JP2014527685A5 - 磁気的閉じ込め及びファラデーシールド付き誘導結合型プラズマシステム並びに磁気的閉じ込め及びファラデーシールドを提供する方法 - Google Patents

磁気的閉じ込め及びファラデーシールド付き誘導結合型プラズマシステム並びに磁気的閉じ込め及びファラデーシールドを提供する方法 Download PDF

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JP2014527685A5
JP2014527685A5 JP2014520297A JP2014520297A JP2014527685A5 JP 2014527685 A5 JP2014527685 A5 JP 2014527685A5 JP 2014520297 A JP2014520297 A JP 2014520297A JP 2014520297 A JP2014520297 A JP 2014520297A JP 2014527685 A5 JP2014527685 A5 JP 2014527685A5
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faraday shield
magnetic confinement
inductively coupled
coupled plasma
plasma system
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図２は、図１ａに示すプラズマ源の一部分の詳細な断面ブロック図を示す。この図にはプラズマ源５の一断面が示され、この断面ではアンテナアレイ１６を流れるＲＦ電流１８（Ｉrf）は紙面に垂直に向いているが、永久マルチカスプ磁石アレイ１４はその磁化ベクトルとともに紙面内にある。同様に、図３は図２から９０度オフセットした図１ａのプラズマ源５の一部分の詳細な第２の断面ブロック図を示す。この図にはプラズマ源５の一断面が示され、この断面では永久磁石アレイ１４の磁化ベクトルとアンテナアレイ１６を流れるＲＦ電流１８（Ｉrf）の両方が紙面内にある。
JP2014520297A 2011-07-12 2012-07-12 磁気的閉じ込め及びファラデーシールド付き誘導結合型プラズマシステム並びに磁気的閉じ込め及びファラデーシールドを提供する方法 Active JP6139520B2 (ja)

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US13/181,210 US20130015053A1 (en) 2011-07-12 2011-07-12 Inductively coupled rf plasma source with magnetic confinement and faraday shielding
US13/181,210 2011-07-12
PCT/US2012/046369 WO2013009941A1 (en) 2011-07-12 2012-07-12 Inductively coupled rf plasma source with magnetic confinement and faraday shielding

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JP2014527685A JP2014527685A (ja) 2014-10-16
JP2014527685A5 true JP2014527685A5 (ja) 2015-05-14
JP6139520B2 JP6139520B2 (ja) 2017-05-31

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US (2) US20130015053A1 (ja)
JP (1) JP6139520B2 (ja)
KR (1) KR102031578B1 (ja)
CN (1) CN103650098B (ja)
TW (1) TWI547215B (ja)
WO (1) WO2013009941A1 (ja)

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