JP2017143057A - Rf端子から隣接する非rf端子への電気絶縁破壊を避けるための装置および方法 - Google Patents
Rf端子から隣接する非rf端子への電気絶縁破壊を避けるための装置および方法 Download PDFInfo
- Publication number
- JP2017143057A JP2017143057A JP2016234648A JP2016234648A JP2017143057A JP 2017143057 A JP2017143057 A JP 2017143057A JP 2016234648 A JP2016234648 A JP 2016234648A JP 2016234648 A JP2016234648 A JP 2016234648A JP 2017143057 A JP2017143057 A JP 2017143057A
- Authority
- JP
- Japan
- Prior art keywords
- power
- capacitors
- channel
- channels
- slip ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000015556 catabolic process Effects 0.000 title claims description 9
- 238000000034 method Methods 0.000 title description 49
- 239000003990 capacitor Substances 0.000 claims abstract description 211
- 238000002955 isolation Methods 0.000 claims abstract description 61
- 238000012545 processing Methods 0.000 claims abstract description 49
- 238000009413 insulation Methods 0.000 claims description 38
- 238000010438 heat treatment Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 abstract description 59
- 230000000903 blocking effect Effects 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 57
- 230000008569 process Effects 0.000 description 35
- 238000010586 diagram Methods 0.000 description 22
- 239000007789 gas Substances 0.000 description 17
- 239000000758 substrate Substances 0.000 description 12
- 241000239290 Araneae Species 0.000 description 10
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 10
- 238000000151 deposition Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000008021 deposition Effects 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 238000009826 distribution Methods 0.000 description 6
- 238000012546 transfer Methods 0.000 description 6
- 238000000576 coating method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 210000002304 esc Anatomy 0.000 description 4
- 229910001338 liquidmetal Inorganic materials 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000011112 process operation Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000013500 data storage Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000012636 effector Substances 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- AUEPDNOBDJYBBK-UHFFFAOYSA-N [Si].[C-]#[O+] Chemical compound [Si].[C-]#[O+] AUEPDNOBDJYBBK-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011554 ferrofluid Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- -1 oxides Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- WNUPENMBHHEARK-UHFFFAOYSA-N silicon tungsten Chemical compound [Si].[W] WNUPENMBHHEARK-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32577—Electrical connecting means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32697—Electrostatic control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32697—Electrostatic control
- H01J37/32706—Polarising the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R39/00—Rotary current collectors, distributors or interrupters
