JP2019040996A - Uv optical element, package for uv optical element, optical member used for uv optical element, and method for manufacturing the optical member - Google Patents

Abstract

To obtain an optical member of a desired form by a more simple method, and to join the optical member to a ceramic package substrate by a reduced number of steps.SOLUTION: An optical member 4 is press-shaped by pressing a jig 25 against a molten or softened glass pellet 10, in which glass which has a softening point of 1000°C or below and an average transmittance of 80% or more to light of 250-400 nm in wavelength is used. In parallel of shaping the optical member 4, a frame 5 is integrally joined to the optical member 4 in a sealing manner. The frame 5 integrated with the optical member 4 and an upper end 33 (metallized portion) of a peripheral wall 32 of a package substrate 3 subjected to a metallization treatment have metal joint faces for joint to each other; they are joined together by an inorganic material.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an ultraviolet light element such as a deep ultraviolet LED used for ultraviolet sterilization, a package for the ultraviolet light element, an optical member used for the ultraviolet light element, and a method for manufacturing the optical member.

  Mercury lamps have been widely used for ultraviolet sterilization, but the production, import and export of mercury products will be restricted after 2020 due to the enforcement of the Minamata Convention on Mercury. Therefore, ultraviolet LEDs (Light Emitting Diodes), particularly deep UV LEDs with a wavelength of 280 nm or less, are attracting attention as alternative light sources after the lifetime of currently used mercury lamps has expired.

  For example, Patent Document 1 discloses a light emitting module that outputs ultraviolet light having a wavelength of 200 nm to 360 nm. The light emitting module includes a ceramic package substrate having a bottomed recess in which a light emitting element is mounted at the center, and a window member attached to cover the opening of the bottomed recess. A lens portion is formed in a portion of the window member that faces the light emitting element, and a flange portion that is joined to the package substrate is integrally formed with the lens portion around the lens portion. Since the ultraviolet LED also has a flat light emitting surface, a lens is required to distribute light in a desired direction.

  In Patent Document 1, the window member is formed by pouring molten quartz made of quartz glass pellets or the like into a mold (see paragraph 0034). However, the softening point of quartz glass is as high as about 1700 ° C., and even when heated to 1900 ° C., it is very hard and difficult to process. In addition, since quartz glass has a high vapor pressure of gas and is directly transferred from solid to gas, it may not be in a molten state, and it is very difficult to obtain a desired lens shape from fused silica. Therefore, in general, a traditional glass lens manufacturing method in which quartz glass supplied in an ingot shape is cut and ground into a predetermined shape and the surface is mirror-polished is used. turn into.

  In addition, quartz glass has been conventionally used as a substance that transmits deep ultraviolet rays having a wavelength of 300 nm or less with high transmittance, but recently, as disclosed in Patent Document 2, deep ultraviolet rays having a wavelength of 300 nm or less are high. Glass that transmits light with transmittance is also being developed. The softening point of this type of glass is 1000 ° C. or less, and a desired lens shape may be obtained by a manufacturing method other than the above-described traditional glass lens manufacturing method.

  Moreover, in the light emitting module of patent document 1, masking is given to the part other than the part through which light passes among a lens part and a flange part among window members, and vacuum evaporation, sputtering, etc. are applied to the part which is not masked. The metallization process formed by the multilayer film which laminated | stacked titanium (Ti), copper (Cu), nickel (Ni), and gold (Au) in order by the method is performed. However, it is not easy to mask and metallize a fine and three-dimensional lens part or flange part, and if the masking is insufficient and the metallization process is not properly performed, the bonding of the package substrate and the window member and Sealing may be incomplete. Ultraviolet rays, particularly deep ultraviolet rays with a short wavelength, remarkably deteriorate the resin material and the like. Therefore, it is necessary to prevent leakage of deep ultraviolet rays from the package of the optical module including the light emitting element and the light receiving element that handles deep ultraviolet rays. Bonding and sealing greatly affects product reliability.

