JP6600838B2 - Alignment apparatus and alignment method - Google Patents

Description

  The present invention relates to an alignment apparatus (such as a bonding apparatus) that aligns two objects and a technique related thereto.

  There is a technique for aligning two objects (for example, two substrates) facing each other (see Patent Documents 1 and 2, etc.). In the alignment (alignment) of the two objects, two pairs of alignment marks (alignment marks) are used.

  For example, Patent Document 1 describes the following technique.

  Specifically, first, the positional deviation (Δxa, Δya) (“the positional deviation of the first mark pair” between the mark provided on the left end side of one object and the mark provided on the left end side of the other object. (Refer to FIG. 31 of Patent Document 1). Further, a positional deviation (Δxb, Δyb) between the mark provided on the right end side of one object and the mark provided on the right end side of the other object (also referred to as “positional deviation of the second mark pair”). Is required. Based on these two positional shifts (Δxa, Δya), (Δxb, Δba), the positional shifts (Δx, Δy, Δθ) between the two objects are obtained.

  Specifically, among the positional deviations (Δx, Δy, Δθ) between the two objects, the value Δx is an average value (Δx = (Δxa + Δxb) / 2) of the x components of the two positional deviations described above. Desired. Further, the value Δy is obtained as an average value (Δy = (Δya + Δyb) / 2) of the y components of the above-described two positional deviations (see paragraphs 0157 and 0159 of Patent Document 1). Further, the value Δθ is expressed by using the distance L between the two marks at the left and right ends and the x and y components (Δxa, Δya, Δxb, Δyb) of the above-described two positional shifts (see Patent Document 1). (See paragraph 0153).

  Then, it is determined whether or not each value Δx, Δy, Δθ is within a predetermined allowable range (see paragraph 0169 of Patent Document 1).

  If any of the values Δx, Δy, Δθ is not within the predetermined allowable range, it is determined that the positional deviation between the two objects is not within the allowable error range, and the value (clearance) is determined. In order to correct (quantity) Δx, Δy, Δθ, a positional deviation correction operation is executed.

  On the other hand, when each value Δx, Δy, Δθ is within the predetermined allowable range, it is determined that the positional deviation between the two objects is within the allowable error range, and the alignment operation is performed. Ends.

JP 2010-267682 A JP 2011-66287 A

  However, the inventor of the present application has found that the following problems exist in the above-described technique (hereinafter also referred to as a conventional example).

  Specifically, in the case where the end of alignment is determined based only on the average deviation values Δx, Δy, Δθ in the X, Y, and θ directions, although there is still a correctable error, It has been found that the positional deviation between the two objects may be determined to be within the allowable error range. In short, the present inventors have found that there is a problem that the alignment (positioning) ends even though the two objects are not necessarily sufficiently aligned. More specifically, it has been found that there is room for improving the deviation in the Y direction when, for example, a slight deviation in the θ direction remains.

  In the above conventional example, as a situation where it is determined that the positional deviation between the two objects is within the allowable error range, there are situations as shown in FIGS. 11 to 13, the positions of the alignment marks MK1a and MK1b provided on one object are indicated by white circles, and the positions of the alignment marks MK2a and MK2b provided on the other object are indicated by black circles. It is shown in

  In these drawings, the shift Δθ in the rotation direction (θ direction) is exaggerated. Actually, the deviation Δθ in the rotational direction is within an allowable range (the absolute value of Δθ is equal to or less than the threshold value TH3), and the deviation Δθ is a very small angle θ1 (for example, 0.00008 (degree)). Similarly, the deviations Δx and Δy are exaggerated. The threshold TH3 has the smallest value, for example, a deviation in recognition resolution (recognition resolution in image processing) Δp appears as a deviation in the Y direction with respect to an X-direction displacement that is half the distance L between marks (L / 2). Is set to the minute angle θ1 (tan θ1 = Δp / (L / 2) = Δp × 2 / L).

  11 to 13, the X-direction deviation Δx is within the allowable range (−TH1 ≦ Δx ≦ TH1), and the Y-direction deviation Δy is within the allowable range (−TH2 ≦ Δy ≦ TH2). ) And the rotational deviation Δθ is within the allowable range (−TH3 ≦ Δθ ≦ TH3). The thresholds TH1, TH2, and TH3 are predetermined minute values (for example, 0.2 μm (micrometer)).

  More specifically, in any case of FIGS. 11 to 13, the value Δy (the average value of the y components of the above-described two positional deviations (Δy = (Δya + Δyb) / 2)) is within the allowable range. Further, the difference value (Δyb−Δya) between the two values Δya and Δyb is 0.4 μm (micrometer). However, the deviation in the Y direction in the vicinity of the left mark and the deviation in the Y direction in the vicinity of the right mark are different between the situations shown in the drawings.

  In short, FIG. 11 is the most ideal state, and FIG. 13 is the least desirable state (described later). FIG. 12 shows an intermediate state between the state of FIG. 11 and the state of FIG.

  First, in FIG. 11, the values Δya and Δyb (specifically, absolute values thereof) are very small values (for example, 0.2 μm (micrometer)). For example, Δya = −0.2 μm and Δyb = + 0.2 μm. The deviation Δya in the Y direction near the left mark is also within the allowable range (specifically, the absolute value of Δya is equal to or less than the threshold TH2), and the deviation Δyb in the Y direction near the right mark is also within the allowable range ( Specifically, the absolute value of Δya is equal to or less than the threshold value TH2.

  On the other hand, in FIG. 13, although the value Δya is zero, the value Δyb is 0.4 μm (micrometer) (Δya = −0.0 μm, Δyb = + 0.4 μm). In this case, although the deviation Δya in the Y direction near the left mark is within the allowable range, the deviation Δyb (0.4 μm) in the Y direction near the right mark is larger than the threshold value TH2 (0.2 μm). The allowable range is exceeded (| Δyb |> TH2). That is, the deviation in the Y direction near the left mark and the deviation in the Y direction near the right mark are greatly different. More specifically, the value Δy (= (Δya + Δyb) / 2) calculated as the average value is 0.2 μm and is within the allowable range, but the deviation in the Y direction near the right mark is the left mark. It is larger than the deviation in the Y direction in the vicinity and also exceeds the allowable range. In other words, in the right region of the object, a positional deviation exceeding the allowable range (a positional deviation in the Y direction) occurs.

  In FIG. 12, each value Δya is −0.1, and the value Δyb is +0.3. The value Δy (= (Δya + Δyb) / 2) calculated as the average value is 0.1 μm and is within the allowable range, but the value yb (specifically its absolute value) is larger than the threshold value TH2. That is, in the right region of the object, a positional deviation exceeding the allowable range (a positional deviation in the Y direction) occurs.

  In the case of FIG. 12 and FIG. 13 (particularly FIG. 13), the positional deviation in the Y direction between the two objects is relatively large in the vicinity of the imaging target area (near the alignment marks MK1b and MK2b) of the right captured image GAb. Thus, the alignment accuracy in the Y direction is slightly reduced.

  However, in the case of FIGS. 11 to 13, since the average value of the value Δya and the value Δyb are both within the allowable range, using the conventional determination method, not only the case of FIG. 11 but also FIG. In the case of FIG. 12), it is determined that accurate alignment has been performed. In other words, the alignment ends even though an error larger than the allowable error still exists (and can be corrected). That is, the alignment of the two objects is not necessarily performed sufficiently.

  Therefore, an object of the present invention is to provide a technique capable of accurately aligning two objects.

In order to solve the above problems, the invention of claim 1 is an alignment apparatus, wherein the first holding means for holding the first object, the second holding means for holding the second object, The first alignment mark attached to the first object and the second object in a state where the objects of the first object and the second object are arranged close to each other or in contact with each other. A first misalignment vector representing the misalignment between the first mark pair and the second alignment mark attached to the object, and a third alignment mark attached to the first object. Measuring means for measuring a second misalignment vector representing a misalignment between the second mark pair and the fourth alignment mark attached to the second object; and Determine whether the mutual misalignment is within the allowable error range. And the first displacement vector is a displacement in the first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects. A first shift and a second shift that is a shift in a second translation direction perpendicular to the first translation direction out of the two translation directions, and the second displacement vector is A third shift that is a shift in the first translational direction and a fourth shift that is a shift in the second translational direction, wherein the first translational direction includes the first alignment mark and the first shift 3 is a direction parallel to the direction connecting the three alignment marks, and the determination means includes the first deviation within a first allowable range and the third deviation within the first allowable range. without proviso that at an average value of said third shift between the first shift Both the objects, provided that the second deviation is within the second tolerance range and the fourth deviation is within the second tolerance range. It is determined that the positional deviation between the two is within the allowable error range.

  According to a second aspect of the present invention, in the alignment apparatus according to the first aspect of the invention, when it is determined that the positional deviation between the two objects is not within the allowable error range, the first positional deviation. The first holding means and the second holding means are relatively driven so as to eliminate the positional deviation between the two objects determined based on the vector and the second positional deviation vector. Drive means for relatively moving both the objects in the predetermined plane.

  Invention of Claim 3 is an alignment apparatus, Comprising: The 1st holding means holding a 1st target object, The 2nd holding means holding a 2nd target object, The said 1st target object, The first alignment mark attached to the first object and the second object are attached in a state where both the objects with the second object are close to each other or in contact with each other. A first misalignment vector representing a misalignment between the first mark pair and the second alignment mark; a third alignment mark attached to the first object; and the second object. Measuring means for measuring a second misalignment vector representing a misalignment between the second mark pair and the fourth alignment mark attached to the second alignment mark, and misalignment between the two objects is allowed Determination means for determining whether or not the error is within the error range. The first displacement vector is a first displacement which is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects; A second displacement which is a displacement in a second translation direction perpendicular to the first translation direction of the two translation directions, and the second displacement vector is a displacement in the first translation direction. A third shift and a fourth shift that is a shift in the second translation direction, and the first translation direction includes the first alignment mark and the second translation direction out of the two translation directions. One direction is relatively close to the direction connecting the third alignment mark, and the determination means has an average value of the first deviation and the third deviation within a first allowable range. The second deviation is within a second tolerance range and the fourth deviation is On the condition that it is within the second allowable range, it is determined that the positional deviation between the two objects is within the allowable error range, and the alignment apparatus When it is determined that the positional deviation between the two is not within the allowable error range, between the two objects obtained based on the first positional deviation vector and the second positional deviation vector. Driving means for relatively driving the first holding means and the second holding means to move the two objects relative to each other within the predetermined plane so as to eliminate misalignment; In the driving means, at least one of the second shift and the fourth shift exceeds the second allowable range, and an average value of the second shift and the fourth shift is the drive Shift of the means in the second translational direction When the resolution is greater than or equal to the dynamic resolution, the positional deviation correction drive in the second translation direction is executed, and at least one of the second deviation and the fourth deviation exceeds the second allowable range. Even when the average value of the second deviation and the fourth deviation is smaller than the moving resolution in the second translation direction, the positional deviation correction drive in the second translation direction is not executed. The alignment operation in the second translation direction is terminated.

  Invention of Claim 4 is an alignment apparatus, Comprising: The 1st holding means to hold | maintain a 1st target object, The 2nd holding means to hold | maintain a 2nd target object, The said 1st target object, The first alignment mark attached to the first object and the second object are attached in a state where both the objects with the second object are close to each other or in contact with each other. A first misalignment vector representing a misalignment between the first mark pair and the second alignment mark; a third alignment mark attached to the first object; and the second object. Measuring means for measuring a second misalignment vector representing a misalignment between the second mark pair and the fourth alignment mark attached to the second alignment mark, and misalignment between the two objects is allowed Determination means for determining whether or not the error is within the error range. The first displacement vector is a first displacement which is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects; A second displacement which is a displacement in a second translation direction perpendicular to the first translation direction of the two translation directions, and the second displacement vector is a displacement in the first translation direction. A third shift and a fourth shift that is a shift in the second translation direction, and the first translation direction includes the first alignment mark and the second translation direction out of the two translation directions. One direction is relatively close to the direction connecting the third alignment mark, and the determination means has an average value of the first deviation and the third deviation within a first allowable range. The second deviation is within a second tolerance range and the fourth deviation is On the condition that it is within the second allowable range, it is determined that the positional deviation between the two objects is within the allowable error range, and the alignment apparatus When it is determined that the positional deviation between the two is not within the allowable error range, between the two objects obtained based on the first positional deviation vector and the second positional deviation vector. Driving means for relatively driving the first holding means and the second holding means to move the two objects relative to each other within the predetermined plane so as to eliminate misalignment; The determination means includes a first inter-mark distance which is a distance between the first alignment mark and the third alignment mark, and a distance between the second alignment mark and the fourth alignment mark. distance When the difference from the second inter-mark distance is deviated from a specified value, the first deviation is within the first tolerance and the third deviation is the first tolerance. The positional deviation between the two objects is within the allowable error range, and the driving means is configured to determine the distance between the first mark and the second distance. When the difference from the mark-to-mark distance deviates from a specified value, at least one of the first deviation and the third deviation exceeds the first allowable range, and the first deviation and the first deviation When the average value of the three deviations is equal to or greater than the moving resolution of the driving means in the first translation direction, misregistration correction driving in the first translation direction is executed, and the first deviation and the third deviation are performed. At least one of the deviations exceeds the first allowable range Even when the average value of the first deviation and the third deviation is smaller than the moving resolution in the first translation direction, the positional deviation correction drive in the first translation direction is executed. And the alignment operation in the first translation direction is terminated.

  Invention of Claim 5 is an alignment apparatus, Comprising: The 1st holding means holding a 1st target object, The 2nd holding means holding a 2nd target object, The said 1st target object, The first alignment mark attached to the first object and the second object are attached in a state where both the objects with the second object are close to each other or in contact with each other. A first misalignment vector representing a misalignment between the first mark pair and the second alignment mark; a third alignment mark attached to the first object; and the second object. Measuring means for measuring a second misalignment vector representing a misalignment between the second mark pair and the fourth alignment mark attached to the second alignment mark, and misalignment between the two objects is allowed Determination means for determining whether or not the error is within the error range. The first displacement vector is a first displacement which is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects; A second displacement which is a displacement in a second translation direction perpendicular to the first translation direction of the two translation directions, and the second displacement vector is a displacement in the first translation direction. A third shift and a fourth shift that is a shift in the second translation direction, and the first translation direction includes the first alignment mark and the second translation direction out of the two translation directions. One direction is relatively close to the direction connecting the third alignment mark, and the determination means has an average value of the first deviation and the third deviation within a first allowable range. The second deviation is within a second tolerance range and the fourth deviation is On the condition that it is within the second allowable range, it is determined that the positional deviation between the two objects is within the allowable error range, and the alignment apparatus When it is determined that the positional deviation between the two is not within the allowable error range, between the two objects obtained based on the first positional deviation vector and the second positional deviation vector. Driving means for relatively driving the first holding means and the second holding means to move the two objects relative to each other within the predetermined plane so as to eliminate misalignment; In the driving means, at least one of the second shift and the fourth shift exceeds the second allowable range, and an average value of the second shift and the fourth shift is the drive Recognition of said means in said second translational direction If the resolution is equal to or greater than the resolution, the position deviation correction drive in the second translation direction is executed, and at least one of the second deviation and the fourth deviation exceeds the second allowable range. Even if it exists, when the average value of the second deviation and the fourth deviation is smaller than the recognition resolution in the second translation direction, the positional deviation correction drive in the second translation direction is not executed. The alignment operation in the second translation direction is terminated.