- H01R39/02—Details for dynamo electric machines
- H01R39/08—Slip-rings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (21)
- プラズマ処理チャンバに電力を提供するためのシステムであって、
電極を含むチャンバと、
前記電極にRF電力を提供するための無線周波(RF)電源と、
前記電極を加熱するための第1の加熱器に非RF電力を提供するための非RF電源と、
第1のコンデンサおよび第2のコンデンサを有する底部インターフェースと、前記第1および第2のコンデンサはそれぞれ入力端および出力端を有し、前記RF電源は、前記第1および第2のコンデンサの前記入力端に結合され、前記非RF電源は、前記第1および第2のコンデンサの前記出力端に結合され、
複数の入力端および複数の出力端を有するスリップリングと、前記スリップリングの前記入力端は、前記第1および第2のコンデンサの前記出力端に結合され、
第3のコンデンサおよび第4のコンデンサを有する上部インターフェースと、前記第3および第4のコンデンサはそれぞれ入力端および出力端を有し、前記第3および第4のコンデンサの前記入力端は、前記スリップリングの前記出力端に結合され、かつ前記電極の前記第1の加熱器に通じる第1および第2の加熱器接続線に結合され、前記第3および第4のコンデンサの前記出力端は前記電極に接続することを備え、
それにより、前記RF電力は前記第1および第2のコンデンサ、前記スリップリング、ならびに前記第3および第4のコンデンサを介して前記電極に伝送され、前記非RF電力は、前記第1および第2のコンデンサを含むセットと前記第3および第4のコンデンサを含むセットとの間に位置された前記スリップリングを介して伝送される
システム。 - 請求項1に記載のシステムであって、前記第1および第2のコンデンサは、前記非RF電力が前記RF電源に向けて伝送し返されることを遮断し、第3および第4のコンデンサは、前記非RF電力が前記電極に向けて伝送されることを遮断するシステム。
- 請求項1に記載のシステムであって、前記非RF電源は、複数のチャネルのうちの第1のチャネルおよび第2のチャネルに関連付けられ、前記第1のチャネルは、前記第1および第3のコンデンサを含み、前記第2のチャネルは、前記第2および第4のコンデンサを含むシステム。
- 請求項3に記載のシステムはさらに、
前記電極を加熱するための第2の加熱器であって、前記複数のチャネルのうちの第3のチャネルおよび第4のチャネルに関連付けられている第2の加熱器を備え、前記第1、第2、第3および第4のチャネルは、前記底部インターフェースの一部および前記上部インターフェースの一部の内部に組み込まれ、前記第1、第2、第3および第4のチャネルは、前記RF電力と前記非RF電力との両方を伝送するために前記スリップリングの一部を含む
、システム。 - 請求項1に記載のシステムであって、前記スリップリングは、前記RF電力と前記非RF電力との両方を同時に伝送するように構成され、前記スリップリングは、前記上部インターフェースと共に前記電極の回転を可能にし、前記底部インターフェースは固定されている、システム。
- 請求項1に記載のシステムであって、前記底部インターフェースは第1のプリント回路基板によって画定され、前記上部インターフェースは第2のプリント回路基板によって画定されている、システム。
- 請求項1に記載のシステムであって、前記RF電力は、複数のチャネルの間で分配され、前記複数のチャネルは、第1のチャネルおよび第2のチャネルを含み、前記第1のチャネルは前記第1および第3のコンデンサを含み、前記第2のチャネルは前記第2および第4のコンデンサを含むシステム。
- 請求項7に記載のシステムであって、各前記チャネルには、電圧のレベルおよび電圧の極性が割り当てられて、前記チャネルのうちの任意の2つの隣接するチャネル間における電圧の破壊の変化を低減し、前記チャネル間で電圧降下を均等に分配させるシステム。
- プラズマ処理チャンバに電力を提供するためのシステムであって、
電極を含むチャンバと、
前記電極にRF電力を提供するための無線周波(RF)電源と、
前記電極の第1の加熱器に関連して配置されている熱電対によって測定された温度信号を受信するための温度制御装置と、
第1のコンデンサおよび第2のコンデンサを有する底部インターフェースと、前記第1および第2のコンデンサはそれぞれ入力端および出力端を有し、前記RF電源は前記第1および第2のコンデンサの前記入力端に結合され、前記温度制御装置は前記第1および第2のコンデンサの前記出力端に結合され、
複数の入力端および複数の出力端を有するスリップリングと、前記スリップリングの前記入力端は前記第1および第2のコンデンサの前記出力端に結合され、
第3のコンデンサおよび第4のコンデンサを有する上部インターフェースと、前記第3および第4のコンデンサはそれぞれ入力端および出力端を有し、前記第3および第4のコンデンサの前記入力端は前記スリップリングの前記出力端に結合され、かつ前記熱電対の熱電対接合部に通じる熱電対接続線に結合され、前記第3および第4のコンデンサの前記出力端は前記電極に接続し、
それにより、前記RF電力は、前記第1および第2のコンデンサ、前記スリップリング、ならびに前記第3および第4のコンデンサを介して前記電極に伝送され、前記温度信号は、前記第1および第2のコンデンサを含むセットと前記第3および第4のコンデンサを含むセットとの間に位置された前記スリップリングを介して伝送される
システム。 - 請求項9に記載のシステムであって、前記第1および第2のコンデンサが、前記非RF電力が前記RF電源に向けて伝送し返されることのを遮断し、第3および第4のコンデンサが、前記非RF電力が前記電極に向けて伝送されることを遮断する、システム。
- 請求項9に記載のシステムであって、前記温度制御装置は、複数のチャネルのうちの第1のチャネルおよび第2のチャネルに関連付けられ、前記第1のチャネルは前記第1および第3のコンデンサを含み、前記第2のチャネルは前記第2および第4のコンデンサを含む、システム。
- 請求項11に記載のシステムはさらみ、
前記電極の第2の加熱器に関連して位置された第2の加熱器であって、前記複数のチャネルのうちの第3のチャネルおよび第4のチャネルに関連付けられている第2の加熱器を備え、前記第1、第2、第3および第4のチャネルは、前記底部インターフェースの一部および前記上部インターフェースの一部の内部に組み込まれ、前記第1、第2、第3および第4のチャネルは、前記RF電力と前記温度信号との両方を伝送するために前記スリップリングの一部を含む
