JP2017073489A - Metal-glass lid and duv-led device arranged by use thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a metal-glass lid used for a DUV light-emitting device, and a DUV-LED device arranged by use thereof.SOLUTION: A metal-glass lid comprises: a frame 12 having a face 11 arranged to be flat, and made of an iron nickel-based sealing alloy material, such as 36%-Ni-Fe alloy(invar alloy), 42%-Ni-Fe alloy (42 alloy), 47%-Ni-Fe alloy, 52%-Ni-Fe alloy, or 29%-Ni-17%-Co-Fe alloy (Kovar alloy); and a window 13 hermetically sealed to a through-hole provided in the frame 12, and made of DUV light-permeable borosilicate glass. The window 13 has a window face 14 arranged to be flat. The window face 14 and the plane face 11 of the frame 12 form one flat face in combination.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a metal-glass lid used in a DUV light emitting device and a DUV-LED device using the same.

  In recent years, DUV-LED devices that can irradiate deep ultraviolet (DUV) light having a shorter wavelength (200 to 300 nm) than ultraviolet (UV) light have attracted attention. DUV-LED is a high-density optical information recording, information / electronic field such as high-luminance and long-life fluorescent lighting equipment, high-speed decomposition treatment of pollutants and allergens, sterilization, skin treatment, laser scalpel, cell sterilization and medical treatment Application to such as is expected. In a conventional DUV-LED device, a DUV-LED element is attached to a substrate container made of a highly heat-conductive material such as aluminum nitride, and the inside of the substrate container is filled with an inert gas such as nitrogen gas to make the container opening DUV transparent. It was formed by covering with an excellent quartz lid and hermetically sealing the lid and the substrate container with an Au—Sn alloy brazing material.

  The quartz lid used in the conventional DUV-LED device has a transmittance of 90 to 93% in the UV region and is very excellent in the transmittance of DUV light, but has a coefficient of thermal expansion α of 0. It is a material that hardly expands at 6 ppm / K. For this reason, the thermal expansion difference between the Au—Sn alloy brazing material (α = 13 ppm / K) and the aluminum nitride (α = 4.6 ppm / K) of the substrate container was large, and the temperature change was weak. For example, when exposed to repeated lighting and lighting or temperature cycles, the brazing contact surface peels off and the airtightness is impaired, and the device life is likely to be shortened due to leakage of the filling gas and entry of moisture.

  On the other hand, as a glass material that transmits DUV light, there is a high-ultraviolet-transmissive borosilicate glass material described in Patent Document 1. High UV transmissive borosilicate glass has a UV transmittance of 80% or more, which is close to that of quartz, and has a thermal expansion coefficient α of about 4 ppm / K, which is close to aluminum nitride and has good α matching. However, since the mechanical strength is inferior to quartz, it cannot be used alone like a quartz lid.

JP 2011-032162 A

  The objective of this invention is proposed in order to eliminate the said subject, and it is implementing the metal-glass lid which improves the airtight reliability of a DUV-LED apparatus, and the LED apparatus using this metal-glass lid.

  According to the present invention, there is provided a frame made of an iron-nickel base sealing alloy material having a flat plate surface, and a window made of DUV light transmissive glass hermetically sealed in a through hole provided in the frame. The window has a flat window surface, and the window surface and the plate surface of the frame body form the same plane. A metal-glass lid for DUV-LED is provided. The metal-glass lid of the present invention is arranged so that the window surface of the window and the plate surface of the metal frame are processed to be extremely flat and constitute the same plane. As for the surface roughness of the window surface of the window and the plate surface of the metal frame, the arithmetic average roughness Ra is preferably 5 nm or less. Further, in the metal-glass lid of the present invention, it is preferable that the swell of the plane constituted by the window surface of the window and the plate surface of the metal frame has a maximum height swell Wz of 5 μm or less. The arithmetic average roughness Ra and the maximum height waviness Wz are based on JIS B 0601-2013 “Product Geometric Characteristics Specifications (GPS) —Surface Properties: Contour Curve Method—Terms, Definitions, and Surface Properties”.

  The lid window of the metal-glass lid according to the present invention may be provided with a coating film for the purpose of preventing reflection of the window surface and enhancing the surface protection.

