JP2017133593A - 流体圧アクチュエータ - Google Patents
流体圧アクチュエータ Download PDFInfo
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- JP2017133593A JP2017133593A JP2016013778A JP2016013778A JP2017133593A JP 2017133593 A JP2017133593 A JP 2017133593A JP 2016013778 A JP2016013778 A JP 2016013778A JP 2016013778 A JP2016013778 A JP 2016013778A JP 2017133593 A JP2017133593 A JP 2017133593A
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- rod
- scale
- fluid
- piston
- pressure
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- 239000012530 fluid Substances 0.000 title claims abstract description 55
- 238000001514 detection method Methods 0.000 claims abstract description 66
- 230000002093 peripheral effect Effects 0.000 claims abstract description 9
- 230000002706 hydrostatic effect Effects 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 230000033001 locomotion Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 230000003068 static effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000011000 absolute method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
- F15B15/1423—Component parts; Constructional details
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/20—Other details, e.g. assembly with regulating devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/20—Other details, e.g. assembly with regulating devices
- F15B15/28—Means for indicating the position, e.g. end of stroke
- F15B15/2815—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
- F15B15/2846—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT using detection of markings, e.g. markings on the piston rod
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/52—Mounting semiconductor bodies in containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/70—Output members, e.g. hydraulic motors or cylinders or control therefor
- F15B2211/71—Multiple output members, e.g. multiple hydraulic motors or cylinders
- F15B2211/7135—Combinations of output members of different types, e.g. single-acting cylinders with rotary motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/70—Output members, e.g. hydraulic motors or cylinders or control therefor
- F15B2211/765—Control of position or angle of the output member
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Actuator (AREA)
Abstract
Description
なお、以下の説明で用いる図面では、各構成要素を見やすくするため、構成要素を模式的に示している場合があり、構成要素によっては寸法の縮尺を異ならせて示すこともある。
例えば、上記エア圧アクチュエータ1では、図5に示すように、シャフト5の外周面の一部に平坦部5aを設けて、この平坦部5aにスケール21を取り付けた構成とすることも可能である。なお、図5は、スケール21の別の取付構造を示す斜視図である。この場合、治具を用いることなく、スケール21をシャフト5の外周面に容易に取り付けることが可能である。
Claims (6)
- シリンダと、
前記シリンダの内部で移動するピストンと、
前記ピストンの一端側に接続された状態で、前記ピストンと一体に移動するロッドと、
前記ピストンの他端側に接続された状態で、前記ピストンと一体に移動するシャフトと、
前記シャフト側に設けられたスケールを前記シリンダ側に設けられた読取ヘッドで読み取ることによって、前記ロッドの位置を検出する位置検出部と、
前記位置検出部の検出結果に基づいて、前記シリンダ内の前記ピストンを挟んだ一方側の圧力室に供給される流体の圧力と、他方側の圧力室に供給される流体の圧力とを調整しながら、前記ロッドを軸方向に移動させる圧力調整部と、
前記位置検出部の検出結果に基づいて、前記ロッドを所定の角度範囲で周方向に回動させる回動駆動部とを備え、
前記スケールは、前記シャフトの外周面に取り付けられると共に、前記読取ヘッドと対向する面が平面であることを特徴とする流体圧アクチュエータ。 - 前記スケールは、前記ロッドの軸方向における位置を検出する直進検出用スケールと、前記ロッドの周方向における位置を検出する回動検出用スケールとが一体化された構成を有し、
前記読取ヘッドは、前記直進検出用スケールに対応した直進検出用読取ヘッドと、前記回動検出用スケールに対応した回動検出用読取ヘッドとを含むことを特徴とする請求項1に記載の流体圧アクチュエータ。 - 前記スケールは、前記読取ヘッドと対向する面に、前記直進検出用スケールを構成するパターンが前記ロッドの軸方向と直交する方向に並んで配置され、前記回動検出用スケールを構成するパターンが前記ロッドの軸方向と平行な方向に並んで配置された構成を有することを特徴とする請求項2に記載の流体圧アクチュエータ。
- 前記ピストンは、前記シリンダとの間の隙間に流入する流体により形成される静圧流体軸受を介して、前記シリンダとは非接触な状態で軸方向に移動自在に支持されていることを特徴とする請求項1〜3の何れか一項に記載の流体圧アクチュエータ。
- 前記回動駆動部は、回転モータと、前記回転モータによる駆動力を前記ロッドに伝達する駆動伝達機構と、前記ロッドとの隙間を流れる流体により圧力を発生させる動圧流体軸受とを有し、