JP 2017-59716 A JP 2013-91593 A

  The present invention has been made to solve the above-mentioned problems, and uses a glass having a softening point lower than that of quartz glass and a high average transmittance of light having a wavelength of 250 to 400 nm or less, and a desired shape by a simple method. Can be obtained, and an optical element used for an ultraviolet light element, an ultraviolet light element package, and an ultraviolet light element capable of bonding a ceramic package substrate and an optical member in a simple process. It aims at providing a manufacturing method of a member and its optical member.

In order to achieve the above object, the ultraviolet light device according to the present invention comprises:
An optical element that emits ultraviolet rays;
A ceramic package substrate on which the optical element is mounted;
An optical element having a lens in a portion facing the optical element mounted on the substrate, and an optical member bonded to the substrate,
The optical member is formed of glass having a softening point of 1000 ° C. or less and an average transmittance of 80% or more for light having a wavelength of 250 to 400 nm,
A frame body made of a metal having substantially the same shape as that of the joint and having a thermal expansion coefficient substantially equal to the thermal expansion coefficient of the glass is integrally formed at the joint portion of the optical member with the substrate. Are joined,
A metallized portion subjected to a metallization process is formed at a joint portion between the substrate and the optical member,
The frame body and the metallized portion are bonded with an inorganic material.

  In the ultraviolet light element, the frame body is preferably sealed and bonded to the glass by an oxide film formed on a surface thereof.

  In the ultraviolet light element, it is preferable that the frame body and the metallized portion are joined by a metal preform.

  In the ultraviolet light element, the frame body may be embedded in the optical member such that a surface bonded to the metallized portion is exposed from a surface of the optical member facing the substrate.

  In the ultraviolet light element, a plurality of the optical elements are mounted on the substrate in a predetermined arrangement pattern, and the optical member has a plurality of lenses arranged so as to correspond to the arrangement pattern of the optical elements. It may be.

In addition, the package for an ultraviolet light device according to the present invention is as follows.
A package for an ultraviolet light device comprising a ceramic package substrate on which an optical device that emits ultraviolet light is mounted, and an optical member bonded to the substrate,
The optical member is formed of glass having a softening point of 1000 ° C. or less and an average transmittance of 80% or more for light having a wavelength of 250 to 400 nm,
A frame body made of a metal having substantially the same shape as that of the joint and having a thermal expansion coefficient substantially equal to the thermal expansion coefficient of the glass is integrally formed at the joint portion of the optical member with the substrate. Are joined,
A metallized portion subjected to a metallization process is formed at a joint portion between the substrate and the optical member,
The frame body and the metallized portion are bonded with an inorganic material.

The optical member according to the present invention is
An optical member bonded to a ceramic substrate on which an optical element that emits ultraviolet light is mounted,
The softening point is 1000 ° C. or less, and the average transmittance for light with a wavelength of 250 to 400 nm is 80% or more, and is formed of glass.
A frame body made of a metal having substantially the same shape as that of the joint and having a thermal expansion coefficient substantially equal to the thermal expansion coefficient of the glass is integrally formed at the joint portion of the optical member with the substrate. It is characterized by being joined.

Moreover, the manufacturing method of the optical member according to the present invention is as follows:
A method of manufacturing an optical member to be bonded to a ceramic substrate on which an optical element that emits ultraviolet light is mounted,
A step of cutting glass having a softening point of 1000 ° C. or less and an average transmittance of 80% or more with respect to light having a wavelength of 250 to 400 nm into glass pellets of a predetermined size;
A metal having a thermal expansion coefficient substantially equal to the thermal expansion coefficient of the glass is formed into a frame body having substantially the same shape as a bonding portion with the optical member of the substrate. Forming, and
Forming an oxide film on the surface of the frame, and sealingly bonding the frame and the glass with the oxide film;
In a nitrogen gas environment, the frame and the glass pellet are placed on a jig formed in a predetermined shape, and heated to a first temperature higher than the softening point to melt the glass pellet, Forming an optical member having a predetermined shape to which the shape of the tool is transferred;
And a step of removing an oxide film on a surface of the frame body that is not bonded to the glass.

In the method for producing the optical member,
It is preferable to further comprise a step of heating to a second temperature higher than the softening point of the glass and lower than the first temperature, and thermally polishing the surface of the optical member.