  According to another aspect of the present invention, a substrate container made of a high thermal conductivity material having a plurality of wiring electrodes, a DUV-LED element mounted on a wiring electrode in the substrate container among the wiring electrodes, and the substrate container is filled. In the DUV-LED device formed of the inert gas and the DUV-transmissive lid that covers the opening of the substrate container and hermetically seals, the lid is an iron nickel base having a flat plate surface. A frame made of a sealing alloy material, and a window made of DUV light-transmitting glass hermetically sealed in a through hole provided in the frame, the window having a flat window surface, and a window surface A DUV-LED device is provided in which the plate surface of the frame body forms the same plane, and the frame body is hermetically sealed with a brazing material on at least one plate surface of the frame body. . The lid of the DUV-LED device of the present invention uses a metal-glass lid. The metal-glass lid constituting the lid is arranged so that the window surface of the window and the plate surface of the frame are processed to be extremely flat and constitute the same plane. As for the surface roughness of the window surface of the lid body window and the plate surface of the frame body, the arithmetic average roughness Ra is preferably 5 nm or less. Furthermore, the metal-glass lid of the lid body preferably has a maximum height undulation Wz of 5 μm or less for the swell of the plane constituted by the window surface of the window and the plate surface of the frame.

  The lid window of the DUV-LED device according to the present invention may be provided with a coating film for the purpose of preventing reflection of the window surface and enhancing the surface protection.

  In the DUV-LED device using the metal-glass lid for DUV-LED according to the present invention and the metal-glass lid as a lid, the window surface of the window and the plate surface of the frame are both processed extremely flat. Although arranged so as to constitute the same plane, the following effects are obtained.

  In the window portion, the surface of the glass window is flattened to reduce the micro-scratches on the glass surface, and the remaining micro-scratches also reduce the notch angle, thereby reducing the stress concentration. Furthermore, the glass window surface and the frame plate surface are configured in the same plane, so that the entire window end can be completely covered by the entire inner wall of the through hole of the frame, and the gap is generated between the metal frame and the window glass. Stress (tensile / compressive stress acting on the edge of the glass window and around the hole) can be distributed evenly over the entire inner wall of the hole and the entire window edge. These effects reduce the glass fatigue of the window and improve the strength reliability of the glass window.

  Furthermore, in the metal frame body, the flatness of the plate surface can improve the permeability of the molten brazing material, and the unevenness of the plate surface can be reduced to reduce bubbles trapped there. -Improve hermetic reliability and bonding reliability of glass lids. As a result, economical hermetic brazing can be achieved using less Au—Sn alloy brazing.

  Then, by applying a coating film (for example, AR coating [Anti-Reflective Coating]) on the window surface of the window, reflection of DUV light is prevented and the DUV light transmittance of the window is further improved. The coating film fills minute scratches on the glass surface, increases the flatness of the window surface, and covers and protects the surface, thereby contributing to an improvement in the strength of the glass window.

The metal-glass lid 10 which concerns on this invention is shown, (a) is a top view, (b) shows the front fragmentary sectional view cut | disconnected along DD of (a). The DUV-LED apparatus 20 which concerns on this invention is shown, (a) is a top view, (b) shows front sectional drawing which cut | disconnected (a).

  As shown in FIG. 1, the metal-glass lid 10 according to the present invention includes a 36% Ni—Fe alloy (Invar alloy), a 42% Ni—Fe alloy (42 alloy), and 47% with a flat plate surface 11. Frame body 12 made of an iron-nickel based sealing alloy material such as Ni-Fe alloy, 52% Ni-Fe alloy, 29% Ni-17% Co-Fe alloy (Kovar alloy), and through holes provided in frame body 12 And a window 13 made of DUV light-transmitting borosilicate glass hermetically sealed. The window 13 has a flat window surface 14 and the window surface 14 and the plate surface 11 of the frame 12 are flush with each other. It is characterized by comprising. In the metal-glass lid 10 of the present invention, the window surface 14 of the window 13 and the plate surface 11 of the metal frame 12 are arranged so as to be extremely flat and form the same plane. As for the surface roughness of the plate surface 11 of the metal frame 12, the arithmetic average roughness Ra is preferably 5 nm or less. Furthermore, in the metal-glass lid 10 of the present invention, it is preferable that the swell of the plane constituted by the window surface 14 of the window 13 and the plate surface 11 of the metal frame 12 has a maximum height swell Wz of 5 μm or less. The thermal expansion coefficient α of the frame 12 and the window 13 of the metal-glass lid 10 according to the present invention is matched so as to be substantially the same over a wide temperature range.

