationary member, A movable side member movable in at least one direction with respect to the fixed side member, and the imaging unit moves in the at least one direction as the movable side member moves, Said small number of parts After moving in one direction, at least one of the two marks is imaged in a state where the moving member is held in surface contact with the fixed member. .

  According to a second aspect of the present invention, in the alignment apparatus according to the first aspect of the invention, after the movement-side member is moved in the at least one direction, the movement-side member is attracted and held by the fixed-side member due to negative air pressure. It is characterized by that.

  According to a third aspect of the present invention, in the alignment apparatus according to the first or second aspect of the present invention, the imaging unit images the first alignment mark before the movement-side member moves in the at least one direction. The first alignment mark and the second alignment mark are imaged at different positions by imaging the second alignment mark after the movement.

  According to a fourth aspect of the present invention, in the alignment apparatus according to the third aspect of the present invention, the imaging unit is accompanied by a movement operation of the moving member in the at least one direction, whereby the first alignment mark and the first alignment mark are moved. The second alignment mark is imaged at different positions in the focus adjustment direction.

  According to a fifth aspect of the present invention, in the alignment apparatus according to the third aspect of the invention, the first alignment mark and the second alignment mark are different from each other in a direction parallel to the opposing surfaces of the two objects. The imaging unit is configured to move the moving side member in the at least one direction, thereby causing the first alignment mark and the first alignment mark to be different from each other in a direction parallel to the facing surface. The second alignment mark is imaged.

  According to a sixth aspect of the present invention, in the alignment apparatus according to the third aspect of the invention, the first alignment mark and the second alignment mark are different from each other in a direction parallel to the facing surfaces of the two objects. The imaging unit is configured to move the moving side member in the at least one direction, thereby moving the first member at a position different from each other in both a direction parallel to the facing surface and a focus adjustment direction. The first alignment mark and the second alignment mark are imaged.

  According to a seventh aspect of the invention, in the alignment apparatus according to the first or second aspect of the invention, the moving side member is attached to each of the other two objects that are alignment objects immediately before the two objects. The imaging unit moves in the at least one direction after imaging with respect to the set of alignment marks, and the imaging unit is immediately before the imaging position with respect to the set of alignment marks after the movement-side member moves in the at least one direction. An image of at least one of the two marks is taken at a position different from.

  The invention of claim 8 relates to the alignment apparatus according to claim 1 or claim 2, wherein the moving side member relates to a set of alignment marks provided separately from the two marks in the two objects. After photographing, the image pickup unit moves in the at least one direction, and the image pickup unit is moved at a position different from the immediately preceding image pickup position related to the set of alignment marks after the movement side member is moved in the at least one direction. An image of at least one of the two marks is taken.

  According to a ninth aspect of the present invention, in the alignment apparatus according to any one of the first to eighth aspects, the moving side member is supplied with air between the moving side member and the fixed side member. In the state, it is moved with respect to the stationary member in the at least one direction.

  According to a tenth aspect of the present invention, in the alignment apparatus according to any one of the first to ninth aspects, the moving side member is movable in the first direction only with respect to the fixed side member. A moving member, and the imaging unit moves in the first direction along with a first moving operation in the first direction between the fixed-side member and the first moving member. Imaging at least one of the two marks in a state where the first moving member is held in surface contact with the fixed-side member after the movement in the first direction. It is characterized by.

  An eleventh aspect of the present invention is the alignment apparatus according to any one of the first to ninth aspects, wherein the moving side member has a first direction and a second direction with respect to the fixed side member. A first moving member that is movable in one direction, and the imaging unit in the first direction and / or the second direction between the fixed side member and the first moving member. Along with the movement operation, the first movement member moves in the at least one direction, and after the movement in the at least one direction, the first movement member is held in surface contact with the stationary member, It is characterized in that at least one of the two marks is imaged.

  According to a twelfth aspect of the present invention, in the alignment apparatus according to any one of the first to ninth aspects, the moving side member is movable in the first direction with respect to the fixed side member. A second moving member that is movable in a second direction with respect to the first moving member, and the imaging unit is located between the fixed-side member and the first moving member. At least one of the first movement operation in the first direction and the second movement operation in the second direction between the first movement member and the second movement member The first moving member is held in surface contact with the stationary member and moved in the at least one direction, and after the movement in the at least one direction, and the second The moving member is in surface contact with the first moving member. While it is held Te, characterized by imaging at least one of the marks of the two marks.

  A thirteenth aspect of the present invention is the alignment apparatus according to any one of the first to ninth aspects, wherein the movable side member is movable in a first direction relative to the fixed side member. A member, a second moving member movable in a second direction with respect to the first moving member, and a third moving member movable in a third direction with respect to the second moving member; The imaging section includes a first movement operation in the first direction between the fixed side member and the first movement member, and the first movement member and the second movement member. A second moving operation in the second direction with respect to the moving member; and a third moving operation in the third direction between the second moving member and the third moving member; After at least one of the moving operations, the first moving member is moved relative to the fixed-side member. The second moving member is held in contact and held in surface contact with the first moving member, and the third moving member is held in surface contact with the second moving member. In this state, at least one of the two marks is imaged.

  According to a fourteenth aspect of the present invention, in the alignment apparatus according to any one of the first to thirteenth aspects, the fixed-side member is a member fixed directly or indirectly to a base member of the alignment apparatus. And the base member itself, wherein the base member is damped by a vibration damping mechanism.

  According to a fifteenth aspect of the present invention, in the alignment apparatus according to the fourteenth aspect of the invention, the vibration damping mechanism is an active vibration damping mechanism.

  According to the first to fifteenth aspects of the present invention, it is possible to perform accurate alignment by suppressing the shaking of the imaging unit.

It is a figure which shows the internal structure of the alignment apparatus which concerns on embodiment of this invention. It is a top view which shows one target object (board | substrate) with which the alignment mark was attached | subjected. It is a top view which shows the other target object (board | substrate) with which the alignment mark was attached | subjected. It is a figure which shows the positional relationship of two marks. It is a figure which shows the position shift of two marks. It is a side view which shows the state (separation | separation state) where the two target objects are opposingly arranged. It is a side view which shows the state (contact state) with which two target objects are opposingly arranged. It is a figure which shows the target object in which the alignment mark was provided in a different horizontal position. It is a figure which shows the imaging | photography range etc. of each imaging | photography image. It is a side view which shows the state (separated state) where the two target objects which have an alignment mark in a different horizontal position are opposingly arranged. It is a front view of the drive mechanism of an imaging part. It is a perspective view of the drive mechanism of an imaging part. It is a disassembled perspective view of the drive mechanism of an imaging part. It is a figure which shows the contact state of a Z direction moving member and an X direction moving member (guide part). It is a side view which shows the state (separation | separation state) where another two target object is opposingly arranged. It is a side view which shows the state (contact state) with which two target objects are opposingly arranged. It is a top view which shows the drive mechanism which concerns on a modification. It is a figure which shows the X direction movement by the drive mechanism which concerns on the said modification. It is a figure which shows the Y direction movement by the drive mechanism which concerns on the said modification. It is a side view which shows the state (separated state) with which the board | substrate and the mold were opposingly arranged. It is a side view which shows the state (contact state) with which the board | substrate and the mold were opposingly arranged. It is a figure which shows the mark position etc. which concern on a modification. It is a figure which shows the alignment apparatus which concerns on a prior art. It is a figure which shows the camera moving mechanism (movement mechanism using a ball bearing) which concerns on a prior art. It is a figure which shows the A-A 'cross section of FIG. In prior art, it is a figure which shows a mode that the vibration (vibration) at the time of a stop of an imaging part does not fully converge.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<1. First Embodiment>
<1-1. Device configuration>
FIG. 1 is a diagram showing an internal structure of an alignment apparatus 1 (also referred to as 1A) according to a first embodiment of the present invention. In the following, in each figure, directions and the like are shown using an XYZ orthogonal coordinate system for convenience.

  The alignment apparatus 1 pressurizes and heats an object to be bonded (here, a substrate) 91 and an object to be bonded (here, a substrate) 92 in a chamber (vacuum chamber) 2 under reduced pressure so that both objects are bonded. An apparatus for joining the objects 91 and 92. This alignment apparatus 1 is also expressed as a bonding apparatus that bonds the substrate 92 held by the head 22 and the substrate 91 held by the stage 12. In addition, although the semiconductor substrate is illustrated here as the board | substrates 91 and 92, it is not limited to this, A glass substrate etc. may be used. Further, both the objects to be joined 91 and 92 are also expressed as objects (for alignment operation).

  Moreover, the surface activation process is performed in advance on the bonding surfaces of the objects 91 and 92. Here, it is assumed that a surface activation process is performed on both the objects 91 and 92 in advance in an apparatus outside the alignment apparatus 1, and then both the objects 91 and 92 are carried into the alignment apparatus 1.

  The surface activation process is a process for activating the bonding surfaces of both objects 91 and 92, and is performed by releasing a specific substance (for example, argon) using a beam irradiation unit. The beam irradiation unit accelerates an ionized specific substance (such as argon) by an electric field and emits the specific substance toward the bonding surfaces of the objects 91 and 92, thereby joining the surfaces of the objects 91 and 92. Activate. In other words, the beam irradiation unit activates the bonding surfaces of both objects 91 and 92 by irradiating energy waves toward the bonding surfaces of both objects 91 and 92. As the beam irradiation unit, an atomic beam irradiation apparatus, an ion beam irradiation apparatus, or the like is used.

  The alignment apparatus (joining apparatus) 1 includes a vacuum chamber 2 that is a processing space for both objects 91 and 92. The vacuum chamber 2 is connected to a vacuum pump 5 via an exhaust pipe 6 and an exhaust valve 7. The vacuum chamber 2 is put into a vacuum state by reducing (reducing pressure) the pressure in the vacuum chamber 2 in accordance with the suction operation of the vacuum pump 5. Further, the exhaust valve 7 can adjust the degree of vacuum in the vacuum chamber 2 by the opening / closing operation and the exhaust flow rate adjusting operation.

  The upper object 92 is held by the head 22 (more specifically, an electrostatic chuck or a mechanical chuck provided at the tip thereof). Similarly, the lower object 91 is held by the stage 12 (more specifically, an electrostatic chuck or a mechanical chuck provided at the tip thereof).

  The head 22 is heated by a heater 22 h built in the head 22, and can adjust the temperature of the object 92 held by the head 22. Similarly, the stage 12 is heated by a heater 12h built in the stage 12, and the temperature of the object 91 on the stage 12 can be adjusted. Further, the head 22 can also cool the head 22 itself rapidly to near room temperature by an air cooling type cooling device or the like built in the head 22. The same applies to the stage 12. The heaters 12h and 22h (particularly 22h) function as heating means (melting means) for melting the metal bumps on the object, and also as cooling means (solidification means) for cooling and solidifying the metal bumps again. Function. That is, the heaters 12h and 22h (particularly 22h) function as heating / cooling means for heating or cooling the metal bumps.