In the method for producing the optical member,
The jig is preferably formed by solidifying carbon powder.

  According to the present invention, the shape of the jig is transferred to a molten or softened glass pellet and the optical member is pressure-molded. Therefore, in the traditional glass lens manufacturing method of cutting and grinding a quartz glass ingot. In comparison, the manufacturing process can be simplified. In addition, since the metal frame is integrally sealed and joined to the optical member simultaneously with the molding of the optical member, the masking and vapor deposition steps for the metallization process are unnecessary. Furthermore, the package substrate and the optical member can be easily joined by joining the frame integrated with the optical member and the metallized portion of the metallized package substrate with a metal preform. As a result, it is possible to provide a low-cost and highly reliable ultraviolet light device and a package for the ultraviolet light device.

The disassembled perspective view which shows the structure of the ultraviolet light element which concerns on one Embodiment of this invention. The graph which shows the transmittance | permeability distribution of the glass which comprises the optical member used for the said ultraviolet light element. (A)-(f) is process drawing which shows the manufacturing method of the said ultraviolet light element, and is a figure which shows the manufacturing process of the optical member especially integrated with the frame. (A) is process drawing which shows the manufacturing method of the said ultraviolet light element, (b) is a figure which shows the joining process of the optical member integrated with the package board | substrate and a frame especially as a 2nd step. The figure which shows the modification of the said ultraviolet light element. FIG. 4 is a diagram showing a lens array in which a plurality of spherical or aspherical lenses are arranged in a predetermined pattern, as a modified example of the optical element in one embodiment of the present invention, (a) is a plan view thereof, and (b) is a side view thereof. Figure. (A)-(f) is process drawing which shows the modification of the manufacturing method of the said ultraviolet light element, and is a figure which shows the manufacturing process of the optical member integrated with the frame as a 1st step especially. It is process drawing which shows the modification of the manufacturing method of the said ultraviolet light element, and is a figure which shows the joining process of the optical member integrated with the package board | substrate and the frame as a 2nd step especially. (A)-(f) is process drawing which shows another modification of the manufacturing method of the said ultraviolet light element, The figure which shows the manufacturing process of the optical member integrated with the frame as a 1st step especially. It is process drawing which shows another modification of the manufacturing method of the said ultraviolet light element, and is a figure which shows the joining process of the optical member integrated with the package board | substrate and the frame as a 2nd step especially.

  An ultraviolet light element, an ultraviolet light element package, an optical member used for the ultraviolet light element, and a method of manufacturing the optical member according to an embodiment of the present invention will be described. FIG. 1 shows a configuration of an ultraviolet light device according to an embodiment of the present invention. An ultraviolet light element package is obtained by removing a light emitting element from an ultraviolet light element.

  The ultraviolet light element 1 includes an optical element 2 that outputs deep ultraviolet light, a ceramic package substrate 3, and an optical member 4 that is bonded to the package substrate 3. Here, as an example, the optical element 2 is a deep ultraviolet light emitting element that emits deep ultraviolet light having a wavelength of 300 nm or less, more preferably a wavelength of 280 nm or less, and still more preferably 265 nm. The optical element 2 may be, for example, a single chip in which a single LED structure is formed on a sapphire substrate (illustrated example), or an integrated structure in which a plurality of LED structures are formed on a sapphire substrate. It may be a die chip.

  The package substrate 3 is, for example, substantially square in plan view, and has a bottomed recess 31 in which the optical element 2 is mounted and a peripheral wall 32 that surrounds the bottomed recess 31 without a gap. The optical member 4 is a single spherical surface or a single aspherical lens in the configuration of the illustrated example, and a lens 41 is formed in a portion facing the opening of the bottomed recess 31, and the bottomed recess of the package substrate 3 is formed. The depth of the bottomed recess 31 of the lens 41 and the package substrate 3 and the height of the peripheral wall 32 are designed so that the light emitting surface of the optical element 2 mounted on 31 is exactly the focal point of the lens of the optical member 4. Yes.

