JP2017058157A - Vibration measurement system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a vibration measurement system with which it is easy to shorten the time needed for measuring vibrations at a plurality of places.SOLUTION: A vibration measurement system in an embodiment of the invention comprises a laser vibrometer and an irradiation device. The laser vibrometer measures the vibration of the surface of an object on the basis of the reflectance of a laser beam with which the surface of the object is irradiated. The irradiation device has a first rotary mirror provided with a plurality of first curved reflection surfaces that are arranged in the circumferential direction of a first center axis of rotation and each reflect a laser beam moving relatively in the circumferential direction of the first center axis of rotation toward a fixed direction, the first rotary mirror capable of rotating relative to the laser vibrometer around the first center axis of rotation, wherein the plurality of first reflection surfaces rotating around the first center axis of rotation successively reflect the laser beam and cause the irradiated surface position of the laser beam to change discretely.SELECTED DRAWING: Figure 2

Description

  Embodiments described herein relate generally to a vibration measurement system.

  Conventionally, a vibration generator irradiates an object with sound waves to generate vibration on the object, a vibration measurement system measures the vibration of the surface of the object using laser light, and a defect determination device measures with the vibration measurement system 2. Description of the Related Art An inspection system that determines whether or not a target has a defect based on the vibration of the surface of the target is performed.

Japanese Patent Laid-Open No. 4-273447

  In this type of inspection system, the vibration of one part of the surface of the target part is measured every time a sound wave is irradiated. Therefore, when measuring vibrations of a plurality of parts on the surface of the object, the measurement time becomes long. There is a problem of end. Thus, as an example, it would be meaningful to obtain a vibration measurement system that can easily reduce the time taken to measure vibrations at a plurality of locations.

  The vibration measurement system according to the embodiment includes a laser vibrometer and an irradiation device. The laser vibrometer measures the vibration of the surface based on the reflected light of the laser light irradiated on the surface of the object. The irradiation device includes a plurality of curved second light beams that are arranged in the circumferential direction of the first rotation center axis and that each move relative to the circumferential direction of the first rotation center axis and each reflect the laser beam in a certain direction. A first reflecting mirror provided on the first rotation center axis and rotatable with respect to the laser vibrometer; and rotating about the first rotation center axis; The laser beam is sequentially reflected by a plurality of first reflecting surfaces, and the irradiation position of the laser beam on the surface is discretely changed.

FIG. 1 is an exemplary diagram of an inspection form of the inspection system according to the first embodiment. FIG. 2 is an exemplary configuration diagram of the vibration measurement system according to the first embodiment. FIG. 3 is an exemplary configuration diagram of a state different from FIG. 2 of the vibration measurement system of the first embodiment. FIG. 4 is an exemplary perspective view of a part of the vibration measurement system according to the first embodiment. FIG. 5 is an exemplary perspective view of first and second rotating mirrors of the vibration measurement system according to the first embodiment. FIG. 6 is an exemplary perspective view of the first rotating mirror of the vibration measurement system according to the first embodiment. FIG. 7 is an exemplary block diagram of the vibration measurement system according to the first embodiment. FIG. 8 is a diagram illustrating a result of vibration measurement performed by the vibration measurement system according to the first embodiment. FIG. 9 is an exemplary perspective view of the first rotating mirror of the vibration measurement system according to the second embodiment. FIG. 10 is an exemplary configuration diagram of a part of the vibration measurement system according to the third embodiment. FIG. 11 is an exemplary configuration diagram of a vibration measurement system according to the fourth embodiment. FIG. 12 is an exemplary configuration diagram of a state different from FIG. 11 of the vibration measurement system of the fourth exemplary embodiment. FIG. 13 is an exemplary configuration diagram of a vibration measurement system according to the fifth embodiment. FIG. 14 is an exemplary configuration diagram of a state different from FIG. 13 of the vibration measurement system of the fifth exemplary embodiment. FIG. 15 is an exemplary configuration diagram of a part of the vibration measurement system according to the sixth embodiment. FIG. 16 is an exemplary configuration diagram of a vibration measurement system according to the seventh embodiment. FIG. 17 is an exemplary configuration diagram of a state different from FIG. 16 of the vibration measurement system according to the seventh embodiment. FIG. 18 is an exemplary configuration diagram of a part of the vibration measurement system according to the eighth embodiment.

