JP2017073498A5 - - Google Patents
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- JP2017073498A5 JP2017073498A5 JP2015200348A JP2015200348A JP2017073498A5 JP 2017073498 A5 JP2017073498 A5 JP 2017073498A5 JP 2015200348 A JP2015200348 A JP 2015200348A JP 2015200348 A JP2015200348 A JP 2015200348A JP 2017073498 A5 JP2017073498 A5 JP 2017073498A5
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- JP
- Japan
- Prior art keywords
- value
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- heating
- exceeded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000010438 heat treatment Methods 0.000 claims 10
- 238000000034 method Methods 0.000 claims 5
- 238000001947 vapour-phase growth Methods 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 4
- 230000005856 abnormality Effects 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015200348A JP2017073498A (ja) | 2015-10-08 | 2015-10-08 | 気相成長装置および異常検出方法 |
| DE112016004625.1T DE112016004625T5 (de) | 2015-10-08 | 2016-09-30 | Dampfphasenwachstumseinrichtung und Abnormalitätsdetektionsverfahren |
| PCT/JP2016/079070 WO2017061334A1 (ja) | 2015-10-08 | 2016-09-30 | 気相成長装置および異常検出方法 |
| TW105132122A TWI626331B (zh) | 2015-10-08 | 2016-10-05 | Gas phase growth device and abnormality detection method |
| US15/946,696 US20180291507A1 (en) | 2015-10-08 | 2018-04-05 | Vapor phase growth apparatus and abnormality detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015200348A JP2017073498A (ja) | 2015-10-08 | 2015-10-08 | 気相成長装置および異常検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017073498A JP2017073498A (ja) | 2017-04-13 |
| JP2017073498A5 true JP2017073498A5 (enExample) | 2018-11-08 |
Family
ID=58487648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015200348A Pending JP2017073498A (ja) | 2015-10-08 | 2015-10-08 | 気相成長装置および異常検出方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20180291507A1 (enExample) |
| JP (1) | JP2017073498A (enExample) |
| DE (1) | DE112016004625T5 (enExample) |
| TW (1) | TWI626331B (enExample) |
| WO (1) | WO2017061334A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018101010B4 (de) | 2017-09-25 | 2025-01-09 | X-Fab Semiconductor Foundries Ag | Echtzeit Monitoring eines Mehrzonen-Vertikalofens mit frühzeitiger Erkennung eines Ausfalls eines Heizzonen-Elements |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002352938A (ja) * | 2001-05-28 | 2002-12-06 | Tokyo Electron Ltd | 熱処理装置のヒ−タ素線の断線予測方法及び熱処理装置 |
| JP3988942B2 (ja) * | 2003-03-31 | 2007-10-10 | 株式会社国際電気セミコンダクターサービス | ヒータ検査装置及びそれを搭載した半導体製造装置 |
| JP2006165200A (ja) * | 2004-12-06 | 2006-06-22 | Kokusai Electric Semiconductor Service Inc | 半導体製造装置における抵抗加熱ヒータの抵抗値検出装置、半導体製造装置における抵抗加熱ヒータの劣化診断装置及びネットワークシステム |
| JP4326570B2 (ja) * | 2007-04-17 | 2009-09-09 | 東京エレクトロン株式会社 | ヒータ素線の寿命予測方法，熱処理装置，記録媒体，ヒータ素線の寿命予測処理システム |
| JP4343253B1 (ja) * | 2008-03-27 | 2009-10-14 | Ｔｄｋ株式会社 | 密閉容器の蓋開閉装置及び該開閉装置を用いたガス置換装置 |
| JP2009245978A (ja) * | 2008-03-28 | 2009-10-22 | Yokogawa Electric Corp | 半導体製造装置 |
| US8581153B2 (en) * | 2008-09-30 | 2013-11-12 | Tokyo Electron Limited | Method of detecting abnormal placement of substrate, substrate processing method, computer-readable storage medium, and substrate processing apparatus |
| WO2012165174A1 (ja) * | 2011-06-01 | 2012-12-06 | シャープ株式会社 | 抵抗加熱ヒータの劣化検出装置および方法 |
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2015
- 2015-10-08 JP JP2015200348A patent/JP2017073498A/ja active Pending
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2016
- 2016-09-30 WO PCT/JP2016/079070 patent/WO2017061334A1/ja not_active Ceased
- 2016-09-30 DE DE112016004625.1T patent/DE112016004625T5/de not_active Ceased
- 2016-10-05 TW TW105132122A patent/TWI626331B/zh active
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2018
- 2018-04-05 US US15/946,696 patent/US20180291507A1/en not_active Abandoned