  The optical member 4 has a substantially square shape in plan view, and has an outer dimension that is substantially the same as the outer dimension of the package substrate 3 and is joined to the upper end portion 33 of the peripheral wall 32 of the package substrate 3. The upper end portion 33 of the peripheral wall 32 of the package substrate 3 is subjected to metallization processing by, for example, gold plating or gold vapor deposition. That is, in the present embodiment, the upper end portion 33 is a joint portion with the optical member 4 and is a metallized portion. On the other hand, of the surface of the optical member 4 facing the package substrate 3, the joint portion with the upper end portion of the peripheral wall 32 has substantially the same shape as the upper end portion 33 of the peripheral wall 32, and has a thermal expansion coefficient of glass. A frame 5 made of metal having substantially the same thermal expansion coefficient is integrally sealed and joined. That is, the frame 5 is also substantially square in plan view, and its outer dimension is substantially the same as the outer dimension of the package substrate 3.

Here, as an example, the optical member 4 has a softening point of 1000 ° C. or less and, as shown in FIG. 2, the average transmittance of a material having a thickness of 2.0 mm is 80% or more with respect to light having a wavelength of 250 to 400 nm. It is made of glass. As components of this glass, SiO ₂ and B ₂ O ₃ are mainly used, and further Al ₂ O ₃ , Li ₂ O, Na ₂ O, K ₂ O, CaO, BaO, ZnO, Y ₂ O ₃ , ZrO _2. , La ₂ O ₃ , Sb ₂ O (refer to Patent Document 2 above for the detailed composition).

The thermal expansion coefficient of the glass and the frame 5 is, for example, about 4.5 × 10 ⁻⁶ K ^{−1 at} room temperature, and the material of the frame 5 is, for example, about 0.1 to 0.2 mm in thickness. Kovar can be used. Kovar is an alloy such as iron and nickel and cobalt, and is a common material used for bonding hard glass. The melting point of Kovar is about 1450 ° C., which is higher than the melting point of glass. The package substrate 3 and the optical member 4 are joined by welding the metal frame 5 and the metallized layer on the upper end portion 33 of the peripheral wall 32 of the package substrate 3 with a metal preform 6. The metal preform 6 is formed by molding a thin metal (alloy) containing a noble metal such as gold or tin into the shape of a joint portion.

  Next, a method for manufacturing the ultraviolet light element 1 will be described with reference to FIGS. FIG. 3 shows a manufacturing method of the optical member 4 used in the ultraviolet light element 1 as a first step in the manufacturing method of the ultraviolet light element 1. The manufacturing process of the optical member 4 integrally joined to the frame 5 is shown in FIG. Show. FIG. 4 shows a bonding step of the package substrate 3 and the optical member 4 as a second stage in the method for manufacturing the ultraviolet light element 1.

  In the method for manufacturing the ultraviolet light element 1, the optical member 4 is heated and melted or softened by glass, and then compression molded with a predetermined mold (jig) (so-called compression molding). As shown in FIG. 3A, a recess 21 having substantially the same shape as that of the frame 5 is formed on the upper surface of the fixed jig 20, and as shown in FIG. Is fitted in the recess 21. Here, the frame 5 is subjected to an oxidation treatment, and an oxide film is formed on the surface thereof. The jig 20 is formed by, for example, compressing and molding carbon powder into a predetermined shape as illustrated. For convenience, the frame 5 is drawn in an annular shape in plan view, but may be a square or a round rectangle. Moreover, the thickness of the frame 5 is drawn exaggerated rather than the actual thing.

  Next, as shown in FIG. 3 (b), for example, glass supplied in a rod shape is cut into glass pellets 10 of a predetermined size (predetermined volume or predetermined weight), and a frame as shown in FIG. 3 (c). It mounts on the jig | tool 20 so that the center of the body 5 and the center of the glass pellet 10 may correspond. Next, as shown in FIG. 3D, a movable type in which a jig 20 on which the frame body 5 and the glass pellet 10 are placed, and a depression 26 having a curved surface having the same shape as the lens to be molded are formed. The jig 25 is housed in the first heating furnace 40 and heated to a first temperature (for example, 1000 ° C.) higher than the softening point of the glass in a nitrogen gas environment. FIG. 3D shows a state where the glass pellet 10 is melted or softened. The jig 20 is, for example, compression-molded carbon powder in a predetermined shape as shown in the figure, and the jig 20 has a center of the recess 21 of the jig 20 and a center of the recess 26 of the jig 25. And the jig | tool 25 is arrange | positioned.