  The following exemplary embodiments include similar components. Therefore, below, the same code | symbol is attached | subjected to the same component, and the overlapping description is partially abbreviate | omitted. The configuration of the embodiment shown below and the operations, results, and effects brought about by the configuration are examples.

<First Embodiment>
A first embodiment will be described with reference to FIGS. As shown in FIG. 1, the inspection system 1 of the present embodiment is mounted on, for example, a vehicle 100 and inspects an object 200 using a laser beam L. In the present embodiment, the vehicle 100 is an automobile and the object 200 is a tunnel. The vehicle 100 is not limited to an automobile, and the object 200 is not limited to a tunnel.

  The inspection system 1 includes a vibration generation device (not shown), a vibration measurement system 10 (vibration measurement device), and a defect determination device (not shown). The vibration generator irradiates the object 200 with the sound wave S to generate vibration on the object 200. The vibration measurement system 10 measures the vibration of the surface 200a of the object 200 using the laser light L. The defect determination device determines whether or not the object 200 has a defect 200b based on the vibration of the surface 200a measured by the vibration measurement system 10. The defect 200b is, for example, a cavity.

  Hereinafter, the vibration measurement system 10 will be described in detail. As shown in FIG. 2, the vibration measurement system 10 includes a laser vibrometer 11, an irradiation device 12, and a control device 13.

  The laser vibrometer 11 measures the vibration of the surface 200a based on the reflected light of the laser beam L irradiated to the surface 200a of the object 200. The laser beam L emitted from the laser vibrometer 11 is irradiated onto the surface 200 a of the object 200 via the irradiation device 12. The surface 200a of the object 200 is a scattering surface, and the reflected light of the laser light L reflected by the surface 200a becomes scattered light. A part of the reflected light of the laser light L reflected by the surface 200 a of the object 200 enters the laser vibrometer 11 via the irradiation device 12. The laser vibrometer 11 measures the vibration of the surface 200a based on the incident reflected light. The laser vibrometer 11 is, for example, a known laser Doppler vibrometer. The laser vibrometer 11 may be another type of vibrometer. The laser vibrometer is supported on the vehicle body via a support member (not shown).

  As shown in FIGS. 2 to 4, the irradiation device 12 discretely irradiates the surface 200 a of the object 200 with the laser light L emitted from the laser vibrometer 11 by the rotation of the reflection unit 20. For convenience, in FIGS. 2 and 3 and the like, a part of the object 200 is divided into a plurality of parts, and each of the divided parts includes an irradiation position P to which the laser beam L is irradiated on the surface 200a. . 2 and 3, irradiation positions Pa to Pd are shown as a plurality of irradiation positions P. The irradiation position P is a measurement location where the laser vibrometer 11 measures vibration.

  The irradiation device 12 includes two lenses 21 and 22, two rotary mirrors 23 and 24 that constitute the reflection unit 20, and a correction plate 25. In FIG. 4, the lenses 21 and 22 and the correction plate 25 are not shown. In the present embodiment, the rotating mirror 23 is an example of a first rotating mirror, and the rotating mirror 24 is an example of a second rotating mirror. The rotating mirrors 23 and 24 can also be referred to as rotating members, reflecting members, or reflecting portions.

  The lens 21 is configured as a condensing lens, and condenses the laser light L emitted from the laser vibrometer 11. The lens 21 condenses the laser light L so that the focal point of the laser light L is located between the lens 21 and the lens 22. The lens 21 is fixed to the support member, and its position is fixed to the laser vibrometer 11.

  The lens 22 is configured as a collimating lens, and converts the laser light L emitted from the lens 21 into parallel light. The lenses 21 and 22 reduce the diameter (beam diameter) of the laser light emitted from the laser vibrometer 11. The lens 22 is fixed to the support member, and its position is fixed to the laser vibrometer 11.

  The rotating mirror 23 is supported by the support member so as to be rotatable about the rotation center axis Ax. That is, the rotary mirror 23 can rotate with respect to the laser vibrometer 11. The rotating mirror 23 is connected to the motor 26 (FIG. 7) via a connecting mechanism (not shown), and is rotated about the rotation center axis Ax with respect to the laser vibrometer 11 by the driving force of the motor 26. The rotating mirror 23 can be composed of, for example, a glass substrate in which aluminum is deposited.