  Invention of Claim 6 is an alignment apparatus, Comprising: The 1st holding means holding a 1st target object, The 2nd holding means holding a 2nd target object, The said 1st target object, The first alignment mark attached to the first object and the second object are attached in a state where both the objects with the second object are close to each other or in contact with each other. A first misalignment vector representing a misalignment between the first mark pair and the second alignment mark; a third alignment mark attached to the first object; and the second object. Measuring means for measuring a second misalignment vector representing a misalignment between the second mark pair and the fourth alignment mark attached to the second alignment mark, and misalignment between the two objects is allowed Determination means for determining whether or not the error is within the error range. The first displacement vector is a first displacement which is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects; A second displacement which is a displacement in a second translation direction perpendicular to the first translation direction of the two translation directions, and the second displacement vector is a displacement in the first translation direction. A third shift and a fourth shift that is a shift in the second translation direction, and the first translation direction includes the first alignment mark and the second translation direction out of the two translation directions. One direction is relatively close to the direction connecting the third alignment mark, and the determination means has an average value of the first deviation and the third deviation within a first allowable range. The second deviation is within a second tolerance range and the fourth deviation is On the condition that it is within the second allowable range, it is determined that the positional deviation between the two objects is within the allowable error range, and the alignment apparatus When it is determined that the positional deviation between the two is not within the allowable error range, between the two objects obtained based on the first positional deviation vector and the second positional deviation vector. Driving means for relatively driving the first holding means and the second holding means to move the two objects relative to each other within the predetermined plane so as to eliminate misalignment; The determination means includes a first inter-mark distance which is a distance between the first alignment mark and the third alignment mark, and a distance between the second alignment mark and the fourth alignment mark. distance When the difference from the second inter-mark distance is deviated from a specified value, the first deviation is within the first tolerance and the third deviation is the first tolerance. The positional deviation between the two objects is within the allowable error range, and the driving means is configured to determine the distance between the first mark and the second distance. When the difference from the mark-to-mark distance deviates from a specified value, at least one of the first deviation and the third deviation exceeds the first allowable range, and the first deviation and the first deviation When the average value of the three deviations is greater than or equal to the recognition resolution of the driving means in the first translation direction, misregistration correction driving in the first translation direction is executed, and the first deviation and the third deviation are performed. At least one of the deviations exceeds the first allowable range Even when the average value of the first deviation and the third deviation is smaller than the recognition resolution in the first translation direction, the misregistration correction drive in the first translation direction is executed. And the alignment operation in the first translation direction is terminated.

Invention of Claim 7 is an alignment apparatus , Comprising: The 1st holding means to hold | maintain a 1st target object, The 2nd holding means to hold | maintain a 2nd target object, The said 1st target object, The first alignment mark attached to the first object and the second object are attached in a state where both the objects with the second object are close to each other or in contact with each other. A first misalignment vector representing a misalignment between the first mark pair and the second alignment mark; a third alignment mark attached to the first object; and the second object. Measuring means for measuring a second misalignment vector representing a misalignment between the second mark pair and the fourth alignment mark attached to the second alignment mark, and misalignment between the two objects is allowed Determination means for determining whether or not the error is within the error range. The first displacement vector is a first displacement which is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects; A second displacement which is a displacement in a second translation direction perpendicular to the first translation direction of the two translation directions, and the second displacement vector is a displacement in the first translation direction. A third shift and a fourth shift that is a shift in the second translation direction, and the first translation direction includes the first alignment mark and the second translation direction out of the two translation directions. One direction is relatively close to the direction connecting the third alignment mark, and the determination means has an average value of the first deviation and the third deviation within a first allowable range. The second deviation is within a second tolerance range and the fourth deviation is As serial second allowable range condition and that it is, the positional deviation between each other the two object determines that the is within the allowable error range, the determination means, the first alignment A first inter-mark distance that is a distance between a mark and the third alignment mark; and a second inter-mark distance that is a distance between the second alignment mark and the fourth alignment mark; The first deviation is within the first tolerance range and the third deviation is within the first tolerance range, the difference between It is determined that the positional deviation between the two objects is within the allowable error range.

  According to an eighth aspect of the present invention, in the alignment apparatus according to any of the second to seventh aspects of the present invention, the measurement operation of the first and second positional deviation vectors and the positional deviation between the two objects. After performing the determination operation regarding whether or not is within the allowable error range and the drive operation for eliminating the positional deviation between the two objects, the first and second positions are again A shift vector measurement operation and a determination operation regarding whether or not a positional shift between the two objects is within the allowable error range are performed.

According to a ninth aspect of the present invention, in the alignment apparatus according to any one of the first to eighth aspects, the determination means is a rotational deviation with respect to a rotational direction about an axis perpendicular to the predetermined plane, and the second means. The positional deviation between the two objects is within the allowable error range on the condition that the rotational deviation calculated based on the deviation and the fourth deviation is within the third allowable range. It is characterized by determining to the effect.
According to a tenth aspect of the present invention, in the alignment apparatus according to any one of the first to ninth aspects, the first allowable range has an error equal to a recognition resolution in the first translation direction of the measuring means. It is an allowable range.

According to an eleventh aspect of the present invention, in the alignment apparatus according to any one of the first to eighth aspects, the second allowable range has an error equal to a recognition resolution in the second translation direction of the measuring means. It is an allowable range.

According to a twelfth aspect of the present invention, in the alignment apparatus according to any one of the first to eleventh aspects, both the objects are substrates.

A thirteenth aspect of the invention is the alignment apparatus according to the twelfth aspect of the invention, wherein the first heating means for heating the first substrate which is the first object and the second object which is the second object. A second heating unit for heating the substrate, wherein the measuring unit is configured such that the first substrate is heated by the first heating unit and the second substrate is heated by the second heating unit. In the heated state, the first misregistration vector and the second misregistration vector are measured.

According to a fourteenth aspect of the present invention, in the alignment apparatus according to the twelfth aspect of the present invention, the measuring means includes a first substrate that is the first object and a second substrate that is the second object. The first displacement vector and the second displacement vector are measured in a state where at least one of the substrates is bent from the center toward the outer peripheral portion.

According to a fifteenth aspect of the present invention, in the alignment apparatus according to any one of the first to fourteenth aspects, one of the objects is a substrate, and the other of the objects is the other. The object is a mold.

The invention according to claim 16 is an alignment method, wherein: a) the first object and the second object are arranged close to each other or in contact with each other and in contact with each other. A first misalignment vector representing a misalignment between the first mark pair of the first alignment mark attached to the second object and the second alignment mark attached to the second object; A second misalignment vector representing a misalignment between the second mark pair of the third alignment mark attached to one object and the fourth alignment mark attached to the second object; And b) determining whether or not a positional deviation between the two objects is within an allowable error range, the first positional deviation vector being With respect to a predetermined plane perpendicular to the facing direction A first shift that is a shift in the first translation direction of the two parallel translation directions and a second shift in the second translation direction that is perpendicular to the first translation direction among the two translation directions. The second displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction. The first translation direction is a direction parallel to a direction connecting the first alignment mark and the third alignment mark, and in the step b), the first deviation is a first allowable value. An average value of the first deviation and the third deviation is within the first tolerance range without being a condition that the third deviation is within the first tolerance range. The second deviation is within a second tolerance range and the fourth deviation is the second tolerance. As the allowable range condition and it is characterized by that the positional deviation between each other the two objects is within the allowable error range is determined.

  According to a seventeenth aspect of the present invention, in the alignment method according to the sixteenth aspect of the invention, c) when it is determined that the positional deviation between the two objects does not fall within the allowable error range, the first Moving both the objects relative to each other in the predetermined plane so as to eliminate the positional deviation between the two objects determined based on a positional deviation vector and the second positional deviation vector; Is further provided.

  The invention according to claim 18 is an alignment method, wherein: a) the first object and the second object are arranged close to each other or in close contact with each other. A first misalignment vector representing a misalignment between the first mark pair of the first alignment mark attached to the second object and the second alignment mark attached to the second object; A second misalignment vector representing a misalignment between the second mark pair of the third alignment mark attached to one object and the fourth alignment mark attached to the second object; And b) determining whether or not a positional deviation between the two objects is within an allowable error range, the first positional deviation vector being With respect to a predetermined plane perpendicular to the facing direction of the object A first shift that is a shift in the first translation direction of the two parallel translation directions and a second shift in the second translation direction that is perpendicular to the first translation direction among the two translation directions. The second displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction. The first translation direction is one of the two translation directions that is relatively close to the direction connecting the first alignment mark and the third alignment mark, and the step b). , The average value of the first deviation and the third deviation is within a first allowable range, and the second deviation is within the second allowable range and the fourth deviation. Between the two objects, provided that is within the second tolerance range When it is determined that a positional deviation is within the allowable error range, and the alignment method c) it is determined that the positional deviation between the two objects is not within the allowable error range, The two objects are relatively moved within the predetermined plane so as to eliminate the positional deviation between the two objects determined based on the first and second positional displacement vectors. The step c) further comprises: c-1) at least one of the second deviation and the fourth deviation exceeds the second tolerance and the second deviation. When the average value of the second deviation and the fourth deviation is equal to or greater than the moving resolution in the second translation direction, c-2) executing the second deviation correction drive in the second translation direction; Gap Even when at least one of the fourth shifts exceeds the second allowable range, an average value of the second shift and the fourth shift is the second translation direction. When the resolution is smaller than the moving resolution, the step of correcting the displacement in the second translation direction is not executed, and the alignment operation in the second translation direction is terminated.

  The invention according to claim 19 is an alignment method, wherein: a) the first object and the second object are arranged in close proximity to or in contact with each other, the first object. A first misalignment vector representing a misalignment between the first mark pair of the first alignment mark attached to the second object and the second alignment mark attached to the second object; A second misalignment vector representing a misalignment between the second mark pair of the third alignment mark attached to one object and the fourth alignment mark attached to the second object; And b) determining whether or not a positional deviation between the two objects is within an allowable error range, the first positional deviation vector being With respect to a predetermined plane perpendicular to the facing direction of the object A first shift that is a shift in the first translation direction of the two parallel translation directions and a second shift in the second translation direction that is perpendicular to the first translation direction among the two translation directions. The second displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction. The first translation direction is one of the two translation directions that is relatively close to the direction connecting the first alignment mark and the third alignment mark, and the step b). , The average value of the first deviation and the third deviation is within a first allowable range, and the second deviation is within the second allowable range and the fourth deviation. Between the two objects, provided that is within the second tolerance range When it is determined that a positional deviation is within the allowable error range, and the alignment method c) it is determined that the positional deviation between the two objects is not within the allowable error range, The two objects are relatively moved within the predetermined plane so as to eliminate the positional deviation between the two objects determined based on the first and second positional displacement vectors. A step of moving, and in step b), a first inter-mark distance which is a distance between the first alignment mark and the third alignment mark, and the second alignment mark When the difference from the second mark distance, which is the distance to the fourth alignment mark, deviates from a specified value, the first deviation is within the first tolerance. In addition, on the condition that the third deviation is within the first allowable range, it is determined that the positional deviation between the two objects is within the allowable error range, and the step c) c-3) when the difference between the distance between the first mark and the distance between the two marks deviates from a specified value, at least one of the first deviation and the third deviation is When the average value of the first deviation and the third deviation exceeds the first allowable range and is greater than or equal to the moving resolution in the first translation direction, the position deviation in the first translation direction A step of executing correction driving; and c-4) even when at least one of the first deviation and the third deviation exceeds the first allowable range, The average value of the third deviation is in the first translation direction. Wherein when the movement is smaller than the resolution that, without executing the positional deviation correction driving for the first translational direction, characterized in that it and a step of terminating the alignment operation in the first translational direction.

  The invention of claim 20 is an alignment method, wherein: a) the first object and the second object are arranged close to each other or in close contact with each other and in contact with each other. A first misalignment vector representing a misalignment between the first mark pair of the first alignment mark attached to the second object and the second alignment mark attached to the second object; A second misalignment vector representing a misalignment between the second mark pair of the third alignment mark attached to one object and the fourth alignment mark attached to the second object; And b) determining whether or not a positional deviation between the two objects is within an allowable error range, the first positional deviation vector being With respect to a predetermined plane perpendicular to the facing direction of the object A first shift that is a shift in the first translation direction of the two parallel translation directions and a second shift in the second translation direction that is perpendicular to the first translation direction among the two translation directions. The second displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction. The first translation direction is one of the two translation directions that is relatively close to the direction connecting the first alignment mark and the third alignment mark, and the step b). , The average value of the first deviation and the third deviation is within a first allowable range, and the second deviation is within the second allowable range and the fourth deviation. Between the two objects, provided that is within the second tolerance range When it is determined that a positional deviation is within the allowable error range, and the alignment method c) it is determined that the positional deviation between the two objects is not within the allowable error range, The two objects are relatively moved within the predetermined plane so as to eliminate the positional deviation between the two objects determined based on the first and second positional displacement vectors. The step c) further comprises: c-1) at least one of the second deviation and the fourth deviation exceeds the second tolerance and the second deviation. When the average value of the second translation direction is equal to or higher than the recognition resolution in the second translation direction, a step of executing misregistration correction driving in the second translation direction; c-2) the second translation Gap Even when at least one of the fourth shifts exceeds the second allowable range, an average value of the second shift and the fourth shift is the second translation direction. When the resolution is smaller than the recognition resolution, the step of correcting the displacement in the second translation direction is not executed, and the alignment operation in the second translation direction is terminated.

  The invention according to claim 21 is an alignment method, wherein: a) the first object and the second object are arranged close to each other or in contact with each other and in contact with each other. A first misalignment vector representing a misalignment between the first mark pair of the first alignment mark attached to the second object and the second alignment mark attached to the second object; A second misalignment vector representing a misalignment between the second mark pair of the third alignment mark attached to one object and the fourth alignment mark attached to the second object; And b) determining whether or not a positional deviation between the two objects is within an allowable error range, the first positional deviation vector being With respect to a predetermined plane perpendicular to the facing direction of the object A first shift that is a shift in the first translation direction of the two parallel translation directions and a second shift in the second translation direction that is perpendicular to the first translation direction among the two translation directions. The second displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction. The first translation direction is one of the two translation directions that is relatively close to the direction connecting the first alignment mark and the third alignment mark, and the step b). , The average value of the first deviation and the third deviation is within a first allowable range, and the second deviation is within the second allowable range and the fourth deviation. Between the two objects, provided that is within the second tolerance range When it is determined that a positional deviation is within the allowable error range, and the alignment method c) it is determined that the positional deviation between the two objects is not within the allowable error range, The two objects are relatively moved within the predetermined plane so as to eliminate the positional deviation between the two objects determined based on the first and second positional displacement vectors. A step of moving, and in step b), a first inter-mark distance which is a distance between the first alignment mark and the third alignment mark, and the second alignment mark When the difference from the second mark distance, which is the distance to the fourth alignment mark, deviates from a specified value, the first deviation is within the first tolerance. In addition, on the condition that the third deviation is within the first allowable range, it is determined that the positional deviation between the two objects is within the allowable error range, and the step c) c-3) when the difference between the distance between the first mark and the distance between the two marks deviates from a specified value, at least one of the first deviation and the third deviation is When the average value of the first deviation and the third deviation exceeds the first permissible range and is greater than or equal to the recognition resolution in the first translation direction, the positional deviation in the first translation direction A step of executing correction driving; and c-4) even when at least one of the first deviation and the third deviation exceeds the first allowable range, The average value of the third deviation is in the first translation direction. Wherein when recognizing smaller than the resolution is that, without executing the positional deviation correction driving for the first translational direction, characterized in that it and a step of terminating the alignment operation in the first translational direction.