  When the glass pellet 10 is melted or softened to such an extent that compression molding is possible, the movable jig 25 is gradually lowered toward the jig 20 as shown in FIG. The glass pellet 10 is deformed under pressure. Thereby, the curved surface of the depression 26 is transferred to the surface of the molten glass pellet 10. Further, when the glass pellet 10 is melted, the oxide film formed on the surface of the frame 5 improves the wettability between the frame 5 and the glass, improves the adhesion between the glass and the metal interface, and seals them. Hermetic joining. In this way, after pressing the jig 25 against the jig 20 at a predetermined pressure for a predetermined time to compress and mold the optical member 4, the temperature in the first heating furnace 40 is lowered, and the jig 20, the jig 25, and the like are molded. The optical member 4 and the frame body 5 are cooled.

  Further, as described above, since the thermal expansion coefficient of the material of the frame body 5 and the optical member 4 are substantially the same, the optical member 4 and the frame body 5 contract at substantially the same rate during cooling. 4 and the frame 5 do not separate, and the optical member 4 and the frame 5 are integrally sealed and joined even after cooling. And after cooling to normal temperature, the jig | tool 20, the jig | tool 25, the optical member 4, and the frame 5 are taken out from the 1st heating furnace 40, and the jig | tool 25 is isolate | separated from the jig | tool 20. FIG. Thereby, as shown in FIG. 3F, the optical member 4 and the frame body 5 which are sealed and joined are obtained.

  The frame 5 and the optical member 4 are housed in a separate heating furnace (not shown), and are higher than the softening point of the glass in an oxygen-containing air environment and higher than the first temperature (for example, 1000 ° C.). Reheating to a low second temperature (eg, 800 ° C.) is preferred. By this heat treatment, when the surface of the textured optical member 4 transferred by carbon powder is remelted or resoftened, the glass melted or softened by the surface tension moves from the convex portion to the concave portion, and the optical member 4 The unevenness on the surface of the film is gradually smoothed and smoothed. That is, the lens surface can be mirror-finished by thermally polishing the lens surface with a simple heat treatment.

  The optical member 4 is formed such that each surface ridgeline becomes an R-shaped curved surface during pressure molding, and as shown in FIG. 1, the curved surface R is further increased by thermal polishing. In addition, what is necessary is just to cut the surface of an optical member by machining, when it is necessary to make the said curved surface into an acute angle. After joining the optical member 4 and the frame body 5 through the above process, the oxide film on the surface of the frame body 5 not joined to the glass is washed and removed. The optical member 4 joined to the frame 5 can be manufactured and traded independently, and the joining process with the package substrate 3 described below is a manufacturer different from the manufacturer of the optical member 4. May be implemented.

  Next, as shown in FIG. 4A, separately, using ceramic, a step of manufacturing a package substrate 3 having a bottomed recess 31 and a peripheral wall 32 surrounding the bottomed recess 31 without a gap, and a package The optical element 2 is subjected to a process of metallizing the upper end portion 33 of the peripheral wall 32 of the substrate 3 by gold plating or gold vapor deposition and a process of mounting the optical element 2 such as a deep ultraviolet LED in the bottomed recess 31 of the package substrate 3. A package substrate 3 on which is mounted is prepared. At this stage, the oxide film on the surface of the frame 5 that is not bonded to the glass is removed. Further, the upper end portion 33 of the peripheral wall 32 of the package substrate 3 is subjected to gold plating or gold vapor deposition (not shown) as a metallization process. And between the prepared package substrate 3 and the optical member 4 integrally joined with the frame 5 formed as described above, an alloy containing a noble metal such as gold / tin or gold / germanium is used. The formed metal preform 6 is disposed, and alignment is performed so that the upper end portion 33 on the package substrate 3 side and the lower surface 51 of the frame body 5 are in close contact with each other. And as shown in FIG.4 (b), the melting temperature (200-400 degreeC) of the metal substrate 6 at least with the package substrate 3, the metal preform 6, and the optical member 4 in the 2nd heating furnace 50. FIG. Heat to above temperature and weld them. The metal preform 6 is cured by cooling to a temperature equal to or lower than the melting temperature of the metal preform 6, and the frame body 5 integrated with the optical member 4 and the upper end portion of the peripheral wall 32 of the package substrate 3. 33 is joined with an inorganic material (fillet).