  Both the head 22 and the stage 12 are movably installed in the vacuum chamber 2.

  The stage 12 can be moved (translated) in the Y direction by the slide moving mechanism 14. The stage 12 moves in the Y direction between a relatively far-side standby position and a relatively near-side joining position (a position just below the head 22 (see FIG. 1)). The slide moving mechanism 14 has a highly accurate position detector (linear scale), and the stage 12 is positioned with high accuracy.

  The head 22 is moved (translationally moved) in the X direction and the Y direction (two translational directions parallel to the horizontal plane) by the alignment table 23, and at the θ direction (around the axis parallel to the Z axis) by the rotation drive mechanism 25. Rotation direction). The head 22 is driven by the alignment table 23 and the rotation drive mechanism 25 based on a position detection result by a position recognition unit 28 described later, and alignment operations in the X direction, the Y direction, and the θ direction are executed. Thus, in each direction (X direction, Y direction, θ direction) (horizontal direction in short) along the plane (horizontal plane) perpendicular to the vertical direction (Z direction), the stage 12 and the head 22 are By relatively moving, the object 91 held on the stage 12 and the object 92 held on the head 22 are aligned in the horizontal direction.

  The head 22 is moved (lifted / lowered) in the Z direction by the Z-axis lifting / lowering drive mechanism 26. As the stage 12 and the head 22 move relative to each other in the Z direction, the object 91 held on the stage 12 and the object 92 held on the head 22 come into contact with each other and are pressed and joined. In addition, the Z-axis raising / lowering drive mechanism 26 can also control the applied pressure at the time of joining based on signals detected by a plurality of pressure detection sensors (load cells, etc.) 29 and 32.

  The alignment apparatus 1 includes a position recognition unit 28 (described later), and the position recognition unit 28 includes two imaging units 75 (75M and 75N). Each imaging unit 75, for example, images the alignment mark MK1 (see FIG. 2) provided on the object 91 and the alignment mark MK2 (see FIG. 3) provided on the object 92, respectively. The displacement (position displacement in the X direction, Y direction, and θ direction) of the objects 91 and 92 is measured.

  Then, when the head 22 is driven relative to the stage 12 so as to eliminate the positional deviation, both the objects 91 and 92 are driven relatively, and alignment in the X direction, the Y direction, and the θ direction is performed. The action is executed.

  As described above, the alignment apparatus 1 is an apparatus that aligns the two objects 91 and 92.

<1-2. Alignment mark>
As shown in FIGS. 2 and 3, both the objects 91 and 92 are each provided with an alignment mark (hereinafter also referred to as an alignment mark) MK. Here, two alignment marks MK1 (MK1a, MK1b) (see FIG. 2) are provided on one object 91, and two alignment marks MK2 (MK2a, MK2b) (see FIG. 3) are also provided on the other object 92. Is provided.

  Here, two alignment marks MK1a and MK1b (also collectively referred to as MK1) provided on the object 91 are pattern marks each having an annular shape (see FIG. 2). On the other hand, two alignment marks MK2a and MK2b (also collectively referred to as MK2) provided on the object 92 are circular pattern marks (see FIG. 3). The outer diameter of the circle of alignment mark MK2 is smaller than the inner diameter of the annular portion of alignment mark MK1.

  Here, a circular mark or the like is used as the alignment mark MK, but the present invention is not limited to this, and various other shapes (frame shape, cross shape, etc.) are used as the alignment mark MK. Also good.

  Each alignment mark MK1 (MK1a, MK1b) is arranged on the surface (in detail, the upper surface) of the lower object 91, and each alignment mark MK2 (MK2a, MK2b) is the upper object 92. Is disposed on the surface (specifically, the lower surface).

  As shown in FIG. 2, the two alignment marks MK1a and MK1b in the same object 91 are arranged at a large distance from each other on the substrate 91 so that the distance between the two marks MK1a and MK1b is relatively large. The More specifically, these alignment marks MK1a and MK1b are arranged near both ends of the substrate 91. For example, in the substrate 91 having a diameter of 300 mm (millimeters), the alignment mark MK1a is arranged near the left end of the substrate 91 (for example, a position of 5 mm (millimeters) from the left end to the center), and the other alignment mark MK1b is disposed on the substrate 91. Near the right end (for example, a position of 5 mm (millimeters) from the right end toward the center). Note that, by increasing the distance between the two marks MK1a and MK1b, it is possible to improve the detection accuracy and alignment accuracy of the positional deviation in the rotational direction.

  As shown in FIG. 3, the two alignment marks MK2a and MK2b in the same object 92 are similarly arranged. Specifically, the two alignment marks MK2a and MK2b are arranged on the substrate 92 so as to be separated from each other. For example, in the substrate 92 having a diameter of 300 mm (millimeter), the alignment mark MK2a is arranged near the left end of the substrate 92 (for example, a position of 5 mm (millimeter) from the left end to the center side), and the other alignment mark MK2b is disposed on the substrate 92. Near the right end (for example, a position of 5 mm (millimeters) from the right end toward the center).

  In a state where both the objects 91 and 92 are opposed to each other in the vertical direction (opposed arrangement state), the alignment mark MK2a of the object 92 is disposed in a region near the alignment mark MK1a of the object 91. Similarly, in the facing arrangement state, the alignment mark MK2b of the object 92 is arranged in a region near the alignment mark MK1b of the object 91 (see FIGS. 4 and 6).

<1-3. Position recognition unit>
The alignment apparatus 1 includes a position recognition unit 28 that recognizes the horizontal positions (specifically, X, Y, and θ) of the objects 91 and 92. The position recognition unit 28 can execute a position measurement operation for the alignment operation. More specifically, the position recognizing unit 28 can measure the displacement (in detail, Δx, Δy, Δθ) of the horizontal positions of both the objects 91, 92.

  As illustrated in FIG. 1, the position recognition unit 28 includes two imaging units (cameras) 75 (also referred to as 75M and 75N, respectively) that acquire optical images related to the objects 91 and 92 as image data. The imaging units 75M and 75N each have a coaxial illumination system. In addition, as a light source of each coaxial illumination system of the imaging units 75M and 75N, light (for example, infrared light) transmitted through both the objects 91 and 92, the stage 12, and the like is used.

  Each imaging unit 75 (75M, 75N) captures the alignment mark MK1 provided on the object 91 and the alignment mark MK2 provided on the object 92, respectively, so that the two objects 91 and 92 are captured. The positional deviation (the positional deviation in the X direction, Y direction, and θ direction) is measured.

  Specifically, the imaging unit 75M provided on the left side of FIG. 1 captures a captured image G1a (see FIG. 4) related to the alignment mark MK1a provided on the left side of the object 91, and on the left side of the object 92. A photographed image G2a (see FIG. 4) relating to the provided alignment mark MK2a is photographed.

  In addition, the imaging unit 75N provided on the right side of FIG. 1 captures a captured image G1b (see FIG. 4) related to the alignment mark MK1b provided on the right side of the object 91 and is provided on the right side of the object 92. A photographed image G2b (see FIG. 4) relating to the alignment mark MK2b is photographed.

  A captured image G1 (G1a, G1b) relating to the alignment mark MK1 of the lower object 91 is captured as follows. First, as shown in FIG. 1, the light emitted from the light source (not shown) of the coaxial illumination system in the imaging unit 75 travels upward and passes through the window 2b (FIG. 1) having translucency. If it is later reflected by the mark MK1 of the object 91, it proceeds in the opposite direction (downward). Then, the light again passes through the window portion 2b and reaches the image pickup element in the image pickup portion 75. In this way, the position recognizing unit 28 acquires a light image (an image including the mark MK1) related to the object 91 as the captured image G1 (G1a, G1b).

  The captured image G2 (G2a, G2b) relating to the alignment mark MK2 of the upper object 92 is captured as follows. First, light emitted from a light source (not shown) of the coaxial illumination system in the imaging unit 75 travels upward, passes through the window 2b (FIG. 1) and both the objects 91 and 92, and then marks the object 92. When reflected by MK2, it proceeds in the opposite direction (downward). Then, the light again passes through the window portion 2b and the like and reaches the image pickup element in the image pickup portion 75. In this way, the position recognition unit 28 acquires a light image (an image including the mark MK2) related to the object 92 as the captured image G2 (G2a, G2b).

  Then, the alignment apparatus 1 obtains a positional deviation (specifically, positional deviation vectors) (Δxa, Δya) between the pair of alignment marks (MK1a, MK2a) based on the captured images G1a, G2a (see FIG. 5). FIG. 5 shows a state in which the pair of marks MK1a and MK2a are displaced from each other.

  Further, the alignment apparatus 1 obtains a positional deviation (specifically, positional deviation vectors) (Δxb, Δyb) between the pair of alignment marks (MK1b, MK2b) based on the captured images G1b, G2b.

  Thereafter, the position recognizing unit 28 determines the X direction, the Y direction, and the θ direction based on the positional deviations (Δxa, Δya), (Δxb, Δyb) of these two sets of marks and the geometric relationship between the two sets of marks. The relative deviation ΔD (specifically, Δx, Δy, Δθ) of both the workpieces 91 and 92 is calculated (detected). Then, the stage 12 is driven in two translational directions (X direction and Y direction) and a rotational direction (θ direction) so that the relative deviation ΔD recognized by the position recognition unit 28 is reduced. Thereby, both the to-be-joined objects 91 and 92 are relatively moved in a direction parallel to the substantially horizontal plane, and the above-described positional deviation ΔD is corrected.

  In this manner, the positional deviation ΔD (specifically Δx, Δy, Δθ) in the plane (substantially horizontal plane) perpendicular to the substantially vertical direction (Z direction) is measured (detected), and the positional deviation ΔD is corrected. An alignment operation (alignment operation) is performed. Such measurement operation (detection operation) and alignment operation are executed under the control of a controller (not shown) of the alignment apparatus 1.

<1-4. Horizontal alignment operation>
Here, the position of the alignment mark on each object may differ depending on the type of object (substrate type or the like). For example, the distance between marks may be 290 mm for a certain object (substrate or the like), whereas the distance between marks may be 296 mm for another object (such as a substrate). In other words, the horizontal position (X direction position and / or Y direction position) of the alignment mark of the upper object and the horizontal position of the alignment mark of the lower object may not necessarily be the same position.