  The invention of claim 22 is an alignment method, wherein: a) the first object and the second object are arranged close to each other or in close contact with each other and in contact with each other. A first misalignment vector representing a misalignment between the first mark pair of the first alignment mark attached to the second object and the second alignment mark attached to the second object; A second misalignment vector representing a misalignment between the second mark pair of the third alignment mark attached to one object and the fourth alignment mark attached to the second object; And b) determining whether or not a positional deviation between the two objects is within an allowable error range, the first positional deviation vector being With respect to a predetermined plane perpendicular to the facing direction of the object A first shift that is a shift in the first translation direction of the two parallel translation directions and a second shift in the second translation direction that is perpendicular to the first translation direction among the two translation directions. The second displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction. The first translation direction is one of the two translation directions that is relatively close to the direction connecting the first alignment mark and the third alignment mark, and the step b). , The average value of the first deviation and the third deviation is within a first allowable range, and the second deviation is within the second allowable range and the fourth deviation. Between the two objects, provided that is within the second tolerance range It is determined that the positional deviation is within the allowable error range, and in step b), a first inter-mark distance that is a distance between the first alignment mark and the third alignment mark. If the difference between the second alignment mark and the second alignment mark, which is the distance between the second alignment mark and the fourth alignment mark, deviates from a specified value, the first deviation is That the positional deviation between the two objects is within the allowable error range, provided that the positional deviation is within the allowable range of 1 and the third shift is within the first allowable range. Is determined.

  The invention of claim 23 is the alignment method according to any one of claims 17 to 22, wherein after step a), step b) and step c) are executed, the step a) And step b) are executed again.

According to a twenty-fourth aspect of the present invention, in the alignment method according to any one of the sixteenth to twenty-third aspects, in the step b), the rotational deviation about a rotation direction about an axis perpendicular to the predetermined plane is On the condition that the rotational deviation calculated based on the second deviation and the fourth deviation is within the third allowable range, the positional deviation between the two objects is within the allowable error range. It is determined that it is within the range.
According to a twenty-fifth aspect of the present invention, in the alignment method according to any one of the sixteenth to twenty- fourth aspects, the first allowable range is a range in which the same error as the recognition resolution in the first translational direction is allowed. It is characterized by being.

According to a twenty-sixth aspect of the present invention, in the alignment method according to any of the sixteenth to twenty- fourth aspects, the second permissible range is a range in which the same error as the recognition resolution in the second translation direction is permissible. It is characterized by being.

According to a twenty-seventh aspect of the present invention, in the alignment method according to any one of the sixteenth to twenty-sixth aspects, both the objects are substrates.

The invention of claim 28 is the alignment method according to any one of claims 16 to 27 , wherein one of the objects is a substrate, and the other of the objects is the other of the objects. The object is a mold.

According to the invention described in claims 1 to 28 , the second translation direction is determined in the vicinity of one of the alignment marks by separately determining the first and second positional deviations with respect to the second translation direction. Therefore, it is possible to make a more accurate determination than when the average value is used. Therefore, it is possible to accurately align the two objects.

It is a figure which shows the internal structure of the alignment apparatus which concerns on embodiment of this invention. It is a figure which shows one target object (board | substrate) with which the alignment mark was attached | subjected. It is a figure which shows the other target object (board | substrate) with which the alignment mark was attached | subjected. It is a figure which shows the alignment mark attached | subjected to one target object. It is a figure which shows the alignment mark attached | subjected to the other target object. It is a top view which shows the state by which the two target objects were opposingly arranged. It is a figure which shows a mode that two marks have shifted | deviated mutually in the picked-up image. It is a top view which shows the position shift of 2 sets of marks. It is a figure explaining calculation of deviation deltatheta. It is a figure explaining calculation of deviation deltatheta. It is a figure which shows a certain positional relationship regarding both objects (especially Y direction). It is a figure which shows another positional relationship regarding both objects (especially Y direction). It is a figure which shows another positional relationship regarding both objects (especially Y direction). It is a conceptual diagram for demonstrating position shift determination. It is a flowchart which shows operation | movement of the alignment apparatus which concerns on this embodiment. It is a flowchart which shows the detailed operation | movement regarding a position shift measurement. It is a figure which shows a mode that both target objects adjoin (separate) mutually and are opposingly arranged. It is a figure which shows a mode that both objects are opposingly arranged by the contact state. It is a figure which shows a mode that both the objects are mutually offset and arrange | positioned. It is a figure for demonstrating 2nd Embodiment (The aspect which performs additional correction operation | movement also in a X direction). It is a figure for demonstrating 2nd Embodiment. It is a figure for demonstrating 2nd Embodiment. It is a figure for demonstrating 2nd Embodiment. It is a figure which shows the modification which bends and joins a target object. It is explanatory drawing regarding the said modification. It is explanatory drawing regarding the said modification. It is a figure which shows an example of an experimental result. It is a figure which shows an example of the experimental result which concerns on a comparative example. It is a figure which shows the other example of arrangement | positioning regarding an alignment mark. It is a figure which shows position alignment (nanoimprint process) with a board | substrate and a mold (non-contact opposing state). It is a figure which shows position alignment (nanoimprint process) with a board | substrate and a mold (contact opposing state). It is a figure which shows a mode that the lens shape | molded using the mold is arrange | positioned in the predetermined position on a board | substrate by position alignment (nanoimprint process) of a board | substrate and a mold.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<1. First Embodiment>
<1-1. Device configuration>
FIG. 1 is a diagram showing an internal structure of an alignment apparatus 1 (also referred to as 1A) according to an embodiment of the present invention. In the following, in each figure, directions and the like are shown using an XYZ orthogonal coordinate system for convenience.

  The alignment apparatus 1 pressurizes and heats an object to be bonded (here, a substrate) 91 and an object to be bonded (here, a substrate) 92 in a chamber (vacuum chamber) 2 under reduced pressure so that both objects are bonded. An apparatus for joining the objects 91 and 92. This alignment apparatus 1 is also expressed as a bonding apparatus that bonds the substrate 92 held by the head 22 and the substrate 91 held by the stage 12. In addition, although the semiconductor substrate is illustrated here as the board | substrates 91 and 92, it is not limited to this, A glass substrate etc. may be used. Further, both the objects to be joined 91 and 92 are also expressed as objects (for alignment operation).

  Here, as shown in FIGS. 17 and 18, a situation is assumed in which a substrate (object) 91 and a substrate (object) 92 are joined. More specifically, both the substrates 91 and 92 are bonded by bonding pads (electrodes) 93 of the substrate 91 and metal bumps (electrodes) 94 of chips (components) formed on the substrate 92. As the metal bump 94, a so-called solder bump formed of an appropriate solder material can be used. Further, the metal bump 94 is not limited to this, and may be formed using various metal materials such as Au (gold), Cu (copper), Al (aluminum). In FIG. 17 and the like, the pad 93 and the metal bump 94 are exaggerated for convenience of illustration.

  In addition, the surface activation treatment is applied in advance to the bonding surfaces of both objects 91 and 92 (pad 93 and metal bump 94). Here, it is assumed that a surface activation process is performed on both objects 91 and 92 in advance in an apparatus outside the bonding apparatus 1, and then both the objects 91 and 92 are carried into the bonding apparatus 1.

  The surface activation process is a process for activating the bonding surfaces of both the objects 91 and 92, and is executed by releasing a specific substance (for example, argon) using the beam irradiation unit. The beam irradiation unit accelerates an ionized specific substance (such as argon) by an electric field and emits the specific substance toward the bonding surfaces of the objects 91 and 92, thereby joining the surfaces of the objects 91 and 92. Activate. In other words, the beam irradiation unit activates the bonding surfaces of both objects 91 and 92 by irradiating energy waves toward the bonding surfaces of both objects 91 and 92. As the beam irradiation unit, an atomic beam irradiation apparatus, an ion beam irradiation apparatus, or the like is used.

  The bonding apparatus 1 includes a vacuum chamber 2 that is a processing space for both objects 91 and 92. The vacuum chamber 2 is connected to a vacuum pump 5 via an exhaust pipe 6 and an exhaust valve 7. The vacuum chamber 2 is put into a vacuum state by reducing (reducing pressure) the pressure in the vacuum chamber 2 in accordance with the suction operation of the vacuum pump 5. Further, the exhaust valve 7 can adjust the degree of vacuum in the vacuum chamber 2 by the opening / closing operation and the exhaust flow rate adjusting operation.

  The upper object 92 is held by the head 22 (more specifically, an electrostatic chuck or a mechanical chuck provided at the tip thereof). Similarly, the lower object 91 is held by the stage 12 (more specifically, an electrostatic chuck or a mechanical chuck provided at the tip thereof).

  The head 22 is heated by a heater 22 h built in the head 22, and can adjust the temperature of the object 92 held by the head 22. Similarly, the stage 12 is heated by a heater 12h built in the stage 12, and the temperature of the object 91 on the stage 12 can be adjusted. Further, the head 22 can also cool the head 22 itself rapidly to near room temperature by an air cooling type cooling device or the like built in the head 22. The same applies to the stage 12. The heaters 12h and 22h (particularly 22h) function as heating means (melting means) for melting the metal bumps 94, and also function as cooling means (solidification means) for cooling and solidifying the metal bumps 94 again. That is, the heaters 12h and 22h (particularly 22h) function as heating / cooling means for heating or cooling the metal bumps 94.

  Both the head 22 and the stage 12 are movably installed in the vacuum chamber 2.

  The stage 12 can be moved (translated) in the Y direction by the slide moving mechanism 14. The stage 12 moves in the Y direction between a relatively far-side standby position and a relatively near-side joining position (a position just below the head 22 (see FIG. 1)). The slide moving mechanism 14 has a highly accurate position detector (linear scale), and the stage 12 is positioned with high accuracy.

  The head 22 is moved (translationally moved) in the X direction and the Y direction (two translational directions parallel to the horizontal plane) by the alignment table 23, and at the θ direction (around the axis parallel to the Z axis) by the rotation drive mechanism 25. Rotation direction). The head 22 is driven by the alignment table 23 and the rotation drive mechanism 25 based on a position detection result by a position recognition unit 28 described later, and alignment operations in the X direction, the Y direction, and the θ direction are executed. Thus, in each direction (X direction, Y direction, θ direction) (horizontal direction in short) along the plane (horizontal plane) perpendicular to the vertical direction (Z direction), the stage 12 and the head 22 are By relatively moving, the object 91 held on the stage 12 and the object 92 held on the head 22 are aligned in the horizontal direction.

  The head 22 is moved (lifted / lowered) in the Z direction by the Z-axis lifting / lowering drive mechanism 26. As the stage 12 and the head 22 move relative to each other in the Z direction, the object 91 held on the stage 12 and the object 92 held on the head 22 come into contact with each other and are pressed and joined. In addition, the Z-axis raising / lowering drive mechanism 26 can also control the applied pressure at the time of joining based on signals detected by a plurality of pressure detection sensors (load cells, etc.) 29 and 32.

  The alignment apparatus 1 further includes a controller 100.

  The controller 100 is a control unit that controls the alignment operation and the bonding operation.

  The controller 100 (FIG. 1) includes an image acquisition control unit 101, a calculation unit 102, a determination unit 103, and a position correction control unit 104.

  The image acquisition control unit 101 controls an image acquisition unit (measurement unit) configured by the imaging units 28M and 28N. The image acquisition unit acquires an overlapping image (superimposed image) GA of both alignment marks respectively disposed on the surfaces of two opposing objects.

  The calculation unit 102 calculates a positional deviation or the like between the two objects 91 and 92 in a predetermined plane based on a captured image acquired under the control of the image acquisition control unit 101.

  The determination unit 103 determines whether or not the positional deviation between the objects 91 and 92 within a predetermined plane is within an allowable error range.

  The position correction control unit 104 controls the position correction unit configured to include the drive mechanism that drives the alignment table 23 and the rotation drive mechanism 25, and relatively drives both the objects 91 and 92 to shift the position. to correct.

<1-2. Alignment mark>
As shown in FIGS. 2 and 3, both the objects 91 and 92 are each provided with an alignment mark (hereinafter also referred to as an alignment mark) MK. Here, two alignment marks MK1a and MK1b (see FIG. 2) are provided on one object 91, and two alignment marks MK2a and MK2b (see FIG. 3) are also provided on the other object 92.

  Two alignment marks MK1a and MK1b (also collectively referred to as MK1) provided on the object 91 are pattern marks each having a square frame shape (see also FIG. 4). On the other hand, two alignment marks MK2a and MK2b (also collectively referred to as MK2) provided on the object 92 are pattern marks having a cross shape (see also FIG. 5).

  The alignment mark MK1 is disposed on the bonding surface of the lower object 91, and the alignment mark MK2 is disposed on the bonding surface of the upper object 92. For example, the size (length) H1 of the alignment mark MK1 and the size (length) H2 of the alignment mark MK1 are each about several hundred μm (micrometers). The value H1 is slightly larger than the value H2 (for example, about 1 to 2 times).

  As shown in FIG. 2, the two alignment marks MK1a and MK1b are arranged at a large distance from each other on the substrate 91 so that the distance between the two marks MK1a and MK1b is relatively large. More specifically, these alignment marks MK1a and MK1b are arranged near both ends of the substrate 91. For example, in the substrate 91 having a diameter of 300 mm (millimeters), the alignment mark MK1a is arranged near the left end of the substrate 91 (for example, a position of 5 mm (millimeters) from the left end to the center), and the other alignment mark MK1b is disposed on the substrate 91. Near the right end (for example, a position of 5 mm (millimeters) from the right end toward the center). Note that, by increasing the distance between the two marks MK1a and MK1b, it is possible to improve the detection accuracy and alignment accuracy of the positional deviation in the rotational direction.

  As shown in FIG. 3, the two alignment marks MK2a and MK2b are similarly arranged. Specifically, the two alignment marks MK2a and MK2b are arranged on the substrate 92 so as to be separated from each other. For example, in the substrate 92 having a diameter of 300 mm (millimeter), the alignment mark MK2a is arranged near the left end of the substrate 92 (for example, a position of 5 mm (millimeter) from the left end to the center side), and the other alignment mark MK2b is disposed on the substrate 92. Near the right end (for example, a position of 5 mm (millimeters) from the right end toward the center).

  As shown in FIG. 6, in a state where both the objects 91 and 92 are vertically arranged opposite to each other (opposed arrangement state), the alignment mark MK2a of the object 92 is arranged in a region near the alignment mark MK1a of the object 91. The Similarly, in the facing arrangement state, the alignment mark MK2b of the object 92 is arranged in the vicinity of the alignment mark MK1b of the object 91.

  When both the objects 91 and 92 are correctly positioned, as shown in FIG. 6, the cross-shaped portion of the alignment mark MK2 is included inside the square frame-shaped portion of the alignment mark MK1. More preferably, the center position of the cross-shaped part and the center position of the frame-shaped part are exactly the same.

<1-3. Position recognition unit>
The joining apparatus 1 includes a position recognition unit 28 that recognizes the horizontal positions (specifically, X, Y, and θ) of the objects 91 and 92.

  As illustrated in FIG. 1, the position recognition unit 28 includes imaging units (cameras) 28 </ b> M and 28 </ b> N that acquire optical images related to the objects 91 and 92 as image data. The imaging units 28M and 28N each have a coaxial illumination system. Note that light (for example, infrared light) that passes through both the objects 91 and 92, the stage 12, and the like is used as a light source of each coaxial illumination system of the imaging units 28M and 28N.

  The position recognition unit 28 can execute a position measurement operation for the alignment operation. Specifically, the position recognizing unit 28 captures images (images) relating to transmitted light and reflected light of illumination light emitted from the respective coaxial illumination systems of the imaging units 28M and 28N in a state where both the objects 91 and 92 face each other. Data) The positions of both objects 91 and 92 can also be recognized using GA. In other words, the alignment operation (alignment operation) of both objects 91 and 92 is performed by the position recognition unit (camera etc.) 28 with two sets of alignment marks (MK1a and MK2a) attached to both objects 91 and 92. ), (MK1b, MK2b).