  In the ultraviolet light element 1 or the ultraviolet light element package thus obtained, both the package substrate 3 and the optical member 4 have substantially the same size and shape in plan view, and the frame 5 and the package substrate. The upper end portions 33 of the three peripheral walls 32 are also substantially the same size and shape in plan view.

  The frame body 5 is integrally sealed and bonded to a portion of the lower surface 43 of the optical member 4 facing the package substrate 3, which is bonded to the upper end portion 33 of the peripheral wall 32. Therefore, when the lower surface 51 of the frame 5 and the metallized upper end portion 33 of the peripheral wall 32 of the package substrate 3 are closely bonded by the metal preform 6, the bottomed recess 31 of the package substrate 3 and the optical member 4 A space formed by the lower surface 43 on the side facing the package substrate 3 is hermetically sealed, and is blocked from the outside of the ultraviolet light element 1 or the ultraviolet light element package. When the optical element 2 is a light-emitting element, deep ultraviolet light output from the light-emitting element does not leak from the gap between the joint portion of the package substrate 3 and the optical member 4, and adversely affects resin products and the like existing around the ultraviolet optical element 1. Is almost never given.

  By the way, in the manufacturing process of the optical member 4 integrally joined to the frame 5 shown in FIG. 3, the jig 20 and the jig 25 are each formed by compressing carbon powder. Therefore, on the surface of the optical member 4 molded in FIG. 3 (f), the shape of the minute carbon powder is transferred to form a textured shape, so that a so-called matting process is performed. . Moreover, the peeled carbon powder may adhere to the surface of the optical member 4. Therefore, after the step shown in FIG. 3F, a cleaning step of cleaning the surface of the molded optical member 4 and removing the adhering carbon powder may be provided. Specifically, the surface of the optical member 4 is cleaned using hydrochloric acid, hydrogen fluoride water, deionized water, or the like.

  In addition, when it is desired to diffuse and irradiate deep ultraviolet light emitted from the optical element 2, it may be preferable that unevenness remains on the surface of the optical member 4. In that case, the surface of the optical member 4 is remelted by setting the heating temperature in the bonding process of the package substrate 3 and the optical member 4 shown in FIG. Alternatively, the degree of resoftening may be reduced.

  Moreover, in the said embodiment, although the package substrate 3 which has the bottomed recessed part 31, the surrounding wall 32, and the upper end part 33 was used and the optical element 2 was mounted in the bottomed recessed part 31, the example of a structure was shown in the frame 5. As shown in FIG. 5, a flat substrate 3F having no bottomed recess 31 or the like may be used. In this case, the optical member 4 is held in a state where the clogs are put on the substrate 3F with the thickness of the frame 5, and the optical element is inserted in the gap formed between the optical member 4 (lower surface 43) and the substrate 3F. 2 is accommodated. In the above embodiment, a plano-convex single lens is exemplified as the optical member 4, but the present invention is not limited to this, and the optical member 4 may be a biconvex single lens, a convex meniscus single lens, or a concave single lens depending on applications. May be. In those cases, a recess or protrusion corresponding to the lens shape is also formed on the surface of the jig 20. Further, the package substrate 3 and the optical member 4 may be substantially circular in addition to being substantially square in plan view.