  FIG. 8 is a diagram illustrating an object 92 (substrate) in which alignment marks MK are provided at horizontal positions (here, X direction positions) different from the object 91. In the object 92 (92b) of FIG. 8, the alignment mark MK2 (MK2a, MK2b) is different from the position of the alignment mark MK1 (MK1a, MK1b) of the object 91 (see the X-direction position of the two-dot chain line). It is provided at a directional position (more specifically, on the relatively outer peripheral side).

  In such a case, the imaging ranges of the two alignment marks MK1 and MK2 are changed by moving the imaging units 75 in the X direction (and / or the Y direction). According to this, even when the field-of-view range (shooting range) of each imaging unit 75 (75M, 75N) is not so large, the alignment marks MK1 and MK2 can be more reliably contained within the shooting range.

  Specifically, the imaging unit 75 (75M, 75N) first photographs the alignment mark (MK1) of one object (for example, the lower object 91) (acquires a captured image G1). Next, the imaging unit 75 moves in the horizontal direction (X direction and / or Y direction) (changes the shooting position). Thereafter, the imaging unit 75 takes an image of the alignment mark (MK2) of the other object (for example, the upper object 92) (acquires a captured image G2) (see FIG. 9). In other words, the imaging unit 75 executes the next shooting after moving to the next shooting position.

  Note that the relatively left (−X side) imaging unit 75M captures a captured image G1a centered on the horizontal position (theoretical position) of the alignment mark MK1a as a captured image G1, as shown in FIG. A captured image G2a centered on the horizontal position of the mark MK2a is captured as a captured image G2. The relatively right (+ X side) imaging unit 75N captures the captured image G1b centered on the horizontal position of the alignment mark MK1b as the captured image G1, and the captured image G2b centered on the horizontal position of the alignment mark MK2b. Is captured as a captured image G2.

  Then, the alignment apparatus 1 obtains a positional deviation (Δxa, Δya) between the two marks MK1a, MK2a based on the two captured images G1a, G2a. Similarly, the alignment apparatus 1 obtains a positional deviation (Δxb, Δyb) between the two marks MK1b, MK2b based on the two captured images G1b, G2b. Note that the calibration between the camera coordinate system in the captured image G1a and the camera coordinate system in the captured image G2a, and the calibration between the camera coordinate system in the captured image G1b and the camera coordinate system in the captured image G2b are performed in advance. It is assumed that

<1-5. Focusing operation>
Further, the imaging unit 75 can realize the adjustment of the in-focus state by driving in the Z direction. In other words, the imaging unit 75 can achieve focus adjustment by being driven in the Z direction (moved to a different position in the focus adjustment direction).

  For example, as described above, the vertical position (Z-direction position) of the alignment mark MK1 of the lower object 91 and the vertical position of the alignment mark MK2 of the upper object 92 are not necessarily close enough. is there. In such a case, the imaging unit 75 (75M, 75N) first focuses the alignment mark MK1 of the lower object 91 in order to ensure the in-focus state of the photographed images related to both alignment marks. After the photographed image G1 is photographed, the focus position is moved by moving in the vertical direction (Z direction), and this time, the photographed image G2 is photographed by focusing the alignment mark MK2 of the upper object 92. In other words, by moving the imaging unit 75 in the Z direction, the state in which the alignment mark MK1 of the lower object 91 is in focus and the state in which the alignment mark MK2 of the upper object 92 is in focus are switched. . It should be noted that the focusing operation with movement in the Z direction does not always have to be performed. For example, when the position of the two alignment marks MK1 and MK2 is recognized by focusing on an intermediate position between the two alignment marks MK1 and MK2 separated in the vertical direction, the focus is accompanied by movement in the Z direction. The alignment operation may not be performed.

  As described above, the imaging unit 75 performs an imaging operation before and after movement in at least one of the X direction, the Y direction, and the Z direction.

  In such a situation, if the imaging unit 75 is driven using the conventional technique as described above, the vibration of the imaging unit 75 does not sufficiently converge when the imaging unit 75 moves and stops. Problems can arise.

  Therefore, in this embodiment, the imaging unit 75 is driven using the following drive mechanism 70. Hereinafter, the drive mechanism 70 of the imaging unit 75 will be described in detail.

<1-6. Imaging Unit Drive Mechanism 70>
The alignment apparatus 1 includes a driving mechanism 70 (70M, 70N) (also referred to as a camera moving mechanism) for driving the imaging units 75M and 75N (see FIG. 11 and the like). Each drive mechanism 70M, 70N has a symmetrical configuration. Here, one drive mechanism 70N will be described in detail, and the description of the other drive mechanism 70M will be omitted.

  11 is a front view of the drive mechanism 70, FIG. 12 is a perspective view of the drive mechanism 70, and FIG. 13 is an exploded perspective view of the drive mechanism 70. As shown in these drawings, the drive mechanism 70 includes a base member 3, a Y direction moving member 71, an X direction moving member 72, and a Z direction moving member 73.

  The three moving members 71, 72, 73 are movable members (or moving members) that are movable in at least one direction (here, three directions of X direction, Y direction, and Z direction) with respect to the base member 3. Group). The base member 3 is also expressed as a fixed side member (a member fixed on the alignment device 1). Further, the imaging unit 75 is directly fixed to the moving side member (more specifically, the Z direction moving member 73). However, it is not limited to this, The imaging part 75 may be indirectly fixed with respect to a movement side member.

  The Y-direction moving member 71 is a member that can move in the Y direction with respect to the base member 3 of the alignment apparatus 1. The Y-direction moving member 71 is a flat plate member. Specifically, the Y-direction moving member 71 is a substantially cross-shaped member composed of a portion extending in the Y direction and a portion extending in the X direction (plan view). The Y-direction moving member 71 is supported by the base member 3 over almost the entire bottom surface except for some hollow portions.

  In the base member 3, a plurality of guide pins 76 for guiding the Y-direction moving member 71 in the Y direction are fixed. The Y-direction moving member 71 is guided by the plurality of guide pins 76 and can move in the Y direction with respect to the base member 3. Specifically, the side surface (vertical plane) 71p on the + X side of the Y-direction moving member 71 moves along two guide pins 76 provided on the + X side of the Y-direction moving member 71, and the Y-direction moving member When the side surface 71q on the −X side of the Y direction moving member 71 moves along the two guide pins 76 provided on the −X side of 71, the Y direction moving member 71 moves in the Y direction. The Y-direction moving member 71 is driven in the Y direction by a drive unit 74y (servo motor or the like).

  The X-direction moving member 72 is a member that can move in the X direction with respect to the Y-direction moving member 71. The X-direction moving member 72 includes a substantially flat plate portion (also referred to as a plane portion) 72b extending in the X direction, and a guide portion 78 that is a substantially quadrangular prism portion disposed on the upper side (+ Z side) of the substantially flat plate portion 72b. It is a member comprised by having. The guide part 78 has a hollow part (substantially rectangular parallelepiped shape) extending in the Z direction. The guide portion 78 accommodates the Z-direction moving member 73 in the hollow portion, and guides the movement of the Z-direction moving member 73 in the Z direction using the hollow portion (described later). The X-direction moving member 72 is supported by the Y-direction moving member 71 over substantially the entire bottom surface except for some hollow portions.

  In the Y-direction moving member 71, a plurality of guide pins 77 for guiding the X-direction moving member 72 in the X direction are fixed. The X-direction moving member 72 is guided by the plurality of guide pins 77 and can move in the X direction. Specifically, the side surface (vertical plane) 72r on the + Y side of the X direction moving member 72 moves along two guide pins 77 provided on the + Y side of the X direction moving member 72, and the X direction moving member As the side surface 72s on the -Y side of the X-direction moving member 72 moves along the two guide pins 77 provided on the -Y side of 72, the X-direction moving member 72 moves in the X direction. The X-direction moving member 72 is driven in the X direction by a drive unit 74x (servo motor or the like).

  The Z-direction moving member 73 is a member having a substantially quadrangular prism shape, and is a member that can move in the Z direction with respect to the X-direction moving member 72.

  In the X direction moving member 72, a guide portion 78 for guiding the Z direction moving member 73 in the Z direction is fixed. The guide part 78 has a hollow quadrangular prism shape surrounded by four guide walls (plate-like vertical flat members) 78p, 78q, 78r, 78s.

  The Z direction moving member 73 is guided by the guide portion 78 of the X direction moving member 72 and can move in the Z direction. Specifically, the −X side side surface 73q of the Z direction moving member 73 moves along the inner side surface (+ X side surface) of the −X side guide wall 78q of the guide portion 78 and the −Z side moving member 73 − When the side surface 73s on the Y side moves along the inner surface of the guide wall 78s on the -Y side of the guide portion 78, the Z-direction moving member 73 moves in the Z direction. The Z direction moving member 73 is driven in the Z direction by a drive unit 74z (servo motor or the like).

  Further, as shown in FIG. 14, a plurality of guides with a biasing force toward the −X side (rightward in FIG. 14) are provided on the inner side surface (the −X side surface) of the + X side guide wall 78 p of the guide portion 78. A roller 79 (79x) is provided. When the Z-direction moving member 73 moves, the Z-direction moving member 73 is guided by the plurality of guide rollers 79. On the other hand, when the Z-direction moving member 73 is not moved, the Z-direction moving member 73 (specifically, the side surface 73q) corresponds to the inner side surface (+ X of the −X side guide wall 78q of the guide portion 78 according to the biasing force. The Z-direction moving member 73 is stably supported (held) by the guide portion 78 (and eventually the X-direction moving member 72) by being pressed against the side surface.

  Similarly, a plurality of guide rollers 79 (79y) with a biasing force toward the −Y side are provided on the inner side surface (the −Y side surface) of the + Y side guide wall 78r of the guide portion 78. When the Z-direction moving member 73 moves, the Z-direction moving member 73 is guided by the plurality of guide rollers 79. On the other hand, when the Z-direction moving member 73 is not moved, the Z-direction moving member 73 (specifically, the side surface 73s) is connected to the inner side surface of the guide wall 78s on the −Y side of the guide portion 78 (specifically, the side surface 73s). By pressing against the + Y side surface, the Z-direction moving member 73 is stably supported (held) by the guide portion 78 (and eventually the X-direction moving member 72).

  The imaging unit 75N is (directly) fixed to the Z-direction moving member 73 in the hollow portion of the Z-direction moving member 73 having a substantially quadrangular prism shape. Here, the imaging unit 75N is directly fixed to the Z-direction moving member 73, but is not limited to this, and may be indirectly fixed via another member.