  The rotating mirror 23 includes a body 23a and a plurality (for example, four) reflecting surfaces 23b. The body 23a has an annular shape around the rotation center axis Ax. The body 23a is provided with an opening 23c that penetrates the body 23a along the axial direction of the rotation center axis Ax (the left-right direction in FIG. 2). The opening 23c is a through hole. The rotation center axis Ax is an example of a first rotation center axis.

  As shown in FIGS. 2, 3, 5, and 6, the plurality of reflecting surfaces 23b are provided at the end of the body 23a in the axial direction of the rotation center axis Ax and at the end of the body 23a on the lens 22 side. ing. The plurality of reflecting surfaces 23b are arranged in the circumferential direction of the rotation center axis Ax. As the rotating mirror 23 rotates around the rotation center axis Ax, the laser light L relatively moves on the reflection surface 23b in the circumferential direction of the rotation center axis Ax. That is, when the rotating mirror 23 rotates about the rotation center axis Ax, the laser light L is scanned relatively on the reflection surface 23b in the circumferential direction of the rotation center axis Ax. The reflecting surface 23b is a concave curved shape that reflects the laser light L, which moves relatively on the reflecting surface 23b in the circumferential direction of the rotation center axis Ax, in a certain direction, and is directed toward the reflecting surface 24b of the rotating mirror 24. Accordingly, the diameter of the laser beam L is reduced so that the laser beam L is condensed into a concave curved shape. In the present embodiment, the reflecting surface 23b has a curved shape in which the intersection line N1 with the plane M along the rotation center axis Ax is concave. The reflection surface 23b can be configured as a paraboloid as an example. For convenience, the curvature of the reflecting surface 23b is exaggerated in FIG.

  The plurality of reflection surfaces 23b are different from each other in the reflection direction of the laser light L (a constant reflection direction). The plurality of reflection surfaces 23 b having different reflection directions of the laser light L constitute a reflection surface group 27. In the present embodiment, one reflecting surface group 27 is provided. The reflection surface group 27 is an example of a first reflection surface group.

  As shown in FIGS. 2, 3, 4, and 5, the rotary mirror 24 is arranged with the rotary mirror 23 along the axial direction of the rotation center axis Ax. The rotating mirror 24 is supported by a support member so as to be rotatable about a rotation center axis Ax. That is, the rotary mirror 24 can rotate with respect to the laser vibrometer 11. The rotating mirror 24 is connected to the motor 26 via a connecting mechanism (not shown), and is rotated about the rotation center axis Ax with respect to the laser vibrometer 11 by the driving force of the motor 26. The rotation of the rotating mirror 24 is synchronized with the rotation of the rotating mirror 23. The rotation center axis Ax is an example of a second rotation center axis. That is, the rotation center axis Ax also serves as the first rotation center axis and the second rotation center axis. In other words, the first rotation center axis also serves as the second rotation center axis.

  The rotating mirror 24 includes a body 24a and a plurality (for example, four) reflecting surfaces 24b. The rotating mirror 24 can be made of aluminum, for example.

  As shown in FIGS. 2, 3, and 5, the plurality of reflection surfaces 24b are provided at positions facing the plurality of reflection surfaces 23c of the rotating mirror 23 in the body 24a. The plurality of reflecting surfaces 24b are arranged in the circumferential direction of the rotation center axis Ax. The laser beam L reflected by the corresponding reflecting surface 23b is incident on each reflecting surface 24b. As the rotating mirror 24 rotates around the rotation center axis Ax, the laser light L relatively moves on the reflection surface 24b in the circumferential direction of the rotation center axis Ax. That is, the rotating mirror 24 rotates around the rotation center axis Ax, so that the laser light L is scanned relatively on the reflection surface 24b in the circumferential direction of the rotation center axis A. The plurality of reflecting surfaces 24b are convex curved shapes that reflect the laser light L, which moves relatively on the reflecting surface 24b in the circumferential direction of the rotation center axis Ax, in a certain direction, and are reflected by the rotating mirror 23. A convex curved shape for condensing the laser light L on the surface 200a of the object 200 is configured by a combination with the surface 23b. Further, in the present embodiment, the reflecting surface 24b has a curved shape in which the intersection line N2 with the plane M is convex. The reflective surface 24b may be configured as a paraboloid as an example. For convenience, the curvature of the reflecting surface 24b is exaggerated in FIG.