  Alternatively, as the optical member 4, in addition to a spherical or aspherical single lens, as shown in FIG. 6, the optical member 4 includes a plurality of spherical lenses or a plurality of aspheric surfaces arranged in a predetermined pattern. The lens 41 may be configured (a so-called lens array). Also in this case, the package substrate 3 and the optical member 4 may be substantially circular or rectangular in addition to being substantially square in plan view. In particular, when the optical member 4 is a lens array, it cannot be manufactured by conventional grinding and polishing treatment of quartz glass, and the effect of the present invention is remarkable. Furthermore, even if the optical member 4 is a single spherical or aspherical lens, it may be a Fresnel lens (not shown) in order to reduce the thickness of the lens. Also in the case of a Fresnel lens, it cannot be manufactured by conventional grinding and polishing treatment of quartz glass, and the effect of the present invention is remarkable.

  7 and 8 show a modification of the method for producing the ultraviolet light element and the optical member used therefor. In FIG. 3, a jig 20 having a recess 21 having substantially the same shape as the frame body 5 is used. However, in this modification, as shown in FIGS. The frame body 5 having a thickness smaller than that shown in FIG. 3 or the like is directly placed on the upper surface 22 of the jig 20 at the outer peripheral portion of the convex portion 23. . Then, as shown in FIGS. 7C and 7D, the melted or softened glass pellet 10 was formed by transferring the shape of the convex portion 23 and as shown in FIGS. 7E and 7F. A recess 44 is formed on the lower surface 43 of the optical member 4. In this case, as shown in FIG. 8, even if the thickness of the frame 5 is thin, there is a recess 44 of the optical member 4, so that the flat substrate without the bottomed recess 31 and the like is the same as the configuration shown in FIG. The optical element 2 can be accommodated in a space formed between the recess 44 of the optical member 4 and the substrate 3F using 3F. The process of joining the optical member 4 with the frame 5 and the substrate 3F created in the process of FIG. 7 is the same as that of FIG. 4, and the description of the metal preform 6 is omitted in FIG. ing.

  9 and 10 show another modification of the method for manufacturing the ultraviolet light element and the optical member used therefor. In FIG. 3, a jig 20 having a recess 21 having substantially the same shape as that of the frame 5 is used. However, in this modification, as shown in FIGS. 9A and 9B, the upper surface 22 is flat. The tool 5 is used to place the frame 5 directly on the upper surface 22 of the jig 20. Then, as shown in FIGS. 9 (c) and 9 (d), the molten or softened glass pellet 10 flows into the cavity inside the frame 5, and is molded as shown in FIGS. 9 (e) and 9 (f). The lower surface 43 of the optical member 4 is flush with the lower surface of the frame 5. Further, as shown in FIG. 10, the frame body 5 is exposed such that the lower surface 51 joined to the upper end portion 33 of the peripheral wall 32 of the package substrate 3 is exposed from the lower surface 43 of the optical member 4 facing the package substrate 3. Furthermore, it is buried in the optical member 4. Here, if a moderately concavo-convex portion is formed on the inner peripheral surface 52 of the annular portion of the frame body 5, the molten or softened glass flows into the concavo-convex portion and exhibits an anchor effect. The optical member 4 and the frame 5 are firmly fixed. Note that the step of joining the optical member 4 with the frame 5 and the package substrate 3 created in the step of FIG. 9 and the package substrate 3 are the same as in FIG. 4, and the description of the metal preform 6 is omitted in FIG. doing.

  As described above, according to the present invention, a glass having a softening point of 1000 ° C. or less and an average transmittance of 80% or more with respect to light having a wavelength of 250 to 400 nm is used for a glass pellet 10 that is melted or softened. Since the optical member 4 is pressure-molded by pressing 25, the number of manufacturing steps is small and the steps themselves are simple. Moreover, since the frame 5 is integrally joined to the optical member 4 simultaneously with the molding of the optical member 4, masking and vapor deposition steps for metallization processing are not required. Further, the metal preform 6 is used for the frame 5 integrated with the optical member 4 and the upper end portion 33 of the peripheral wall 32 of the metallized package substrate 3 because the joint surface is made of metal. It can be easily joined with an inorganic material (fillet), and the manufacturing process can be further simplified. As a result, it is possible to provide the ultraviolet light element 1 and the ultraviolet light element package with high reliability at low cost. Further, the glass material is not limited to those exemplified above, and even if the transmittance for deep ultraviolet rays (for example, 265 nm) having a shorter wavelength is lower than 80%, a practically sufficient transmittance (for example, 70%). The above may be included.