前記ロッドは、前記動圧流体軸受を介して非接触な状態で周方向に回動駆動されることを特徴とする請求項1〜4の何れか一項に記載の流体圧アクチュエータ。 - 前記流体がエアであることを特徴とする請求項1〜5の何れか一項に記載の流体圧アクチュエータ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016013778A JP6723013B2 (ja) | 2016-01-27 | 2016-01-27 | 流体圧アクチュエータ |
KR1020160054508A KR102511100B1 (ko) | 2016-01-27 | 2016-05-03 | 유체압 액추에이터 |
Applications Claiming Priority (1)
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JP2016013778A JP6723013B2 (ja) | 2016-01-27 | 2016-01-27 | 流体圧アクチュエータ |
Publications (2)
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JP2017133593A true JP2017133593A (ja) | 2017-08-03 |
JP6723013B2 JP6723013B2 (ja) | 2020-07-15 |
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JP2016013778A Active JP6723013B2 (ja) | 2016-01-27 | 2016-01-27 | 流体圧アクチュエータ |
Country Status (2)
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JP (1) | JP6723013B2 (ja) |
KR (1) | KR102511100B1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6456565B1 (ja) * | 2018-01-25 | 2019-01-23 | 藤倉ゴム工業株式会社 | 流体シリンダ |
WO2020116421A1 (ja) * | 2018-12-05 | 2020-06-11 | 藤倉コンポジット株式会社 | シリンダ装置 |
KR20210088418A (ko) | 2020-01-06 | 2021-07-14 | 스미도모쥬기가이고교 가부시키가이샤 | 액추에이터 |
KR20210093920A (ko) | 2018-12-05 | 2021-07-28 | 후지쿠라 컴퍼지트 가부시키가이샤 | 실린더 장치 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006349377A (ja) * | 2005-06-13 | 2006-12-28 | Shinko Electric Co Ltd | 2自由度センサ |
JP2015113868A (ja) * | 2013-12-09 | 2015-06-22 | 三星電子株式会社Samsung Electronics Co.,Ltd. | 流体圧アクチュエータ |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0446081Y2 (ja) * | 1984-11-07 | 1992-10-29 | ||
JP2000046014A (ja) | 1998-07-24 | 2000-02-15 | Konan Electric Co Ltd | 位置検出器内蔵空気圧アクチュエータ |
JP4268431B2 (ja) | 2003-03-28 | 2009-05-27 | 住友重機械工業株式会社 | 流体圧アクチュエータ |
JP4171666B2 (ja) | 2003-03-31 | 2008-10-22 | 住友重機械工業株式会社 | 直線運動及び回転運動可能なアクチュエータ |
JP6351336B2 (ja) | 2014-03-31 | 2018-07-04 | 日立オートモティブシステムズ株式会社 | 緩衝器 |
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2016
- 2016-01-27 JP JP2016013778A patent/JP6723013B2/ja active Active
- 2016-05-03 KR KR1020160054508A patent/KR102511100B1/ko active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006349377A (ja) * | 2005-06-13 | 2006-12-28 | Shinko Electric Co Ltd | 2自由度センサ |
JP2015113868A (ja) * | 2013-12-09 | 2015-06-22 | 三星電子株式会社Samsung Electronics Co.,Ltd. | 流体圧アクチュエータ |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10927864B2 (en) | 2018-01-25 | 2021-02-23 | Fujikura Composites Inc. | Fluid cylinder |
JP6456565B1 (ja) * | 2018-01-25 | 2019-01-23 | 藤倉ゴム工業株式会社 | 流体シリンダ |
KR20200095570A (ko) * | 2018-01-25 | 2020-08-10 | 후지쿠라 컴퍼지트 가부시키가이샤 | 유체 실린더 |
KR102201982B1 (ko) | 2018-01-25 | 2021-01-11 | 후지쿠라 컴퍼지트 가부시키가이샤 | 유체 실린더 |
KR20210093920A (ko) | 2018-12-05 | 2021-07-28 | 후지쿠라 컴퍼지트 가부시키가이샤 | 실린더 장치 |
WO2020116421A1 (ja) * | 2018-12-05 | 2020-06-11 | 藤倉コンポジット株式会社 | シリンダ装置 |
KR20210096103A (ko) | 2018-12-05 | 2021-08-04 | 후지쿠라 컴퍼지트 가부시키가이샤 | 실린더 장치 |
JPWO2020116421A1 (ja) * | 2018-12-05 | 2021-10-21 | 藤倉コンポジット株式会社 | シリンダ装置 |
US11644051B2 (en) | 2018-12-05 | 2023-05-09 | Fujikura Composites Inc. | Cylinder device |
JP7373886B2 (ja) | 2018-12-05 | 2023-11-06 | 藤倉コンポジット株式会社 | シリンダ装置 |
US11873847B2 (en) | 2018-12-05 | 2024-01-16 | Fujikura Composites Inc. | Cylinder device |
KR20210088418A (ko) | 2020-01-06 | 2021-07-14 | 스미도모쥬기가이고교 가부시키가이샤 | 액추에이터 |
JP2021110344A (ja) * | 2020-01-06 | 2021-08-02 | 住友重機械工業株式会社 | アクチュエータ |
JP7490366B2 (ja) | 2020-01-06 | 2024-05-27 | 住友重機械工業株式会社 | アクチュエータ |
Also Published As
Publication number | Publication date |
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JP6723013B2 (ja) | 2020-07-15 |
KR102511100B1 (ko) | 2023-03-15 |
KR20170089739A (ko) | 2017-08-04 |
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