、システム。 - 請求項9に記載のシステムであって、前記スリップリングは、前記RF電力と前記温度信号との両方を同時に電送するように構成され、前記スリップリングは、前記上部インターフェースと共に前記電極の回転を可能にし、前記底部インターフェースは固定されている、システム。
- 請求項9に記載のシステムであって、前記底部インターフェースは第1のプリント回路基板によって画定され、前記上部インターフェースは第2のプリント回路基板によって画定されている、システム。
- 請求項9に記載のシステムであって、前記RF電力は複数のチャネルの間で分配され、前記複数のチャネルは第1のチャネルおよび第2のチャネルを含み、前記第1のチャネルは前記第1および第3のコンデンサを含み、前記第2のチャネルは前記第2および第4のコンデンサを含む、システム。
- 絶縁システムであって、
コンデンサの第1のアレイを含む上部インターフェースプレートと、前記第1のアレイはコンデンサの複数のグループを含み、前記第1のアレイのコンデンサの各グループは、複数のチャネルの1つに関連付けられ、
コンデンサの第2のアレイを含む底部インターフェースプレートと、前記第2のアレイはコンデンサの複数のグループを含み、前記第2のアレイのコンデンサの各グループは複数のチャネルの1つに関連付けられ、
前記上部インターフェースプレートの前記チャネルおよび前記底部インターフェースプレートの前記チャネルに接続されているスリップリングと、を備え、
前記上部インターフェースプレートは回転するように構成され、前記底部インターフェースプレートは固定されるように構成され、
前記スリップリングは前記上部インターフェースプレートと前記底部インターフェースプレートとの間で無線周波(RF)電力と非RF電力との両方を伝送するように構成され、
コンデンサの前記第1のアレイとコンデンサの前記第2のアレイとはそれぞれ、前記非RF電力を遮断するように構成されている、
絶縁システム。 - 請求項16に記載の絶縁システムであって、前記第1のアレイのコンデンサの前記グループの1つは入力端および出力端を有し、前記入力端は加熱器要素に接続され、前記出力端はプラズマチャンバの電極に接続されている絶縁システム。
- 請求項16に記載の絶縁システムであって、前記第2のアレイのコンデンサの前記グループの1つは入力端および出力端を有し、前記入力端はRF電源に接続され、前記出力端が非RF電源に接続されている絶縁システム。
- 請求項16に記載の絶縁システムであって、前記第1のアレイのコンデンサの前記グループの1つは入力端および出力端を有し、前記入力端は熱電対に接続され、前記出力端はプラズマチャンバの電極に接続されている絶縁システム。
- 請求項16に記載の絶縁システムであって、前記第2のアレイのコンデンサの前記グループの1つは入力端および出力端を有し、前記入力端はRF電源に接続され、前記出力端は温度制御装置に接続されているRFフィルタに接続されている絶縁システム。
- 請求項16に記載の絶縁システムであって、コンデンサの前記第1のアレイは、前記非RF電力による電極の損壊を保護するために前記非RF電力を遮断するように構成され、コンデンサの前記第2のアレイは、前記非RF電力によるRF電源の損壊を保護するために前記非RF電力を遮断するように構成されている絶縁システム。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562265605P | 2015-12-10 | 2015-12-10 | |
US62/265,605 | 2015-12-10 | ||
US15/048,796 | 2016-02-19 | ||
US15/048,796 US10043636B2 (en) | 2015-12-10 | 2016-02-19 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017143057A true JP2017143057A (ja) | 2017-08-17 |
JP2017143057A5 JP2017143057A5 (ja) | 2020-01-16 |
JP6879724B2 JP6879724B2 (ja) | 2021-06-02 |
Family
ID=59020138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016234648A Active JP6879724B2 (ja) | 2015-12-10 | 2016-12-02 | Rf端子から隣接する非rf端子への電気絶縁破壊を避けるための装置および方法 |
Country Status (3)
Country | Link |
---|---|
US (6) | US10043636B2 (ja) |
JP (1) | JP6879724B2 (ja) |
KR (1) | KR20170074750A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021093462A (ja) * | 2019-12-11 | 2021-06-17 | 東京エレクトロン株式会社 | 回転駆動装置、基板処理装置及び回転駆動方法 |
Families Citing this family (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9132436B2 (en) | 2012-09-21 | 2015-09-15 | Applied Materials, Inc. | Chemical control features in wafer process equipment |
US10256079B2 (en) | 2013-02-08 | 2019-04-09 | Applied Materials, Inc. | Semiconductor processing systems having multiple plasma configurations |
US9966240B2 (en) | 2014-10-14 | 2018-05-08 | Applied Materials, Inc. | Systems and methods for internal surface conditioning assessment in plasma processing equipment |
US11637002B2 (en) | 2014-11-26 | 2023-04-25 | Applied Materials, Inc. | Methods and systems to enhance process uniformity |
US20160225652A1 (en) | 2015-02-03 | 2016-08-04 | Applied Materials, Inc. | Low temperature chuck for plasma processing systems |