  Here, when the Y direction moving member 71 moves in the Y direction, air is supplied between the base member 3 and the Y direction moving member 71. When the Y-direction moving member 71 moves in the air supply state, the sliding resistance with the base member 3 is reduced, and the Y-direction moving member 71 can move smoothly with respect to the base member 3. Preferably, the Y-direction moving member 71 moves smoothly in a state where it floats from the base member 3 (non-contact state).

  Similarly, when the X direction moving member 72 moves in the X direction, air is supplied between the Y direction moving member 71 and the X direction moving member 72. When the X-direction moving member 72 moves in the air supply state, sliding resistance with the Y-direction moving member 71 is reduced, and the X-direction moving member 72 can move smoothly with respect to the Y-direction moving member 71. It is. Preferably, the X-direction moving member 72 moves smoothly while floating from the Y-direction moving member 71.

  Similarly, when the Z-direction moving member 73 moves in the Z direction, air is supplied between the X-direction moving member 72 (guide portion 78) and the Z-direction moving member 73. By moving the Z-direction moving member 73 in the air supply state, the sliding resistance with the X-direction moving member 72 (guide portion 78) is reduced, and the Z-direction moving member 73 is smoother than the X-direction moving member 72. It is possible to move. Preferably, the Z-direction moving member 73 moves smoothly while floating from the X-direction moving member 72.

  Although not shown in FIGS. 11 to 14 and the like, each of the Y-direction moving member 71 and the X-direction moving member 72 is provided with a plurality of through holes having a small diameter. Air is supplied through the holes. For example, air is supplied between the base member 3 and the Y direction moving member 71 through a plurality of through holes provided in the Y direction moving member 71. Further, air is supplied between the Y-direction moving member 71 and the X-direction moving member 72 through a plurality of through holes provided in the flat portion 72 b of the X-direction moving member 72. Further, air is supplied between the X-direction moving member 72 (guide portion 78) and the Z-direction moving member 73 through a plurality of through holes provided in the guide walls 78q and 78s of the X-direction moving member 72. .

  On the other hand, when the movement is completed, the air supply is stopped. Further, on the contrary, each moving member 71, 72, 73 is sucked and held using the negative pressure of air. The suction operation using the negative pressure of air is performed by sucking air (in this case, reversely) through the above-described plurality of through holes provided in the Y-direction moving member 71 and the X-direction moving member 72. .

  Specifically, after the movement in the Y direction, the Y direction moving member 71 is attracted and held by the base member 3 by the negative pressure of air. The Y-direction moving member 71 has a wide bottom surface (a plane on the −Z side). At this time, the bottom surface is held in surface contact with the top surface (plane) of the base member 3. As a result, the Y-direction moving member 71 is supported (fixed) to the base member 3 very stably.

  Further, after the movement in the X direction, the X direction moving member 72 is attracted and held by the Y direction moving member 71 by the negative pressure of air. The X-direction moving member 72 has a wide bottom surface (a plane on the −Z side) on the flat surface portion 72b. At this time, the bottom surface is held in surface contact with the upper surface (plane) of the Y-direction moving member 71. Is done. Thereby, the X direction moving member 72 is supported (fixed) to the Y direction moving member 71 very stably.

  Further, after the movement in the Z direction, the Z direction moving member 73 is attracted and held by the X direction moving member 72 by the negative pressure of air. The Z-direction moving member 73 has relatively wide side surfaces 73q and 73s. At this time, the side surfaces 73q and 73s face the guide walls 78q and 78s of the X-direction moving member 72 (guide portion 78), respectively. Hold in contact. Thereby, the Z direction moving member 73 is fixed to the X direction moving member 72 very stably. The Z-direction moving member 73 is also held by the pressing force of a plurality of guide rollers.

  Further, the base member 3 is damped by a vibration damping mechanism (also referred to as a vibration damping mechanism). For example, an active vibration control mechanism is used as the vibration control mechanism. The active vibration control mechanism includes a detection unit that detects vibration of the base member 3 and a drive unit that drives the base member 3 so as to cancel the vibration detected by the detection unit. Alternatively, the vibration suppression mechanism may be a passive vibration suppression mechanism. The passive vibration damping mechanism is configured to include a damper or the like for damping the vibration of the base member 3.

  By such a vibration control mechanism, the base member 3 can support the drive mechanism 70 (the moving members 71, 72, 73, etc.) described above in a very stable state. In other words, the drive mechanism 70 and the imaging unit 75 are supported by the base member 3 in a very stable state.

  In the above aspect, after the movement-side members 71, 72, 73 are moved in at least one direction, the two movement-side members are held in surface contact with the fixed-side member 73. At least one of the marks (MK1, MK2) (MK2) is imaged.

  More specifically, the imaging unit 75 performs a Y-direction movement operation in the Y direction between the base member 3 and the Y-direction movement member 71, and an X between the Y-direction movement member 71 and the X-direction movement member 72. With at least one movement operation of the X direction movement operation in the direction and the Z direction movement operation in the Z direction between the X direction movement member 72 and the Z direction movement member 73, the alignment mark MK2 is An image is taken at a position different from the alignment mark MK1. When imaging the alignment marks MK1 and MK2 (particularly when imaging the alignment mark MK2), the Y-direction moving member 71 is held in surface contact with the base member 3, and the X-direction moving member 72 is held in the Y-direction moving member 71. The Z-direction moving member 73 is held in surface contact with the X-direction moving member 72.

According to this, the Y-direction moving member 71 is stably held (fixed) on the stable base member 3, and the X-direction moving member 72 is stably held (fixed) on the Y-direction moving member 71. Further, the Z-direction moving member 73 is stably held (fixed) on the X-direction moving member 72.
Therefore, the imaging unit 75 fixed to the Z-direction moving member 73 is held very stably.

  As a result, it is possible to converge the shaking after stopping the movement to a very small value (for example, 0.2 μm (micrometer)) or less. That is, the above-described problem that the shaking after the movement stops (for example, 5 μm (micrometer)) does not converge to a value smaller than a predetermined accuracy is solved. Further, it is possible to perform alignment more accurately.

  Here, FIG. 23 is a view showing an alignment apparatus 901 according to the prior art, and FIG. 24 is a view showing an example of a camera moving mechanism (moving mechanism using a ball bearing) according to the prior art. FIG. 25 is a view showing a part of the A-A ′ cross section (near the ball bearing) in FIG. 24.

  In the camera moving mechanism 970 (FIG. 23) according to the conventional technique, a driving mechanism for moving the imaging unit (camera) in three directions (X direction, Y direction, and Z direction) is provided. The drive mechanism in each direction is configured using ball bearings. For example, as shown in FIG. 24, in the drive mechanism in the Z direction, the moving member (for example, the Z direction moving member) 983 driven in the Z direction is compared with the other member (for example, the X direction moving member) 982. It can slide through a ball bearing 986. Note that the same drive configuration is adopted in the other directions.

  In the camera moving mechanism 970, as shown in FIGS. 24 and 25, two driven members (moving members) driven relatively to each other are in contact with each other with a ball bearing (specifically, a hard ball 986) interposed therebetween. For example, each hard sphere (ball) 986 used for the ball bearing is in contact with the two driven members at about two points (or four points). That is, the driven member is held by “point contact”. In this case, the stability is not always sufficient, and the above-described problem, that is, the vibration of the imaging unit does not converge to a predetermined accuracy when the movement of the imaging unit ends (when stopped) (see FIG. 26). , And problems occur. For example, a vibration of about 5 μm (micrometer) remains.

  The inventor adopted a roller bearing in place of the ball bearing and changed the contact state with the driven member from “point contact” to “line contact”. The vibration was 2 μm (micrometer). Reduced to a degree. However, vibrations still larger than the predetermined accuracy still remained.

  On the other hand, the inventor of the present application has a configuration as described above that is completely different from the driving mechanism according to the related art, that is, a configuration in which two driven members (moving members) are held in surface contact. Devised. As a result, the two driven members can be held very stably, and the shake after stopping the movement of the imaging unit can be converged to a very small value (for example, 0.2 μm (micrometer)) or less. I was able to. In other words, it is possible to suppress shaking of the imaging unit 75 by holding the imaging unit 75 stably.

  Here, if the imaging unit 75 vibrates during image capture (image capture), “blurred” and / or “distortion” or the like occurs in the captured image, and it is difficult to capture with high accuracy. Normally, the light receiving element stores the amount of light obtained for each pixel for a certain time (for example, 33 ms). However, when the imaging unit 75 vibrates, light that should be incident on each pixel during the predetermined time does not enter the pixel accurately because the light is incident on other pixels. Instead, “blurring” (or “distortion”) occurs in the captured image.

  On the other hand, according to the above embodiment, it is possible to suppress the shaking (vibration) of the imaging unit 75 during imaging of the alignment mark, and thus it is possible to avoid or suppress the occurrence of such “blurring” or the like. It is. As a result, it is possible to grasp an accurate positional shift based on the captured image and perform an accurate alignment.

<1-7. Imaging operation (operation with movement in the Z direction)>
Next, an imaging operation involving the movement of the imaging unit 75 in the Z direction will be described.

  For example, as shown in FIG. 6, when the distance H in the Z direction between the two alignment marks MK1 and MK2 that are opposed to each other in the vertical direction is larger than a predetermined level, the Z direction of the imaging unit 75 as described above. A photographing operation with a driving operation is performed. Specifically, first, after the alignment mark MK1 of the lower object 91 is focused and the alignment mark MK1 is photographed, the imaging unit 75 is moved in the vertical direction (Z direction) to adjust the focus position. This time, the alignment mark MK2 of the other object 92 is focused and the alignment mark MK2 is photographed. Hereinafter, such an operation will be described in more detail with a focus on the operation of the imaging unit 75N.

  Specifically, as illustrated in FIG. 6, the imaging unit 75N is assumed to be present at a position (horizontal position (Xb, Yb)) immediately below the alignment mark MK1 (MK1b). In this state, the imaging unit 75N moves the imaging unit 75 in the Z direction so that the alignment mark MK1 (MK1b) of the lower object 91 is in focus. During the movement, air is supplied as described above in the drive mechanism 70 (see FIG. 13 and the like), and each moving member moves smoothly. On the other hand, when the movement is completed, the Y-direction moving member 71 is held in surface contact with the base member 3 (specifically, suction holding), and the X-direction moving member 72 is held in surface contact with the Y-direction moving member 71 ( The Z-direction moving member 73 is held in surface contact with the X-direction moving member 72 (specifically, suction-held). Thereby, as described above, the imaging unit 75N is stably held with respect to the base member 3.

  In this state, the imaging unit 75N captures the alignment mark MK1b in a focused state, and acquires a captured image G1 (G1b) of the alignment mark MK1b.