  The plurality of reflection surfaces 24 b are provided corresponding to the plurality of reflection surfaces 23 b of the reflection surface group 27. The plurality of reflection surfaces 24 b constitute a reflection surface group 28. The reflective surface group 28 is an example of a second reflective surface group.

  The reflection directions of the laser beams L on the plurality of reflecting surfaces 23b are the same (parallel). The laser beam L reflected by the reflecting surface 24 b passes through the opening 23 c of the rotating mirror 23.

  The rotary mirrors 23 and 24 may be provided with counterweights (not shown) for adjusting the weight balance.

  The correction plate 25 is fixed to the body 23a while being inserted into the opening 23c of the body 23a of the rotary mirror 23. Therefore, the correction plate 25 rotates integrally with the rotary mirror 23. The correction plate 25 is configured as a Schmitt correction plate as an example, and corrects aberrations. The laser beam L emitted from the correction plate 25 reaches the surface 200a of the object 200. The correction plate 25 may not be provided when the aberration does not matter, such as when the reflecting surfaces 23b and 24b are configured as paraboloids having apexes on the rotation center axis Ax.

  In the vibration measurement system 10 having the above-described configuration, the following operation is performed for each irradiation of the sound wave S by the vibration generator. The laser light L emitted from the laser vibrometer 11 is incident on the irradiation device 12 in a state where the rotary mirrors 23 and 24 are rotating. The laser beam L incident on the irradiation device 12 is irradiated onto the surface 200 a of the object 200 via the lenses 21 and 22, the rotary mirrors 23 and 24, and the reflection plate 25. At this time, the laser beam L is condensed on the surface 200a by the pair of reflecting surfaces 23b and 24b. At this time, the irradiation position P of the laser beam L is different for each set of the plurality of reflecting surfaces 23b and 24b. Further, as the rotating mirrors 23 and 24 rotate, the set of reflecting surfaces 23b and 24b that reflect the laser light L sequentially changes. The irradiation positions Pa to Pd of the laser beams L on the respective reflecting surfaces 23b and 24b are separated from each other. That is, the irradiation device 12 changes the set of the reflecting surface 23b on which the laser beam L is incident and the reflecting surface 24b corresponding to the reflecting surface 23b by rotating the rotating mirrors 23 and 24, thereby causing the laser beam on the surface 200a. The irradiation position of L is changed discretely. As described above, in the present embodiment, while the surface 200a is vibrated by one irradiation of the sound wave S, the irradiation device 12 determines the irradiation position P of the laser light L on the surface 200a in a discrete manner. To change.

  As shown in FIG. 7, the control device 13 is connected to the laser vibrometer 11 and the motor 26. The control device 13 executes control of the laser vibrometer 11 and the motor 26 and various arithmetic processes. The control device 13 may be configured by a digital circuit or an analog circuit. The control device 13 is an example of a processing device.

  The control device 13 executes a process of collecting the vibration data of the surface 200 a measured by the laser vibrometer 11 for each irradiation position P of the laser light L by the irradiation device 12. This process will be described with reference to FIG. Data indicating the amplitude of vibration of the surface 200a acquired by the laser vibrometer 11 includes data a indicating the amplitude of the irradiation position Pa (measurement result using the first pair of reflecting surfaces 23b and 24b) and the irradiation position Pb. Data b (result of measurement using the second set of reflecting surfaces 23b and 24b) and data c (measurement using the set of the third reflecting surfaces 23b and 24b) indicating the amplitude of the irradiation position Pc Result) and data d indicating the amplitude of the irradiation position Pd (result of measurement using a set of the fourth reflecting surfaces 23b and 24b). The laser vibrometer 11 acquires data a to d at each specified time interval t1. Each of these data “a” to “d” is associated with time data indicating the time from the measurement start time. Further, the timing (period) of measurement by each pair of reflecting surfaces 23b and 24b is determined by the number of rotations of the rotating mirrors 23 and 24 (the number of rotations of the motor). The control device 13 time-divides and rearranges data indicating the amplitude of vibration of the surface 200a of the object 200 acquired by the laser vibrometer 11, and collects (associates) the data a to d for each irradiation position Pa to Pd. ,Classify). The control device 13 calculates waveform data 301 to 304 indicating the vibration waveforms at the irradiation positions Pa to bd based on the collected data a to d.

