JP2017076799A5 - - Google Patents
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- Publication number
- JP2017076799A5 JP2017076799A5 JP2016201954A JP2016201954A JP2017076799A5 JP 2017076799 A5 JP2017076799 A5 JP 2017076799A5 JP 2016201954 A JP2016201954 A JP 2016201954A JP 2016201954 A JP2016201954 A JP 2016201954A JP 2017076799 A5 JP2017076799 A5 JP 2017076799A5
- Authority
- JP
- Japan
- Prior art keywords
- door
- magnetic couplers
- magnetic
- substrate container
- couplers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000758 substrate Substances 0.000 claims 14
- 239000000463 material Substances 0.000 claims 3
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562242032P | 2015-10-15 | 2015-10-15 | |
US62/242,032 | 2015-10-15 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017076799A JP2017076799A (ja) | 2017-04-20 |
JP2017076799A5 true JP2017076799A5 (enrdf_load_stackoverflow) | 2019-11-14 |
JP6961335B2 JP6961335B2 (ja) | 2021-11-05 |
Family
ID=58551570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016201954A Active JP6961335B2 (ja) | 2015-10-15 | 2016-10-13 | 磁気ラッチ補助を備える基板容器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6961335B2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3539420A1 (de) | 2018-03-16 | 2019-09-18 | Eppendorf AG | Laborschrankvorrichtung zum lagern von laborproben mit magnetverschluss |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60160539U (ja) * | 1984-04-02 | 1985-10-25 | ソニー株式会社 | 半導体ウエハ等収納容器 |
JP3963227B2 (ja) * | 1997-06-13 | 2007-08-22 | ミライアル株式会社 | 蓋付き薄板収納容器 |
JPH11317438A (ja) * | 1997-11-12 | 1999-11-16 | Intevac Inc | 基板キャリアの磁気支持を利用する基板支持装置 |
US20070175792A1 (en) * | 2006-02-02 | 2007-08-02 | Barry Gregerson | Magnetic seal for wafer containers |
TWI365836B (en) * | 2009-05-08 | 2012-06-11 | Gudeng Prec Industral Co Ltd | Wafer container with the magnetic latch |
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2016
- 2016-10-13 JP JP2016201954A patent/JP6961335B2/ja active Active
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