The lid window 13 of the metal-glass lid 10 according to the present invention may be further provided with an AR coating in which HfO ₂ or ZrO ₂ and SiO ₂ are laminated for the purpose of preventing reflection of the window surface 14 and enhancing the surface protection.

  As shown in FIG. 2, a DUV-LED device 20 according to the present invention includes a substrate container 200 made of a high thermal conductivity material such as aluminum nitride or silicon nitride having a plurality of wiring electrodes, and wiring in the substrate container among the wiring electrodes. DUV-LED element 210 mounted on the electrode, inert gas 220 such as nitrogen gas, He gas, Ar gas filled in the substrate container 200, and DUV transmission that covers the opening of the substrate container 200 and is hermetically sealed. In the DUV-LED device formed from the conductive lid 230, the lid 230 is composed of a 36% Ni—Fe alloy (Invar alloy), a 42% Ni—Fe alloy (42 alloy), and a flat plate surface 21; A frame 22 made of an iron-nickel-based sealing alloy material such as a 47% Ni-Fe alloy, a 52% Ni-Fe alloy, and a 29% Ni-17% Co-Fe alloy (Kovar alloy); 2 and a window 23 made of DUV light-transmitting borosilicate glass hermetically sealed in a through hole provided in the window 2. The window 23 has a flat window surface 24, and a plate of the window surface 24 and the frame body 22. The surface 21 forms the same plane, and the frame body 22 is characterized in that at least one plate surface 21 is hermetically sealed to the substrate container 200 using a brazing material 240 such as an Au—Sn alloy brazing. The lid 230 used in the DUV-LED device of the present invention is made of a metal-glass lid, and the window surface 24 of the window 23 and the plate surface 21 of the metal frame 22 are processed extremely flat to form the same plane. The surface roughness of the window surface 24 of the window 23 and the plate surface 21 of the metal frame 22 is preferably an arithmetic average roughness Ra of 5 nm or less. Further, in the lid body 230 of the present invention, it is preferable that the swell of the plane constituted by the window surface 24 of the window 23 and the plate surface 21 of the metal frame 22 has a maximum height swell Wz of 5 μm or less. The thermal expansion coefficients α of the substrate container 200, the lid frame 22 and the window 23 of the DUV-LED device 20 according to the present invention are matched so as to be substantially the same over a wide temperature range.

The lid window 23 of the DUV-LED device according to the present invention may be provided with an AR coating in which HfO ₂ or ZrO ₂ and SiO ₂ are laminated for the purpose of preventing reflection of the window surface 24 and enhancing the surface protection.

Example 1 of the metal-glass lid 10 according to the present invention includes an α = 5.4 ppm / K Kovar alloy frame 12 having a flat plate surface 11 and a frame 12 as shown in FIG. A window 13 made of borosilicate glass (8337B manufactured by SCHOTT) having a DUV light transmittance of 88 to 92% and α = 4.1 ppm / K hermetically sealed in the provided through-hole. Is configured to be flat, and the window surface 14 and the plate surface 11 of the frame 12 are configured to be on the same plane. The metal-glass lid 10 is arranged such that the window surface 14 of the window 13 and the plate surface 11 of the metal frame 12 are processed to be extremely flat and form the same plane, and the window surface 14 of the window 13 and the metal The surface roughness of the plate surface 11 of the frame body 12 has an arithmetic average roughness Ra of 5 nm or less, and furthermore, the swell of a plane constituted by the window surface 14 of the window 13 and the plate surface 11 of the metal frame body 12 has a maximum height. After the surface is polished so that the undulation Wz is 5 μm or less, a multilayer AR coating in which HfO ₂ and SiO ₂ are laminated is applied to the window surface 14 to improve the DUV light transmittance to 95%.