  Next, the imaging unit 75N moves in the vertical direction (Z direction) to adjust the focus state, and this time, the alignment mark MK2 (MK2b) of the other object 92 is focused. During the movement in the Z direction, air is supplied between the X direction moving member 72 and the Z direction moving member 73, and the Z direction moving member 73 moves smoothly with respect to the X direction moving member 72. During movement in the Z direction, the Y direction moving member 71 is held in surface contact with the base member 3 (specifically, suction holding), and the X direction moving member 72 is in surface contact with the Y direction moving member 71. And held (specifically, adsorption holding).

  On the other hand, when the movement is completed, the Z-direction moving member 73 is held in surface contact with the X-direction moving member 72 (specifically, suction holding). More specifically, the Y-direction moving member 71 is held in surface contact with the base member 3 (specifically, suction holding), and the X-direction moving member 72 is held in surface contact with the Y-direction moving member 71 (in detail). The Z-direction moving member 73 is held in surface contact with the X-direction moving member 72 (specifically, sucked and held). Thereby, the imaging unit 75N is stably held with respect to the base member 3.

  In this state, the imaging unit 75N captures the alignment mark MK2b in a focused state, and acquires a captured image G2 (G2b) of the alignment mark MK2b.

  Then, based on these captured images G1b and G2b, a positional deviation (specifically, positional deviation vectors) (Δxb, Δyb) between a pair of alignment marks (MK1b, MK2b) is obtained.

  Here, the imaging unit 75N has been mainly described, but the same applies to the imaging unit 75M. The imaging unit 75M acquires a captured image G1a related to the alignment mark MK1a and a captured image G2a related to the alignment mark MK2a. Then, based on the captured images G1a and G2a, a positional deviation (specifically, positional deviation vectors) (Δxa, Δya) between the pair of alignment marks (MK1a, MK2a) is obtained.

  Further, the above-described operation (moving operation in the Z direction of the imaging unit 75) is performed on each of the two objects 91 and 92 in a state where the two objects 91 and 92 are separated in the Z direction as shown in FIG. It is not limited to the case where the alignment mark is photographed. For example, as shown in FIG. 7, it can also be performed when the alignment marks of the two objects 91 and 92 are photographed in a state where the two objects 91 and 92 are in contact with each other. In particular, when the alignment mark MK1 is provided on the lower surface of the lower object 91 and the alignment mark MK2 is provided on the upper surface of the upper object 92, the two marks MK1 and MK2 are The distance H may be larger than a predetermined level.

<1-8. Imaging operation (operation with horizontal movement)>
Next, an imaging operation involving the movement of the imaging unit 75 in the X direction will be described.

  For example, as shown in FIG. 10, when the positions of the upper and lower alignment marks MK1, MK2 in the X direction are different from each other, the horizontal driving operation of the imaging unit 75 as described above (specifically, the X direction driving is described in detail). Operation) is performed. Here, a mode in which the movement operation in the Z direction of the imaging unit 75 is also performed is illustrated.

  Specifically, as illustrated in FIG. 10, the imaging unit 75N first moves to a position (X direction position X1b) immediately below the alignment mark MK1 (MK1b). Further, the imaging unit 75N moves the imaging unit 75 in the Z direction so that the alignment mark MK1 (MK1b) of the lower object 91 is in focus. During the movement, air is supplied as described above in the drive mechanism 70 (see FIG. 13 and the like), and each moving member moves smoothly. On the other hand, when the movement is completed, the Y-direction moving member 71 is held in surface contact with the base member 3 (specifically, suction holding), and the X-direction moving member 72 is held in surface contact with the Y-direction moving member 71 ( The Z-direction moving member 73 is held in surface contact with the X-direction moving member 72 (specifically, suction-held). Thereby, as described above, the imaging unit 75N is stably held with respect to the base member 3.

  In this state, the imaging unit 75N captures the alignment mark MK1b in a focused state, and acquires a captured image G1 (G1b) of the alignment mark MK1b.

  Next, the imaging unit 75N moves to a position (X direction position X2b) immediately below the alignment mark MK2 (MK2b). Further, the imaging unit 75N further moves in the vertical direction (Z direction) to adjust the focus state, and this time, the alignment mark MK2 (MK2b) of the other object 92 is focused.

  During these movements (in the X and Z directions), air is supplied as described above in the drive mechanism 70 (see FIG. 13 and the like), and each moving member moves smoothly.

  During movement in the X direction, air is supplied between the X direction moving member 72 and the Y direction moving member 71, and the X direction moving member 72 moves smoothly with respect to the Y direction moving member 71. During movement in the Z direction, air is supplied between the X direction moving member 72 and the Z direction moving member 73, and the Z direction moving member 73 moves smoothly with respect to the X direction moving member 72.

  On the other hand, when the movement is completed, the Y-direction moving member 71 is held in surface contact with the base member 3 (specifically, suction holding), and the X-direction moving member 72 is held in surface contact with the Y-direction moving member 71 ( The Z-direction moving member 73 is held in surface contact with the X-direction moving member 72 (specifically, suction-held). Thereby, as described above, the imaging unit 75N is stably held with respect to the base member 3.

  In this state, the imaging unit 75N captures the alignment mark MK2b in a focused state, and acquires a captured image G2 (G2b) of the alignment mark MK2b.

  Then, based on these captured images G1b and G2b, a positional deviation (specifically, positional deviation vectors) (Δxb, Δyb) between a pair of alignment marks (MK1b, MK2b) is obtained.

  The imaging unit 75N has been mainly described, but the same applies to the imaging unit 75M. The imaging unit 75M acquires a captured image G1a related to the alignment mark MK1a and a captured image G2a related to the alignment mark MK2a. Then, based on the captured images G1a and G2a, a positional deviation (specifically, positional deviation vectors) (Δxa, Δya) between the pair of alignment marks (MK1a, MK2a) is obtained.

  Further, here, when the alignment marks MK1 and MK2 of the objects 91 and 92 are spaced apart from each other in the X direction (see FIGS. 8 and 9), the imaging unit 75 is driven in the X direction. Although an aspect etc. are illustrated, it is not limited to this, The imaging part 75 may be driven to a Y direction. For example, when the alignment marks MK1b and MK2b of the objects 91 and 92 are arranged apart from each other in the Y direction, the imaging unit 75 is moved in the Y direction that is the separation direction of the two alignment marks MK1b and MK2b. You may make it do. The captured image G1b of the alignment mark MK1b may be captured before the movement, and the captured image G2b of the alignment mark MK2b may be captured after the movement.

  Further, the imaging unit 75 may be driven in both the X direction and the Y direction. For example, when the alignment marks MK1b and MK2b of the objects 91 and 92 are spaced apart in both the X direction and the Y direction, the separation directions of the two alignment marks MK1b and MK2b (the X direction and the Y direction) ), The imaging unit 75 may be moved. The captured image G1b of the alignment mark MK1b may be captured before the movement, and the captured image G2b of the alignment mark MK2b may be captured after the movement.

  Further, here, there is exemplified an aspect in which not only the horizontal movement (X direction and / or Y direction) of the imaging unit 75 but also the Z direction movement of the imaging unit 75 is performed. It is not limited. For example, the moving operation of the imaging unit 75 in the Z direction may not be performed, and only the moving operation of the imaging unit 75 in the horizontal direction (X direction and / or Y direction) may be performed.

  In addition, here, in each of the two objects 91 and 92 facing each other, the surface opposite to the facing surface (inner surface) (for example, the lower surface of the lower substrate 91 and the upper surface of the upper substrate 92). ) Is provided with an alignment mark (see FIGS. 6 and 7), but is not limited thereto. Specifically, in each of two opposing objects, the alignment marks MK1 and MK2 are provided on the opposing surfaces (for example, the upper surface of the lower substrate 91 and the lower surface of the upper substrate 92). Good. Even in the case where alignment marks are provided on each facing surface side, the above-described operation and the like regarding the horizontal direction and / or the vertical direction of the imaging unit 75 can be applied. In particular, as shown in FIG. 22, when both substrates 91 and 92 are in contact with each other with convex metal members (such as bumps and pads) provided on the respective surfaces (in detail, the metal pads of the substrate 91). 97 and the metal bump 98 of the substrate 92 are in contact), the alignment mark MK1 (MK1a, etc.) provided on the upper surface of the lower substrate 91 and the alignment mark provided on the lower surface of the upper substrate 92 MK2 (such as MK2a) may be relatively distant. Even in such a situation, the imaging unit 75 is driven in the Z direction (vertical direction), and the lower alignment mark MK1 and the upper alignment mark MK2 are different positions (focus positions) in the Z direction (focus adjustment direction). You may make it image by.

<2. Second Embodiment>
The second embodiment is a modification of the first embodiment. Hereinafter, the difference from the first embodiment will be mainly described.

  In the first embodiment, the imaging unit 75 images the alignment mark MK1 before the movement of the moving members 71, 72, 73, and images the alignment mark MK2 after the movement. In other words, a mode in which the moving operation of the imaging unit 75 is performed between two shooting operations regarding a certain set of objects is illustrated.

  On the other hand, in the second embodiment, a mode in which the moving operation of the imaging unit 75 is performed when the board type is switched is exemplified.

  Specifically, a situation is assumed in which an alignment operation relating to a set of objects (93, 94) different from the above-described set of objects (91, 92) is performed in advance. The alignment operation relating to the object (93, 94) is performed, for example, in the same manner as the alignment operation described above. Then, after the alignment operation relating to the another set of objects (93, 94) is completed, at least one movement operation of the moving members 71, 72, 73 is performed, and then the above-described one set of objects is performed. An alignment operation relating to the objects (91, 92) is performed. Below, such an aspect is demonstrated in detail.

  Here, it is assumed that the two objects 93 and 94 are different types of objects (for example, different types of substrates) from the above-described objects 91 and 92. The objects 93 and 94 are assumed to have alignment marks MK3 and MK4 (see FIG. 15) at horizontal positions different from those of the objects 91 and 92, respectively. Here, the alignment marks MK3, MK4 (specifically, MK3a, MK3b, MK4a, MK4b) are the alignment marks MK1, MK2 (specifically, MK1a, MK1b, MK2a and MK2b) are provided on the inner peripheral side.

  It should be noted that the alignment operation of a certain set of alignment objects (91, 92) and the alignment operation of the previous set of alignment objects (93, 94) may be performed with a relatively short period of time. However, the present invention is not limited to this, and it may be performed after a relatively long period (for example, one month to several months). That is, the substrate type may be switched over a relatively long blank period. In such a case, at least one of the moving members 71, 72, 73 from the position for photographing the immediately preceding object (93, 94) to the position for photographing the new object (91, 92). One may be moved.

