JP2017154059A - Auxiliary device and treatment device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To properly adjust a supply quantity and a discharge quantity of fluid supplied to a treatment tank, in a treatment device.SOLUTION: An auxiliary device executes predetermined treatment to a work by using fluid R supplied to a treatment tank from an external part, and is installed in a treatment device A for externally discharging a discharge object generated in the treatment tank by treatment, and comprises supply valves 2b and 6b for adjusting supply of the fluid R to the treatment tank, discharge valves 4e and 8e for adjusting discharge of the discharge object to the external part from the treatment tank and a valve control part 10a for automatically opening-closing the supply valves 2b and 6b and the discharge valves 4e and 8e in the predetermined timing.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an auxiliary device and a processing device.

  For example, Patent Document 1 discloses a surface treatment apparatus including a surface treatment tank for performing plating treatment on a member to be treated (work) and a washing tank for washing the member to be treated that has been subjected to plating treatment. It is disclosed. In this patent document 1, the liquid is supplied to the surface treatment tank and the washing tank, and surface treatment and washing are performed by immersing the member to be treated in the surface treatment tank and the washing tank.

JP 2008-255374 A

  However, in general, supply and discharge of liquid (fluid) to and from such a processing tank are performed manually by an operator, so that an excessive amount of liquid (fluid) can be supplied to the processing tank. And wastes liquid (fluid). Furthermore, since the supply and discharge of the liquid (fluid) are performed manually by the operator, if the supply amount of the liquid (fluid) is insufficient, sufficient processing cannot be performed on the workpiece.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to appropriately adjust the supply amount and the discharge amount of the fluid supplied to the processing tank in the processing apparatus.

  In order to achieve the above object, in the present invention, a predetermined treatment is performed on a work using a fluid supplied to the treatment tank from the outside, and discharge generated in the treatment tank by the treatment is discharged to the outside. An auxiliary device attached to the apparatus, the supply valve for adjusting the supply of fluid to the treatment tank, the discharge valve for adjusting the discharge of the discharge from the treatment tank to the outside, the supply valve and the discharge A configuration is adopted that includes a valve control unit that automatically opens and closes the valve at a predetermined timing.

  As a second solving means related to the auxiliary device, in the first solving means, the valve control unit stops discharging the discharged material from the processing tank when supplying the fluid to the processing tank, and A configuration is adopted in which the supply valve and the discharge valve are controlled so as to start discharging the discharged material after the supply to the treatment tank is stopped.

  As a third means for solving the auxiliary device, the valve control unit further includes an operation unit that instructs the valve control unit to open and close the supply valve and the discharge valve, and the valve control unit receives the opening / closing timing input from the operation unit. Is used to automatically open and close the supply valve and the discharge valve.

  As a fourth solving means related to the auxiliary device, in the first to third solving means, a configuration is adopted in which the processing apparatus is a cleaning apparatus that performs a cleaning process on a workpiece using a liquid as a cleaning liquid.

  As a first solving means related to the processing apparatus, a processing facility for performing a predetermined process on the workpiece using a fluid supplied to the processing tank from the outside and discharging waste generated in the processing tank by the processing to the outside A supply valve that adjusts the supply of fluid to the treatment tank, a discharge valve that regulates the discharge of discharged substances from the treatment tank, and a valve that automatically opens and closes the supply valve and the discharge valve at a predetermined timing A configuration including a control unit is employed.

  According to the present invention, since the auxiliary device including the supply valve, the discharge valve, and the valve control unit is attached to the processing device, the supply valve and the discharge valve can be automatically controlled. Therefore, the supply amount and discharge amount of the fluid supplied to the treatment tank can be appropriately adjusted.

It is an apparatus block diagram of the processing apparatus which concerns on one Embodiment of this invention. It is a front view of the operation part in one Embodiment of this invention. It is a flowchart which shows the flow of operation | movement of the control unit in one Embodiment of this invention. It is an example of the opening / closing timing of the supply / discharge valve in one Embodiment of this invention. It is a modification of the opening / closing timing of the supply / discharge valve in one embodiment of the present invention.

  Hereinafter, an embodiment of a processing apparatus according to the present invention will be described with reference to FIGS. FIG. 1 is an apparatus configuration diagram of a processing apparatus A according to the present embodiment.