KR102587203B1 (ko) * | 2015-07-13 | 2023-10-10 | 브룩스 오토메이션 인코퍼레이티드 | 온 더 플라이 자동 웨이퍼 센터링 방법 및 장치 |
US9741593B2 (en) | 2015-08-06 | 2017-08-22 | Applied Materials, Inc. | Thermal management systems and methods for wafer processing systems |
US10504700B2 (en) | 2015-08-27 | 2019-12-10 | Applied Materials, Inc. | Plasma etching systems and methods with secondary plasma injection |
US10043636B2 (en) * | 2015-12-10 | 2018-08-07 | Lam Research Corporation | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal |
US10504754B2 (en) | 2016-05-19 | 2019-12-10 | Applied Materials, Inc. | Systems and methods for improved semiconductor etching and component protection |
US10546729B2 (en) | 2016-10-04 | 2020-01-28 | Applied Materials, Inc. | Dual-channel showerhead with improved profile |
US10431429B2 (en) | 2017-02-03 | 2019-10-01 | Applied Materials, Inc. | Systems and methods for radial and azimuthal control of plasma uniformity |
US10943834B2 (en) | 2017-03-13 | 2021-03-09 | Applied Materials, Inc. | Replacement contact process |
US11276559B2 (en) | 2017-05-17 | 2022-03-15 | Applied Materials, Inc. | Semiconductor processing chamber for multiple precursor flow |
US11276590B2 (en) | 2017-05-17 | 2022-03-15 | Applied Materials, Inc. | Multi-zone semiconductor substrate supports |
US10920320B2 (en) | 2017-06-16 | 2021-02-16 | Applied Materials, Inc. | Plasma health determination in semiconductor substrate processing reactors |
US10727080B2 (en) | 2017-07-07 | 2020-07-28 | Applied Materials, Inc. | Tantalum-containing material removal |
KR102269344B1 (ko) * | 2017-07-25 | 2021-06-28 | 주식회사 원익아이피에스 | 기판처리장치 |
US10297458B2 (en) | 2017-08-07 | 2019-05-21 | Applied Materials, Inc. | Process window widening using coated parts in plasma etch processes |
US10170287B1 (en) * | 2017-10-16 | 2019-01-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber |
TWI768849B (zh) * | 2017-10-27 | 2022-06-21 | 美商應用材料股份有限公司 | 具有空間分離的單個晶圓處理環境 |
US11664206B2 (en) * | 2017-11-08 | 2023-05-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | Arcing protection method and processing tool |
JP7323525B2 (ja) * | 2017-12-05 | 2023-08-08 | ラム リサーチ コーポレーション | エッジリング摩耗補償のためのシステムおよび方法 |
US10903054B2 (en) | 2017-12-19 | 2021-01-26 | Applied Materials, Inc. | Multi-zone gas distribution systems and methods |
US11328909B2 (en) | 2017-12-22 | 2022-05-10 | Applied Materials, Inc. | Chamber conditioning and removal processes |
US10854426B2 (en) | 2018-01-08 | 2020-12-01 | Applied Materials, Inc. | Metal recess for semiconductor structures |
US10964512B2 (en) | 2018-02-15 | 2021-03-30 | Applied Materials, Inc. | Semiconductor processing chamber multistage mixing apparatus and methods |
US10679870B2 (en) | 2018-02-15 | 2020-06-09 | Applied Materials, Inc. | Semiconductor processing chamber multistage mixing apparatus |
US10319600B1 (en) | 2018-03-12 | 2019-06-11 | Applied Materials, Inc. | Thermal silicon etch |