  As shown in FIG. 15, the alignment mark MK3a on the left side of the object 93 is imaged in a state where the imaging unit 75 exists at the X direction position X3a, and the alignment mark MK3b on the right side of the object 93 is captured by the imaging unit 75. An image is captured in a state that exists at the X-direction position X3b. The X-direction position X3a is a position different from any of the X-direction positions Xa, X1a, X2a (see FIGS. 6, 7, and 10) related to the objects 91, 92, and the X-direction position X3b is the objects 91, 92. X-direction positions Xb, X1b, and X2b (see FIGS. 6, 7, and 10) are different positions.

  Similarly, the alignment mark MK4a on the left side of the object 94 is imaged in a state where the imaging unit 75 exists at the X direction position X4a, and the alignment mark MK4b on the right side of the object 93 is captured by the imaging unit 75 at the X direction position X4b. Images are taken in the existing state. The X-direction position X4a is a position different from any of the X-direction positions Xa, X1a, X2a (see FIGS. 6, 7, and 10) related to the objects 91, 92, and the X-direction position X4b is the objects 91, 92. X-direction positions Xb, X1b, and X2b (see FIGS. 6, 7, and 10) are different positions. In this example, the X-direction position X4a is the same position as the X-direction position X3a, and the X-direction position X4b is the same position as the X-direction position X3b. However, the present invention is not limited to this. May be.

  In such a case, when the alignment operation related to the objects 93 and 94 is completed, the imaging unit 75 moves to the position for photographing the next objects 91 and 92 by the driving operation of the driving mechanism 70. In other words, the imaging unit 75 is moved using the drive mechanism 70 in accordance with the switching of the type of the object.

  For example, when imaging of the alignment mark MK4a of the object 94 is completed at the X-direction position X4a (X3a), the imaging unit 75M causes the object 91 (next) by the drive operation of the drive mechanism 70M (X-direction moving member 72 and the like). To the position X1a for photographing (in the X direction). In other words, the imaging unit 75M captures the immediately preceding imaging position related to the one set of alignment marks MK3 and MK4 after imaging related to the one set of alignment marks MK3 and MK4 respectively attached to the immediately preceding alignment objects (93 and 94). Move to a position X1a different from (X4a).

  Similarly, when imaging of the alignment mark MK4b of the object 94 is completed at the X-direction position X4b (X3b), the imaging unit 75N performs the driving operation of the drive mechanism 70N (X-direction moving member 72 and the like) to move the object 91. It moves to the shooting position X1b (in the X direction). In other words, the imaging unit 75N takes the imaging position immediately before the set of alignment marks MK3 and MK4 after imaging with respect to the set of alignment marks MK3 and MK4 attached to the immediately preceding alignment objects (93 and 94), respectively. It moves to a position X1b different from (X4b).

  Even when switching the type of the object, if the image pickup unit 75 is driven using the conventional technique as described above, there arises a problem that the vibration of the image pickup unit 75 does not sufficiently converge. obtain.

  On the other hand, in the second embodiment, the imaging unit 75 is moved using the drive mechanism 70 as described above when switching the type of the alignment object. In other words, after the movement-side members 71, 72, 73 are moved in at least one direction, the two marks (MK1, MK1, MK1, and MK1, in a state where the movement-side member is held in surface contact with the fixed side member 73) At least one mark (MK1, etc.) of MK2) is imaged.

  According to this, since the imaging unit 75 is stably held after the movement is stopped, the vibration of the imaging unit 75 can be converged to a predetermined accuracy. Since the alignment mark MK1 and the like are imaged while the imaging unit 75 is stably held, it is possible to suppress the shaking of the imaging unit 75. Therefore, it is possible to avoid or suppress the occurrence of “blurring” or the like in the captured image. As a result, it is possible to grasp an accurate positional shift based on the captured image and perform an accurate alignment.

  In the second embodiment, when the imaging of the alignment mark MK4 (MK4b, etc.) of the object 94 (immediately before imaging) is completed, the imaging unit 75 moves to the imaging position X1b of the next object 91 in the X direction. However, it is not limited to this.

  More specifically, when the imaging unit 75 moves in another horizontal direction (Y direction or the like) after the imaging of the alignment mark MK4b of the object 94 (immediate imaging) is completed, the above-described concept is applied. Also good. For example, when the objects 93 and 94 have the alignment marks MK3 and MK4 at positions different from the objects 91 and 92 in the Y direction, respectively, the drive mechanism 70 (the Y direction moving member 71) described above. Etc.) may be used to drive the imaging unit 75 in the Y direction.

  Alternatively, when the imaging unit 75 moves in a direction other than the horizontal direction (such as the Z direction) after the imaging of the alignment mark MK4b of the object 94 (immediately before imaging) is completed, the above-described idea may be applied. .

  For example, when imaging of the alignment mark MK4b of the object 94 is completed, the imaging unit 75N moves from the Z-direction position for imaging of the upper object 94 by the driving operation of the drive mechanism 70N (Z-direction moving member 73 and the like) ( You may make it move to the Z direction position for the imaging | photography of the lower side object 91 (next set). Alternatively, when imaging of the alignment mark MK4b of the object 94 is completed, the imaging unit 75N moves from the Z-direction position for imaging of the object 94 to the next by the driving operation of the drive mechanism 70N (Z-direction moving member 73 and the like). You may make it move to the Z direction position for the imaging | photography of the target object 92 of a set (Z direction). In particular, the distance H (also referred to as H3) between the two alignment marks MK3 and MK4 on the objects 93 and 94 is the distance H (H1) between the two alignment marks MK1 and MK2 on the objects 91 and 92. In the case where the objects 93 and 94 have thicknesses different from the thicknesses of the objects 91 and 92, respectively). The direction position and the Z-direction position for shooting the object 92 may be different. In such a case, the imaging unit 75 may be driven in the Z direction by using the drive mechanism 70 described above.

  In the first embodiment, the alignment mark MK1 provided on the object 91 and the alignment mark MK2 provided on the object 92 are individually imaged. Also in the second embodiment, similarly to the first embodiment, the alignment mark MK1 provided on the object 91 and the alignment mark MK2 provided on the object 92 may be individually imaged.

  However, the present invention is not limited to this, and the alignment mark MK1 provided on the target 91 after the alignment target (93, 94) is switched to the new target (91, 92) in the second embodiment. The alignment mark MK2 provided on the object 92 may be photographed simultaneously. In other words, one captured image including both of the two alignment marks MK1 and MK2 may be acquired. More specifically, one photographed image (left photographed image) Ga including both of the two alignment marks MK1a and MK2a and another photographed image including both the two alignment marks MK1b and MK2b (on the right side) Of the captured image) Gb.

  Further, when the two alignment marks MK1 and MK2 are photographed at the same time, it is preferable that the photographing is performed in the following in-focus state.

  For example, in the captured image Ga on the left side, the light from the virtual object at the Z-direction position MP (see FIG. 16) between the Z-direction position PZ1 of the alignment mark MK1a and the Z-direction position PZ2 of the alignment mark MK2a It is preferably acquired in a state where an image is formed on the imaging surface. By focusing between the alignment marks MK1a and MK2a (preferably in the middle (center)), the alignment of the alignment marks MK1a and MK2a is balanced (one of the blurs is greatly increased). It is possible to detect misalignment with high accuracy.

  Furthermore, it is preferable that edges of portions corresponding to both alignment marks MK1a and MK2a in the captured image Ga are detected by the vector correlation method. By using the vector correlation method, it is possible to reduce the influence of the degree of image blur, and the position of the alignment mark can be detected with high accuracy.

  The same applies to the captured image Gb.

  In the second embodiment, when a new type of object (91, 92) is imaged after the type of the object is switched, a further movement operation of the imaging unit 75 in the X direction or the like is executed. However, the present invention is not limited to this. For example, with respect to a new type of object (91, 92), the photographing operation relating to each of the alignment marks MK1, MK2 (for example, MK1b, MK2b) is performed without driving the imaging unit 75 by the drive mechanism 70. It may be. Similarly, the photographing operation relating to the two marks MK3 and MK4 (for example, MK3b and MK4b) is accompanied by driving of the imaging unit 75 by the drive mechanism 70 for the type of objects (93 and 94) before switching. You may be made to perform without.

  More specifically, first, each mark MK3 of the object 93, 94 as shown in FIG. 15 is not accompanied by a driving operation of the imaging unit 75 by the driving mechanism 70 (without the imaging unit 75 moving from a certain position). Photographing relating to MK4 is performed, and an alignment operation is performed. Next, when the object is switched, a driving operation of the imaging unit 75 by the driving mechanism 70 (driving operation in at least one of the X direction, the Y direction, and the Z direction) is performed. Thereby, the imaging unit 75 moves from a certain position to another position (position after movement). Next, imaging is performed on the marks MK1 and MK2 of the objects 91 and 92 as shown in FIG. 7, and an alignment operation is performed. Shooting with respect to each of the marks MK1 and MK2 is performed without the drive operation of the imaging unit 75 by the drive mechanism 70 (without the imaging unit 75 moving from the other position (position after the movement)). For example, the imaging unit 75N may shoot both marks MK1 and MK2 while remaining at the X-direction position Xb. Further, the imaging unit 75N may shoot the two alignment marks MK1 and MK2 at the same time in the above-described in-focus state without changing the position in the Z direction.

<3. Modified example>
Although the embodiments of the present invention have been described above, the present invention is not limited to the contents described above.

  For example, in each of the above-described embodiments, the case where the base member 3 itself is a fixed side member of the drive mechanism 70 is illustrated, but the present invention is not limited to this, and the fixed side member is It may be a member fixed directly or indirectly.

  Further, in each of the above-described embodiments and the like, the mode in which the imaging unit 75 can be driven in the three directions of the X direction, the Y direction, and the Z direction is illustrated, but the present invention is not limited thereto, and the alignment apparatus 1 You may have the structure which drives the imaging part 75 only to one direction or two directions among directions. In other words, the driving mechanism 70 related to the imaging unit 75 includes three moving members, that is, a Y-direction moving member 71, an X-direction moving member 72, and a Z-direction moving member 73, but is not limited thereto.

  Specifically, the imaging unit 75 may be driven only in the Z direction. More specifically, in the drive mechanism 70, the Y direction moving member 71 and the X direction moving member 72 may not be provided, and only the Z direction moving member 73 may be provided. More specifically, a configuration in which the Z-direction moving member 73 is moved relative to the base member 3 is adopted, and the Z-direction moving member 73 comes into surface contact with the base member 3 after the movement. May be held (adsorbed). The imaging unit 75 may image the two alignment marks at different positions in the Z direction (focus adjustment direction) by moving the Z direction moving member 73 in the Z direction. Note that the imaging unit 75 may be fixed directly or indirectly to the Z-direction moving member 73.