DESCRIPTION OF SYMBOLS 1 Ultraviolet light element 2 Optical element 3 Package substrate (board | substrate)
3F substrate 4 optical member 5 frame 10 glass pellet 20 jig 25 jig 33 upper end part (joint part, metallized part)
41, 42 Lens

Claims (10)

An optical element that emits ultraviolet rays;
A ceramic substrate on which the optical element is mounted;
An optical element having a lens in a portion facing the optical element mounted on the substrate, and an optical member bonded to the substrate,
The optical member is formed of glass having a softening point of 1000 ° C. or less and an average transmittance of 80% or more for light having a wavelength of 250 to 400 nm,
A frame body made of a metal having substantially the same shape as that of the joint and having a thermal expansion coefficient substantially equal to the thermal expansion coefficient of the glass is integrally formed at the joint portion of the optical member with the substrate. Are joined,
A metallized portion subjected to a metallization process is formed at a joint portion between the substrate and the optical member,
The ultraviolet light element, wherein the frame body and the metallized portion are bonded with an inorganic material.   The ultraviolet light device according to claim 1, wherein the frame is sealed and bonded to the glass by an oxide film formed on a surface thereof.   The ultraviolet light element according to claim 1, wherein the frame body and the metallized portion are joined by a metal preform.   4. The frame is embedded in the optical member such that a surface bonded to the metallized portion is exposed from a surface of the optical member facing the substrate. The ultraviolet light element according to any one of the above. A plurality of the optical elements are mounted on the substrate in a predetermined arrangement pattern,
The ultraviolet optical element according to claim 1, wherein the optical member includes a plurality of lenses arranged to correspond to the arrangement pattern of the optical elements. A package for an ultraviolet light device comprising a ceramic substrate on which an optical device that emits ultraviolet light is mounted, and an optical member bonded to the substrate,
The optical member is formed of glass having a softening point of 1000 ° C. or less and an average transmittance of 80% or more for light having a wavelength of 250 to 400 nm,
A frame body made of a metal having substantially the same shape as that of the joint and having a thermal expansion coefficient substantially equal to the thermal expansion coefficient of the glass is integrally formed at the joint portion of the optical member with the substrate. Are joined,
A metallized portion subjected to a metallization process is formed at a joint portion between the substrate and the optical member,
A package for an ultraviolet light element, wherein the frame and the metallized portion are bonded with an inorganic material. An optical member bonded to a ceramic substrate on which an optical element that emits ultraviolet light is mounted,
The softening point is 1000 ° C. or less, and the average transmittance for light with a wavelength of 250 to 400 nm is 80% or more, and is formed of glass.
A frame body made of a metal having substantially the same shape as that of the joint and having a thermal expansion coefficient substantially equal to the thermal expansion coefficient of the glass is integrally formed at the joint portion of the optical member with the substrate. An optical member which is bonded. A method of manufacturing an optical member to be bonded to a ceramic substrate on which an optical element that emits ultraviolet light is mounted,
A step of cutting glass having a softening point of 1000 ° C. or less and an average transmittance of 80% or more with respect to light having a wavelength of 250 to 400 nm into glass pellets of a predetermined size;
A metal having a thermal expansion coefficient substantially equal to the thermal expansion coefficient of the glass is formed into a frame body having substantially the same shape as a bonding portion with the optical member of the substrate. Forming, and
Forming an oxide film on the surface of the frame, and sealingly bonding the frame and the glass with the oxide film;
In a nitrogen gas environment, the frame and the glass pellet are placed on a jig formed in a predetermined shape, and heated to a first temperature higher than the softening point to melt the glass pellet, Forming an optical member having a predetermined shape to which the shape of the tool is transferred;
And a step of removing an oxide film on a surface of the frame body that is not bonded to the glass.   The optical member according to claim 8, further comprising a step of heating to a second temperature higher than the softening point of the glass and lower than the first temperature to thermally polish the surface of the optical member. Manufacturing method.   The method of manufacturing an optical member according to claim 8 or 9, wherein the jig is formed by solidifying carbon powder.