KR102437306B1 (ko) * | 2018-03-19 | 2022-08-29 | 베이징 나우라 마이크로일렉트로닉스 이큅먼트 씨오., 엘티디. | 전력 급전 기구, 회전 베이스 장치 및 반도체 가공 장비 |
US10699879B2 (en) | 2018-04-17 | 2020-06-30 | Applied Materials, Inc. | Two piece electrode assembly with gap for plasma control |
US10886137B2 (en) | 2018-04-30 | 2021-01-05 | Applied Materials, Inc. | Selective nitride removal |
US10872778B2 (en) | 2018-07-06 | 2020-12-22 | Applied Materials, Inc. | Systems and methods utilizing solid-phase etchants |
US10755941B2 (en) | 2018-07-06 | 2020-08-25 | Applied Materials, Inc. | Self-limiting selective etching systems and methods |
US10672642B2 (en) | 2018-07-24 | 2020-06-02 | Applied Materials, Inc. | Systems and methods for pedestal configuration |
US10991550B2 (en) * | 2018-09-04 | 2021-04-27 | Lam Research Corporation | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system |
US20200281066A1 (en) * | 2018-09-11 | 2020-09-03 | Hypertherm, Inc. | Connector in a Plasma Arc Torch System |
US10892198B2 (en) | 2018-09-14 | 2021-01-12 | Applied Materials, Inc. | Systems and methods for improved performance in semiconductor processing |
US11049755B2 (en) | 2018-09-14 | 2021-06-29 | Applied Materials, Inc. | Semiconductor substrate supports with embedded RF shield |
US11062887B2 (en) | 2018-09-17 | 2021-07-13 | Applied Materials, Inc. | High temperature RF heater pedestals |
US20200090907A1 (en) * | 2018-09-18 | 2020-03-19 | Applied Materials, Inc. | Systems and processes for plasma tuning |
US11417534B2 (en) | 2018-09-21 | 2022-08-16 | Applied Materials, Inc. | Selective material removal |
US11682560B2 (en) | 2018-10-11 | 2023-06-20 | Applied Materials, Inc. | Systems and methods for hafnium-containing film removal |
JP7094856B2 (ja) * | 2018-10-19 | 2022-07-04 | 東京エレクトロン株式会社 | フィルタユニットの調整方法およびプラズマ処理装置 |
US11121002B2 (en) | 2018-10-24 | 2021-09-14 | Applied Materials, Inc. | Systems and methods for etching metals and metal derivatives |
KR102485400B1 (ko) * | 2018-11-14 | 2023-01-06 | 주식회사 원익아이피에스 | 기판 처리 장치 |
US11437242B2 (en) | 2018-11-27 | 2022-09-06 | Applied Materials, Inc. | Selective removal of silicon-containing materials |
US11398387B2 (en) * | 2018-12-05 | 2022-07-26 | Lam Research Corporation | Etching isolation features and dense features within a substrate |
US11721527B2 (en) | 2019-01-07 | 2023-08-08 | Applied Materials, Inc. | Processing chamber mixing systems |
US10920319B2 (en) | 2019-01-11 | 2021-02-16 | Applied Materials, Inc. | Ceramic showerheads with conductive electrodes |
US11387110B2 (en) * | 2019-06-20 | 2022-07-12 | Hitachi High-Tech Corporation | Plasma processing apparatus and plasma processing method |
CN115443518A (zh) * | 2020-04-24 | 2022-12-06 | 朗姆研究公司 | 用于衬底支撑组件的浮动pcb设计 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002506286A (ja) * | 1998-03-06 | 2002-02-26 | アプライド マテリアルズ インコーポレイテッド | 半導体処理システムにおける漏電遮断の防止 |
JP2002526915A (ja) * | 1998-09-30 | 2002-08-20 | アプライド マテリアルズ インコーポレイテッド | 半導体ウェーハ処理装置にウェーハを保持する静電チャック内蔵カソード組立体 |