  Alternatively, the imaging unit 75 may be driven only in a direction parallel to the XY plane.

  For example, in the drive mechanism 70, the Z direction moving member 73 may not be provided, and the Y direction moving member 71 and the X direction moving member 72 may be provided. The imaging unit 75 may be fixed directly or indirectly to the X direction moving member 72 (or the Y direction moving member 71). The imaging unit 75 may image the two alignment marks at positions different from each other in the horizontal direction by accompanying a movement operation in the horizontal direction by the Y direction moving member 71 and the X direction moving member 72. According to this, it is possible to image | photograph in the state which moved the two alignment marks to the position suitable for each imaging | photography. When acquiring each of the captured images (particularly, the captured image after movement), the surface contact between the base member 3 and the Y-direction moving member 71 and the Y-direction moving member 71 and the X-direction moving member 72 are obtained. By using the surface contact between them, stabilization can be suppressed when the imaging unit 75 moves (when the movement is stopped).

  Alternatively, in the drive mechanism 70, the Z-direction moving member 73 may not be provided, and only one of the Y-direction moving member 71 and the X-direction moving member 72 may be provided. For example, only the X direction moving member 72 among the three moving members 71, 72, 73 may be provided. The imaging unit 75 may be fixed directly or indirectly to the X direction moving member 72 (or the Y direction moving member 71).

  More specifically, a configuration in which the X-direction moving member 72 is driven relative to the base member 3 is adopted, and the X-direction moving member 72 comes into surface contact with the base member 3 after the movement. May be held. Then, with the movement operation in the horizontal direction by the X-direction moving member 72, the imaging unit 75 may image two alignment marks at different positions in the horizontal direction (X direction). According to this, it is possible to photograph in a state where two alignment marks arranged at different positions in the horizontal direction (X direction) are moved to positions suitable for respective photographing. And in acquiring such each picked-up image, the base member 3 and the X direction moving member 72 are stably held in a surface contact state, thereby suppressing the shaking of the image pickup unit 75 during movement. Is possible.

  Alternatively, the imaging unit 75 may be driven only in one direction parallel to the XY plane and the Z direction. Specifically, the Z direction moving member 73 may be provided, and at least one of the Y direction moving member 71 and the X direction moving member 72 may be provided. For example, among the three moving members 71, 72, 73, only the X-direction moving member 72 and the Z-direction moving member 73 may be provided. More specifically, a configuration in which the X direction moving member 72 is driven relative to the base member 3 and the Z direction moving member 73 is driven relative to the X direction moving member 72 is employed. At the same time, after the movement is stopped, the X-direction moving member 72 is held in surface contact with the base member 3, and the Z-direction moving member 73 is held in surface contact with the X-direction moving member 72. Also good. The imaging unit 75 may be fixed directly or indirectly to the Z direction moving member 73.

  According to this, the imaging unit 75 can photograph the two alignment marks at two positions that are different from each other in the Z direction (focus adjustment direction) and different from each other in the horizontal direction. is there. When acquiring each of the captured images, the surface contact between the base member 3 and the X direction moving member 72 and the surface contact between the X direction moving member 72 and the Z direction moving member 73 are stable. As a result, it is possible to suppress shaking during movement of the imaging unit 75.

  Moreover, in each said embodiment, although each moving member 71,72,73 of the drive mechanism 70 has each moved only to one direction, it is not limited to this. For example, a certain moving member of the drive mechanism 70 may move in two directions. FIG. 17 is a plan view showing a drive mechanism 70 (70B) according to such a modification.

  The moving member 71xy is a thin plate member having a substantially rectangular shape, and is disposed on the base member 3. The moving member 71xy can move in two directions (X direction and Y direction) with respect to the base member 3. Compared to the first embodiment (see FIG. 13 and the like), a moving member 71xy is provided instead of the Y-direction moving member 71 and the X-direction moving member 72.

  Specifically, the drive mechanism 70B includes three pressing force applying portions (also referred to as pressing drive portions) 51, 52, 53 and three elastic support portions 61, 62, 63 around the moving member 71xy. ing. These six members 51, 52, 53, 61, 62, 63 constitute three sets of clamping parts (51, 61), (52, 62), (53, 63), and the three sets of clamping parts Thus, the moving member 71xy is clamped. Then, the respective contact positions (PT11, PT21), (PT12, PT22), (PT13, PT23) between each sandwiching portion and the moving member 71xy are sandwiching directions (X direction, Y direction, Y) corresponding to each sandwiching portion, respectively. The movement member 71xy is moved in a direction parallel to the substantially horizontal plane.

  For example, as illustrated in FIG. 18, the pressing force applying unit 51 determines the position of the tip of the pressing force applying unit 51 while pressing the moving member 71xy in the X direction (specifically, the −X direction) at the pressing point PT11. Move by a minute amount ΔX0 in the −X direction. In response to this, the moving member 71xy also moves by a minute amount ΔX0 in the −X direction. At this time, the position of the distal end portion of the elastic support portion 61 also moves by a minute amount ΔX0 in the −X direction, and the elastic support force in the + X direction is applied from the elastic support portion 61 to the moving member 71xy at the elastic support point PT21. The And the position of the moving member 71xy is fixed when the pressing force by the pressing force provision part 51 and the elastic force by the elastic support part 61 balance. In other words, the moving member 71xy is clamped by the pair of clamping portions (51, 61), and the contact positions PT11, PT21 are moved by a minute amount ΔX0 in the −X direction in the clamping direction (here, the X direction), respectively. The moving member 71xy moves slightly in the −X direction.

  Similarly, it is similarly moved in the Y direction. Specifically, as shown in FIG. 19, the pressing force applying units 52 and 53 press the moving member 71xy in the Y direction (specifically, the + Y direction) at the pressing points PT12 and PT13, respectively. The position of the tip of the applying portions 52 and 53 is moved by a minute amount ΔY0 in the + Y direction. In response to this, the moving member 71xy also moves by a minute amount ΔY0 in the + Y direction. At this time, the positions of the tips of the elastic support portions 62 and 63 also move by a minute amount ΔY0 in the + Y direction, and the elastic support force in the −Y direction moves from the elastic support portions 62 and 63 at the elastic support points PT22 and PT23. It is given to member 71xy. The position of the moving member 71xy is fixed by the balance between the pressing force by the pressing force applying portions 52 and 53 and the elastic force by the elastic support portions 62 and 63. In other words, the moving member 71xy is clamped by the two sets of clamping portions (52, 62), (53, 63), and the contact positions (PT12, PT22), (PT13, PT23) are in the clamping direction (here, the Y direction). ), The moving member 71xy moves slightly in the + Y direction by moving the minute amount ΔY0 in the + Y direction.

  Here, when the moving member 71xy moves in the X direction and / or the Y direction, air is supplied between the base member 3 and the moving member 71xy. The air supply is performed through a plurality of through holes provided in the moving member 71xy. When the moving member 71xy moves in the air supply state, sliding resistance with the base member 3 is reduced, and the moving member 71xy can move smoothly with respect to the base member 3. Preferably, the moving member 71xy moves smoothly in a state of floating (floating state) from the base member 3.

  On the other hand, when the movement is completed, the air supply is stopped. Further, conversely, the moving member 71xy is sucked and held on the base member 3 by utilizing the negative pressure of air. Note that the suction operation using the negative pressure of air is performed by sucking air through a plurality of through holes provided in the moving member 71xy (inversely). At this time, the bottom surface of the moving member 71xy is held in surface contact with the upper surface (plane) of the base member 3. By such surface contact holding (more specifically, suction holding), the moving member 71xy is fixed to the base member 3 very stably.

  Further, similarly to the X-direction moving member 72, the moving member 71xy is provided with a guide portion 78. The Z-direction moving member 73 can be moved in the Z direction with respect to the moving member 71xy by being guided using the guide portion 78.

  The drive mechanism 70 (70B) according to the modified example as described above may be used.

  Further, in each of the above-described embodiments, each mark is photographed by illumination using a coaxial illumination system (in other words, the mark is photographed mainly using reflected light from the mark). However, the present invention is not limited to this. For example, illumination (light source) is provided on the upper side (one side) of both objects 91 and 92, and light emitted from the light source is transmitted through the mark portions (alignment marks MK1a and MK2a) of both objects 91 and 92. Let Then, the transmitted light may be imaged using an imaging unit provided on the lower side (the other side) of both objects 91 and 92. In other words, each captured image related to each alignment mark MK may be acquired using only transmitted light that has passed through each alignment mark portion.

  Moreover, in each said embodiment etc., although infrared light is used as light for imaging | photography, it is not limited to this, For example, visible light may be used. In that case, a portion corresponding to the mark in the stage 12 may be provided with a light transmitting portion (a portion formed by a light transmitting material such as glass or a hollow portion). In addition, an alignment mark is provided on the camera-side surface (for example, the lower surface) of each of the objects 91 and 92, and a portion that transmits light to the camera-side object (for example, 91) (translucent portion). May be provided.

  Further, in each of the above-described embodiments and the like, each captured image is acquired by photographing the marks MK (MKa, MKb) on both the left and right sides in parallel (substantially simultaneously) using the two imaging units (cameras) 75M and 75N. However, the present invention is not limited to this.

  For example, by moving one imaging unit 75 (for example, 75N) in the X direction and / or the Y direction, each of the marks MK (MKa, MKb) on the left and right sides in the same object pair (91, 92). You may make it acquire a captured image by image | photographing sequentially. More specifically, one imaging unit 75N may photograph the alignment marks MK1a and MK2a, move in the Z direction and / or the horizontal direction, and further photograph the alignment marks MK1b and MK2b. In other words, another set of alignment marks (MK1b, MK2b) may be photographed at a position different from the previous imaging position related to a certain set of alignment marks (MK1a, MK1b). In such a case, by moving the imaging unit 75N using the drive mechanism 70N described above, it is possible to satisfactorily suppress the shaking of the imaging unit 75N after the movement is stopped. In other words, after the movement-side members 71, 72, 73 are moved in at least one direction, the two marks (MK1b, MK1b, Since at least one mark (MK1b) of MK2b) is imaged, it is possible to satisfactorily suppress shaking of the imaging unit 75N after the movement is stopped.