  The processing apparatus A according to the present embodiment is an apparatus that cleans the chemical adhering to the workpiece with the cleaning liquid R. The workpiece is, for example, a metal member to which sulfuric acid is attached as the drug by being plated, and the cleaning liquid R is water. As shown in FIG. 1, the processing apparatus A includes a processing tank 1, a first supply unit 2, a first supply distribution pipe 3, a first discharge pipe 4, a first overflow pipe 5, a second supply distribution pipe 7, 2 a discharge pipe 8, a second overflow pipe 9 and a control unit 10 are provided.

  The processing apparatus A includes, as the processing tank 1, first row processing tanks 1A to 1C and second row processing tanks 1D to 1F. The first row treatment tanks 1 </ b> A to 1 </ b> C and the second row treatment tanks 1 </ b> D to 1 </ b> F are storage tanks whose upper surfaces are opened and the cleaning liquid R is stored therein. The The first row treatment tanks 1 </ b> A to 1 </ b> C are connected to the first supply distribution pipe 3 and the first overflow pipe 5 on the upper side surface, and are connected to the first discharge pipe 4 on the bottom surface. The second row processing tanks 1D to 1F are connected to the second supply distribution pipe 7 and the second overflow pipe 9 on the upper side surface and connected to the second discharge pipe 8 on the bottom surface. In such first row treatment tanks 1A to 1C and second row treatment tanks 1D to 1F, the chemicals adhered to the surface of the workpiece are separated and removed (washed) by the cleaning liquid R.

  The first supply unit 2 includes a first supply pipe 2a and a first supply valve 2b. The first supply pipe 2 a is a pipe that connects an existing supply pipe (not shown) and the first supply distribution pipe 3. The first supply valve 2 b is provided at a connection site between the first supply pipe 2 a and the first supply distribution pipe 3. The first supply valve 2b is an electric valve that is electrically connected to the valve control unit 10a and whose opening / closing timing is controlled by the valve control unit 10a. Such a 1st supply valve 2b adjusts supply of cleaning fluid R to the 1st line processing tanks 1A-1C. The first supply distribution pipe 3 includes a pipe 3a connected to the first row processing tank 1A, a pipe 3b connected to the first row processing tank 1B, a pipe 3c connected to the first row processing tank 1C, It is comprised by the piping 3d connected with these piping 3a-3c.

  The first discharge pipe 4 includes a pipe 4a connected to the first row processing tank 1A, a pipe 4b connected to the first row processing tank 1B, a pipe 4c connected to the first row processing tank 1C, and these It comprises a pipe 4d connected to the pipes 4a to 4c and a first discharge valve 4e. The first discharge valve 4e is an electric valve that is electrically connected to the valve control unit 10a and whose opening / closing timing is controlled by a valve control unit 10a described later. Such a first discharge valve 4e adjusts the discharge of the cleaning liquid R from the first row processing tanks 1A to 1C to the outside. The first discharge pipe 4 is a pipe provided for discharging the cleaning liquid R stored in the first row processing tanks 1A to 1C, and is connected to a discharge processing facility (not shown).

  The first overflow pipe 5 includes a pipe 5a connected to the first row processing tank 1A, a pipe 5b connected to the first row processing tank 1B, a pipe 5c connected to the first row processing tank 1C, and these It is comprised by the piping 5d connected to the piping 5a-5c. The first overflow pipe 5 is a pipe provided to prevent the cleaning liquid R from overflowing from the openings on the upper surfaces of the first row processing tanks 1A to 1C. The first overflow pipe 5 is connected to a discharge processing facility (not shown).

  The second supply unit 6 includes a second supply pipe 6a and a second supply valve 6b. The second supply pipe 6 a is a pipe that connects an existing supply pipe (not shown) and the second supply distribution pipe 7. The second supply valve 6 b is provided at a connection site between the second supply pipe 6 a and the second supply distribution pipe 7. The second supply valve 6b is an electric valve that is electrically connected to a later-described valve control unit 10a and whose opening / closing timing is controlled by the valve control unit 10a. Such a second supply valve 6b adjusts the supply of the cleaning liquid R to the second row processing tanks 1D to 1F. The second supply distribution pipe 7 includes a pipe 7a connected to the second row processing tank 1D, a pipe 7b connected to the second row processing tank 1E, a pipe 7c connected to the second row processing tank 1F, It is comprised by the piping 7d connected with these piping 7a-7c.

  The second discharge pipe 8 includes a pipe 8a connected to the second row processing tank 1D, a pipe 8b connected to the second row processing tank 1E, a pipe 8c connected to the second row processing tank 1F, and these A pipe 8d connected to the pipes 8a to 8c and a second discharge valve 8e are configured. The first discharge valve 4e is an electric valve that is electrically connected to a later-described valve control unit 10a and whose opening / closing timing is controlled by the valve control unit 10a. Such a second discharge valve 8e adjusts the discharge of the cleaning liquid R from the second row processing tanks 1D to 1F to the outside. The second discharge pipe 8 is a pipe provided for discharging the cleaning liquid R stored in the second row processing tanks 1D to 1F, and is connected to a discharge processing facility (not shown).

  The second overflow pipe 9 includes a pipe 9a connected to the second row processing tank 1D, a pipe 9b connected to the second row processing tank 1E, a pipe 9c connected to the second row processing tank 1F, and these And a pipe 9d connected to the pipes 9a to 9c. This 2nd overflow piping 9 is piping provided in order to prevent the washing | cleaning liquid R from overflowing from opening of the upper surface of 2nd row processing tank 1D-1F. The second overflow pipe 9 is connected to a discharge processing facility (not shown).

  The control unit 10 includes a valve control unit 10a and an operation unit 10b. The valve control unit 10a is based on the program stored in advance and the timer set value set by the operation unit 10b, and the first supply valve 2b, the first discharge valve 4e, the second supply valve 6b, and the second discharge valve. The opening / closing timing of 8e is automatically controlled. That is, the valve control unit 10a stores the timer set value set by the operation unit 10b. Based on the timer set value, the automatic supply and the first supply of the cleaning liquid R by the first supply valve 2b and the second supply valve 6b are performed. The automatic discharge of the cleaning liquid R by the first discharge valve 4e and the second discharge valve 8e is controlled.

  The timer setting value includes a daily timer setting value that specifies the time for automatic supply and automatic discharge of the cleaning liquid R in a day, and a weekly setting that specifies the day (day of week) for automatic supply and automatic discharge of the cleaning liquid R within a week. Timer setting value exists. Such a timer set value is preset by an operator and can be changed by operating the operation unit 10b.

  FIG. 2 is a front view of the operation unit 10b. As shown in FIG. 2, the operation unit 10b includes a main power lamp 11a, a touch panel 11b, a display unit 11c, an operation mode switch 11d, an automatic lamp 11e, an automatic supply / discharge switch 11f, an automatic discharge switch 11g, a manual supply lamp 11h, A supply start switch 11i, a supply end switch 11j, a manual discharge lamp 11k, a discharge start switch 11m, and a discharge end switch 11n are provided.

  The main power supply lamp 11 a is a lamp that indicates ON / OFF of the main power supply of the control unit 10. The main power lamp 11a lights up when a main power breaker (not shown) is turned on. The touch panel 11b is provided for the operator to change the setting of the control schedule of the valve control unit 10a. The display unit 11c is a liquid crystal display panel that displays a valve control schedule and the like based on an instruction from the valve control unit 10a.

  The operation mode switch 11d is a switch that switches the operation mode of the control unit 10 to “manual”, “off”, and “automatic”. “Automatic” is a control mode in which valve opening / closing control by the valve controller 10a is automatically performed based on a timer set value. “Manual” is a manual control mode in which the operator manually supplies and discharges the cleaning liquid R. “Off” is a control mode that enters a standby state without accepting an operation from the operation unit. Note that the operation mode change-over switch 11d is set to “automatic” in order to automatically supply and discharge the cleaning liquid R in normal times.

  The automatic lamp 11e is a lamp that is turned on when automatic control of supply and discharge of the cleaning liquid R is performed. That is, the automatic lamp 11e is turned on when the operation mode switch 11d is set to “automatic”. The automatic supply / discharge switch 11f is an automatic start switch when the operation mode is "automatic". The automatic discharge switch 11g is a switch for forcibly discharging the cleaning liquid R when the operation mode is “automatic”.