Family Cites Families (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5556501A (en) | 1989-10-03 | 1996-09-17 | Applied Materials, Inc. | Silicon scavenger in an inductively coupled RF plasma reactor |
US6068784A (en) | 1989-10-03 | 2000-05-30 | Applied Materials, Inc. | Process used in an RF coupled plasma reactor |
US6518195B1 (en) | 1991-06-27 | 2003-02-11 | Applied Materials, Inc. | Plasma reactor using inductive RF coupling, and processes |
US5175472A (en) | 1991-12-30 | 1992-12-29 | Comdel, Inc. | Power monitor of RF plasma |
KR100296692B1 (ko) * | 1996-09-10 | 2001-10-24 | 사토 도리 | 플라즈마cvd장치 |
KR20000075660A (ko) | 1997-02-24 | 2000-12-26 | 로버트 엠. 포터 | 직렬전원의 병렬 출력 고주파 발생기 |
US6222718B1 (en) | 1998-11-12 | 2001-04-24 | Lam Research Corporation | Integrated power modules for plasma processing systems |
US6447655B2 (en) | 2000-05-30 | 2002-09-10 | Alexander D. Lantsman | DC plasma power supply for a sputter deposition |
US6922324B1 (en) * | 2000-07-10 | 2005-07-26 | Christopher M. Horwitz | Remote powering of electrostatic chucks |
EP1384322A1 (en) | 2001-03-30 | 2004-01-28 | California Institute Of Technology | Carbon nanotube array rf filter |
US6920312B1 (en) | 2001-05-31 | 2005-07-19 | Lam Research Corporation | RF generating system with fast loop control |
US8175209B2 (en) * | 2004-03-24 | 2012-05-08 | Richard Carl Auchterlonie | Method and apparatus for pulsed power generation |
EP1759402B1 (en) | 2004-05-21 | 2015-07-08 | Craig M. Whitehouse | Rf surfaces and rf ion guides |
US7276135B2 (en) | 2004-05-28 | 2007-10-02 | Lam Research Corporation | Vacuum plasma processor including control in response to DC bias voltage |
US7403764B2 (en) | 2004-11-30 | 2008-07-22 | Turner Terry R | RF power delivery diagnostic system |
US7713430B2 (en) | 2006-02-23 | 2010-05-11 | Micron Technology, Inc. | Using positive DC offset of bias RF to neutralize charge build-up of etch features |
US7746677B2 (en) | 2006-03-09 | 2010-06-29 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | AC-DC converter circuit and power supply |
US8932430B2 (en) | 2011-05-06 | 2015-01-13 | Axcelis Technologies, Inc. | RF coupled plasma abatement system comprising an integrated power oscillator |
US7777152B2 (en) * | 2006-06-13 | 2010-08-17 | Applied Materials, Inc. | High AC current high RF power AC-RF decoupling filter for plasma reactor heated electrostatic chuck |
US7718120B2 (en) | 2006-12-11 | 2010-05-18 | George Paskalov | RF plasma system for medical waste treatment |
CN101287327B (zh) | 2007-04-13 | 2011-07-20 | 中微半导体设备(上海)有限公司 | 射频功率源系统及使用该射频功率源系统的等离子体反应腔室 |
KR100968132B1 (ko) * | 2008-02-29 | 2010-07-06 | (주)얼라이드 테크 파인더즈 | 안테나 및 이를 구비한 반도체 장치 |
US20090325340A1 (en) * | 2008-06-30 | 2009-12-31 | Mohd Aslami | Plasma vapor deposition system and method for making multi-junction silicon thin film solar cell modules and panels |
