JP2017067200A5 - - Google Patents
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- JP2017067200A5 JP2017067200A5 JP2015194786A JP2015194786A JP2017067200A5 JP 2017067200 A5 JP2017067200 A5 JP 2017067200A5 JP 2015194786 A JP2015194786 A JP 2015194786A JP 2015194786 A JP2015194786 A JP 2015194786A JP 2017067200 A5 JP2017067200 A5 JP 2017067200A5
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- positions
- isolator
- states
- sensors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000009434 installation Methods 0.000 description 5
- 238000002955 isolation Methods 0.000 description 1
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015194786A JP6587487B2 (ja) | 2015-09-30 | 2015-09-30 | アクティブ除振装置及びそのセンサの設置方法 |
CN201610648111.2A CN106556460B (zh) | 2015-09-30 | 2016-08-09 | 主动去振装置及该主动去振装置的振动传感器的设置方法 |
TW105128151A TWI698596B (zh) | 2015-09-30 | 2016-08-31 | 主動去振裝置及該主動去振裝置的振動感測器的設置方法 |
KR1020160124472A KR102493122B1 (ko) | 2015-09-30 | 2016-09-28 | 능동형 제진장치 및 그 센서의 설치방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015194786A JP6587487B2 (ja) | 2015-09-30 | 2015-09-30 | アクティブ除振装置及びそのセンサの設置方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017067200A JP2017067200A (ja) | 2017-04-06 |
JP2017067200A5 true JP2017067200A5 (zh) | 2018-10-04 |
JP6587487B2 JP6587487B2 (ja) | 2019-10-09 |
Family
ID=58417385
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015194786A Active JP6587487B2 (ja) | 2015-09-30 | 2015-09-30 | アクティブ除振装置及びそのセンサの設置方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6587487B2 (zh) |
KR (1) | KR102493122B1 (zh) |
CN (1) | CN106556460B (zh) |
TW (1) | TWI698596B (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107061591B (zh) * | 2017-04-27 | 2019-03-08 | 武汉微搏科技有限公司 | 一种整体式金属弹簧主动减振台 |
JP2019121688A (ja) * | 2018-01-05 | 2019-07-22 | 株式会社ニューフレアテクノロジー | 制振システム及び、その制振システムを備える光学装置 |
JP7023121B2 (ja) * | 2018-01-15 | 2022-02-21 | 倉敷化工株式会社 | アクティブ除振装置 |
CN110319919B (zh) * | 2018-03-29 | 2021-05-07 | 上海梅山钢铁股份有限公司 | 一种应用于风机混泥土基础的松动判别方法 |
US20220163374A1 (en) * | 2019-04-12 | 2022-05-26 | Satake Corporation | Sieving device |
CN110360267B (zh) * | 2019-07-17 | 2021-05-21 | 山东圣海光纤科技有限公司 | 一种主动消除光学系统外界震动干扰的装置 |
CN113884004A (zh) * | 2021-09-08 | 2022-01-04 | 长江存储科技有限责任公司 | 特征尺寸测量用扫描电镜的气浮系统和扫描电镜 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3282302B2 (ja) | 1992-09-30 | 2002-05-13 | 株式会社島津製作所 | 加振装置または振動除去装置 |
JP2003130128A (ja) * | 2001-10-30 | 2003-05-08 | Canon Inc | 能動除振装置 |
EP1540201B1 (de) * | 2002-09-12 | 2010-12-15 | Schaeffler Technologies AG & Co. KG | Verfahren zum vermindern von rupfschwingungen |
US8229598B2 (en) * | 2007-09-06 | 2012-07-24 | Okuma Corporation | Vibration suppressing device for machine tool |
JP2010085099A (ja) * | 2008-09-29 | 2010-04-15 | Bridgestone Corp | 防振ゴムの劣化モニタリング装置および方法 |
CN101718333B (zh) * | 2009-11-28 | 2012-01-18 | 山西太钢不锈钢股份有限公司 | 一种消除快速链振动的方法及其装置 |
CN102928073A (zh) * | 2012-11-26 | 2013-02-13 | 昆山北极光电子科技有限公司 | 一种基于相位叠加的振动噪声滤除方法 |
JP6198556B2 (ja) * | 2013-10-09 | 2017-09-20 | 倉敷化工株式会社 | アクティブ除振装置 |
CN103557268A (zh) * | 2013-11-14 | 2014-02-05 | 高乐(天津)科技发展有限公司 | 半主动型除振系统 |
-
2015
- 2015-09-30 JP JP2015194786A patent/JP6587487B2/ja active Active
-
2016
- 2016-08-09 CN CN201610648111.2A patent/CN106556460B/zh active Active
- 2016-08-31 TW TW105128151A patent/TWI698596B/zh active
- 2016-09-28 KR KR1020160124472A patent/KR102493122B1/ko active IP Right Grant
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