JP2017129799A5 - - Google Patents
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- Publication number
- JP2017129799A5 JP2017129799A5 JP2016010394A JP2016010394A JP2017129799A5 JP 2017129799 A5 JP2017129799 A5 JP 2017129799A5 JP 2016010394 A JP2016010394 A JP 2016010394A JP 2016010394 A JP2016010394 A JP 2016010394A JP 2017129799 A5 JP2017129799 A5 JP 2017129799A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- electronic device
- barrier layer
- resin layer
- functional layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000010410 layer Substances 0.000 claims 23
- 239000002346 layers by function Substances 0.000 claims 12
- 239000011347 resin Substances 0.000 claims 11
- 229920005989 resin Polymers 0.000 claims 11
- 238000000231 atomic layer deposition Methods 0.000 claims 6
- 238000000926 separation method Methods 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 6
- OZAIFHULBGXAKX-UHFFFAOYSA-N precursor Substances N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- 239000000463 material Substances 0.000 claims 3
- 238000005530 etching Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- CJNBYAVZURUTKZ-UHFFFAOYSA-N Hafnium(IV) oxide Chemical group O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 claims 1
- 229910000449 hafnium oxide Inorganic materials 0.000 claims 1
- 230000003287 optical Effects 0.000 claims 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 1
- 229910001936 tantalum oxide Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016010394A JP6699195B2 (ja) | 2016-01-22 | 2016-01-22 | 電子デバイスの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016010394A JP6699195B2 (ja) | 2016-01-22 | 2016-01-22 | 電子デバイスの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017129799A JP2017129799A (ja) | 2017-07-27 |
| JP2017129799A5 true JP2017129799A5 (zh) | 2018-10-18 |
| JP6699195B2 JP6699195B2 (ja) | 2020-05-27 |
Family
ID=59396164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016010394A Active JP6699195B2 (ja) | 2016-01-22 | 2016-01-22 | 電子デバイスの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6699195B2 (zh) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7106410B2 (ja) * | 2018-09-24 | 2022-07-26 | シチズンファインデバイス株式会社 | 強誘電性液晶セルの製造方法 |
| CN111190310B (zh) * | 2018-11-15 | 2022-11-18 | 立景光电股份有限公司 | 显示面板 |
| JP2021001966A (ja) * | 2019-06-21 | 2021-01-07 | セイコーエプソン株式会社 | 電気光学装置、及び電子機器 |
| KR102448198B1 (ko) * | 2020-11-09 | 2022-09-29 | 솔루스첨단소재 주식회사 | 배리어 실란트 조성물 및 이를 이용한 표시패널의 제조방법 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4082239B2 (ja) * | 2003-02-27 | 2008-04-30 | セイコーエプソン株式会社 | 電気光学装置の製造方法、電気光学装置、および電子機器 |
| JP2011059374A (ja) * | 2009-09-10 | 2011-03-24 | Seiko Epson Corp | 電気光学装置、その製造方法、および電子機器 |
| KR101977708B1 (ko) * | 2012-09-04 | 2019-08-29 | 삼성디스플레이 주식회사 | 표시 장치 및 그 제조 방법 |
| KR20140122910A (ko) * | 2013-04-11 | 2014-10-21 | 삼성디스플레이 주식회사 | 액정 표시 장치 |
| JP6361327B2 (ja) * | 2014-07-02 | 2018-07-25 | セイコーエプソン株式会社 | 電気光学装置、及び電子機器 |
-
2016
- 2016-01-22 JP JP2016010394A patent/JP6699195B2/ja active Active
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