  As described above, in the present embodiment, the irradiation device 12 sequentially reflects the laser light L by the plurality of reflecting surfaces 23b rotating around the rotation center axis Ax, and the irradiation position P of the laser light L on the surface 200a. Is changed discretely. Therefore, for example, while the surface 200a vibrates by one irradiation of the sound wave S of the vibration generating device, the laser light L can be discretely applied to the plurality of irradiation positions P. It is easy to shorten the time required to measure the vibration of the location.

  Further, as described above, in the present embodiment, the laser light L relatively moves on the reflection surfaces 23b and 24b. Here, for example, the reflecting surfaces 23b and 24b of the rotary mirrors 23 and 24 having a configuration in which aluminum is deposited on a glass substrate have a smaller surface roughness than the surface 200a of the object 200 made of concrete, for example. Therefore, in this embodiment, compared with the case where vibration measurement is performed by continuously scanning the surface 200a with the laser light L, it is easy to suppress the occurrence of noise in the data a to d (measurement data).

<Other embodiments>
Next, the vibration measurement system 10 of another embodiment (2nd Embodiment-8th Embodiment) is demonstrated with reference to FIGS. 9-18. The vibration measurement system 10 of these other embodiments has the same configuration as a part of the vibration measurement system 10 of the first embodiment. Therefore, also by these other embodiments, the same effect based on the same configuration as the first embodiment can be obtained. Hereinafter, differences between the vibration measurement system 10 of the first embodiment and the vibration measurement system 10 of other embodiments will be mainly described.

<Second Embodiment>
As shown in FIG. 9, in this embodiment, the rotary mirror 23 of the irradiation device 12 in the vibration measurement system 10 has a plurality of reflecting surface groups 27. In the present embodiment, the two reflecting surfaces 23b paired in the direction (radial direction) orthogonal to the axial direction of the rotation center axis Ax have the same reflection direction of the laser light L (that is, in the same shape). is there). With such a configuration, the weight balance of the rotating mirror 23 is improved. Although not shown, the rotating mirror 24 also has a plurality of reflecting surface groups 28 as with the rotating mirror 23.

<Third Embodiment>
As shown in FIG. 10, in the present embodiment, the correction plate 25 of the irradiation device 12 in the vibration measurement system 10 is positioned between the rotating mirror 23 and the rotating mirror 24.

<Fourth Embodiment>
As shown in FIGS. 11 and 12, in the present embodiment, the irradiation device 12 in the vibration measurement system 10 includes a reflection unit 31. The reflection unit 31 has a plurality of mirrors 32. The mirror 32 has a reflecting surface 32a. That is, the reflecting part 31 has a plurality of reflecting surfaces 32a. The plurality of reflecting surfaces 32a are provided corresponding to the plurality of reflecting surfaces 24b. Each mirror 32 (reflective surface 32a) is supported by a support member, and its position relative to the laser vibrometer 11 is fixed. The reflecting surface 32a reflects the laser beam L reflected by the corresponding reflecting surface 24b toward the surface 200a. The plurality of reflecting surfaces 32a are different from each other in posture with respect to the rotating mirror 24. The plurality of reflecting surfaces 32a have different reflection directions of the laser light L from each other. The reflection surface 32a is an example of a third reflection surface. In the above configuration, for example, the interval between the irradiation positions P can be easily increased. That is, it is easy to increase the irradiation range (scan angle) of the laser light L.

<Fifth Embodiment>
As shown in FIGS. 13 and 14, in this embodiment, the irradiation device 12 in the vibration measurement system 10 includes lenses 41 to 43, a lens array 44, in addition to the lenses 21 and 22 and the rotating mirrors 23 and 24. Have

  The lens 41 is located between the lens 22 and the rotating mirror 23. The lens 41 is configured as a condensing lens, and condenses the laser light L emitted from the laser vibrometer 11 and passing through the lenses 21 and 22 onto the reflection surface 23b. The lens 41 is an example of a first lens.

  The lens 42 is located between the rotary mirror 23 and the rotary mirror 24. The lens 42 is configured as a condensing lens, and condenses the laser light L that is reflected by the reflecting surface 23b and spreads on the reflecting surface 24b. Further, the lens 42 can correct the laser light L. The lens 42 is an example of a second lens.

  The lens 43 is located on the emission side (downstream side) of the rotating mirror 24. The lens 43 is configured as a collimating lens, and converts the laser beam L reflected by the reflecting surface 24b to spread into parallel light. The lens 43 can correct the laser light L. The lens 43 is an example of a fourth lens.