  More specifically, as shown in FIG. 1, the light emitted from the light source (not shown) of the coaxial illumination system in the imaging unit 28M is reflected by the mirror 28e, the traveling direction thereof is changed, and the light travels upward. When the light is further reflected by the marks MK1a and MK2a of both objects 91 and 92 after passing through the window 2b (FIG. 1) and part (or all) of both objects 91 and 92, this time. Advances in the opposite direction (downward). Then, the light again passes through the window 2b and is reflected by the mirror 28e, and its traveling direction is changed to the left, and reaches the image pickup device in the image pickup unit 28M. In this way, the position recognizing unit 28 acquires the optical images (images including the marks MK1a and MK2a) related to the both objects 91 and 92 as the captured image GAa (see FIG. 6), and both the objects based on the image GAa. The position of a certain set of marks (MK1a, MK2a) attached to 91 and 92 is recognized, and the position shift between the set of marks (MK1a, MK2a) (in detail, a position shift vector) (Δxa, Δya) is obtained (see FIGS. 6 and 7). FIG. 7 is a diagram showing an example of the photographed image GAa, and shows a state in which a pair of marks MK1a and MK2a are displaced from each other.

  Similarly, the light emitted from the light source (not shown) of the coaxial illumination system in the imaging unit 28N is reflected by the mirror 28f, the traveling direction thereof is changed, and the light travels upward. If the light is further reflected by the marks MK1b and MK2b of the objects 91 and 92 after passing through part or all of the window 2b (FIG. 1) and the objects 91 and 92, this time, the opposite is obtained. Proceed in the direction (downward). Then, the light again passes through the window 2b and is reflected by the mirror 28f, and its traveling direction is changed to the right, and reaches the image pickup device in the image pickup unit 28N. In this way, the position recognizing unit 28 acquires the optical images (images including the marks MK1b and MK2b) regarding both the objects 91 and 92 as the captured image GAb (see FIG. 6), and both the objects based on the image GAb. The positions of the other set of marks (MK1b, MK2b) attached to 91 and 92 are recognized, and the position shift (position shift vector) (Δxb, Δyb) between the set of marks (MK1b, MK2b). ) Here, the photographing operations of the captured images GAa and GAb by the imaging units 28M and 28N are executed almost simultaneously.

  FIG. 8 is a top view showing positional deviations (Δxa, Δya) and (Δxb, Δyb) of two sets of marks. In FIG. 8, a position Q1 indicates the position of the alignment mark MK1a, and a position Q2 indicates the position of the alignment mark MK2a. A position Q3 indicates the position of the alignment mark MK1b, and a position Q4 indicates the position of the alignment mark MK2b. In FIG. 8, the misalignment is exaggerated.

  Thereafter, the position recognizing unit 28 and the calculating unit 102 (FIG. 1) cooperate to position misalignment (Δxa, Δya), (Δxb, Δyb) of these two sets of marks and the geometric relationship between the two sets of marks. Based on the above, a relative deviation ΔD (specifically, Δx, Δy, Δθ) of both the objects 91, 92 in the X direction, the Y direction, and the θ direction is calculated. Specifically, each value Δx, Δy, Δθ is calculated based on the following equations (1) to (3).

  Note that the following equation (4) may be used instead of the equation (3).

  When it is determined that the positional deviation between the two objects does not fall within the allowable error range (described later), the relative deviation ΔD recognized by the position recognition unit 28 is reduced in principle. As described above, the head 22 is driven in at least one of three directions of two translational directions (X direction and Y direction) and a rotational direction (θ direction). Thereby, both the objects 91 and 92 are relatively moved, and the positional deviation ΔD is corrected.

  On the other hand, when it is determined that the positional deviation between the two objects is within the allowable error range, the positional deviation correction operation is not performed and the alignment operation ends.

  In this way, the positional deviation ΔD (specifically Δx, Δy, Δθ) in the plane (horizontal plane) perpendicular to the vertical direction (Z direction) is measured, and the alignment operation for correcting the positional deviation ΔD is executed. The As will be described later, the measurement operation of the positional deviation ΔD is performed in a non-contact state of both the objects 91 and 92 and also in a contact state of both the objects 91 and 92.

  Here, a case where two cameras 28M and 28N are used to capture and acquire two captured images GAa and GAb in parallel (substantially simultaneously) is illustrated, but the present invention is not limited to this. For example, the captured images GAa and GAb may be sequentially captured and acquired by moving one camera 28M in the X direction and / or the Y direction.

<1-4. Overview of operation in this embodiment>
In the determination process according to the conventional example, there is a problem as described above. In short, if the conventional determination method is used, it is determined not only in the case of FIG. 11 but also in the case of FIG. 13 (and FIG. 12) that accurate alignment has been performed, which is not always a sufficient position. There is a problem that the alignment is not performed.

  In particular, in the prior art, the above-described problem related to the prior art has not been recognized, and thus the alignment operation according to the prior art has been performed. In contrast, the inventor of the present application has found the above-described problem in the prior art and devised a technique for further improving the alignment accuracy by further performing correction movement.

  More specifically, the threshold TH3 related to the shift in the θ direction is the angle θ1 described above even if it is the smallest. The angle θ1 is a minute angle when a shift in recognition resolution (recognition resolution in image processing) Δp appears as a shift in the Y direction with respect to a displacement in the X direction that is half the distance L between marks (L / 2) ( tan θ1 = Δp / (L / 2) = Δp × 2 / L). If a value smaller than the minute angle θ1 is set as the threshold value TH3 (this is equivalent to setting the allowable error substantially to zero), the deviation in the θ direction is not corrected even after repeated position correction. There are cases where convergence does not occur within the threshold TH3. Therefore, a value smaller than the minute angle θ1 cannot be set as the value TH3 (threshold of deviation in the θ direction). For example, a half value (θ / 2) of the angle θ1 cannot be set as the threshold value TH3.

  As described above, there are situations as shown in FIG. 11 and situations as shown in FIG. If a half value (θ1 / 2) of the angle θ1 is set as the threshold value TH3, it is determined that the situation as shown in FIG. 13 is still in the middle of correction of the deviation in the θ direction, and the final state is The situation of FIG. 13 does not occur. However, as described above, the value (θ1 / 2) cannot be set as the threshold value TH3. Due to such circumstances, the situation shown in FIG. 13 may occur as the final state (positional deviation correction completion state).

  Then, in the situation as shown in FIG. 13, a deviation in the Y direction that is larger than the recognition resolution Δp (a deviation in the Y direction that is at least twice as large as Δp) has occurred. It is possible.

  The inventor of the present application has found such knowledge and devised a technique for further improving the alignment accuracy.

  Specifically, in this embodiment, whether or not the deviations Δya and Δyb of the two mark pairs (two deviations in the Y direction measured at different X direction positions) are within the allowable range in the Y direction. It is determined individually, and based on the determination result, it is determined whether or not the positional deviation between the two objects is within the allowable error range. In other words, in the direction (Y direction) perpendicular to the direction in which the two alignment marks are separated (for example, the direction in which the two alignment marks MK1a and MK1b are connected to each other) (the X direction), the deviations Δya and Δyb (in detail) Is the absolute value) and the threshold value TH2 is individually determined.

  In the conventional example, whether or not the average value Δy of the deviation Δya and the deviation Δyb is within a predetermined allowable range with respect to the Y direction is employed as a determination criterion. On the other hand, in this embodiment, instead of the determination criterion according to the conventional example (substantially in addition to the determination criterion), the deviation Δya is within a predetermined allowable range (the absolute value of the deviation Δya is equal to or less than the threshold value TH2). And that the deviation Δyb is within a predetermined allowable range (the absolute value of the deviation Δyb is equal to or less than the threshold value TH2) is adopted as a determination criterion (new determination criterion).

  Then, on the condition that the new determination criterion is satisfied, it is determined that the positional deviation between the two objects is within the allowable error range.

  Specifically, as shown in FIG. 14, the average value Δx of the deviation Δxa and the deviation Δxb is within the first allowable range (the absolute value of the average value Δx is equal to or less than the threshold value TH1) (also referred to as the determination criterion B1). The deviation Δya is within the second allowable range (the absolute value of the deviation Δya is equal to or less than the threshold value TH2), and the deviation Δyb is within the second allowable range (also referred to as determination criterion B2). It is determined that the positional deviation between the two objects is within the allowable error range. More specifically, with respect to the Y direction, the positional deviation between the two objects falls within the allowable error range on condition that the average value Δy of the deviation Δya and the deviation Δyb is within the second allowable range. Is determined.

  Note that the criterion B1 is that the position of the middle point N2 (see FIG. 14) of the line segment connecting the alignment marks MK2a and MK2b connects both alignment marks MK1a and MK1b in the first translation direction (here, the X direction). It is also expressed as being within the first allowable range with respect to the position of the midpoint N1 (see FIG. 14) of the line segment. The criterion B2 is also expressed as that each of the two deviations Δya and Δyb in the second translation direction (here, the Y direction) is (individually) within the second allowable range. When the deviation (Δyb> TH2) as shown in FIG. 14 occurs, the deviation Δyb does not fall within the allowable range as in FIG. 13, and the positional deviation between the two objects does not occur. It is determined that it is not within the allowable error range. Also in FIG. 14, each shift is exaggerated.

  Further, as the threshold values (allowable values) TH1 and TH2, it is preferable to use a minute value such as a recognition resolution Δp (for example, 0.2 μm (micrometer)) of the captured image GA. In other words, the first allowable range is a range in which the same error as the recognition resolution Δp (also expressed as Δp1) in the X direction of the position recognition unit 28 is allowed, and the second allowable range is the position recognition unit 28. The same error as the recognition resolution Δp (also expressed as Δp2) in the Y direction is allowed. The thresholds TH1 and TH2 are the same value here, but are not limited to this, and may be different values. In other words, the first allowable range and the second allowable range may be the same range or different ranges.

  Here, the recognition resolution Δp of the position recognition unit 28 (recognition resolution Δp in image processing) is the following value. In other words, even if the same thing is photographed and a photographed image is acquired and a position measurement value is obtained based on the photographed image, there is “variation” in the position measurement value. A value that is considered to be probable as the minimum possible amount is the recognition resolution Δp. The recognition resolution Δp in the X direction is also denoted as recognition resolution Δp1, and the recognition resolution Δp in the Y direction is also denoted as recognition resolution Δp2. For example, Δp1 = Δp2 = 0.2 μm (micrometer).

  The first translation direction is the alignment mark MK1a and the alignment direction of two translation directions parallel to a predetermined plane (XY plane) perpendicular to the opposing direction of the objects 91 and 92 (here, the Z direction). One direction (for example, a direction parallel to the mark separation direction) (here, the X direction) that is relatively close to the direction connecting the marks MK1b (mark separation direction). The second translation direction is a direction perpendicular to the first translation direction (Y direction here) of the two translation directions.

  In this embodiment, the rotational deviation Δθ in the θ direction (the rotational direction around an axis perpendicular to a predetermined plane perpendicular to the opposing direction of the objects 91 and 92), based on the deviation Δya, the deviation Δyb, and the like. On the condition that the calculated rotational deviation Δθ is within the third allowable range (the absolute value of the rotational deviation is equal to or less than the threshold value TH3) (also referred to as determination criterion B3), the positional deviation between the two objects is different. It is determined that it is within the allowable error range. The rotation deviation Δθ is a deviation in the rotation direction (θ direction) calculated based on the deviation Δya and the deviation Δyb, and is calculated by the equation (3) or the equation (4). Further, the value TH3 may be determined based on the recognition resolution of the photographed image, equation (4), and the like. For example, the value TH3 is 0.00008 (degree). In the case where it can be assumed that there is no deviation in the θ direction, only the deviation in the two translational directions (X direction, Y direction, etc.) (in other words, only the determination criteria B1 and B2) may be considered. .

  As described above, in the case of FIGS. 12 and 13, the deviation Δyb is a value larger than the threshold value TH2. In such a case, if the above-described determination criteria B1, B2, and B3 (especially the determination criteria B2 regarding the Y direction) according to the present embodiment are used, an error larger than the allowable error still exists (and can be corrected). Is determined). That is, it is determined that it has not converged yet.

  Based on the determination result, it is determined that the alignment should be continued and the position correction operation is executed again. This position correction operation reduces the positional deviation in the Y direction. Specifically, both the objects 91 and 92 are relatively driven so that the absolute value of the value Δya is equal to or less than the threshold value TH2 and the absolute value of the value Δyb is also equal to or less than the threshold value TH2. Thereby, for example, it is possible to transition from the state of FIG. 13 (or FIG. 12) to the state of FIG.

  By adopting the above-described method (determination method using determination criterion B2) as the determination method in the Y direction, it is possible to improve the alignment accuracy in the Y direction.

  Further, here, in the alignment operation (position shift correction operation) in the Y direction, the moving resolution Δq (Δq2) in the Y direction of the drive unit (head 22 or the like) is further considered. The moving resolution Δq of the driving unit is the following value. In other words, even if the drive unit performs the same drive operation, there is “variation” in the actual movement amount. Considering this variation, a value that is considered to be the most probable minimum drive amount is the movement resolution. Δq. The moving resolution Δq2 is the moving resolution in the Y direction, and the moving resolution Δq1 is the moving resolution in the X direction. For example, Δq1 = Δq2 = 0.1 μm (micrometer).

  The alignment operation (position shift correction operation) in the Y direction is performed, for example, as follows in consideration of the movement resolution Δq2.

  Specifically, when at least one of the deviation Δya and the deviation Δyb exceeds the second allowable range, and the average deviation value Δy (= (Δya + Δyb) / 2) in the Y direction is equal to or greater than the movement resolution Δq2 ( For Δy ≧ Δq2), the misalignment correction driving in the Y direction is executed by the driving unit.

  For example, when (Δya, Δyb) = (0.0, +0.4), at least one of the deviation Δya and the deviation Δyb (here, Δyb) exceeds the second allowable range and is in the Y direction. The average deviation Δy (= 0.2 = (0.0 + 0.4) / 2) is greater than or equal to the moving resolution Δq2 (0.1) (Δy ≧ Δq2). In this case, misalignment correction driving in the Y direction is executed by the drive unit.

  On the other hand, even when at least one of the deviation Δya and the deviation Δyb exceeds the second allowable range, the average deviation Δy (= (Δya + Δyb) / 2) in the Y direction is smaller than the moving resolution Δq2. , Misalignment correction driving in the Y direction is not executed. That is, the alignment operation in the Y direction ends.

  For example, when (Δya, Δyb) = (− 0.2, +0.3), at least one of the deviation Δya and the deviation Δyb (here, Δyb) exceeds the second allowable range. The average value Δy (= 0.05 = (− 0.2 + 0.3) / 2) of the deviation in the Y direction is smaller than the moving resolution Δq2 (0.1). In this case, misalignment correction driving in the Y direction is not executed. That is, the alignment operation in the Y direction ends.

  In this case, since it is determined based on the determination criterion B2 that the positional deviation between the two objects is not within the allowable error range, the alignment operation is continued according to the determination result (in principle). Technology to do is also conceivable. However, it is not useful to correct an error smaller than the moving resolution. Therefore, in this embodiment, when the average value Δy of the deviation in the Y direction is smaller than the movement resolution Δq2, the position deviation correction driving in the Y direction is not performed (in other words, the alignment operation is ended). According to this, it is not necessary to perform an unnecessary drive operation, and the alignment operation can be appropriately terminated.

  Thus, even when it is determined based on the above-described determination criterion B2 that the positional deviation between the two objects is not within the allowable error range, if the predetermined condition is satisfied, The alignment operation ends exceptionally.

  As described above, according to the first embodiment, the magnitude relationship between the positional deviations Δya and Δyb and the threshold value TH2 is individually determined for the Y direction. According to this, it is possible to prevent a relatively large deviation in the Y direction from remaining in the vicinity of one of the two alignment mark pairs (for example, the mark pair (MK1b, MK2b)). As described above, it is possible to accurately determine the misalignment state of the objects 91 and 92 as compared with the case of determining with the average value. Therefore, it is possible to accurately align the two objects. Specifically, in the situation as shown in FIG. 13 (on the + X side (right side) in both substrates, the deviation in the Y direction (second translation direction of both objects) is unevenly distributed and a deviation in the Y direction larger than the allowable value occurs. Situation) can be avoided and the deviation can be dispersed (see FIG. 11). In other words, it is possible to avoid the occurrence of a relatively large shift (a shift larger than the allowable error) (see FIG. 13) in the right region (near the marks MK1b, MK2b, etc.) of both objects, and within the joint surface of both objects. It is possible to make the Y direction deviation of both objects uniform.

<1-5. Joining operation (including alignment operation)>
Next, the operation according to the present embodiment will be described in more detail with reference to the flowchart of FIG.

  Here, as shown in FIG. 1, it is assumed that both the objects 91 and 92 are already arranged to face each other in a non-contact state (closely). Both objects 91 and 92 are heated by heaters 12h and 22h, respectively, and are heated to a predetermined temperature TM1. The predetermined temperature TM1 is preferably a temperature near the melting point (melting temperature) TMm of the metal bump 94 (specifically, bump electrode material) and lower than the melting point by ΔTU1 (for example, within 10 ° C.). For example, when the melting point TMm of the bump electrode BM is 220 ° C., the temperature TM 1 is set to 210 ° C. lower than the melting point by ΔTU 1 (here, 10 ° C.).

  Thereafter, in steps S11 to S13, an alignment operation in a non-contact state is performed.

  Specifically, in step S11, a measurement process such as a positional deviation between the two objects in a non-contact state is performed. More specifically, an operation as shown in FIG. 16 is performed.

  First, in step S21 (FIG. 16), captured images GAa and GAb (see FIG. 6) of both objects 91 and 92 (see FIG. 17) in a non-contact state are acquired. Specifically, the captured images GAa and GAb related to the two alignment mark pairs are captured and acquired.

  Next, in step S22, the positional deviation (Δxa, Δya) between the first mark pair (MK1a, MK2a) is measured (calculated) based on one captured image GAa. Specifically, based on the image GAa obtained by reading both marks MK1a and MK2a at the same time, the positional deviation (positional deviation vector) (Δxa, Δya) between the mark pair (MK1a, MK2a) is calculated.

  In step S23, the positional deviation (Δxb, Δyb) between the second pair of marks (MK1b, MK2b) is measured (calculated) based on the other captured image GAb. Specifically, based on the image GAb obtained by reading both marks MK1b and MK2b at the same time, a positional shift (positional shift vector) (Δxb, Δyb) between the mark pair (MK1b, MK2b) is calculated.

  In step S24, based on the two captured images GAa and GAb (specifically, two positional shifts (Δxa, Δya) and (Δxb, Δyb)), both objects 91 and 92 (in the horizontal direction) are detected. .DELTA.x, .DELTA.y, .DELTA.ya, .DELTA.yb, .DELTA..theta.

  Specifically, the deviation Δya is obtained based on the captured image GAa, and the deviation Δyb is obtained based on the captured image GAb. Δy is also obtained based on equation (2).

  Further, the value Δx is obtained based on the shift Δxa acquired from the captured image GAa, the shift Δxb acquired from the captured image GAb, and the equation (1).

  Further, the shift Δθ is obtained based on the shift Δya acquired from the captured image GAa and the shift Δyb acquired from the captured image GAb. Specifically, the deviation Δθ is obtained based on the formula (3) or the formula (4). Equation (3) is an equation derived from the geometric relationship as shown in FIG. 9, and Equation (4) is an equation derived from the geometric relationship as shown in FIG. In the equation (4), an approximation is made that the X-direction component L ′ of the inter-mark distance L is equal to the inter-mark distance L.

  In the next step S12, the above-described determination process is executed. Specifically, based on the above-described determination criteria B1, B2, and B3, it is determined whether or not the positional deviation between the objects 91 and 92 is within an allowable error range. Specifically, as described above, based on whether each of the four types of values Δx, Δya, Δyb, Δθ is within the allowable range, the positional deviation between the objects 91, 92 is allowed. It is determined whether it is within the error range.

  When it is determined that the positional deviation between the objects 91 and 92 is within the allowable error range, the process proceeds to step S14. The processing after step S14 will be described later.

  On the other hand, if it is determined that the positional deviation between the objects 91 and 92 is not within the allowable error range, the process proceeds (in principle) to step S13. As described above, when a predetermined condition regarding the moving resolution is satisfied, the process proceeds from step S12 to step S14 as an exception.

  In step S13, both objects 91 and 92 are relatively moved in order to correct the displacement (Δx, Δy, Δθ). Specifically, in a state where the stage 12 is fixed, both the objects 91 and 92 are relatively relative to each other in the X direction, the Y direction, and the θ direction so that the head 22 eliminates the positional deviation (Δx, Δy, Δθ). Moved to. Thereby, both the objects 91 and 92 are aligned with very high accuracy in the horizontal direction. In particular, in the Y direction, both the objects 91 and 92 are aligned with an accuracy within 0.2 μm (micrometers), for example.

  In order to eliminate the positional deviation (Δx, Δy, Δθ), particularly the rotational deviation Δθ in the θ direction, the rotational drive is performed with respect to the correction amount in the X direction based on Δx and the correction amount in the Y direction based on Δy. Both the objects 91 and 92 are driven relatively after adding correction amounts (Δx0, Δy0) in the X and Y directions caused by the deviation between the rotation center of the mechanism 25 and the origin in the coordinate system. Is preferred.

  FIG. 17 shows a state in which both objects 91 and 92 have a correct positional relationship in the horizontal direction due to the positional deviation correction in step S13. In FIG. 17, both objects 91 and 92 are spaced apart in the vertical direction (Z direction), and both objects 91 and 92 are not yet in contact with each other.

  After step S13, the process returns to step S11 again, and misalignment measurement is performed. Thereafter, the determination process in step S12 is performed again. Then, the branching process is performed again depending on whether or not the positional deviation between the objects 91 and 92 is within the allowable error range.

  In steps S11 to S13, such a process is repeated as necessary.

  As a result, if it is determined that the positional deviation between the objects 91 and 92 is within the allowable error range, the process proceeds to step S14.

  In step S14, by driving the Z-axis raising / lowering drive mechanism 26, the head 22 is lowered to bring both objects 91 and 92 into contact (see FIG. 18). As shown in FIG. 18, in the contact state of both the objects 91 and 92, for example, a pad 93 that is a protrusion on the surface of the object 91 and a metal bump 94 that is a protrusion on the surface of the object 92. Touch. FIG. 18 shows a state in which both the objects 91 and 92 are in contact with each other in a state of having a correct positional relationship in the horizontal direction.

  However, after such a contact operation, in practice, both objects 91 and 92 are often deviated from the correct positional relationship (FIG. 18) as shown in FIG. Even if both the objects 91 and 92 have the correct positional relationship before the contact, a physical impact force acts when both the objects 91 and 92 come into contact with each other. It can be caused by doing so.

  In an attempt to eliminate the positional deviation after the contact as described above, the joining apparatus 1 according to this embodiment is configured so that both the objects 91 and 92 are horizontal in a state where the object 91 and the object 92 are in contact with each other. Measure misalignment in direction. And the said joining apparatus 1 correct | amends the said position shift, and aligns both target objects. According to such an operation, it is possible to join the objects 91 and 92 in a state where the objects 91 and 92 are more accurately positioned in the horizontal direction.

  Specifically, first, in step S15 (FIG. 15), a positional deviation or the like between the objects 91 and 92 in the “contact state” (contact facing state) (see FIGS. 18 and 19) is measured. . More specifically, an operation as shown in FIG. 16 is performed. In short, the captured images GAa and GAb (see FIG. 6) are acquired (step S21), and each value Δx relating to the positional deviation between the two objects 91 and 92 based on the two captured images GAa and GAb. , Δy, Δya, Δyb, Δθ are respectively measured (steps S22 to S24).

  In step S15 as well, as in step S11, the positional deviation (Δxa, Δya) is calculated based on the image GAa obtained by reading both marks MK1a and MK2a at the same time. Similarly, a positional deviation (Δxb, Δyb) is calculated based on the image GAb obtained by reading both marks MK1b and MK2b at the same time. Based on these positional deviations (Δxa, Δya), (Δxb, Δyb), the positional deviations (Δx, Δy, Δya, Δyb, Δθ) between the objects 91 and 92 are measured.

  Thereafter, in step S16, it is determined whether or not the positional deviation between the objects 91 and 92 is within the allowable error range. In the determination process of step S16, the same process as the determination process of step S12 is performed. Specifically, based on the above-described determination criteria B1, B2, and B3, it is determined whether or not the positional deviation between the objects 91 and 92 is within an allowable error range. Specifically, as described above, based on whether each of the four types of values Δx, Δya, Δyb, Δθ is within the allowable range, the positional deviation between the objects 91, 92 is allowed. It is determined whether it is within the error range.

  If it is determined in step S16 that the positional deviation between the objects 91 and 92 is within the allowable error range, the process proceeds to step S19. Step S19 will be described later.

  On the other hand, if it is determined that the positional deviation between the objects 91 and 92 is not within the allowable error range, the process proceeds from step S16 to step S17 (in principle). As described above, when a predetermined condition regarding the moving resolution is satisfied, the process proceeds from step S16 to step S19 as an exception.

  In step S17, both the objects 91 and 92 are moved in directions that are relatively separated in the Z direction, and the contact state between the both objects 91 and 92 is once released (see FIG. 17). Specifically, when the head 22 is raised, the contact state between the objects 91 and 92 is released.

  In step S18, both the objects 91 and 92 are in a non-contact state, that is, both the objects 91 and 92 are freely movable in the horizontal direction. The relative movement is performed to correct (Δy, Δθ), and an alignment operation (alignment operation) is performed. Specifically, in a state in which the stage 12 is fixed, both the objects 91 and 92 are in the X direction and Y so that the head 22 eliminates the positional deviation (Δx, Δy, Δθ) measured in the contact state. Relative to the direction and the θ direction. In other words, a movement operation (relative movement operation) in the opposite direction of the positional deviation measured in the contact state is executed. For example, when it is measured in a contact state that the object 92 is displaced to the right from the object 91 (step S15), the object 92 is moved to the left with respect to the object 91 in step S18. The

  Then, returning to step S14, the joining apparatus 1 drives the Z-axis raising / lowering drive mechanism 26 to lower the head 22 and bring both objects 91 and 92 into contact again.

  And the operation | movement of step S15, ie, the position shift measurement operation | movement of both the objects 91 and 92 in a contact state, is performed again, and it progresses to step S16.

  When the above-described operations (particularly, the displacement measurement operation in the contact state and the correction operation for correcting the displacement) are performed once or a plurality of times, the operation between the objects 91 and 92 is performed. Misalignment due to the contact operation itself is reduced. Therefore, both the objects 91 and 92 are aligned with very high accuracy (for example, error within 0.2 micrometers) in the horizontal direction even in the final state after contact.

  When it is determined in step S16 that the positional deviation between the objects 91 and 92 is within the allowable error range, the process proceeds to step S19.

  In step S19, both objects 91 and 92 are pressurized and heated (heated to a temperature TM2 (temperature higher than the melting point of the metal bump 94)), and both objects 91 and 92 are joined. Specifically, the metal bump 94 is heated and melted and bonded to the pad 93 in a state where the metal bump 94 of the object 92 is in contact with the pad 93 of the object 91. Then, after the metal bump 94 is solidified after an appropriate cooling period, the pressurized state is released. In this way, both objects 91 and 92 are well aligned and joined.

  Thereafter, a device (semiconductor device or the like) composed of a part of both the objects 91 and 92 is manufactured by appropriately cutting both the objects 91 and 92.

  As described above, according to the operation according to this embodiment, it is possible to align both objects 91 and 92 with very high accuracy. As a result, a device (semiconductor device) composed of both objects (both objects to be joined) 91, 92, etc. is manufactured with high precision.

<2. Second Embodiment>
The second embodiment is a modification of the first embodiment. Below, it demonstrates centering on difference with 1st Embodiment.

  In the first embodiment, only the fact that the average value Δx is within the first allowable range is considered with respect to the X direction (first translation direction). Specifically, when the average value Δx of the deviation Δxa and the deviation Δxb is within the first allowable range, the positional deviation between the objects 91 and 92 (the positional deviation in the X direction) is allowable. It is determined that it is within the error range.

  On the other hand, in the second embodiment, the same criterion as in the Y direction is used in the X direction. In other words, in addition to the fact that the average value Δx is within the first tolerance range, the two objects are subject to the condition that the deviation Δxa is within the first tolerance range and the deviation Δxb is within the first tolerance range. It is determined that the positional deviation between 91 and 92 (the positional deviation in the X direction) is within the allowable error range. For the Y direction and the θ direction, determination processing and the like are performed as in the first embodiment.

  Here, when the object is heated, the distance between two marks in the same object may fluctuate due to thermal expansion of the object. For example, the distance (inter-mark distance) L1 between the two marks MK1a and MK1b in the object 91 and / or the distance L2 between the two marks MK2a and MK2b in the object 92 varies (increased, etc.). Sometimes. Then, each situation as shown in FIG. 20 to FIG. 23 may occur due to a difference in fluctuation between the distances L1 and L2 between the marks. In addition, when both the objects 91 and 92 are heated by the separate heaters 12h and 22h, for example, the difference between the distances L1 and L2 between the marks is particularly likely to occur.

  20 to 23 show a situation in which the inter-mark distance L2 is larger than the inter-mark distance L1 due to thermal expansion or the like even though the inter-mark distances L1 and L2 are originally the same. ing. In other words, the difference between the distances L1 and L2 between the two marks is deviated from a specified value (for example, zero).

  For example, in FIG. 21, the deviation Δxa is −0.1 μm, and the deviation Δxb is +0.5 μm. In FIG. 21, the difference (L2−L1) between the mark distances L1 and L2 increases from the original value (specified value) “0.0” μm (micrometer) to “0.6” μm. Similarly, FIGS. 20, 22, and 23 show that the difference between the mark distances L <b> 1 and L <b> 2 increases. 20 to 23, each shift and the like are exaggerated.

  The inventor of the present application performs alignment in the X direction when the difference between the distances L1 and L2 between the two marks is deviated from a specified value (for example, zero) due to a variation difference between the distances L1 and L2 between the two marks. The inventors have found that it is useful to apply an operation similar to the alignment operation in the Y direction in the first embodiment, and devised the following technique.

  Specifically, in the second embodiment, when the difference between the distances L1 and L2 between the two marks deviates from a specified value (for example, zero), the deviation Δxa is within the first allowable range and On the condition that the deviation Δxb is within the first allowable range, it is determined that the positional deviation between the two objects is within the allowable error range. In other words, when the average deviation Δx in the X direction is within the first allowable range, but at least one of the two deviations Δxa and Δxb in the X direction exceeds the first allowable range, both objects Is determined not to fall within the allowable error range.

  For example, when a deviation as shown in FIG. 20 occurs, the deviation Δxa (−0.2 μm) is within the first allowable range and the deviation Δxb (+0.2 μm) is within the first allowable range. Therefore, it is determined that the alignment is complete with respect to the X direction. When the alignment in the Y direction and the θ direction is also completed, it is determined that the positional deviation between the two objects is within the allowable error range.

  On the other hand, when a shift as shown in FIG. 21 occurs, the shift Δxa (−0.1 μm) is within the first allowable range, but the shift Δxb (+0.5 μm) is within the first allowable range. Since it has exceeded, it is determined that the alignment has not yet been completed in the X direction. The average value Δx of the deviation Δxa (−0.1 μm) and the deviation Δxb (+0.5 μm) is “+0.2 μm” (= (− 0.1 + 0.5) / 2). Further, the average value Δx is equal to or less than the recognition resolution Δp1 (here, 0.2 μm) in the X direction (first translation direction) of the position recognition unit 28 and the X direction of the drive unit (head 22 or the like). The moving resolution Δq1 (here, 0.1 μm) in the (first translational direction) or more.

  Similarly, when a shift as shown in FIG. 22 occurs, the shift Δxa (−0.1) is within the first allowable range, but the shift Δxb (+0.3) is the first allowable range. Therefore, it is determined that the alignment has not yet been completed in the X direction. The average value Δx of the deviation Δxa (−0.1) and the deviation Δxb (+0.3) is “+0.1” (= (− 0.1 + 0.3) / 2). The average value Δx is equal to or lower than the recognition resolution Δp1 (here, 0.2 μm) and is higher than the movement resolution Δq1 (here, 0.1 μm).

  In the case where a deviation as shown in FIGS. 21 and 22 has occurred, if the same determination criterion B1 as in the first embodiment is adopted, the average value Δx of the deviation in the X direction is within the first allowable range. Based on this, it is determined that the alignment has been completed in the X direction.

  However, when a shift as shown in FIG. 21 and FIG. 22 has occurred, a shift in the X direction larger than the recognition resolution Δp1 (and movement resolution Δq1) still occurs as the right shift Δxb. In this situation, it is possible to further perform correction movement in the X direction.

  The inventor of the present application has found such knowledge.

  And based on the said knowledge, it devised performing further correction | amendment operation | movement also in a X direction. Specifically, even if the average value Δx is within the first allowable range, if at least one of the deviation Δxa and the deviation Δxb exceeds the first allowable range, the alignment is still complete with respect to the X direction. It is determined that it has not been done. As a result, it is not determined that the positional deviation between the two objects is within the allowable error range.

  When at least one of the deviation Δxa and the deviation Δxb exceeds the first allowable range, in principle, an alignment operation (alignment operation) is performed.

  Specifically, at least one of the deviation Δxa and the deviation Δxb exceeds the first allowable range, and the average value Δx of the deviation Δxa and the deviation Δxb is the X direction (first first) of the drive unit (head 22 or the like). When the moving resolution in the translational direction) is equal to or greater than Δq1, misalignment correction driving in the X direction is executed. In the case of FIGS. 21 and 22, since the average value Δx is equal to or higher than the moving resolution Δq1 (here, 0.1 μm), the alignment operation is executed.

  For example, in FIG. 21, the object 92 is moved with respect to the object 91 by “−0.2” (0.2 in the left direction in the figure). As a result, ideally, a state in which the same degree of deviation exists on both the left and right sides (more specifically, the left side deviation Δxa is “−0.3” and the right side deviation Δxb is “+0.3”. Transition to a certain state.

  More specifically, the larger value (maximum value) (Max (| Δxa |, | Δxb |)) of absolute values of the two left and right deviations Δxa and Δxb before the additional correction operation (see FIG. 21). ) Is the right shift Δxb “0.5”. On the other hand, the larger value (maximum value) (Max (| Δxa |, | Δxb |)) of the absolute values of the two left and right deviations Δxa and Δxb after the additional correction operation is equal to the right deviation Δxb “ 0.3 ”(or left side deviation Δxa“ −0.3 ”). That is, Max (| Δxa |, | Δxb |) is reduced from “0.5” to “0.3”, and a relatively large deviation Δxb “+0.5” on the right side is “+0.3”. Reduced to Therefore, it is possible to further improve the alignment accuracy in the X direction.

  In this way, it is possible to reduce the deviation between the two right alignment marks MK1b and MK2b that are out of the most regular positional relationship. In other words, it is possible to average the deviations of the two objects at the positions on both sides of the two objects in the X direction and suppress the occurrence of the protruding deviation. In other words, it is possible to prevent a relatively large shift in the X direction from remaining in the vicinity of one of the two alignment mark pairs (for example, the mark pair (MK1b, MK2b)).

  The same operation is performed in FIG. Specifically, the object 92 is moved with respect to the object 91 by “−0.1” (0.1 in the left direction in the figure). As a result, ideally, a state where there is a similar shift on both the left and right sides (more specifically, the left shift Δxa is “−0.2” and the right shift Δxb is “+0.2”. Transition to a certain state. As a result, the relatively large deviation Δxb “+0.3” on the right side is reduced to “+0.2”, and Max (| Δxa |, | Δxb |) is changed from “+0.3” to “+0.2”. Reduced. According to this, it is possible to average the deviations of the two objects at the positions on both sides of the two objects in the X direction and suppress the occurrence of the protruding deviation.

  However, even when at least one of the deviation Δxa and the deviation Δxb exceeds the first allowable range, if the average value Δx of the deviation Δxa and the deviation Δxb is smaller than the moving resolution Δp1 in the X direction, it is exceptional. In addition, the misalignment correction drive (alignment operation) in the X direction is not executed, and the alignment operation in the X direction ends.

  For example, when a deviation as shown in FIG. 23 occurs, the deviation Δxa (−0.2 μm) is within the first allowable range, but the deviation Δxb (+0.3 μm) is within the first allowable range. Since it has exceeded, it is determined that the alignment has not yet been completed in the X direction. However, the average value Δx of the deviation Δxa (−0.2 μm) and the deviation Δxb (+0.3 μm) is “+0.05 μm” (= (− 0.2 + 0.3) / 2). In addition, the average value Δx is (recognition resolution Δp1 in the X direction of the position recognition unit 28 (here, 0.2 μm) or less) and the movement resolution Δq1 (in the X direction of the drive unit (head 22 or the like)) ( Here, it is smaller than 0.1 μm). In this case, exceptionally, the misalignment correction drive (alignment operation) in the X direction is not executed. According to this, it is not necessary to perform an unnecessary drive operation, and the alignment operation can be appropriately terminated.

  Thus, even when it is determined based on the above-described determination criterion B2 that the positional deviation between the two objects is not within the allowable error range, if the predetermined condition is satisfied, The alignment operation ends exceptionally.

  As described above, in the second embodiment, since the magnitude relationship between the positional deviations Δya and Δyb and the threshold value TH2 is individually determined in the Y direction, the same effect as in the first embodiment can be obtained. It is. Specifically, it is possible to prevent a relatively large shift in the Y direction from remaining in the vicinity of one of the two alignment mark pairs (for example, the mark pair (MK1b, MK2b)). Specifically, it is possible to accurately determine the misalignment state of both the objects 91 and 92 as compared to the case of determining with an average value as in the conventional example. Therefore, it is possible to accurately align the two objects.

  In the second embodiment, since the magnitude relationship between the positional deviations Δxa and Δxb and the threshold value TH1 is individually determined with respect to the X direction, one of the two alignment mark pairs (for example, It is possible to prevent a relatively large deviation from remaining in the X direction in the vicinity of the mark pair (MK1b, MK2b)). Specifically, it is possible to accurately determine the misalignment state of both the objects 91 and 92 as compared to the case of determining with an average value as in the conventional example. Therefore, it is possible to accurately align the two objects.

  More specifically, for example, on the + X side (right side) in both substrates, a situation in which a deviation in the X direction (the first translation direction of both objects) is unevenly distributed and an X direction deviation larger than the allowable value occurs. It is possible to avoid and disperse the deviation. In other words, it is possible to avoid the occurrence of a relatively large shift (shift larger than the allowable error) in the right side area (such as the vicinity of the marks MK1b and MK2b) of both objects, and the X of both objects within the joint surface of both objects. It is possible to make the direction deviation uniform.

  In the second embodiment, a situation (see FIGS. 20 to 23) in which deviations (errors) may occur in the inter-mark distances L1 and L2 in the X direction due to thermal expansion is illustrated. It is not limited to this.

  For example, deviations (errors) occur in the distances L1 and L2 between the marks in the X direction (the arrangement direction of two marks attached to the same object) based on manufacturing dimension errors (mark patterning errors) and the like. It is possible to apply the above-described idea of the present invention to such a situation.

  Or you may apply the above-mentioned idea in the position alignment at the time of joining the said one board | substrate and the other board | substrate in the state which bent one board | substrate toward the outer peripheral part.

  FIG. 24 is a diagram showing such a modification. In FIG. 24, the substrate 91 is held on the stage 41, and the substrate 92 is held on the head 42. A flexible thin plate-like pressing plate 44 is provided on the substrate holding surface (the surface holding the substrate 91) of the head 42. As shown in FIG. 24, the upper substrate 92 is first bent (elastically deformed) so as to protrude downward from the center toward the outer peripheral portion by center push by the actuator 43 (pressing against the center portion of the substrate). ). Next, the head 42 is lowered to bring the central portion of the upper substrate 92 into contact with the central portion of the lower substrate (FIG. 25). The upper substrate 92 and the lower substrate are increased by gradually increasing the contact portion with the lower substrate 91 from the central portion toward the outer peripheral portion while gradually eliminating the bending of the upper substrate 92. 91 is joined (FIG. 26). Such bonding is used, for example, when the surfaces are made hydrophilic and the two substrates are bonded together. According to this, it is possible to avoid or suppress the generation of voids due to air entrainment.

  In such bonding, the two substrates face each other (see FIGS. 24 and 25) (particularly, one substrate is bent and the central portion of the one substrate contacts the central portion of the other substrate). In the state (see FIG. 25)), the above-described idea may be applied when the two substrates are aligned.

<3. Experimental results>
Next, an experimental result (see FIG. 27) regarding the embodiment of the present application (more specifically, the second embodiment (specifically, the modified example shown in FIGS. 24 to 26 of the second embodiment)) will be exemplified.

  FIG. 27 is a diagram illustrating an example of the experimental result. FIG. 28 is a diagram showing the experimental results of the comparative example (described below). FIG. 28 shows an experimental result of alignment using a technique (also referred to as “comparative example”) similar to the above-described conventional technique. Here, the threshold values TH1 and TH2 are each 0.1 μm (micrometer) (equal to the image recognition resolution Δp), and the threshold value TH3 is 0.00004 (deg). The recognition resolution Δp (0.1 μm) here is a value smaller than the value Δp (0.2 μm) in the above description. 27 and 28, as a result of the experiment, a positional deviation measured by image processing (a positional deviation value measured to a level smaller than the recognition resolution) and the like are described as they are.

  FIG. 28 is a diagram illustrating a deviation amount when the correction operation according to the comparative example is performed. Here, ten experimental results are shown. For example, the first experiment result is described in the top line ("No. 1" line), and the second and subsequent experiment results are sequentially described in the second line ("No. 2" line) and subsequent lines. Has been.

  As shown in FIG. 28, the deviation Δya is a value “−0.05” to “+0.23”, and the deviation Δyb is a value “−0.28” to “+0.00”. It is. Further, the amplitude (± Range) of each of the deviations Δya and Δyb (½ of the difference between the minimum value and the maximum value) is “0.14” (= | 0.23-(− 0.05) | / 2. ), “0.14” (= | 0.00 − (− 0.28) | / 2).

  Further, the deviation Δxa is a value “−0.20” to “+0.03”, and the deviation Δxb is a value “−0.08” to “+0.28”. Further, the amplitude (± Range) of each deviation Δxa, Δxb (1/2 of the difference between the minimum value and the maximum value) is “0.12” (= | 0.03-(− 0.20) | / 2 ), “0.18” (= | 0.28 − (− 0.08) | / 2).

  On the other hand, FIG. 27 is a diagram showing a deviation amount when the correction operation according to the second embodiment of the present application (more specifically, a modification of FIG. 24 of the second embodiment) is performed. Here, ten experimental results are shown. For example, the first experiment result is described in the top line ("No. 1" line), and the second and subsequent experiment results are sequentially described in the second line ("No. 2" line) and subsequent lines. Has been.

  As shown in FIG. 27, the deviation Δya is a value “−0.08” to “+0.04”, and the deviation Δyb is a value “−0.08” to “+0.00”. It is. Further, the amplitude (± Range) of each of the deviations Δya and Δyb (½ of the difference between the minimum value and the maximum value) is “0.06” (= | 0.04-(− 0.08) | / 2. ), “0.04” (= | 0.00 − (− 0.08) | / 2).

  The deviation Δxa is a value from “−0.08” to “+0.03”, and the deviation Δxb is a value from “0.00” to “+0.08”. Further, the amplitude (± Range) of each deviation Δxa, Δxb (1/2 of the difference between the minimum value and the maximum value) is “0.06” (= | 0.03-(− 0.08) | / 2. ), “0.04” (= | 0.08 − (− 0.00) | / 2).

  As can be seen by comparing FIG. 27 and FIG. 28, the deviations Δya and Δyb according to the present embodiment (second embodiment) are reduced compared to the deviations Δya and Δyb according to the comparative example. In particular, in the comparative example (FIG. 28), the deviations Δya and Δyb exceeding the threshold value TH2 are occasionally seen, whereas in the present embodiment (FIG. 27), there are no deviations Δya and Δyb exceeding the threshold value TH2. . In this way, it is possible to reduce the positional deviation in the Y direction, and it is possible to accurately align the two objects.

  Further, also in the X direction, the deviations Δxa and Δxb according to the embodiment (second embodiment) of the present application are reduced compared to the deviations Δxa and Δxb according to the comparative example. In particular, in the comparative example (FIG. 28), the deviations Δxa and Δxb exceeding the threshold value TH1 are occasionally seen, whereas in the embodiment of the present application (FIG. 27), the deviations Δxa and Δxb exceeding the threshold value TH1 do not exist. . In this way, it is possible to reduce the positional deviation in the X direction, and it is possible to accurately align the two objects.

<4. Modified example>
Although the embodiments of the present invention have been described above, the present invention is not limited to the contents described above.

  For example, in each of the above-described embodiments, a frame-shaped mark and a cross-shaped mark are used as the alignment mark MK. However, the present invention is not limited to this, and marks of various other shapes (circular etc.) are aligned. The mark MK may be used.

  Further, in each of the above-described embodiments and the like, a mode in which the two alignment marks MK1a and MK1b are separated in the X direction (in other words, a mode in which the first translation direction is the X direction) is illustrated. It is not limited to.

  For example, the two alignment marks MK1a and MK1b may be separated in the Y direction. In this case, the Y direction that is the separation direction of the two alignment marks MK1a and MK1b may be treated as the first translation direction. Moreover, the X direction which is a direction perpendicular | vertical to the said 1st translation direction should just be handled as a 2nd translation direction.

  Alternatively, as shown in FIG. 29, the two alignment marks MK1a and MK1b may be spaced apart from each other along a direction inclined by a predetermined angle (45 degrees in FIG. 29) with respect to the X direction. In this case, for example, the separation direction of the two alignment marks MK1a and MK1b (the direction inclined by 45 degrees with respect to the X direction) may be treated as the first translation direction. In addition, a direction perpendicular to the first translation direction (a direction tilted by +135 degrees with respect to the X direction) may be treated as the second translation direction.

  Thus, the first translation direction is a direction connecting the alignment mark MK1a and the alignment mark MK1b (also referred to as a mark facing direction or a mark separation direction in the same object), and a direction other than the X direction, and It may also be a direction other than the Y direction.

  In addition, the first translation direction may be a direction that connects both alignment marks (MK2a, MK2b) in another object 92, instead of a direction that connects both alignment marks in the object 91.

  Further, the first translation direction is not limited to the direction in which both alignment marks in the same object are connected (mark facing direction). Of the two translational directions parallel to a predetermined plane perpendicular to the opposing direction of the objects 91 and 92, the direction is relatively close to the direction (mark separating direction) connecting the alignment mark MK1a and the alignment mark MK1b. I just need it. For example, the first translation direction may be a direction inclined (in a horizontal plane) by a predetermined angle (for example, 30 degrees) smaller than 45 degrees with respect to a direction connecting both alignment marks in the same object. Good. The predetermined angle is preferably smaller, for example, preferably within 20 degrees, and more preferably within 10 degrees. Moreover, the 2nd translation direction should just be a direction perpendicular | vertical also with respect to the 1st translation direction among the said 2 translation directions.