  The manual supply lamp 11h is a lamp that is lit when the cleaning liquid R is supplied manually. That is, the manual supply lamp 11h is lit when the operation mode switch 11d is set to “manual”. The supply start switch 11i is a switch for an operator to manually start supplying the cleaning liquid R. When the supply start switch 11i is pressed, the first supply valve 2b and the second supply valve 6b are opened. The supply end switch 11j is a switch for the operator to manually stop the supply of the cleaning liquid R. When the supply end switch 11j is pressed, the first supply valve 2b and the second supply valve 6b are closed.

  The manual discharge lamp 11k is a lamp that lights up when discharge control is performed manually. That is, the manual discharge lamp 11k is lit when the operation mode switch 11d is set to “manual”. The discharge start switch 11m is a switch for an operator to manually start discharge. When the discharge start switch 11m is pressed, the first discharge valve 4e and the second discharge valve 8e are opened. The discharge end switch 11n is a switch for the operator to manually end the discharge of the cleaning liquid. When the discharge end switch 11n is pressed, the first discharge valve 4e and the second discharge valve 8e are closed. Such an operation unit 10b is operated by an operator, and instructs the valve control unit 10a to open and close the first supply valve 2b, the first discharge valve 4e, the second supply valve 6b, and the second discharge valve 8e.

  In such a processing apparatus A, the valve control unit 10a automatically controls the first supply valve 2b and the second supply valve 6b, thereby opening the first supply valve 2b and the second supply valve 6b and processing tank 1 Is a cleaning device that supplies the cleaning liquid R to the workpiece and cleans the workpiece that has entered the processing tank 1. Further, in the processing apparatus A, the valve control unit 10a automatically controls the first discharge valve 4e and the second discharge valve 8e, thereby draining the cleaning liquid R generated in the processing tank 1 during the cleaning process (into the cleaning liquid R). The liquid containing the medicine is discharged by opening the first discharge valve 4e and the second discharge valve 8e.

  The first supply valve 2b, the first discharge valve 4e, the second supply valve 6b, the second discharge valve 8e, and the control unit 10 correspond to an auxiliary device according to the present invention. That is, the processing apparatus A according to the present embodiment has a first supply valve 2b, a first discharge valve 4e, a second supply valve 6b, a second discharge valve 8e, and a control unit 10 with respect to the existing processing facility. It is comprised by installing the auxiliary device which becomes.

  Subsequently, the operation of the processing apparatus A in the present embodiment will be described with reference to FIGS. 3 and 4. FIG. 3 is a flowchart showing the processing operation of the valve control unit 10a. FIG. 4 is an example of the opening / closing timing of supply / discharge of the cleaning liquid R.

  When the operator turns on the main power breaker of the processing apparatus A, the valve control unit 10a turns on the main power lamp 11a of the operation unit 10b (step S1). Then, the valve control unit 10a displays a selection screen as to whether or not to set the timer on the display unit 11c of the operation unit 10b, and determines whether or not the operator has instructed the timer setting using the touch panel 11b. (Step S2).

  If it is determined that the instruction is a timer setting instruction, the valve control unit 10a displays a screen for setting the timer on the display unit 11c, and accepts an input of a timer setting value from the touch panel 11b (step S3). The timer setting time can be set in minutes, for example, in the range of 0 to 30 minutes. Then, the valve control unit 10a stores the timer set value in the internal memory (Step S4). If the determination in step S2 is “NO”, that is, if the operator does not select the timer setting, the valve control unit 10a does not perform the processes in step S3 and step S4, and subsequently performs the process in step S5. I do.

  Next, the valve control unit 10a determines the setting state of the operation mode changeover switch 11d (step S5). When the operator sets the operation mode switch 11d to “automatic”, the valve control unit 10a turns on the automatic lamp 11e (step S6). Further, the valve control unit 10a reads the timer set value stored in the internal memory in step S4 (step S7), and based on the timer set value, the first supply valve 2b, the first discharge valve 4e, the second supply valve The supply and discharge of the cleaning liquid R are automatically controlled by controlling the 6b and the second discharge valve 8e (step S8).