  The lens array 44 has a plurality of lenses 44a. The plurality of lenses 44a are provided corresponding to the plurality of reflecting surfaces 24b. The lens 44a condenses the laser light L reflected by the reflecting surface 24b and converted into parallel light by the lens 43 on the surface 200a. The lens 44a is an example of a third lens.

  In the present embodiment, the reflecting surface 23b has a concave curved shape that reflects the laser light L moving relatively on the reflecting surface 23b in the circumferential direction of the rotation center axis Ax in a certain direction. The line of intersection N1 is linear. Moreover, in this embodiment, the peripheral edge 23b1 (end part) of the circumferential direction of the two reflective surfaces 23b adjacent in the circumferential direction is mutually connected (crossing). In the present embodiment, the laser light L moves through the connecting portion (intersection) of the edge 23b1 of the two adjacent reflecting surfaces 23b. Thereby, it is easy to suppress that noise occurs in data measured by the laser vibrometer 11.

  The reflection surface 24b is a convex curved shape that reflects the laser light L, which moves relatively on the reflection surface 24b in the circumferential direction of the rotation center axis Ax, in a certain direction, but intersects with the plane M. N2 is linear. Further, circumferential edges 24b1 (ends) of two reflecting surfaces 24b adjacent in the circumferential direction are connected (intersected) to each other. In the present embodiment, the laser light L moves through the connecting portion (intersection) between the edges 24b1 of the two adjacent reflecting surfaces 24b. Thereby, it is easy to suppress that noise occurs in data measured by the laser vibrometer 11.

<Sixth Embodiment>
As shown in FIG. 15, the irradiation device 12 in the vibration measurement system 10 of the present embodiment is similar to the irradiation device 12 of the fifth embodiment, in addition to the lenses 21 and 22 and the rotating mirrors 23 and 24. 41-43 (the lens 41 is not shown in FIG. 15) and a lens array 44. In the present embodiment, the lens array 44 is positioned between the lens 43 and the rotating mirror 23.

<Seventh Embodiment>
As shown in FIGS. 16 and 17, in this embodiment, the irradiation device 12 in the vibration measurement system 10 includes lenses 41 and 50, a reflection unit 51, and a lens array 44 in addition to the rotating mirror 23. . In the present embodiment, the lenses 21 and 22 and the rotating mirror 24 are not provided. The lenses 41 and 42 and the lens array 44 are the same as in the fifth embodiment. The rotating mirror 23 of this embodiment is the same as that of the fifth embodiment.

  The lens 50 is configured as a collimating lens, and collimates the laser light L that is reflected and spread by the reflecting surface 23b. The lens 50 can correct the laser light L. The lens 50 is supported by a support member, and the position with respect to the laser vibrometer 11 is fixed.

  The reflection unit 51 includes a plurality of mirrors 52. The mirror 52 has a reflecting surface 52a. That is, the reflecting part 51 has a plurality of reflecting surfaces 52a. The plurality of reflecting surfaces 52a are provided corresponding to the plurality of reflecting surfaces 23b. Each mirror 52 (reflection surface 52a) is supported by a support member, and the position with respect to the laser vibrometer 11 is fixed. The reflecting surface 52a reflects the laser beam L reflected by the corresponding reflecting surface 23b toward the surface 200a. The plurality of reflecting surfaces 52a have different attitudes with respect to the rotating mirror 23. The plurality of reflecting surfaces 52a have the same reflection direction of the laser light L. The laser beam L reflected by the reflecting surface 52a is condensed on the surface 200a by the lenses 44a of the lens array 44. The reflection surface 52a is an example of a second reflection surface.

  In the above configuration, since the motor 26 only needs to drive one rotating mirror 23, the power consumption of the motor 26 can be easily reduced.

<Eighth Embodiment>
As shown in FIG. 18, the irradiation device 12 in the vibration measurement system 10 of the present embodiment is similar to the irradiation device 12 of the seventh embodiment, in addition to the rotating mirror 23, lenses 41 and 50 (in FIG. 18). , The lens 41 is not shown), a reflecting portion 51, and a lens array 44. In the present embodiment, the lens array 44 is located between the lens 43 and the reflecting portion 51.