  Further, in each of the above embodiments and the like, a captured image GA obtained by simultaneously capturing the alignment marks MK1a and MK2a of the mark pair using reflected light (and transmitted light) from each mark pair (for example, MK1a and MK2a). However, it is not limited to this. For example, a photographed image GA obtained by simultaneously photographing both alignment marks MK1a and MK2a of the mark pair may be acquired using only transmitted light that has passed through each mark pair (for example, MK1a and MK2a). . More specifically, illumination (light source) is provided on the upper side (one side) of both objects 91 and 92, and the light emitted from the light source is used to mark portions of both objects 91 and 92 (alignment marks MK1a and MK2a). Make it transparent. And what is necessary is just to image the transmitted light using the imaging part provided in the downward side (other side) of both the objects 91 and 92. FIG.

  In each of the above embodiments and the like, two alignment marks MK1a and MK2a included in one mark pair (MK1a and MK2a) are photographed simultaneously, but the present invention is not limited to this. For example, the two alignment marks MK1a and MK2a included in one mark pair (MK1a and MK2a) may be taken at different times and acquired as separate images (two images). The same applies to the photographing of the other two alignment marks MK1b and MK2b.

  Further, the two alignment marks MK1a and MK2a may be taken by different cameras (two separate cameras or a two-field camera). The same applies to the other two alignment marks MK1b and MK2b.

  Moreover, in the said embodiment, what emitted infrared light is used as a light source of illumination, However, It is not limited to this, For example, visible light etc. may be radiate | emitted.

  Moreover, in the said embodiment, although the aspect to which this invention is applied to position alignment (wafer-on-wafer (WOW: Wafer-on-Wafer) joining technique) of a board | substrate is illustrated, it is not limited to this. . In other words, the alignment processing target is not limited to the substrates.

  For example, the present invention may be applied to alignment (chip-on-wafer (COW) bonding technology) between one substrate and each of a plurality of chips. In this case, two alignment marks for each of a plurality of chips are provided on the substrate (an alignment mark twice as many as the number of chips is provided on the substrate). The two alignment marks provided on the substrate for each chip and the two alignment marks provided on each chip are aligned by the above-described method, thereby aligning each chip and the substrate. It's fine.

  Alternatively, the present invention may be applied to alignment between chips (chip-on-chip (COC) bonding technology).

  In addition, the present invention may be applied to alignment between a substrate and a mold (such as a transparent mold) in nanoimprint processing. More specifically, the above concept is applied when both the substrate and the mold are targets (alignment) and the two are aligned in a plane perpendicular to the opposing direction of the substrate and the mold. May be. Note that such treatment is performed by bringing both the substrate and the mold facing each other into contact with each other in a state where a resin (such as a photocurable resin or a thermoplastic resin) is interposed between the substrate and the mold. What is necessary is just to perform in the apparatus (it also calls a pressurization apparatus) etc. which press. The both are also referred to as objects to be pressed. Furthermore, the said pressurization apparatus is expressed also as a resin device manufacturing apparatus which manufactures the various resin devices using resin.

  For example, as shown in FIGS. 30 and 31, a substrate 82 on which a resin 88 is applied and a mold 81 to be pressed against the resin are arranged in a horizontal direction (a direction parallel to the main surface of the substrate 82) (FIG. 30). The above-mentioned idea may be applied when accurately aligning in the horizontal direction at 30 etc.). 30 is a diagram illustrating a state where the substrate 82 and the mold 81 are separated from each other, and FIG. 31 is a diagram illustrating a state where the substrate 82 and the mold 81 are in contact with each other. The alignment may be performed in the separated state (see FIG. 30) or in the contact state between the two (see FIG. 31).

  Also, as shown in FIG. 32, a resin layer 73 is molded and cured on one surface of a substrate (glass substrate or the like) 72 using a mold 71 having a plurality of concave portions each formed in accordance with a lens shape. Thus, when the plurality of lenses (73) are formed on one surface of the substrate 72, the above idea can be applied. In particular, by using the alignment technique described above, it is possible to accurately arrange each lens at a predetermined position in the substrate.

  FIG. 32 shows a state in which the mold 71 is accurately positioned with respect to the substrate 72 after the resin is applied to the mold 71 to form a plurality of lenses 73 (or during the formation). Has been. In FIG. 32, a relatively small number of lenses 73 are shown for convenience of illustration, but in many cases, a very large number of lenses 73 are actually formed. In such a case, by using the above-described concept, the Y-direction deviation of both objects 72 and 71 (73) in the contact plane of the substrate 72 is made uniform (suppression of the deviation in the X direction) and the like. It is possible to accurately align the substrate 72 and each lens 73.

  In the manufacture of an image sensor (C-MOS sensor or the like), a light receiving element layer (substrate) in which light receiving elements are arranged in two dimensions (XY directions) and a memory layer (substrate) in which memories are arranged in two dimensions. The above-mentioned idea may be applied when and are laminated and joined. Each light receiving element is arranged adjacent to the light receiving element layer at a fine pitch as the number of pixels increases, and the memory layer has a vertical direction (Z direction) corresponding to each light receiving element for high speed data transfer. ) Each pixel memory is arranged. Therefore, each pixel memory is also arranged at a fine pitch. When the two-layered substrate in which the respective elements (the light receiving element and the pixel memory) are arranged at such a fine pitch is aligned with high accuracy (for example, in the submicron order), the above idea is applied very suitably. obtain.

DESCRIPTION OF SYMBOLS 1 Alignment apparatus 12 Stage 22 Head 23 Alignment table 25 Rotation drive mechanism 28 Position recognition part 28M, 28N Imaging part 71, 81 Mold 72, 82, 91, 92 Both substrates 73 Lens 100 Controller GAa, GAb Photographed image L1, L2 Between marks Distance MK1a, MK1b (in the object 91) alignment mark MK2a, MK2b (in the object 92) alignment mark

Claims (28)