  In this case, the alignment mark MK1 (MK1a, etc.) provided on the object 91 and the alignment mark MK2 (MK2a, etc.) provided on the object 92 may be individually captured, but the present invention is not limited to this. . For example, the alignment mark MK1 provided on the object 91 and the alignment mark MK2 provided on the object 92 may be photographed simultaneously. More specifically, one photographed image (left photographed image) Ga including both of the two alignment marks MK1a and MK2a and another photographed image including both the two alignment marks MK1b and MK2b (on the right side) Of the captured image) Gb. That is, one imaging unit 75N may photograph the alignment marks MK1a and MK2a at the same time, move in the Z direction and / or the horizontal direction, and further photograph the alignment marks MK1b and MK2b at the same time.

  Further, in each of the above-described embodiments, the three moving members 71, 72, 73 are sucked and held in a plane contact with each other in the movement completed state, but the present invention is not limited to this. 72 and 73 may be adsorbed and held in contact with each other with curved surfaces.

  Moreover, in each said embodiment etc., each position which has a different position in a Z direction in each position before and behind moving the imaging part 75 (The imaging part in which the optical axis is arrange | positioned along a Z direction) to the said Z direction. Although alignment marks (MK1, MK2, etc.) are respectively photographed, the present invention is not limited to this. In short, the focus adjustment direction is not limited to the Z direction. Specifically, the light traveling direction may be changed using an optical path changing means (mirror or the like).

  For example, the optical axis of the imaging unit 75 is arranged along a predetermined direction (for example, the X direction) other than the Z direction, and the imaging unit 75 is driven in the X direction by driving the moving member in the predetermined direction (for example, the X direction). And the traveling direction of the light may be changed between the X direction and the Z direction using an optical path changing means (mirror or the like). More specifically, light traveling in the X direction (−X direction) (such as light emitted from the coaxial illumination system of the imaging unit 75) is reflected by the mirror and travels in the Z direction (+ Z direction), and also in the Z direction. The light traveling in the (−Z direction) (light reflected by the mark or the like) is reflected again by the mirror and then travels in the X direction (+ X direction), and is received by the imaging unit 75. Good.

  According to this, by moving the imaging unit 75 in the X direction, two alignment marks (MK1, MK2, etc.) arranged at different positions in the direction perpendicular to the opposing surfaces of the two objects (Z direction). It is possible to adjust the in-focus state. In other words, two alignment marks (MK1, MK2, etc.) arranged at different positions in the direction perpendicular to the opposing surfaces of the two objects (Z direction) are placed at different positions (X direction positions) in the focus adjustment direction. ).

  Similarly, in each of the above embodiments and the like, each of the alignment marks having different positions on the XY plane is photographed by moving the imaging unit 75 along the XY plane (horizontal plane). It is not limited.

  For example, each of the alignment marks (MK1, MK2, etc.) having different positions on the XY plane may be photographed by moving the imaging unit 75 along a plane other than the XY plane (for example, the YZ plane). . In detail, the above-mentioned optical path changing means or the like may be used. More specifically, the imaging unit 75 is arranged so that the optical axis of the imaging unit 75 is along the X direction, and the plane movement of the imaging unit 75 by the camera driving mechanism 70 is performed in two directions parallel to the YZ plane. It's fine. Then, it is only necessary that the light traveling direction is changed between the X direction and the Z direction using an optical path changing means (mirror or the like).

  In the above-described embodiments, the two objects 91 and 92 are arranged in the vertical direction, but the present invention is not limited to this, and the two objects 91 and 92 are in different directions (for example, left and right). (Direction) may be arranged.

  Further, in each of the above-described embodiments and the like, a mode in which the present invention is applied to alignment between a substrate and a substrate (wafer-on-wafer (WOW) bonding technique) is illustrated. It is not limited. In other words, the alignment processing target is not limited to the substrates. For example, the present invention may be applied to alignment (chip-on-wafer (COW) bonding technology) between one substrate and each of a plurality of chips, or alignment between chips ( The present invention may be applied to a chip-on-chip (COC) technology.

  In addition, the present invention may be applied to alignment between a substrate and a mold (such as a transparent mold) in nanoimprint processing. More specifically, the above concept is applied when both the substrate and the mold are targets (alignment) and the two are aligned in a plane perpendicular to the opposing direction of the substrate and the mold. May be. Note that such treatment is performed by bringing both the substrate and the mold facing each other into contact with each other in a state where a resin (such as a photocurable resin or a thermoplastic resin) is interposed between the substrate and the mold. What is necessary is just to perform in the apparatus (it also calls a pressurization apparatus) etc. which press. The both are also referred to as objects to be pressed. Furthermore, the said pressurization apparatus is expressed also as a resin device manufacturing apparatus which manufactures the various resin devices using resin.

  For example, as shown in FIGS. 20 and 21, a substrate 82 coated with a resin 88 on its surface and a mold 81 to be pressed against the resin are arranged in a horizontal direction (a direction parallel to the main surface of the substrate 82) (FIG. The above-mentioned idea may be applied when accurately aligning in the horizontal direction or the like at 20 or the like. 20 is a diagram illustrating a state where the substrate 82 and the mold 81 are separated from each other, and FIG. 21 is a diagram illustrating a state where the substrate 82 and the mold 81 are in contact with each other. The alignment may be performed in a separated state between the two (see FIG. 20) or in a contact state between the two (see FIG. 21).

DESCRIPTION OF SYMBOLS 1 Alignment apparatus 3 Base member 12 Stage 22 Head 70, 70M, 70N Camera drive mechanism 71 X direction moving member 72 Y direction moving member 73 Z direction moving member 75, 75M, 75N Imaging part 91, 92 Target object

Claims (15)

An alignment apparatus for aligning two objects,
By measuring two marks, a first alignment mark provided on the first object and a second alignment mark provided on the second object, the displacement of the two objects is measured. Measuring means to
Driving means for relatively moving the two objects so as to eliminate the displacement measured by the measuring means;
With
The measuring means includes
An imaging unit;
A drive mechanism for moving the imaging unit;
Have
The drive mechanism is
A fixed side member;
A movable member movable in at least one direction with respect to the fixed member;
Have
The imaging unit
Moving in the at least one direction as the moving member moves,
Imaging at least one of the two marks in a state where the moving member is held in surface contact with the fixed member after the moving member is moved in the at least one direction. An alignment apparatus characterized by: The alignment apparatus according to claim 1,
The alignment apparatus, wherein the moving side member is attracted and held by the fixed side member by a negative pressure of air after moving in the at least one direction. The alignment apparatus according to claim 1 or 2,
The imaging unit images the first alignment mark before the movement-side member moves in the at least one direction, and images the second alignment mark after the movement, whereby the first alignment mark And an image of the second alignment mark at different positions. The alignment apparatus according to claim 3, wherein
The imaging unit captures the first alignment mark and the second alignment mark at different positions in the focus adjustment direction by moving the movement side member in the at least one direction. A featured alignment device. The alignment apparatus according to claim 3, wherein
The first alignment mark and the second alignment mark are arranged at different positions in a direction parallel to the opposing surfaces of the two objects,
The imaging unit moves the first alignment mark and the second alignment mark at positions different from each other in a direction parallel to the facing surface by moving the moving side member in the at least one direction. An alignment apparatus characterized by imaging. The alignment apparatus according to claim 3, wherein
The first alignment mark and the second alignment mark are arranged at different positions in a direction parallel to the opposing surfaces of the two objects,
The imaging unit includes the first alignment mark and the position at positions different from each other in both the direction parallel to the facing surface and the focus adjustment direction by moving the movement side member in the at least one direction. An alignment apparatus that images the second alignment mark. The alignment apparatus according to claim 1 or 2,
The moving side member moves in the at least one direction after imaging with respect to a set of alignment marks respectively attached to the other two objects that are alignment objects immediately before the two objects;
The imaging unit captures at least one of the two marks at a position different from an immediately preceding imaging position related to the one set of alignment marks after the movement-side member moves in the at least one direction. A featured alignment device. The alignment apparatus according to claim 1 or 2,
The moving-side member moves in the at least one direction after photographing related to a set of alignment marks provided separately from the two marks in the two objects,
The imaging unit captures at least one of the two marks at a position different from an immediately preceding imaging position related to the one set of alignment marks after the movement-side member moves in the at least one direction. A featured alignment device. In the alignment apparatus in any one of Claims 1-8,
The alignment is characterized in that the moving side member is moved with respect to the fixed side member in the at least one direction in a state where air is supplied between the moving side member and the fixed side member. apparatus. In the alignment apparatus in any one of Claims 1-9,
The moving side member has a first moving member that can move only in a first direction with respect to the fixed side member;
The imaging unit
Along with the first movement operation in the first direction between the fixed-side member and the first moving member, the movement in the first direction,
Imaging at least one of the two marks in a state where the first moving member is held in surface contact with the fixed-side member after the movement in the first direction; A featured alignment device. In the alignment apparatus in any one of Claims 1-9,
The moving side member has a first moving member that can move in two directions, a first direction and a second direction, with respect to the fixed side member;
The imaging unit
Moving in the at least one direction with a movement operation in the first direction and / or the second direction between the fixed-side member and the first moving member;
Imaging at least one of the two marks in a state where the first moving member is held in surface contact with the fixed-side member after the movement in the at least one direction; A featured alignment device. In the alignment apparatus in any one of Claims 1-9,
The moving member is
A first moving member movable in a first direction with respect to the fixed side member;
A second moving member movable in a second direction with respect to the first moving member;
Have
The imaging unit
A first movement operation in the first direction between the fixed-side member and the first moving member; and the second movement between the first moving member and the second moving member. Moving in the at least one direction with at least one of the second movement operations in the direction of
After the movement in the at least one direction, the first moving member is held in surface contact with the stationary member, and the second moving member is in surface contact with the first moving member. An alignment apparatus that picks up an image of at least one of the two marks while being held in a state. In the alignment apparatus in any one of Claims 1-9,
The moving member is
A first moving member movable in a first direction with respect to the fixed side member;
A second moving member movable in a second direction with respect to the first moving member;
A third moving member movable in a third direction with respect to the second moving member;
Have
The imaging unit includes a first movement operation in the first direction between the fixed side member and the first movement member, and between the first movement member and the second movement member. At least one of a second movement operation in the second direction and a third movement operation in the third direction between the second movement member and the third movement member. After two moving operations, the first moving member is held in surface contact with the stationary member, and the second moving member is held in surface contact with the first moving member; An alignment apparatus that images at least one of the two marks in a state where the third moving member is held in surface contact with the second moving member. The alignment apparatus according to any one of claims 1 to 13,
The fixed side member is either a member fixed directly or indirectly to the base member of the alignment apparatus and the base member itself,
An alignment apparatus, wherein the base member is damped by a vibration damping mechanism. The alignment apparatus according to claim 14, wherein
The alignment apparatus, wherein the vibration suppression mechanism is an active vibration suppression mechanism.

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