  Further, in each of the embodiments including the present embodiment, a reference surface may be provided between adjacent reflecting surfaces 23b in the rotating mirror 23. The reference surface is configured not to allow the laser light L to reach the surface 200a. As an example, the surface of the reference surface is subjected to masking treatment and absorbs the laser light L, thereby preventing the laser light L from reaching the surface 200a. By providing such a reference plane, the data a to d can be easily classified. The reference surface may be provided in place of the single reflecting surface 23b. The reference plane may be provided on the rotating mirror 24.

  In the above description, numbers such as “first” and “second” are attached to some components, but these numbers are given for convenience of explanation, and these numbers are appropriately set. Can be replaced.

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

  DESCRIPTION OF SYMBOLS 10 ... Vibration measuring system, 11 ... Laser vibrometer, 12 ... Irradiation device, 13 ... Control device (processing device), 23 ... Rotating mirror (first rotating mirror), 23b ... Reflecting surface (first reflecting surface), 24 ... Rotating mirror (second rotating mirror), 27 ... Reflecting surface group (first reflecting surface group), 28 ... Reflecting surface group (second reflecting surface group), 32a ... Reflecting surface (third reflecting surface) ), 52a ... reflecting surface (second reflecting surface), 200 ... object, 200a ... surface, Ax ... rotation center axis (first rotation center axis, second rotation center axis), L ... laser light.

Claims (10)

A laser vibrometer that measures the vibration of the surface based on the reflected light of the laser light applied to the surface of the object;
A plurality of curved first reflecting surfaces that are arranged in the circumferential direction of the first rotation center axis and each of the laser beams that move relatively in the circumferential direction of the first rotation center axis reflect each laser beam in a certain direction. A plurality of first rotation mirrors that are provided and have a first rotating mirror that is rotatable about the first rotation center axis with respect to the laser vibrometer and that rotates about the first rotation center axis; An irradiation device that sequentially reflects the laser light by a reflecting surface and discretely changes the irradiation position of the laser light on the surface;
Vibration measurement system with   2. The irradiation device according to claim 1, wherein the irradiation device includes a plurality of second reflecting surfaces that are provided corresponding to the plurality of first reflecting surfaces and reflect the laser light reflected by the first reflecting surfaces. The vibration measurement system described. The irradiation device has a second rotating mirror that is rotatable with respect to the laser vibrometer about a second rotation center axis,
The second rotating mirror is arranged in the circumferential direction of the second rotation center axis, is reflected by the first reflecting surface, and moves relative to the circumferential direction of the second rotation center axis. The vibration measurement system according to claim 2, comprising a plurality of curved second reflection surfaces each reflecting light in a certain direction.   The vibration measurement system according to claim 2 or 3, wherein a set of the first reflection surface and the second reflection surface corresponding to the first reflection surface condenses the laser light. The irradiation device includes:
A first lens for condensing the laser light emitted from the laser vibrometer on the first reflecting surface;
A second lens for condensing the laser light reflected by the first reflecting surface on the second reflecting surface;
A plurality of third lenses provided corresponding to the plurality of second reflecting surfaces, and condensing the laser light reflected by the second reflecting surface on the surface;
The vibration measurement system according to claim 2, comprising: The irradiation device includes a fourth lens that collimates the laser light reflected by the second reflecting surface,
The vibration measurement system according to claim 5, wherein the third lens condenses the laser light converted into parallel light by the fourth lens on the surface.   3. The vibration measurement system according to claim 2, wherein the irradiation device includes the plurality of second reflecting surfaces whose positions with respect to the laser vibrometer are fixed and whose postures with respect to the first rotating mirror are different from each other. The first rotating mirror has a plurality of first reflecting surface groups configured by a plurality of the first reflecting surfaces whose reflection directions of the laser light are different from each other.
The second rotating mirror includes a plurality of second reflecting surfaces configured by the plurality of second reflecting surfaces provided corresponding to the plurality of first reflecting surfaces of the first reflecting surface group. The vibration measurement system according to claim 3, comprising a group.   The irradiation device is provided to correspond to the plurality of second reflecting surfaces, the position with respect to the laser vibrometer is fixed, and the posture with respect to the second rotating mirror is different from each other and reflected by the second reflecting surface. The vibration measurement system according to any one of claims 2 to 8, further comprising a plurality of third reflection surfaces that reflect the laser beam that is reflected and have different reflection directions of the laser beam.   10. The vibration measurement system according to claim 1, further comprising a processing device that collects the vibration data measured by the laser vibrometer for each irradiation position of the laser light by the irradiation device.

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