An alignment device,
First holding means for holding a first object;
A second holding means for holding a second object;
The first alignment mark attached to the first object and the second object in a state where the objects of the first object and the second object are arranged close to each other or in contact with each other. A first misalignment vector representing the misalignment between the first mark pair and the second alignment mark attached to the object, and a third alignment mark attached to the first object. Measuring means for measuring a second displacement vector representing a displacement between the second mark pair and the fourth alignment mark attached to the second object; and
A determination means for determining whether or not a positional deviation between the two objects is within an allowable error range;
With
The first displacement vector includes a first displacement that is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects, and the 2 A second shift which is a shift in a second translation direction perpendicular to the first translation direction among the two translation directions;
The second positional displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction,
The first translation direction is a direction parallel to a direction connecting the first alignment mark and the third alignment mark,
The determination means does not require that the first deviation is within a first allowable range and the third deviation is within the first allowable range, and the first deviation and the third deviation are not provided. That the average value of the deviation is within the first tolerance, the second deviation is within the second tolerance, and the fourth deviation is within the second tolerance. As a condition, it is determined that the positional deviation between the two objects is within the allowable error range. The alignment apparatus according to claim 1 ,
When it is determined that the positional deviation between the two objects is not within the allowable error range, the two objects obtained based on the first positional deviation vector and the second positional deviation vector Driving means for relatively moving the objects in the predetermined plane by relatively driving the first holding means and the second holding means so as to eliminate misalignment between objects. ,
An alignment apparatus further comprising: An alignment device,
First holding means for holding a first object;
A second holding means for holding a second object;
The first alignment mark attached to the first object and the second object in a state where the objects of the first object and the second object are arranged close to each other or in contact with each other. A first misalignment vector representing the misalignment between the first mark pair and the second alignment mark attached to the object, and a third alignment mark attached to the first object. Measuring means for measuring a second displacement vector representing a displacement between the second mark pair and the fourth alignment mark attached to the second object; and
A determination means for determining whether or not a positional deviation between the two objects is within an allowable error range;
With
The first displacement vector includes a first displacement that is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects, and the 2 A second shift which is a shift in a second translation direction perpendicular to the first translation direction among the two translation directions;
The second positional displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction,
The first translational direction is one of the two translational directions that is relatively close to the direction connecting the first alignment mark and the third alignment mark,
The determination means includes an average value of the first deviation and the third deviation being within a first allowable range, the second deviation being within a second allowable range, and the fourth deviation. On the condition that the deviation is within the second allowable range, it is determined that the positional deviation between the two objects is within the allowable error range,
The alignment apparatus includes:
When it is determined that the positional deviation between the two objects is not within the allowable error range, the two objects obtained based on the first positional deviation vector and the second positional deviation vector Driving means for relatively moving the objects in the predetermined plane by relatively driving the first holding means and the second holding means so as to eliminate misalignment between objects. ,
Further comprising
The driving means includes
At least one of the second deviation and the fourth deviation exceeds the second allowable range, and an average value of the second deviation and the fourth deviation is the second value of the driving unit. When the displacement resolution is equal to or higher than the moving resolution in the translation direction, the misalignment correction drive in the second translation direction is executed,
Even when at least one of the second shift and the fourth shift exceeds the second allowable range, an average value of the second shift and the fourth shift is the first shift. When the moving resolution in the second translation direction is smaller than 2, the alignment shift operation in the second translation direction is terminated without executing the positional deviation correction driving in the second translation direction. An alignment device,
First holding means for holding a first object;
A second holding means for holding a second object;
The first alignment mark attached to the first object and the second object in a state where the objects of the first object and the second object are arranged close to each other or in contact with each other. A first misalignment vector representing the misalignment between the first mark pair and the second alignment mark attached to the object, and a third alignment mark attached to the first object. Measuring means for measuring a second displacement vector representing a displacement between the second mark pair and the fourth alignment mark attached to the second object; and
A determination means for determining whether or not a positional deviation between the two objects is within an allowable error range;
With
The first displacement vector includes a first displacement that is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects, and the 2 A second shift which is a shift in a second translation direction perpendicular to the first translation direction among the two translation directions;
The second positional displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction,
The first translational direction is one of the two translational directions that is relatively close to the direction connecting the first alignment mark and the third alignment mark,
The determination means includes an average value of the first deviation and the third deviation being within a first allowable range, the second deviation being within a second allowable range, and the fourth deviation. On the condition that the deviation is within the second allowable range, it is determined that the positional deviation between the two objects is within the allowable error range,
The alignment apparatus includes:
When it is determined that the positional deviation between the two objects is not within the allowable error range, the two objects obtained based on the first positional deviation vector and the second positional deviation vector Driving means for relatively moving the objects in the predetermined plane by relatively driving the first holding means and the second holding means so as to eliminate misalignment between objects. ,
Further comprising
The determination means includes a first inter-mark distance which is a distance between the first alignment mark and the third alignment mark, and a distance between the second alignment mark and the fourth alignment mark. When the difference from the second inter-mark distance, which is a distance, deviates from a specified value, the first deviation is within the first tolerance and the third deviation is the first tolerance. It is also determined that the positional deviation between the two objects is within the allowable error range, provided that it is within the range,
When the difference between the first mark-to-mark distance and the second mark-to-mark distance is deviated from a specified value,
At least one of the first deviation and the third deviation exceeds the first allowable range, and an average value of the first deviation and the third deviation is the first of the driving means. When the displacement resolution is equal to or higher than the movement resolution in the translation direction, the misregistration correction drive in the first translation direction is executed.
Even when at least one of the first deviation and the third deviation exceeds the first allowable range, an average value of the first deviation and the third deviation is the first deviation. When the resolution is smaller than the moving resolution in one translation direction, the alignment operation in the first translation direction is terminated without executing the positional deviation correction drive in the first translation direction.   An alignment device,
  First holding means for holding a first object;
  A second holding means for holding a second object;
  The first alignment mark attached to the first object and the second object in a state where the objects of the first object and the second object are arranged close to each other or in contact with each other. A first misalignment vector representing the misalignment between the first mark pair and the second alignment mark attached to the object, and a third alignment mark attached to the first object. Measuring means for measuring a second displacement vector representing a displacement between the second mark pair and the fourth alignment mark attached to the second object; and
  A determination means for determining whether or not a positional deviation between the two objects is within an allowable error range;
With
  The first displacement vector includes a first displacement that is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects, and the 2 A second shift which is a shift in a second translation direction perpendicular to the first translation direction among the two translation directions;
  The second positional displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction,
  The first translational direction is one of the two translational directions that is relatively close to the direction connecting the first alignment mark and the third alignment mark,
  The determination means includes an average value of the first deviation and the third deviation being within a first allowable range, the second deviation being within a second allowable range, and the fourth deviation. On the condition that the deviation is within the second allowable range, it is determined that the positional deviation between the two objects is within the allowable error range,
  The alignment apparatus includes:
  When it is determined that the positional deviation between the two objects is not within the allowable error range, the two objects obtained based on the first positional deviation vector and the second positional deviation vector Driving means for relatively moving the objects in the predetermined plane by relatively driving the first holding means and the second holding means so as to eliminate misalignment between objects. ,
Further comprising
  The driving means includes
    At least one of the second deviation and the fourth deviation exceeds the second allowable range, and an average value of the second deviation and the fourth deviation is the second value of the driving unit. When the resolution is equal to or higher than the recognition resolution in the translation direction, the misregistration correction drive in the second translation direction is executed,
    Even when at least one of the second shift and the fourth shift exceeds the second allowable range, an average value of the second shift and the fourth shift is the first shift. When the resolution is smaller than the recognition resolution in the second translation direction, the alignment operation in the second translation direction is terminated without executing the misalignment correction driving in the second translation direction.   An alignment device,
  First holding means for holding a first object;
  A second holding means for holding a second object;
  The first alignment mark attached to the first object and the second object in a state where the objects of the first object and the second object are arranged close to each other or in contact with each other. A first misalignment vector representing the misalignment between the first mark pair and the second alignment mark attached to the object, and a third alignment mark attached to the first object. Measuring means for measuring a second displacement vector representing a displacement between the second mark pair and the fourth alignment mark attached to the second object; and
  A determination means for determining whether or not a positional deviation between the two objects is within an allowable error range;
With
  The first displacement vector includes a first displacement that is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects, and the 2 A second shift which is a shift in a second translation direction perpendicular to the first translation direction among the two translation directions;
  The second positional displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction,
  The first translational direction is one of the two translational directions that is relatively close to the direction connecting the first alignment mark and the third alignment mark,
  The determination means includes an average value of the first deviation and the third deviation being within a first allowable range, the second deviation being within a second allowable range, and the fourth deviation. On the condition that the deviation is within the second allowable range, it is determined that the positional deviation between the two objects is within the allowable error range,
  The alignment apparatus includes:
  When it is determined that the positional deviation between the two objects is not within the allowable error range, the two objects obtained based on the first positional deviation vector and the second positional deviation vector Driving means for relatively moving the objects in the predetermined plane by relatively driving the first holding means and the second holding means so as to eliminate misalignment between objects. ,
Further comprising
  The determination means includes a first inter-mark distance which is a distance between the first alignment mark and the third alignment mark, and a distance between the second alignment mark and the fourth alignment mark. When the difference from the second inter-mark distance, which is a distance, deviates from a specified value, the first deviation is within the first tolerance and the third deviation is the first tolerance. It is also determined that the positional deviation between the two objects is within the allowable error range, provided that it is within the range,
  When the difference between the first mark-to-mark distance and the second mark-to-mark distance is deviated from a specified value,
    At least one of the first deviation and the third deviation exceeds the first allowable range, and an average value of the first deviation and the third deviation is the first of the driving means. When the resolution is equal to or higher than the recognition resolution in the translation direction, the misregistration correction drive in the first translation direction is executed.
    Even when at least one of the first deviation and the third deviation exceeds the first allowable range, an average value of the first deviation and the third deviation is the first deviation. An alignment apparatus characterized in that, when the recognition resolution in the first translation direction is smaller than the recognition resolution, the misalignment correction driving in the first translation direction is not executed and the alignment operation in the first translation direction is terminated. An alignment device,
First holding means for holding a first object;
A second holding means for holding a second object;
The first alignment mark attached to the first object and the second object in a state where the objects of the first object and the second object are arranged close to each other or in contact with each other. A first misalignment vector representing the misalignment between the first mark pair and the second alignment mark attached to the object, and a third alignment mark attached to the first object. Measuring means for measuring a second displacement vector representing a displacement between the second mark pair and the fourth alignment mark attached to the second object; and
A determination means for determining whether or not a positional deviation between the two objects is within an allowable error range;
With
The first displacement vector includes a first displacement that is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects, and the 2 A second shift which is a shift in a second translation direction perpendicular to the first translation direction among the two translation directions;
The second positional displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction,
The first translational direction is one of the two translational directions that is relatively close to the direction connecting the first alignment mark and the third alignment mark,
The determination means includes an average value of the first deviation and the third deviation being within a first allowable range, the second deviation being within a second allowable range, and the fourth deviation. On the condition that the deviation is within the second allowable range, it is determined that the positional deviation between the two objects is within the allowable error range,
The determination means includes a first inter-mark distance which is a distance between the first alignment mark and the third alignment mark, and a distance between the second alignment mark and the fourth alignment mark. When the difference from the second inter-mark distance, which is a distance, deviates from a specified value, the first deviation is within the first tolerance and the third deviation is the first tolerance. An alignment apparatus characterized in that it is determined that a positional deviation between the two objects is within the allowable error range on condition that the range is within the range. In the alignment apparatus in any one of Claims 2-7,
A measurement operation of the first and second misalignment vectors, a determination operation regarding whether or not a misalignment between the two objects is within the allowable error range, and a mutual operation between the two objects. After executing the driving operation for eliminating the positional deviation, the measurement operation of the first and second positional deviation vectors and the positional deviation between the two objects are within the allowable error range again. An alignment apparatus that executes a determination operation regarding whether or not there is. In the alignment apparatus in any one of Claims 1-8 ,
The determination means is a rotational deviation about a rotational direction around an axis perpendicular to the predetermined plane, and the rotational deviation calculated based on the second deviation and the fourth deviation is within a third allowable range. An alignment apparatus characterized in that it is determined that a positional deviation between the two objects is within the allowable error range on the condition of being present. In the alignment apparatus in any one of Claims 1-9,
The alignment apparatus according to claim 1, wherein the first allowable range is a range in which the same error as the recognition resolution of the measuring unit in the first translation direction is allowed. In the alignment apparatus in any one of Claims 1-9,
The second allowable range is a range in which the same error as the recognition resolution of the measuring means in the second translation direction is allowed. In the alignment apparatus in any one of Claims 1-11,
Both of the objects are substrates, and the alignment apparatus is characterized in that The alignment apparatus according to claim 12 , wherein
First heating means for heating the first substrate as the first object;
A second heating means for heating the second substrate as the second object;
Further comprising
The measuring means includes the first displacement vector and the first displacement vector in a state in which the first substrate is heated by the first heating means and the second substrate is heated by the second heating means. 2. An alignment apparatus that measures two positional deviation vectors. The alignment apparatus according to claim 12 , wherein
The measuring means is in a state where at least one of the first substrate as the first object and the second substrate as the second object is bent from the center toward the outer peripheral portion. An alignment apparatus that measures the first misalignment vector and the second misalignment vector. The alignment apparatus according to any one of claims 1 to 14 ,
One of the objects is a substrate,
An alignment apparatus characterized in that the other of the objects is a mold. An alignment method comprising:
a) The first alignment mark attached to the first object and the second object in a state where both the first object and the second object are arranged close to each other or in contact with each other. A first misalignment vector representing the misalignment between the first mark pair and the second alignment mark attached to the object, and a third alignment mark attached to the first object. Measuring a second misalignment vector representing a misalignment between a second mark pair and a fourth alignment mark attached to the second object; and
b) determining whether the displacement between the two objects is within an allowable error range;
With
The first displacement vector includes a first displacement that is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects, and the 2 A second shift which is a shift in a second translation direction perpendicular to the first translation direction among the two translation directions;
The second positional displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction,
The first translation direction is a direction parallel to a direction connecting the first alignment mark and the third alignment mark,
In step b), the first deviation and the first deviation are not conditional on the first deviation being within a first tolerance and the third deviation being within the first tolerance. The average value of the third deviation is within the first tolerance, the second deviation is within the second tolerance, and the fourth deviation is within the second tolerance. On the condition that it is determined that the positional deviation between the two objects is within the allowable error range. The alignment method according to claim 16 , wherein
c) When it is determined that the positional deviation between the two objects is not within the allowable error range, the positional deviation is obtained based on the first positional deviation vector and the second positional deviation vector. Moving both the objects relative to each other in the predetermined plane so as to eliminate a positional shift between the objects.
An alignment method further comprising: An alignment method comprising:
a) The first alignment mark attached to the first object and the second object in a state where both the first object and the second object are arranged close to each other or in contact with each other. A first misalignment vector representing the misalignment between the first mark pair and the second alignment mark attached to the object, and a third alignment mark attached to the first object. Measuring a second misalignment vector representing a misalignment between a second mark pair and a fourth alignment mark attached to the second object; and
b) determining whether the displacement between the two objects is within an allowable error range;
With
The first displacement vector includes a first displacement that is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects, and the 2 A second shift which is a shift in a second translation direction perpendicular to the first translation direction among the two translation directions;
The second positional displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction,
The first translational direction is one of the two translational directions that is relatively close to the direction connecting the first alignment mark and the third alignment mark,
In the step b), an average value of the first deviation and the third deviation is within a first allowable range; the second deviation is within a second allowable range; and On the condition that a fourth deviation is within the second tolerance, it is determined that the positional deviation between the two objects is within the tolerance .
The alignment method includes:
c) When it is determined that the positional deviation between the two objects is not within the allowable error range, the positional deviation is obtained based on the first positional deviation vector and the second positional deviation vector. Moving both the objects relative to each other in the predetermined plane so as to eliminate a positional shift between the objects.
Further comprising
Said step c)
c-1) At least one of the second deviation and the fourth deviation exceeds the second allowable range, and an average value of the second deviation and the fourth deviation is the second When the displacement resolution is equal to or higher than the moving resolution in the translation direction, the step of performing a displacement correction drive in the second translation direction;
c-2) Even when at least one of the second deviation and the fourth deviation exceeds the second allowable range, an average of the second deviation and the fourth deviation When the value is smaller than the moving resolution in the second translation direction, not performing the misalignment correction driving in the second translation direction and ending the alignment operation in the second translation direction;
An alignment method comprising: An alignment method comprising:
a) The first alignment mark attached to the first object and the second object in a state where both the first object and the second object are arranged close to each other or in contact with each other. A first misalignment vector representing the misalignment between the first mark pair and the second alignment mark attached to the object, and a third alignment mark attached to the first object. Measuring a second misalignment vector representing a misalignment between a second mark pair and a fourth alignment mark attached to the second object; and
b) determining whether the displacement between the two objects is within an allowable error range;
With
The first displacement vector includes a first displacement that is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects, and the 2 A second shift which is a shift in a second translation direction perpendicular to the first translation direction among the two translation directions;
The second positional displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction,
The first translational direction is one of the two translational directions that is relatively close to the direction connecting the first alignment mark and the third alignment mark,
In the step b), an average value of the first deviation and the third deviation is within a first allowable range; the second deviation is within a second allowable range; and On the condition that a fourth deviation is within the second tolerance, it is determined that the positional deviation between the two objects is within the tolerance.
The alignment method includes:
c) When it is determined that the positional deviation between the two objects is not within the allowable error range, the positional deviation is obtained based on the first positional deviation vector and the second positional deviation vector. Moving both the objects relative to each other in the predetermined plane so as to eliminate a positional shift between the objects.
Further comprising
In step b), the distance between the first alignment mark, which is the distance between the first alignment mark and the third alignment mark, and the second alignment mark and the fourth alignment mark. When the difference between the distance between the second marks and the distance between the marks is deviated from a specified value, the first deviation is within the first allowable range and the third deviation is the first distance. It is also determined that the positional deviation between the two objects is within the allowable error range, provided that it is within the allowable range of
Said step c)
c-3) When the difference between the first mark-to-mark distance and the second mark-to-mark distance deviates from a specified value, at least one of the first deviation and the third deviation is the first When the tolerance exceeds the allowable range and the average value of the first deviation and the third deviation is equal to or greater than the moving resolution in the first translation direction, the position deviation correction drive in the first translation direction is executed. And steps to
c-4) Even when at least one of the first shift and the third shift exceeds the first allowable range, the average of the first shift and the third shift When the value is smaller than the moving resolution in the first translation direction, not performing the displacement correction driving in the first translation direction, and ending the alignment operation in the first translation direction;
An alignment method comprising:   An alignment method comprising:
  a) The first alignment mark attached to the first object and the second object in a state where both the first object and the second object are arranged close to each other or in contact with each other. A first misalignment vector representing a misalignment between the first mark pair and the second alignment mark attached to the object, and a third alignment mark attached to the first object. Measuring a second misalignment vector representing a misalignment between a second mark pair and a fourth alignment mark attached to the second object; and
  b) determining whether the displacement between the two objects is within an allowable error range;
With
  The first displacement vector includes a first displacement that is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects, and the 2 A second shift which is a shift in a second translation direction perpendicular to the first translation direction among the two translation directions;
  The second positional displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction,
  The first translational direction is one of the two translational directions that is relatively close to the direction connecting the first alignment mark and the third alignment mark,
  In the step b), an average value of the first deviation and the third deviation is within a first allowable range; the second deviation is within a second allowable range; and On the condition that a fourth deviation is within the second tolerance, it is determined that the positional deviation between the two objects is within the tolerance.
  The alignment method includes:
  c) When it is determined that the positional deviation between the two objects is not within the allowable error range, the positional deviation is obtained based on the first positional deviation vector and the second positional deviation vector. Moving both the objects relative to each other in the predetermined plane so as to eliminate a positional shift between the objects.
Further comprising
  Said step c)
    c-1) At least one of the second deviation and the fourth deviation exceeds the second allowable range, and an average value of the second deviation and the fourth deviation is the second When it is equal to or higher than the recognition resolution in the translation direction, the step of performing a displacement correction drive in the second translation direction;
    c-2) Even when at least one of the second deviation and the fourth deviation exceeds the second allowable range, an average of the second deviation and the fourth deviation When the value is smaller than the recognition resolution in the second translation direction, the alignment shift operation in the second translation direction is terminated without performing the displacement correction driving in the second translation direction;
An alignment method comprising:   An alignment method comprising:
  a) The first alignment mark attached to the first object and the second object in a state where both the first object and the second object are arranged close to each other or in contact with each other. A first misalignment vector representing a misalignment between the first mark pair and the second alignment mark attached to the object, and a third alignment mark attached to the first object. Measuring a second misalignment vector representing a misalignment between a second mark pair and a fourth alignment mark attached to the second object; and
  b) determining whether the displacement between the two objects is within an allowable error range;
With
  The first displacement vector includes a first displacement that is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects, and the 2 A second shift which is a shift in a second translation direction perpendicular to the first translation direction among the two translation directions;
  The second positional displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction,
  The first translational direction is one of the two translational directions that is relatively close to the direction connecting the first alignment mark and the third alignment mark,
  In the step b), an average value of the first deviation and the third deviation is within a first allowable range; the second deviation is within a second allowable range; and On the condition that a fourth deviation is within the second tolerance, it is determined that the positional deviation between the two objects is within the tolerance.
  The alignment method includes:
  c) When it is determined that the positional deviation between the two objects does not fall within the allowable error range, the positional deviation is obtained based on the first positional deviation vector and the second positional deviation vector. Moving both the objects relative to each other in the predetermined plane so as to eliminate misalignment between the objects.
Further comprising
  In step b), the distance between the first alignment mark, which is the distance between the first alignment mark and the third alignment mark, and the second alignment mark and the fourth alignment mark. When the difference between the distance between the second marks and the distance between the marks is deviated from a specified value, the first deviation is within the first allowable range and the third deviation is the first distance. It is also determined that the positional deviation between the two objects is within the allowable error range, provided that it is within the allowable range of
  Said step c)
    c-3) When the difference between the distance between the first marks and the distance between the two marks is deviated from a specified value, at least one of the first deviation and the third deviation is the first distance. When the allowable range is exceeded and the average value of the first deviation and the third deviation is equal to or higher than the recognition resolution in the first translation direction, the positional deviation correction drive in the first translation direction is executed. And steps to
    c-4) Even when at least one of the first shift and the third shift exceeds the first allowable range, the average of the first shift and the third shift When the value is smaller than the recognition resolution in the first translation direction, not performing the misalignment correction driving in the first translation direction and ending the alignment operation in the first translation direction;
An alignment method comprising: An alignment method comprising:
a) The first alignment mark attached to the first object and the second object in a state where both the first object and the second object are arranged close to each other or in contact with each other. A first misalignment vector representing the misalignment between the first mark pair and the second alignment mark attached to the object, and a third alignment mark attached to the first object. Measuring a second misalignment vector representing a misalignment between a second mark pair and a fourth alignment mark attached to the second object; and
b) determining whether the displacement between the two objects is within an allowable error range;
With
The first displacement vector includes a first displacement that is a displacement in a first translation direction of two translation directions parallel to a predetermined plane perpendicular to the opposing direction of the two objects, and the 2 A second shift which is a shift in a second translation direction perpendicular to the first translation direction among the two translation directions;
The second positional displacement vector has a third displacement that is a displacement in the first translation direction and a fourth displacement that is a displacement in the second translation direction,
The first translational direction is one of the two translational directions that is relatively close to the direction connecting the first alignment mark and the third alignment mark,
In the step b), an average value of the first deviation and the third deviation is within a first allowable range; the second deviation is within a second allowable range; and On the condition that a fourth deviation is within the second tolerance, it is determined that the positional deviation between the two objects is within the tolerance.
In step b), the distance between the first alignment mark, which is the distance between the first alignment mark and the third alignment mark, and the second alignment mark and the fourth alignment mark. When the difference between the distance between the second marks and the distance between the marks is deviated from a specified value, the first deviation is within the first allowable range and the third deviation is the first distance. The alignment method is characterized in that it is determined that a positional deviation between the two objects is within the allowable error range, on condition that it is within the allowable range. The alignment method according to any one of claims 17 to 22 ,
An alignment method, wherein the step a) and the step b) are performed again after the step a), the step b), and the step c) are performed. The alignment method according to any one of claims 16 to 23 ,
In the step b), the rotational deviation in the rotational direction around the axis perpendicular to the predetermined plane and calculated based on the second deviation and the fourth deviation is a third allowable range. The alignment method is characterized in that it is determined that the positional deviation between the two objects is within the allowable error range on the condition that the object is within the range. The alignment method according to any one of claims 16 to 24 ,
The first allowable range is a range in which the same error as the recognition resolution in the first translation direction is allowed. The alignment method according to any one of claims 16 to 24 ,
The second allowable range is a range in which the same error as the recognition resolution in the second translation direction is allowed. The alignment method according to any one of claims 16 to 26 ,
An alignment method characterized in that both of the objects are substrates. The alignment method according to any one of claims 16 to 27 ,
One of the objects is a substrate,
An alignment method, wherein the other of the two objects is a mold.

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