JP2017152524A - Device for dividing planar article - Google Patents

Abstract

PROBLEM TO BE SOLVED: To preferably divide a planar article into a plurality of chips along a division schedule line.SOLUTION: A division device (10) is constructed by comprising division means (12) of pressing a division schedule line (W2) of a planar article (W) through a protection tape (T), and dividing the planar article into a chip (W1) along the division schedule line. The division means comprises: ejecting means (18) of ejecting and dividing the planar article from a back surface side of the planar article through the protection tape; ejecting advancing and retracting means (19) of advancing and retracting the ejecting means to the planar article; pressing means (21) of pressing the planar article opposite to the ejecting means for the planar article from an upper direction; and pressure advancing and retracting means (23) of advancing and retracting the pressure means to the planar article. The planar article is sandwiched by the ejecting means and the pressing means from a vertical direction, and is divided along the division schedule line.SELECTED DRAWING: Figure 8

Description

  The present invention relates to a plate-like material dividing device for applying an external force and dividing a plate-like material such as a semiconductor wafer along a predetermined division line.

  Patent Document 1 discloses a laser processing method that is performed when a chip having a desired shape is formed by dividing a plate-like object such as a semiconductor wafer. In such a laser processing method, for example, a laser beam in an infrared region that is transmissive to a plate-like object is used, and the laser beam is irradiated within a region to be divided with a focusing point. And a deteriorated layer is continuously formed in the inside of a plate-shaped object along a division planned line by irradiation of a laser beam. The planned dividing line whose strength has been reduced by the deteriorated layer is pressed by the piece-like pressing portion from the back side of the plate-like object, and the plate-like object is divided.

  Patent Document 2 discloses a method of generating a circular chip by irradiating a laser beam along a circular street of a plate-like object, and then applying an external force to the irradiation position to divide the plate-like object.

Japanese Patent Application Laid-Open No. 2005-19769 Japanese Patent Laying-Open No. 2015-226924

  However, just pressing from the back side of the plate-like object as in Patent Document 1, there is a problem that it is difficult to divide well, because sufficient force is not applied to the division line to be the outer edge of the chip. . In particular, when a circular chip is generated as in Patent Document 2, there is a problem that it becomes more difficult to apply a force along the scheduled division line, and it becomes more difficult to divide the plate-like object.

  This invention is made | formed in view of this point, and it aims at providing the dividing device of the plate-shaped object which can divide | segment a plate-shaped object into a some chip | tip favorably along a division | segmentation scheduled line.

  The plate-like object dividing device of the present invention is a plate-like object that is attached to the upper surface of a protective tape attached to an annular frame and has a reduced strength along the planned dividing line. A plate-like object dividing device for dividing a plate-like object, a frame holding means having a holding surface for holding an annular frame, a detection means for detecting a line to be divided of a plate-like object attached to a protective tape, and a detection means The dividing line for dividing the plate-like object detected by the step is pressed through a protective tape, and the dividing means for dividing the plate-like object into chips along the dividing line, the frame holding means and the dividing means are relatively moved. And a dividing means, a pushing-up means for pushing up and dividing the plate-like object from the back side of the plate-like object via a protective tape, and a pushing-up / retreating means for moving the pushing-up means back and forth with respect to the plate-like object When, A pressing means that is disposed above the plate-like object and that pushes the plate-like object from above, and a pressing advance / retreat means that advances and retracts the pressing means relative to the plate-like object. It is characterized in that the plate-like object is sandwiched and pressed by the push-up means and the pressing means from above and below to divide along the planned dividing line.

  According to this configuration, while pushing up by the pushing-up means from the back surface (lower surface) side of the plate-like object along the scheduled dividing line, the pushed-up area is pushed from above the plate-like object by the pushing means, and the plate-like object is pushed up and down on both sides It can be divided between. Accordingly, it is possible to favorably apply a pressing force to a position along the planned dividing line. For example, even when a circular chip is generated from a plate-like object, it is possible to perform satisfactory division.

  According to the present invention, since the plate-like object is divided from both upper and lower sides, the plate-like object can be favorably divided into a plurality of chips along the planned division line.

It is a top view of the plate-shaped object which concerns on this Embodiment. It is a schematic perspective view of the dividing device concerning this embodiment. It is a disassembled schematic perspective view of the partial structure of the said dividing device. 4A is a front view of the pressing means, and FIG. 4B is a bottom view of the pressing means. It is explanatory drawing of the state just before dividing | segmenting a plate-shaped object. It is explanatory drawing of the state which has divided | segmented the plate-shaped object. It is explanatory drawing which shows the positional relationship of the press means and pushing-up means during the division | segmentation of a plate-shaped object. It is explanatory drawing of the state which has divided | segmented the plate-shaped object. It is explanatory drawing of the state which has divided | segmented the plate-shaped object with the dividing device which concerns on a modification. It is a schematic perspective view of the division | segmentation apparatus which concerns on another modification. It is explanatory drawing of the state which has divided | segmented the plate-shaped object in the modification of FIG.

  Hereinafter, a dividing device according to the present invention will be described with reference to the accompanying drawings. First, a plate-like object that is divided by the dividing device according to the present embodiment will be described with reference to FIG. FIG. 1 is a plan view of a plate-like object according to the present embodiment.

  As shown in FIG. 1, the plate-like object W is formed in a disc shape made of a quartz glass substrate, a sapphire substrate, or the like, and is partitioned by a circular scheduled division line W2 that follows the outline of the plurality of chips W1 to be formed. . In addition, the plate-like object W should just be what can form a deteriorated layer so that it may mention later, and may be a semiconductor wafer provided with the semiconductor substrate used as materials other than the above, and may be a substrate formed with other materials. . The plate-like object W is held on the annular frame F by attaching the lower surface side to the upper surface of the protective tape T attached to the annular frame F.

  Next, the dividing apparatus according to the present embodiment will be described with reference to FIGS. 2 and 3. FIG. 2 is a schematic perspective view of the dividing apparatus according to the present embodiment. FIG. 3 is an exploded schematic perspective view of a partial configuration of the dividing device. The dividing apparatus according to the present embodiment is not limited to the configuration shown in FIGS. The dividing device may have any configuration as long as the plate-like object can be divided.

  As shown in FIG. 2, the dividing apparatus 10 includes a frame holding unit 11, a dividing unit 12 that divides the plate-like object W into chips W <b> 1 (see FIG. 1) along the planned division line W <b> 2, and a frame holding unit 11. Moving means 13 for relatively moving the dividing means 12 is provided.

  The frame holding means 11 includes a frame holding member 15 formed in an annular shape, and the upper surface of the frame holding member 15 is a holding surface 15a on which the annular frame F (see FIG. 1) is placed. The frame holding member 15 is made of a magnetic material, and the annular frame F placed on the holding surface 15a is attracted and held by the magnetic force. Note that the annular frame F may be held by the frame holding unit 11 by providing a plurality of clamp mechanisms on the outer periphery of the frame holding member 15 and holding the annular frame F by the clamp mechanisms.

  The dividing means 12 includes a push-up means 18 and a push-up / back-down means 19 provided on the inner lower side of the frame holding member 15. The dividing means 12 includes a pressing means 21 provided above the frame holding member 15, an L-shaped frame 22 that supports the pressing means 21 on the tip side, and a lower end side of the frame 22 that supports the frame 22 and the pressing means. And press advance / retreat means 23 comprising an air cylinder for moving the means 21 in the vertical direction.

  As shown in FIG. 3, the push-up advance / retreat means 19 is constituted by an air cylinder disposed so as to stand up from the base 25. The push-up means 18 includes a piston rod 18a that is advanced and retracted in the vertical direction by the push-up advance / retreat means 19, and a ball member 18b that is rotatably attached to the tip of the piston rod 18a.

  The moving means 13 includes a pair of guide rails 30 and 31 provided on both sides of the base 25 in the X direction and parallel to the Y direction, and a motor-driven Y table slidably installed on the pair of guide rails 30 and 31. 32. The moving means 13 is provided on both sides of the Y table 32 in the Y direction and is parallel to the X direction, and is driven by a motor that is slidably installed on the pair of guide rails 34, 35. And an X table 36.

  The Y table 32 is formed in a frame shape with a rectangular opening at the center, and the X table 36 is formed in a plate shape with a circular opening 37 (shown in FIG. 3) in the center. One of the guide rails 30 and 31 parallel to the Y direction is formed with a guide groove 30a having a V-shaped cross section on the upper surface thereof. A protrusion 38 provided on the lower surface of the Y table 32 is slidably fitted in the guide groove 30a (see FIG. 2). Further, one guide rail 34 of the guide rails 34, 35 parallel to the X direction is formed with a guide groove 34a having a V-shaped cross section on the upper surface thereof. A protrusion 39 provided on the lower surface of the X table 36 is slidably fitted into the guide groove 34a.

  Nut portions 41 and 42 are provided on the lower surface side of the Y table 32 and the X table 36, and ball screws 43 and 44 are screwed onto the nut portions 41 and 42. Drive motors 47 and 48 are connected to one end of a ball screw 43 for the Y table 32 and a ball screw 44 for the X table 36, respectively. The ball screws 43 and 44 are rotationally driven by the drive motors 47 and 48, and the frame holding means 11 on the X table 36 is moved along the guide rails 30, 31, 34, and 35 in the X direction and the Y direction.

  Returning to FIG. 2, the moving unit 13 further includes a rotating unit 50 that rotates the frame holding unit 11 around the Z axis. The rotation means 50 includes a support flange 51 that is rotatably fitted to an inner peripheral surface of an opening 37 (see FIG. 3) of the X table 36, and a rotation shaft of a drive motor provided on the X table 36 (both not shown). ), And an endless belt 55 wound around the pulley 53 and the support flange 51. The rotation means 50 rotates the support flange 51 via the pulley 53 and the endless belt 55 by driving the drive motor. Then, the frame holding means 11 supported by the support flange 51 via the angle changing means 57 is rotated.

  The angle changing means 57 is provided with a plurality (three in this embodiment) of air cylinders 58 provided on the support flange 51 and supporting the frame holding means 11. Each air cylinder 58 is disposed below the frame holding means 11 and is connected to the upper end side of the piston rod via a ball joint structure or the like (not shown) to move the frame holding means 11 forward and backward. In addition, each air cylinder 58 is independently controlled in the amount of vertical movement of the piston rod. Thereby, if the amount of advance and retreat in the vertical direction of all the air cylinders 58 is the same, the holding surface 15a of the frame holding member 15 is moved up and down while maintaining parallel to the surface (XY plane) perpendicular to the vertical direction. . On the other hand, the angle of the holding surface 15a with respect to the vertical direction can be changed by changing the vertical movement amount of the air cylinder 58. At this time, the relative angle between the piston rod of the air cylinder 58 and the frame holding member 15 is changed by the ball joint structure or the like.

  In the dividing device 10, a detecting means 60 for detecting a division line W <b> 2 (see FIG. 1) of the plate-like object W supported by the annular frame F held by the frame holding member 15 via the protective tape T. Is further provided. The detection means 60 is composed of an optical system, an image sensor (CCD), and the like, and is attached to an L-shaped support column 61. The support column 61 is provided so as to be vertically movable and rotatable as indicated by an arrow in FIG. 2, and is provided so that the relative position of the detection means 60 with respect to the plate-like object W held by the frame holding member 15 can be adjusted.

  Next, the pressing unit will be described with reference to FIGS. 4A and 4B. 4A is a front view of the pressing means, and FIG. 4B is a bottom view of the pressing means. As shown in FIGS. 4A and 4B, the pressing means 21 includes a columnar portion 65 whose center axis position C is directed in the vertical direction, and four contact bodies provided so as to protrude downward from the lower surface of the columnar portion 65. 66. The contact body 66 is formed of a soft member such as resin, and when the plate-like object W (not shown in FIG. 4B) is divided, the contact body 66 comes into contact with the upper surface of the plate-like object W and easily deforms while pressing from above. To provide a buffering action. The lower surface of the contact body 66 is formed by an inclined surface that rises as it approaches the central axis position C of the columnar portion 65, and the contact area varies depending on the displacement or deformation of the divided plate-like object W as shown in FIG. 4A. It is formed to expand.

  Next, a method for dividing the plate-like object W by the dividing apparatus 10 according to the present embodiment will be described with reference to FIGS. FIG. 5 is an explanatory diagram of a state immediately before dividing the plate-like object. 6 and 8 are explanatory diagrams of a state in which the plate-like object is divided. FIG. 7 is an explanatory diagram showing the positional relationship between the pressing means and the pushing-up means during the division of the plate-like object.

  Before performing the division by the dividing device 10, in the plate-like object W, a deteriorated layer is continuously formed in the interior along the planned division line W2 by irradiation with a laser beam in advance. The deteriorated layer is in a state where the strength is lowered along the division line W2. Further, the plate-like object W is stuck and held on the protective tape T attached to the annular frame F.

  First, as shown in FIG. 5, the annular frame F is placed on the holding surface 15 a of the frame holding member 15 integrally with the plate-like object W, and the annular frame F is held by magnetic force. In this state, the detection unit 60 (see FIG. 2) detects the division line W2 of the plate-like object W, and the moving unit 13 (see FIG. 2) is driven according to the detection result, and the frame holding member 15 and the plate The plate-like object W is aligned by moving the object W in the X and Y directions. By this alignment, the pressing means 21 is arranged above the dividing position at the beginning of the plate-like object W, and the pushing-up means 18 is arranged below, and positioned so that the pressing means 21 and the pushing-up means 18 face the plate-like object W. It is done.

  After this positioning, as shown in FIG. 6, the push-up advance / retreat means 19 is driven, and the push-up means 18 is raised and advanced with respect to the plate-like object W. Thereby, the plate-like object W is pushed up from the back surface (lower surface) side of the plate-like object W through the protective tape T, and is bent and divided by the division line W2 so that the front surface (upper surface) side becomes the mountain side. Is added. At the same time, the pressing advance / retreat means 23 is driven, and the pressing means 21 is lowered to advance relative to the plate-like object W. As a result, a pressing force is applied to the plate-like object W from above, and the plate-like object W is pressed by the push-up means 18 and the pressing means 21 so as to sandwich the plate-like object from above and below, and the plate-like object is formed along the scheduled dividing line W2. The object W is divided. At this time, since the pressing unit 21 presses the plate-like object W from above, the bending angle of the dividing unit W2 by the push-up unit 18 can be reduced, and a crack can be easily generated in the dividing unit line W2.

  When dividing in this way, as shown in FIG. 7, for example, the four contact bodies 66 are positioned so as to contact the four chips W1 arranged in two rows and two columns, and these are pressed from above. . On the other hand, the ball member 18b of the push-up means 18 is brought into point contact with a portion W3 surrounded by the outer edges of the four chips W1. Therefore, although each chip W1 is lifted by the pushing-up by the pushing-up means 18, the plate-like object W is increased by increasing the force that is pressed from above by each contact body 66 and causes a crack to occur in the division line W2 that forms the portion W3. Is divided. When the number of chips W1 formed is one to three less than the state shown in FIG. 7, the number of chips W1 that the contact body 66 contacts decreases accordingly.

  Further, the push-up means 18 may be moved relative to the plate-like object W by the moving means 13 while the plate-like object W is being pressed as shown in FIG. For example, as shown by the arrow in FIG. 7, the locus of the contact position of the ball member 18b may be along a planned division line W2 that forms the outer edge of the portion W3. In this case, since the ball member 18b rolls in the vicinity of the division planned line W2, the pushing force can be smoothly applied without being restricted by the relative movement direction of the pushing means 18. Therefore, various movement directions of the ball member 18b can be adopted so that cracks are likely to occur in the division line W2 as the movement direction.

  Further, as shown in FIG. 8, while the plate-like object W is being pressed by the pushing-up means 18 and the pressing means 21, the advancing / retreating amounts in the vertical direction of the plurality of air cylinders 58 are changed, so The angle of the object W may be changed. At this time, with respect to the vertical direction, which is the sandwiching direction of the push-up means 18 and the pressing means 21, the dividing line W2 is also inclined and receives a pressing force according to the change in the angle of the plate-like object W. As a result, the angle of the tip W1 to which the sandwiching force is applied by the push-up means 18 and the pressing means 21 can be changed, and the force applied to the planned division line W2 can be increased to allow better division.

  After being divided by the planned dividing line W2 around the position pushed up by the push-up means 18, the push-up advance / retreat means 19 and the press advance / retreat means 23 are driven, and the push-up means 18 and the press means 21 are retreated with respect to the plate-like object W. . Then, the frame holding member 15 and the plate-like object W are moved in the X and Y directions, and the pressing means 21 and the pushing-up means 18 are positioned with respect to the division-scheduled line W2 that is not divided in the adjacent region, and the same as described above. This division is repeated.

  According to such an embodiment, since the plate-like object W is pressed and divided so as to be sandwiched from both the upper and lower sides, the force applied to the planned dividing line W2 is increased as compared with the case where the plate-like object W is pressed and divided only from the lower side. Can be made. Thereby, even when the division | segmentation scheduled line W2 becomes circular, it can divide | segment into the some chip | tip W1 favorably.

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, direction, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, in the push-up means 18, the ball member 18b pushes the plate-like object W through the protective tape T. However, the push-up means 18 is not limited to this, and various types such as a push-up with a roller or blade-like member are used. Can be changed. However, when the ball member 18b is used, it can be rolled in various directions while being in contact with the protective tape T, and the position of the push-up means 18 can be changed smoothly while the plate-like object W is pushed up.

  Moreover, the form of the pressing member 21 is merely an example, and may be changed to another shape or the like as long as the same function as that of the above embodiment is exhibited.

  Further, the pressing means 21 and the pushing-up means 18 can be variously modified, and for example, may be configured as shown in FIGS. FIG. 9 is an explanatory diagram of a state in which the plate-like object is divided by the dividing apparatus according to the modification, and FIG. 10 is a schematic perspective view of the dividing apparatus according to another modification. 9, the pressing means 21 includes a ball member 71 and a ball holding body 72 that holds the ball member 71, and the ball member 71 is formed to be rotatable at the tip. The push-up means 18 comes into surface contact with the protective tape T attached to the plate-like object W, and an elastic member 74 made of rubber or the like that supports the entire back surface (lower surface in the figure) of the plate-like object W via the protective tape T. It has. In FIG. 9, the annular frame F is also held from the lower side by the elastic member 74 and functions as the frame holding means. The frame F may be sandwiched.

  In the modification of FIG. 9, when the plate-like object W is divided, after the ball member 71 of the pressing means 21 is positioned on the planned division line W2, the ball member 71 is pressed while rolling along the planned division line W2. At this time, the elastic member 74 is elastically deformed so as to be recessed in accordance with the deformation of the plate-like object W. Accordingly, a pressing force is applied so that the plate-like object W is sandwiched between the ball member 71 and the elastic member 74 from above and below, and the plate-like object W is divided along the division line W2.

  In the modified example of FIG. 10, the division lines W2 of the plate-like object W are in a lattice shape to form a rectangular chip W1. In the modification of FIG. 10, the pressing means 21 includes a pressing body 76 made of a long object having a lower surface on the plate-like object W side as a pressing surface 76a. Further, the push-up means 18 includes a push-up body 77 made of a long object whose upper surface on the plate-like object W side is a push-up surface 77a. The pressing surface 76a and the push-up surface 77a are formed in a rectangular shape, and the length in the longitudinal direction is the same as or longer than the diameter of the plate-like object W, and at least the same length as the outer diameter of the plate-like object W It has become.

  The annular frame holding member 15 is not supported by the X table 36 of the moving means 13 but is supported at a predetermined height position above the X table 36 via a support structure (not shown). The pressing body 76 is provided so as to be movable in the vertical direction by a pressing advance / retreat means (not shown). The push-up body 77 is provided in the X table 36 and is moved in the X direction and the Y direction by driving the moving means 13 while the position in the Z direction is fixed. The position in the Z direction on the push-up surface 77 a of the push-up body 77 is set to be substantially the same as the holding surface 15 a of the frame holding means 15.

  FIG. 11 is an explanatory diagram of a state where the plate-like object is divided in the modification of FIG. As shown in FIG. 11, the pressing surface 76a and the push-up surface 77a are curved surfaces that gently curve while inclining upward to the right in FIG. 10 when viewed from a direction parallel to the upper and lower surfaces of the plate-like object W. Is formed. The push-up surface 77a is formed with a convex surface 77b that swells from the center in the left-right direction in the drawing to the right. The pressing surface 76a is formed with a concave surface 76b at a position facing the portion that becomes the convex surface 77b, and the concave surface 76b and the convex surface 77b are formed correspondingly. ing.

  When the plate-like object W is divided in the modification of FIG. 10, after the pressing body 76 and the push-up body 77 are positioned on the planned division line W2, the pressing body 76 is moved downward to divide the plate-like object W. From above and below. As a result, a pressing force is applied to the division planned line W2 so as to follow the shape of the concave surface 76b and the convex surface 77b, and the plate-like object W is divided along the division planned line W2.

  Moreover, a load cell (load detection part) may be provided in the pressing means 21, and the pressing force to the plate-shaped object W by the pressing means 21 may be measured with a load cell. In this case, it is possible to adjust the pressing force of the pressing means 21 to be constant or change by controlling the driving amount of the pressing advance / retreat means 23 according to the measurement result of the load cell.

  Further, the rotation means 50 is not limited to the configuration using the endless belt 55 and the pulley 53 as described above, and various changes can be made. For example, it is good also as a structure provided with the drive gear which forms a driven gear along the outer periphery of the cyclic | annular flame | frame holding member 15, meshes with this driven gear, and transmits drive force, such as a motor, to a driven gear.

  As described above, the present invention has an effect that a plate-like object can be favorably divided into a plurality of chips along a planned division line, and in particular, a plurality of chips are divided from a plate-like object. It is useful for the dividing device to generate.

DESCRIPTION OF SYMBOLS 10 Dividing apparatus 11 Frame holding means 12 Dividing means 13 Moving means 18 Pushing means 18b Ball member 19 Pushing forward / backward means 21 Pressing means 23 Pressing forward / backward means 57 Angle changing means 60 Detection means F Annular frame T Protection tape W Plate-like object W1 Chip W2 Scheduled line

Claims (5)

A plate-like material dividing device that divides a plate-like object attached to the upper surface of a protective tape attached to an annular frame and having a reduced strength along the planned dividing line along the planned dividing line. There,
Frame holding means having a holding surface for holding the annular frame, detection means for detecting a dividing line of the plate attached to the protective tape, and detection of the plate detected by the detection means A dividing means for pressing the division line through the protective tape and dividing the plate-like material into chips along the division line, and a movement for relatively moving the frame holding means and the dividing means Means,
With
The dividing means includes a pushing-up means for pushing up and dividing the plate-like object from the back surface side of the plate-like object through the protective tape, and the plate-like object facing the pushing-up means and above the plate-like object. And a pressing means for pressing the plate-shaped object from above,
A plate-like object dividing device characterized in that the push-up means and the pressing means sandwich and press the plate-like object from above and below to divide it along the planned dividing line. The pressing means is formed such that a ball member is rotatable at the tip,
The push-up means is composed of an elastic member that supports at least the entire back surface of the plate-like object,
2. The plate-like object dividing device according to claim 1, wherein the ball member of the pressing means is pressed along the planned division line of the plate-like material and is divided by being sandwiched by the elastic member of the push-up means.   The pressing means and the pushing-up means have at least a pressing surface and a pushing surface having a length equal to the outer diameter of the plate-like object, and the pressing surface or the pushing surface corresponds to a concave surface or a convex surface. 2. The plate-like object dividing device according to claim 1, wherein the plate-like object is divided by pressing between the concave surface and the convex surface along the planned dividing line of the plate-like material. An angle changing means disposed below the frame holding means and changing an angle of the holding surface of the frame holding means with respect to the advancing and retreating direction of the push-up means and the pressing means;
2. The plate-like object dividing device according to claim 1, wherein the plate-like object dividing line is divided by pressing between the push-up means and the pressing means in an oblique direction with respect to the division line of the plate-like object.   5. The plate-like object dividing device according to claim 1, wherein a ball member is rotatably mounted at the tip of the push-up means.

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