As shown in FIG. 2, the DUV-LED device 20 according to the present invention includes an α = 4.5 ppm / K aluminum nitride substrate container 200 having a plurality of wiring electrodes, and the wiring electrodes in the substrate container among the wiring electrodes. A DUV-LED formed from a DUV-LED element 210 mounted on the substrate, a nitrogen gas 220 filled in the substrate container 200, and a DUV-transmissive lid 230 that covers and hermetically seals the opening of the substrate container 200. In the apparatus, the lid 230 is composed of an α = 5.4 ppm / K Kovar alloy frame 22 having a flat plate surface 21 and a DUV light transmittance hermetically sealed in a through hole provided in the frame 22. 88-92%, α = 4.1 ppm / K borosilicate glass (8337B manufactured by SCHOTT), and the window 23 has a flat window surface 24, and the window surface 24 and the frame 22. of Surface 21 and constitute the same plane, further frame 22 is hermetically sealed using α = 13ppm / Au-Sn alloy brazing material 240 K to one side of the plate surface 21 to the substrate container 200. The lid 230 is made of a metal-glass lid, and the window surface 24 of the window 23 and the plate surface 21 of the metal frame 22 are arranged so as to be extremely flat and form the same plane. The surface roughness of the surface 24 and the plate surface 21 of the metal frame 22 is an arithmetic average roughness Ra of 5 nm or less. Furthermore, the swell of the plane constituted by the window surface 24 of the window 23 and the plate surface 21 of the metal frame 22 has a maximum height swell Wz of 5 μm or less, and the window surface 24 is a multilayer in which ZrO ₂ and SiO ₂ are laminated. Apply AR coating to improve DUV light transmission to 95%.

  In addition, the surface roughness of each Example and the waviness of a plane were measured by the three-dimensional optical profiler system made from Zygo, NewView6300.

  The present invention is a high-power deep ultraviolet LED device that requires long-term durability, particularly for high-energy deep ultraviolet light, such as a high-density optical information recording device, a high-intensity and long-life fluorescent lighting device, and pollution. It can be used for lids for DUV-LED devices such as substances and allergens, disinfection lamps, skin treatment devices, laser scalpels, cell sorting devices, and packages for DUV-LED devices.

10: Metal-glass lid,
20 ... DUV-LED device,
11, 21 ... plate surface,
12, 22 ... frame,
13, 23 ... Wind,
14, 24 ... window surface,
200 ... substrate container,
210 ... DUV-LED element,
220 ... inert gas,
230 ... lid,
240: brazing material.

Claims (10)

  A frame made of an iron-nickel base sealing alloy material having a flat plate surface, and a window made of DUV light-transmitting glass hermetically sealed in a through hole provided in the frame, the window being a window surface A metal glass lid for DUV-LED, wherein the window surface and the plate surface of the frame body are formed on the same plane.   2. The metal-glass lid for DUV-LED according to claim 1, wherein the surface roughness of the window surface of the window and the plate surface of the frame body has an arithmetic average roughness Ra of 5 nm or less.   The undulation of a plane constituted by the window surface of the window and the plate surface of the frame body has a maximum height undulation Wz of 5 μm or less, for DUV-LEDs according to claim 1 or 2. Metal-glass lid.   4. The metal-glass lid for DUV-LED according to claim 1, wherein the window is provided with a coating film for the purpose of preventing reflection of a window surface and reinforcing surface protection. 5. 5. The metal-glass lid for DUV-LED according to claim 4, wherein the coating film is made of an AR coating in which HfO ₂ or ZrO ₂ and SiO ₂ are laminated.   A substrate container made of a high thermal conductivity material having a plurality of wiring electrodes; a DUV-LED element mounted on a wiring electrode in the substrate container among the wiring electrodes; an inert gas filled in the substrate container; In a DUV-LED device formed of a DUV-transmissive lid that covers and hermetically seals an opening of a substrate container, the lid is a frame made of an iron-nickel-based sealing alloy material that has a flat plate surface. And a window made of DUV light-transmitting glass hermetically sealed in a through hole provided in the frame, the window having a flat window surface, and a window surface and a plate surface of the frame body. Constituting the same plane, and further, the frame body is hermetically sealed at least one plate surface of the substrate container using a brazing material.   The DUV-LED device according to claim 6, wherein the window surface of the window and the surface roughness of the plate surface of the frame body have an arithmetic average roughness Ra of 5 nm or less.   8. The DUV-LED device according to claim 6, wherein the undulation of the plane constituted by the window surface of the window and the plate surface of the frame body has a maximum height undulation Wz of 5 μm or less. 9. .   The DUV-LED device according to any one of claims 6 to 8, wherein the window is provided with a coating film for the purpose of preventing reflection of a window surface and enhancing surface protection. The DUV-LED device according to claim 9, wherein the coating film is formed of an AR coating in which HfO ₂ or ZrO ₂ and SiO ₂ are laminated.

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