US9017533B2 (en) * | 2008-07-15 | 2015-04-28 | Applied Materials, Inc. | Apparatus for controlling radial distribution of plasma ion density and ion energy at a workpiece surface by multi-frequency RF impedance tuning |
US7994872B2 (en) * | 2008-07-21 | 2011-08-09 | Applied Materials, Inc. | Apparatus for multiple frequency power application |
WO2010052846A1 (ja) * | 2008-11-05 | 2010-05-14 | 株式会社アルバック | 巻取式真空処理装置 |
US8755204B2 (en) | 2009-10-21 | 2014-06-17 | Lam Research Corporation | RF isolation for power circuitry |
US8803424B2 (en) | 2010-10-20 | 2014-08-12 | COMET Technologies USA, Inc. | RF/VHF impedance matching, 4 quadrant, dual directional coupler with V RMS/IRMS responding detector circuitry |
US20120097104A1 (en) | 2010-10-20 | 2012-04-26 | COMET Technologies USA, Inc. | Rf impedance matching network with secondary dc input |
US8779662B2 (en) | 2010-10-20 | 2014-07-15 | Comet Technologies Usa, Inc | Pulse mode capability for operation of an RF/VHF impedance matching network with 4 quadrant, VRMS/IRMS responding detector circuitry |
US8898889B2 (en) | 2011-11-22 | 2014-12-02 | Lam Research Corporation | Chuck assembly for plasma processing |
US9041365B2 (en) | 2011-12-01 | 2015-05-26 | Rf Micro Devices, Inc. | Multiple mode RF power converter |
WO2014018861A1 (en) | 2012-07-26 | 2014-01-30 | Rf Micro Devices, Inc. | Programmable rf notch filter for envelope tracking |
US9670588B2 (en) * | 2013-05-01 | 2017-06-06 | Lam Research Corporation | Anisotropic high resistance ionic current source (AHRICS) |
JP2015180768A (ja) * | 2014-03-06 | 2015-10-15 | 株式会社日立国際電気 | 基板処理装置及び半導体装置の製造方法並びに記録媒体 |
US10047438B2 (en) | 2014-06-10 | 2018-08-14 | Lam Research Corporation | Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas |
US10081869B2 (en) | 2014-06-10 | 2018-09-25 | Lam Research Corporation | Defect control in RF plasma substrate processing systems using DC bias voltage during movement of substrates |
US20160049279A1 (en) * | 2014-08-14 | 2016-02-18 | Allied Techfinders Co., Ltd. | Plasma device |
US9752248B2 (en) * | 2014-12-19 | 2017-09-05 | Lam Research Corporation | Methods and apparatuses for dynamically tunable wafer-edge electroplating |
US9596744B2 (en) * | 2015-03-31 | 2017-03-14 | Lam Research Corporation | Radio frequency generator having multiple mutually exclusive oscillators for use in plasma processing |
US9812349B2 (en) * | 2015-12-01 | 2017-11-07 | Lam Research Corporation | Control of the incidence angle of an ion beam on a substrate |
US10043636B2 (en) * | 2015-12-10 | 2018-08-07 | Lam Research Corporation | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal |
US9960068B1 (en) * | 2016-12-02 | 2018-05-01 | Lam Research Corporation | Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing |
US9892956B1 (en) * | 2016-10-12 | 2018-02-13 | Lam Research Corporation | Wafer positioning pedestal for semiconductor processing |
US20180308663A1 (en) * | 2017-04-24 | 2018-10-25 | Kenneth S. Collins | Plasma reactor with phase shift applied across electrode array |