  For example, the valve control unit 10a opens and closes the first supply valve 2b and the second supply valve 6b in the pattern (timing) shown in the upper side of FIG. 4, and the first discharge valve 4e and the second discharge valve 8e in FIG. Open and close with the pattern shown below. That is, the valve control unit 10a first opens the first supply valve 2b and the second supply valve 6b for 3 minutes to remove the cleaning liquid R from the first row treatment tanks 1A to 1C and the second row treatment tanks 1D to 1D. Then, the cleaning liquid R is discharged from the first row treatment tanks 1A to 1C and the second row treatment tanks 1D to 1F by opening the first discharge valve 4e and the second discharge valve 8e for 3 minutes. Let

  Further, the valve control unit 10a opens the first supply valve 2b and the second supply valve 6b for 10 minutes, thereby bringing the cleaning liquid R into the first row treatment tanks 1A to 1C and the second row treatment tanks 1D to 1F. Then, the cleaning liquid R is discharged from the first row processing tanks 1A to 1C and the second row processing tanks 1D to 1F by opening the first discharge valve 4e and the second discharge valve 8e for 10 minutes.

  On the other hand, when the operator sets the operation mode changeover switch 11d to “manual”, the valve control unit 10a subsequently performs the process of step S9 as a result of the determination of step S5. That is, the valve control unit 10a turns on the manual supply lamp 11h and the manual discharge lamp 11k (step S9). Further, the valve control unit 10a operates the first supply valve 2b, the first discharge valve 4e, and the second supply valve according to the operation of the supply start switch 11i, the supply end switch 11j, the discharge start switch 11m, and the discharge end switch 11n by the operator. The opening / closing of 6b and the second discharge valve 8e is controlled (step S10). When the operator sets the operation mode switch 11d to “OFF”, the valve control unit 10a enters the standby mode.

  Such a processing apparatus A has a valve controller 10a, a first supply valve 2b, a first discharge valve 4e, a second supply valve 6b, and a second discharge valve 8e as auxiliary devices. Accordingly, in the processing apparatus A, the valve control unit 10a can automatically control the first supply valve 2b, the first discharge valve 4e, the second supply valve 6b, and the second discharge valve 8e. Therefore, it is possible to appropriately adjust the supply amount and the discharge amount of the cleaning liquid R supplied to the first row treatment tanks 1A to 1C and the second row treatment tanks 1D to 1F.

  Further, the valve control unit 10a is configured to supply the drainage of the first row treatment tanks 1A to 1C and the second row treatment tank when supplying the cleaning liquid R to the first row treatment tanks 1A to 1C and the second row treatment tanks 1D to 1F. Discharge from 1D to 1F is stopped. In addition, the valve control unit 10a starts the discharge of the drainage liquid after stopping the supply of the cleaning liquid R to the first row treatment tanks 1A to 1C and the second row treatment tanks 1D to 1F. As a result, the supply and discharge of the cleaning liquid R to the first row processing tanks 1A to 1C and the second row processing tanks 1D to 1F are not performed simultaneously, and excessive consumption of the cleaning liquid R can be suppressed. . As a result, energy saving of the cleaning liquid R can be achieved.

  In addition, the processing apparatus A includes an operation unit 10b that instructs the valve control unit 10a to open and close based on the operation of the operator. Further, the valve control unit 10a stores the opening / closing timing input from the operation unit 10b, and automatically opens and closes the first supply valve 2b, the first discharge valve 4e, the second supply valve 6b, and the second discharge valve 8e. As a result, the processing apparatus A uses the first control valve 2b, the first discharge valve 4e, the second supply valve 6b, and the second discharge valve 8e based on the timer set value set by the valve control unit 10a by the operation unit 10b. It is possible to control the opening and closing timing.

In addition, this invention is not limited to the said embodiment, For example, the following modifications can be considered.
(1) In the processing apparatus A according to the above embodiment, the cleaning liquid R is stored in the first row processing tanks 1A to 1C and the second row processing tanks 1D to 1F, and the workpiece is cleaned. It is not limited to. The liquid supplied to the first row treatment tanks 1A to 1C and the second row treatment tanks 1D to 1F may be oil, chemicals, or the like, and the treatment performed by the treatment apparatus A on the workpiece is plating treatment, oil cooling treatment, or the like. But it ’s okay. Further, the fluid supplied to the first row treatment tanks 1A to 1C and the second row treatment tanks 1D to 1F is not limited to liquid, and may be gas such as steam or air.

(2) Further, when opening the first supply valve 2b and the second supply valve 6b, the valve control unit 10a closes the first discharge valve 4e and the second discharge valve 8e and sets the first discharge valve 4e. When the second discharge valve 8e is opened, the first supply valve 2b and the second supply valve 6b are closed, but the present invention is not limited to this. The valve control unit 10a can freely control the supply and discharge of the liquid based on the input to the operation unit 10b.

(3) Moreover, although the processing apparatus A which concerns on the said embodiment shall be provided with the operation part 10b, this invention is not limited to this. The processing apparatus A does not include the operation unit 10b, and the valve control unit 10a stores the opening / closing timings of the first supply valve 2b, the first discharge valve 4e, the second supply valve 6b, and the second discharge valve 8e in the internal memory in advance. It is good also as what you are doing. In this case, the operator does not need to set the timer set value of the processing apparatus A.

(4) In the processing apparatus A according to the above embodiment, the first supply valve 2b, the first discharge valve 4e, the second supply valve 6b, and the second discharge valve 8e are motor-driven electric valves. The present invention is not limited to this. The 1st supply valve 2b, the 1st discharge valve 4e, the 2nd supply valve 6b, and the 2nd discharge valve 8e are good also as a solenoid valve or an electric valve which can adjust flow volume. If the first supply valve 2b, the first discharge valve 4e, the second supply valve 6b, and the second discharge valve 8e are electric valves that can adjust the flow rate, and the valve control unit 10a can control the flow rate, the valve control unit 10a The supply flow rate and the discharge flow rate of the cleaning liquid R can be controlled fully automatically.

(5) In the above embodiment, the processing apparatus A includes the first supply valve 2b, the first discharge valve 4e, the second supply valve 6b, and the second discharge valve 8e. It is not limited. The auxiliary device may include the first supply valve 2b, the first discharge valve 4e, the second supply valve 6b, and the second discharge valve 8e, and the auxiliary device may be mounted on an existing processing apparatus.

(6) FIG. 5 is a modification of the opening / closing timing of the supply / discharge valve in the embodiment. As shown in this figure, at the start of opening / closing timing control, the first supply valve 2b and the second supply valve 6b may be closed, and the first discharge valve 4e and the second discharge valve 8e may be opened. . In this case, the valve control unit 10a can discharge the cleaning liquid remaining in the first row processing tanks 1A to 1C and the second row processing tanks 1D to 1F in advance. Specifically, the first discharge valve 4e and the second discharge valve 8e shown in FIG. 4 are kept for 10 minutes by making the first discharge valve 4e and the second discharge valve 8e normally open (N / O) type valves. Only the control for opening the valve can be made unnecessary. As a result, the automatic cycle time is shortened and power can be saved, and further energy saving is possible.

A …… Processing device 1 …… Processing tank 2b …… First supply valve 4e …… First discharge valve 6b …… Second supply valve 8e …… Second discharge valve 10 …… Control unit 10a …… Valve control unit 10b ...... Operation unit

Claims (5)

An auxiliary device mounted on a processing apparatus that performs a predetermined process on a workpiece using a fluid supplied to the processing tank from the outside and discharges the waste generated in the processing tank by the processing to the outside,
A supply valve for adjusting the supply of fluid to the treatment tank;
A discharge valve for adjusting discharge of the discharge from the treatment tank to the outside;
An auxiliary device comprising: a valve control unit that automatically opens and closes the supply valve and the discharge valve at a predetermined timing.   The valve controller stops the discharge of the discharge from the treatment tank when the fluid is supplied to the treatment tank, and starts the discharge of the discharge after the supply of the fluid to the treatment tank is stopped. The auxiliary device according to claim 1, wherein the supply valve and the discharge valve are controlled. An operation unit for instructing the valve control unit to open and close the supply valve and the discharge valve;
The auxiliary device according to claim 1, wherein the valve control unit automatically opens and closes the supply valve and the discharge valve by storing the opening / closing timing input from the operation unit.   The auxiliary apparatus according to claim 1, wherein the processing apparatus is a cleaning apparatus that performs a cleaning process on a workpiece using a liquid as a cleaning liquid. A processing facility that performs a predetermined process on the workpiece using the fluid supplied to the processing tank from the outside and discharges the waste generated in the processing tank by the processing to the outside,
A supply valve for adjusting the supply of fluid to the treatment tank;
A discharge valve for adjusting discharge of the discharge from the treatment tank to the outside;
And a valve control unit that automatically opens and closes the supply valve and the discharge valve at a predetermined timing.

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