US10510515B2 (en) * | 2017-06-22 | 2019-12-17 | Applied Materials, Inc. | Processing tool with electrically switched electrode assembly |
TWI788390B (zh) * | 2017-08-10 | 2023-01-01 | 美商應用材料股份有限公司 | 用於電漿處理的分佈式電極陣列 |
-
2016
- 2016-02-19 US US15/048,796 patent/US10043636B2/en active Active
- 2016-11-30 KR KR1020160161447A patent/KR20170074750A/ko not_active Application Discontinuation
- 2016-12-02 JP JP2016234648A patent/JP6879724B2/ja active Active
-
2018
- 2018-07-17 US US16/038,076 patent/US10373805B2/en active Active
-
2019
- 2019-07-29 US US16/525,333 patent/US10636624B2/en active Active
-
2020
- 2020-04-22 US US16/855,666 patent/US11264207B2/en active Active
-
2022
- 2022-01-11 US US17/573,607 patent/US11784027B2/en active Active
-
2023
- 2023-09-11 US US18/465,113 patent/US20230420218A1/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002506286A (ja) * | 1998-03-06 | 2002-02-26 | アプライド マテリアルズ インコーポレイテッド | 半導体処理システムにおける漏電遮断の防止 |
JP2002526915A (ja) * | 1998-09-30 | 2002-08-20 | アプライド マテリアルズ インコーポレイテッド | 半導体ウェーハ処理装置にウェーハを保持する静電チャック内蔵カソード組立体 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021093462A (ja) * | 2019-12-11 | 2021-06-17 | 東京エレクトロン株式会社 | 回転駆動装置、基板処理装置及び回転駆動方法 |
JP7325313B2 (ja) | 2019-12-11 | 2023-08-14 | 東京エレクトロン株式会社 | 回転駆動装置、基板処理装置及び回転駆動方法 |
Also Published As
Publication number | Publication date |
---|---|
US20230420218A1 (en) | 2023-12-28 |
US11264207B2 (en) | 2022-03-01 |
US20200027700A1 (en) | 2020-01-23 |
US20200251307A1 (en) | 2020-08-06 |
US20220139670A1 (en) | 2022-05-05 |
JP6879724B2 (ja) | 2021-06-02 |
US11784027B2 (en) | 2023-10-10 |
US20180323037A1 (en) | 2018-11-08 |
US10043636B2 (en) | 2018-08-07 |
US20170169995A1 (en) | 2017-06-15 |
US10636624B2 (en) | 2020-04-28 |
US10373805B2 (en) | 2019-08-06 |
KR20170074750A (ko) | 2017-06-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6879724B2 (ja) | Rf端子から隣接する非rf端子への電気絶縁破壊を避けるための装置および方法 | |
US11258421B2 (en) | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | |
US11183406B2 (en) | Control of wafer bow in multiple stations | |
KR102592529B1 (ko) | 정전 척들의 전극들의 파라미터들을 설정하고 조정하기 위한 임피던스들을 갖는 튜닝 회로들을 포함하는 rf 튜닝 시스템들 | |
KR102212429B1 (ko) | 상호 유도된 필터들 | |
JP7389285B2 (ja) | 複数のステーションシステムにおいてプラズマを平準化するために使用されるモジュール式レシピ制御較正(mrcc)装置 | |
US20230246624A1 (en) | Systems and methods for providing shunt cancellation of parasitic components in a plasma reactor | |
CN114761616A (zh) | 具有集成式rf滤波器的衬底支撑件 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191129 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20191129 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20201119 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20201124 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210219 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210406 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210430 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6879724 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |