JP2017035664A - Coating tool - Google Patents

Coating tool Download PDF

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JP2017035664A
JP2017035664A JP2015159077A JP2015159077A JP2017035664A JP 2017035664 A JP2017035664 A JP 2017035664A JP 2015159077 A JP2015159077 A JP 2015159077A JP 2015159077 A JP2015159077 A JP 2015159077A JP 2017035664 A JP2017035664 A JP 2017035664A
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groove
tip
blade
coating
cutting edge
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JP6631081B2 (en
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林 敦
Atsushi Hayashi
敦 林
卓也 伊藤
Takuya Ito
卓也 伊藤
高橋 健
Takeshi Takahashi
高橋  健
金山 利彦
Toshihiko Kanayama
利彦 金山
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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Priority to JP2015159077A priority Critical patent/JP6631081B2/en
Priority to TW105115067A priority patent/TW201706039A/en
Priority to PCT/JP2016/064487 priority patent/WO2017026153A1/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work

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  • Coating Apparatus (AREA)

Abstract

PROBLEM TO BE SOLVED: To further uniformly and surely coat a coating liquid, without causing a film thickness deviation of a coating film on a bottom surface of a recessed place formed in a coating object.SOLUTION: A tool body 1 is constituted by installing a plurality of head members 2 and 3 by bringing side surfaces 2a and 3a extending in the mutual lengthwise directions into close contact, and edge parts 4 and 5 projecting from tip surfaces 2b and 3b of the head members 2 and 3 are provided along the side surfaces 2a and 3a in a tip part of the side surfaces 2a and 3a, and a groove 6 for discharging a coating liquid is opened on the tip of the edge parts 4 and 5, and at least the edge parts 4 and 5 of the head members 2 and 3 are formed of hard metal, and the edge parts 4 and 5 are a square shape when viewed in the lengthwise direction, and projection quantities P4 and P5 of the edge parts 4 and 5 from the tip surfaces 2b and 3b of the head members 2 and 3, are set to 20 times or less of blade widths W4 and W5 of the edge parts 4 and 5 being an interval between groove surfaces 6a and 6b of the groove 6 and outside surfaces 4b and 5b of the edge parts 4 and 5 in the vertical direction to the lengthwise direction when viewed from the tip side.SELECTED DRAWING: Figure 4

Description

本発明は、複数のヘッド部材が互いの側面を密着させて取り付けられることにより工具本体が構成され、上記側面に沿って延びる上記工具本体の先端部に開口した溝から塗布液を吐出して被塗布物に塗布する塗布工具に関するものである。   According to the present invention, a tool body is configured by attaching a plurality of head members with their side surfaces in close contact with each other, and a coating liquid is discharged from a groove that opens along the side surface and opens at the tip of the tool body. The present invention relates to an application tool applied to an applied material.

従来、板状の被塗布物の表面に塗布液を塗布するのに、例えば特許文献1に記載されているように、塗布液を塗布すべき板状の被塗布物を水平に保持した状態で回転されるチャックと、この被塗布物の上面中央に塗布液を滴下する塗布液供給機構とを備えたスピンコート装置が用いられている。このようなスピンコート装置では、被塗布物を回転しつつ塗布液を滴下することにより、被塗布物の回転による遠心力によって塗布液が被塗布物の上面に拡散して塗布される。   Conventionally, in order to apply a coating liquid to the surface of a plate-shaped object, for example, as described in Patent Document 1, a plate-shaped object to be coated with a coating liquid is held horizontally. 2. Description of the Related Art A spin coater including a rotating chuck and a coating liquid supply mechanism that drops a coating liquid on the center of the upper surface of the object to be coated is used. In such a spin coater, the coating liquid is dropped while being applied to the coating object, whereby the coating liquid is diffused and applied to the upper surface of the coating object by the centrifugal force generated by the rotation of the coating object.

特開平10−057876号公報Japanese Patent Laid-Open No. 10-057876

ところが、このようなスピンコート装置によって、例えば上面に凹所が形成された被塗布物の該凹所の底面に塗布液を塗布しようとした場合には、この凹所の底面と壁面とが交差する凹所の隅に、遠心力によって拡散した塗布液が溜まってしまい、塗布膜の膜厚に大きな偏差を生じてしまう。   However, with such a spin coater, for example, when an application liquid is applied to the bottom surface of an object to be coated having a recess formed on the upper surface, the bottom surface of the recess intersects the wall surface. The coating liquid diffused by centrifugal force accumulates at the corners of the recesses, and a large deviation occurs in the thickness of the coating film.

また、このような塗布液を被塗布物に塗布するものとして、複数のヘッド部材が互いの側面を密着させて取り付けられることにより工具本体が構成され、工具本体先端部に開口した上記側面に沿って延びる溝から塗布液を吐出して被塗布物に塗布する塗布工具も知られている。このような塗布工具によれば、工具本体の先端に突き出した刃先部を設けて、その先端面に上記溝を形成することにより、この刃先部を凹所内に挿入して塗布を行うことで上述のような凹所の底面にも均一な塗布膜を形成することができる。   In addition, as a means for applying such a coating liquid to an object to be coated, a plurality of head members are attached with their side surfaces in close contact with each other to form a tool body, and along the side surface opened at the tip of the tool body. There is also known an application tool for applying an application liquid by discharging an application liquid from a groove extending in an extended manner. According to such an application tool, by providing the cutting edge portion protruding at the tip of the tool body and forming the groove on the tip surface, the cutting edge portion is inserted into the recess to perform application as described above. A uniform coating film can also be formed on the bottom surface of the recess.

しかしながら、このような塗布工具によって、比較的深い凹所の底面に壁面の極近くまで満遍なく塗布液を塗布しようとすると、工具本体先端部から刃先部を大きな突き出し量で突き出させる一方で、先端側から見たときの溝の開口部が延びる方向に垂直な方向における該溝の溝面と記刃先部の外側面との間隔である刃先部の刃幅は小さくしなければならない。このため、例えばヘッド部材が刃先部も含めてステンレス鋼により形成された塗布工具では、刃幅を0.5mm程度にすると刃先部が剛性不足となって塗布液の内圧により変形し、やはり膜厚の偏差が大きくなるので、突き出し量は刃幅の3倍(1.5mm)以上とすることができず、それ以上深い凹所に塗布液を塗布することは困難となる。   However, with such an application tool, if the application liquid is applied evenly to the bottom of a relatively deep recess to the very vicinity of the wall surface, the tip of the tool body protrudes from the tip of the tool body with a large amount of protrusion. The blade width of the blade edge portion, which is the distance between the groove surface of the groove and the outer surface of the blade edge portion in the direction perpendicular to the direction in which the opening of the groove extends when viewed from above, must be reduced. For this reason, for example, in a coating tool in which the head member is made of stainless steel including the blade edge portion, when the blade width is set to about 0.5 mm, the blade edge portion becomes insufficient in rigidity and deforms due to the internal pressure of the coating liquid. Therefore, the protrusion amount cannot be three times (1.5 mm) or more of the blade width, and it becomes difficult to apply the coating liquid to a deeper recess.

本発明は、このような背景の下になされたもので、被塗布物に形成された凹所等の底面に塗布膜の膜厚偏差を生じることなく、より満遍なく確実に塗布液を塗布することが可能な塗布工具を提供することを目的としている。   The present invention has been made under such a background, and the coating liquid can be more evenly and reliably applied without causing a film thickness deviation of the coating film on the bottom surface of the recess or the like formed in the object to be coated. An object of the present invention is to provide a coating tool capable of performing the above.

上記の課題を解決して、このような目的を達成するために、本発明は、複数のヘッド部材が互いの長手方向に延びる側面を密着させて取り付けられることにより工具本体が構成され、上記側面に沿って延びる上記工具本体の先端部に開口した溝から塗布液を吐出して被塗布物に塗布する塗布工具であって、上記複数のヘッド部材の互いに密着させられた上記側面の先端部には、該ヘッド部材の先端面から突き出る刃先部が上記側面に沿ってそれぞれ設けられていて、上記溝はこれらの刃先部の先端に開口しており、上記ヘッド部材の少なくとも上記刃先部は超硬合金によって形成され、この刃先部は、上記長手方向に見て方形状であるとともに、上記ヘッド部材の先端面からの該刃先部の突き出し量が、先端側から見たときの上記長手方向に垂直な方向における該溝の溝面と上記刃先部の外側面との間隔である該刃先部の刃幅の20倍以下とされていることを特徴とする。   In order to solve the above problems and achieve such an object, according to the present invention, a tool main body is configured by attaching a plurality of head members so that side surfaces extending in the longitudinal direction of each other are in close contact with each other. An application tool that discharges a coating liquid from a groove opened at the tip of the tool body extending along the surface of the tool body and applies it to an object to be coated. Are provided with edge portions protruding from the front end surface of the head member along the side surfaces, the grooves are opened at the front ends of the blade edge portions, and at least the edge portion of the head member is made of carbide. The blade edge portion is formed of an alloy and has a square shape when viewed in the longitudinal direction, and the protrusion amount of the blade edge portion from the distal end surface of the head member is in the longitudinal direction when viewed from the distal end side. Characterized in that it is more than 20 times the blade width of the blade tip portion is a distance between the outer surface of the groove surface and the cutting edge portion of the groove in the straight direction.

このような塗布工具では、ヘッド部材の少なくとも刃先部が、ステンレス鋼などよりもヤング率が高い高剛性の超硬合金により形成されており、刃先部の真直度を2μm/m以下とすることができるため、上記刃幅が0.2mm〜0.5mm程度の極薄であり、しかも刃先部の突き出し量を刃幅の最大20倍(4.0mm〜10.0mm)であっても、膜厚偏差の少ない塗布膜を形成することができる。さらに刃先部は溝の開口部が延びる長手方向に見て方形状であるとともに、塗布液はこの刃先部の先端面で広がって塗布されるので、凹所の深さが比較的深くても例えば凹所の壁面から0.1mmの極近くの位置にまで塗布膜を形成することができ、このような凹所の底面に満遍なく均一な厚さの塗布膜を確実に形成することが可能となる。   In such a coating tool, at least the cutting edge portion of the head member is made of a highly rigid cemented carbide having a Young's modulus higher than that of stainless steel or the like, and the straightness of the cutting edge portion may be 2 μm / m or less. Therefore, even if the blade width is extremely thin of about 0.2 mm to 0.5 mm and the protrusion amount of the blade edge portion is 20 times the blade width at the maximum (4.0 mm to 10.0 mm), the film thickness A coating film with little deviation can be formed. Furthermore, the blade edge portion has a rectangular shape when viewed in the longitudinal direction in which the opening of the groove extends, and the coating liquid spreads and is applied on the tip surface of the blade edge portion, so that even if the depth of the recess is relatively deep, for example A coating film can be formed from the wall surface of the recess to a position very close to 0.1 mm, and it is possible to reliably form a coating film having a uniform thickness evenly on the bottom surface of such a recess. .

ここで、上記刃先部の突き出し量が、上記刃幅の18倍以下とされていれば、一層高い膜厚の均一性を得ることができる。ただし、この刃先部の突き出し量は、上記刃幅の3倍以上とされているのが望ましく、これよりも突き出し量が小さいと、深い凹所の底面には塗布液を均一に塗布することができなくなるおそれが生じる。   Here, if the amount of protrusion of the blade edge portion is 18 times or less of the blade width, higher film thickness uniformity can be obtained. However, it is desirable that the protruding amount of the blade edge portion is three times or more of the blade width. If the protruding amount is smaller than this, the coating liquid can be uniformly applied to the bottom surface of the deep recess. There is a risk that it will not be possible.

また、上記複数のヘッド部材は、刃先部も含めて全体が超硬合金によって形成されていてもよいが、これら複数のヘッド部材の互いに密着させられた上記側面の先端部に、上記長手方向に沿って凹部を形成し、上記刃先部を、上記凹部に取り付けられる超硬合金製の刃先部材の先端側に設けることにより、この刃先部材以外のヘッド部材はステンレス鋼等により形成することができる。このため、例えば複数のヘッド部材をクランプボルトによって取り付ける際のネジ孔等の加工を容易に行うことが可能となる。また、この場合において、上記刃先部材を、上記刃幅よりも大きな幅を有して上記凹部に取り付けられる基端部を備えたものとすることにより、この幅の大きな基端部によって刃先部を高い剛性で支持することができて、さらに膜厚の均一化を図ることが可能となる。   In addition, the plurality of head members may be formed entirely of cemented carbide including the cutting edge portion, but in the longitudinal direction, the tip portions of the side surfaces of the plurality of head members brought into close contact with each other. By forming a recess along the tip and providing the cutting edge on the tip side of a cemented carbide cutting edge member attached to the recess, the head member other than the cutting edge member can be formed of stainless steel or the like. For this reason, it becomes possible to process easily the screw hole etc. at the time of attaching a some head member with a clamp bolt, for example. Further, in this case, the blade edge member is provided with a base end portion that has a width larger than the blade width and is attached to the concave portion, so that the blade edge portion is formed by the base end portion having a large width. It can be supported with high rigidity, and the film thickness can be further uniformed.

さらに、上記複数のヘッド部材の互いに密着させられた上記側面のうち、一方の側面は上記刃先部の先端まで平面状に形成するとともに、他方の側面には、上記一方の側面に対して凹んだ上記溝を形成することにより、例えばこれらの側面間にシムを介装したり、複数のヘッド部材の側部にサイドプレートを設けたりして溝を形成するのに比べ、溝の内面の全体に亙って表面粗さを均一にすることができ、溝の両端部における塗布液の流速のバラツキを防いで後述するダレ距離を小さく抑え、さらに均一な塗布膜を形成することができる。   Further, of the side surfaces of the plurality of head members that are brought into close contact with each other, one side surface is formed in a planar shape up to the tip of the blade edge portion, and the other side surface is recessed with respect to the one side surface. By forming the groove, for example, a shim is interposed between the side surfaces, or side plates are provided on the side portions of the plurality of head members, so that the groove is formed on the entire inner surface of the groove. As a result, the surface roughness can be made uniform, variation in the flow rate of the coating solution at both ends of the groove can be prevented, the sag distance described later can be kept small, and a more uniform coating film can be formed.

以上説明したように、本発明によれば、被塗布物に形成された凹所の底面に塗布液を塗布するような場合でも、この凹所の壁面の極近傍にまで満遍なく偏差の少ない均一な膜厚の塗布膜を確実に形成することが可能となる。   As described above, according to the present invention, even in the case where the coating liquid is applied to the bottom surface of the recess formed in the object to be coated, the uniform evenly with little deviation even to the very vicinity of the wall surface of the recess. It becomes possible to reliably form a coating film having a thickness.

本発明の一実施形態を示す正面図である。It is a front view showing one embodiment of the present invention. 図1に示す実施形態を先端側から見た平面図である。It is the top view which looked at embodiment shown in FIG. 1 from the front end side. 図1に示す実施形態を長手方向から見た側面図である。It is the side view which looked at embodiment shown in FIG. 1 from the longitudinal direction. 図3におけるA部の拡大図である。It is an enlarged view of the A section in FIG. 図2におけるB部の拡大図である。It is an enlarged view of the B section in FIG. 図1ないし図5に示す実施形態の変形例を示す長手方向から見た側面図である。It is the side view seen from the longitudinal direction which shows the modification of embodiment shown in FIG. 図6におけるC部の拡大図である。It is an enlarged view of the C section in FIG. 図1ないし図5に示す実施形態に基づいて、刃先部の突き出し量を変化させた塗布工具により塗布膜を形成したときの膜厚を溝の開口部が延びる長手方向に沿って測定した結果を示す図であり、(a)は突き出し量が刃幅の18倍の実施例1の結果、(b)は突き出し量が刃幅の20倍の実施例2の結果、(c)は突き出し量が刃幅の22倍の比較例1の結果を示すものである。Based on the embodiment shown in FIG. 1 to FIG. 5, the result of measuring the film thickness when the coating film is formed by the coating tool with the protruding amount of the blade edge portion changed along the longitudinal direction in which the groove opening extends is shown. (A) is the result of Example 1 in which the protrusion amount is 18 times the blade width, (b) is the result of Example 2 in which the protrusion amount is 20 times the blade width, and (c) is the protrusion amount. The result of the comparative example 1 22 times the blade width is shown. 溝を形成するのにステンレス鋼製のシムを用いた塗布工具である比較例2において、このシムの表面粗さを測定した位置を示す正面図である。It is a front view which shows the position which measured the surface roughness of this shim in the comparative example 2 which is a coating tool using the stainless steel shim to form a groove | channel. 図1ないし図5に示す実施形態に基づく図8(a)に結果を示した実施例1と、図9に示したステンレス鋼製のシムを用いた比較例2とにより塗布膜を形成したときの膜厚を溝の開口部が延びる長手方向に沿って測定した結果を示す図であり、(a)は比較例2の結果、(b)は実施例1の結果(図8(a)の実施例1と同じ)である。When the coating film is formed by Example 1 whose result is shown in FIG. 8A based on the embodiment shown in FIGS. 1 to 5 and Comparative Example 2 using the stainless steel shim shown in FIG. It is a figure which shows the result of having measured the film thickness of along the longitudinal direction where the opening part of a groove | channel extends, (a) is a result of the comparative example 2, (b) is a result of Example 1 (FIG. 8 (a)). The same as in Example 1).

図1ないし図5は、本発明の一実施形態を示すものである。本実施形態の塗布工具において、工具本体1は、横方向(図1および図2において左右方向)に長手方向を有する横長のブロック状であり、この長手方向に直交する断面が縦方向(図1および図3において上下方向)に長い略長方形をなす直方体状で略同形同大の一対のヘッド部材2、3が、互いの長手方向に延びる側面2a、3aを密着させて取り付けられることにより構成されている。   1 to 5 show an embodiment of the present invention. In the application tool of the present embodiment, the tool body 1 has a horizontally long block shape having a longitudinal direction in the lateral direction (left and right direction in FIGS. 1 and 2), and a cross section perpendicular to the longitudinal direction is the longitudinal direction (FIG. 1). And a pair of head members 2 and 3 having a substantially rectangular parallelepiped shape that is substantially rectangular in the vertical direction in FIG. 3 and having substantially the same shape and the same size, are attached with the side surfaces 2a and 3a extending in the longitudinal direction in close contact with each other. Has been.

そして、これらのヘッド部材2、3の互いに密着させられた上記側面2a、3aの先端部(図1および図3において上端部)には、両ヘッド部材2、3の先端面2b、3bから突き出る刃先部4、5がそれぞれ設けられていて、工具本体1の先端部、すなわちこれらの刃先部4、5の先端面4a、5aに、塗布液を吐出する溝6が上記長手方向に延びるように開口している。この溝6の溝幅W6は、上記先端面4a、5aにおける該溝6の開口部が延びる方向、すなわち上記長手方向に亙って一定である。   The head members 2 and 3 protrude from the front end surfaces 2b and 3b of the head members 2 and 3 at the front end portions (the upper end portions in FIGS. 1 and 3) of the side surfaces 2a and 3a. Cutting edge portions 4 and 5 are provided, respectively, so that the grooves 6 for discharging the coating liquid extend in the longitudinal direction at the tip ends of the tool body 1, that is, the tip surfaces 4a and 5a of these cutting edge portions 4 and 5. It is open. The groove width W6 of the groove 6 is constant in the direction in which the opening of the groove 6 extends in the tip surfaces 4a and 5a, that is, in the longitudinal direction.

これら一対のヘッド部材2、3のうち、一方のヘッド部材2は、上記側面(一方の側面)2aが刃先部4の先端にまで亙って平面状である。これに対して、本実施形態では、他方のヘッド部材3の上記側面(他方の側面)3aにおいて、その刃先部5よりも後端側(図1および図3において下側)に、図3に示すように上記長手方向に直交する断面が半円の凹溝状をなすマニホールド7が長手方向に延びるように形成されるとともに、このマニホールド7の長手方向中央部には同じく他方のヘッド部材3に形成された塗布液の供給孔7aが接続されている。   Of the pair of head members 2 and 3, one head member 2 has a planar shape in which the side surface (one side surface) 2 a extends to the tip of the blade edge portion 4. On the other hand, in the present embodiment, the side surface (the other side surface) 3a of the other head member 3 is closer to the rear end side (lower side in FIGS. 1 and 3) than the blade edge portion 5, and FIG. As shown in the figure, a manifold 7 having a semicircular groove shape whose cross section perpendicular to the longitudinal direction is formed to extend in the longitudinal direction, and the other head member 3 is also formed at the center in the longitudinal direction of the manifold 7. A supply hole 7a for the formed coating liquid is connected.

さらに、この他方のヘッド部材3の上記側面3aには、このマニホールド7から刃先部5の先端面5aにかけて、上記溝6が一方のヘッド部材2の上記側面2aに対して凹むように形成されており、この溝6の一方のヘッド部材2側の開口部が該一方のヘッド部材2の上記側面2aによって封止されることにより、マニホールド7に連通するとともに刃先部4、5の先端面4a、5aに開口する該溝6が形成される。なお、上記長手方向において、マニホールド7の両端部は溝6の両端部よりも僅かに長く形成されている。   Further, the groove 6 is formed on the side surface 3 a of the other head member 3 so as to be recessed with respect to the side surface 2 a of the one head member 2 from the manifold 7 to the tip surface 5 a of the blade edge portion 5. The opening on one head member 2 side of the groove 6 is sealed by the side surface 2a of the one head member 2, so that it communicates with the manifold 7 and the front end surfaces 4a of the cutting edge portions 4 and 5; The groove 6 opened to 5a is formed. In the longitudinal direction, both end portions of the manifold 7 are formed slightly longer than both end portions of the groove 6.

また、刃先部4、5は、この溝6の開口部が延びる方向すなわち長手方向から見て図4に示すように方形状であり、特に本実施形態では、工具本体1の先端側に長く突き出た長方形状に形成されている。従って、刃先部4、5の先端面4a、5aは、ヘッド部材2、3の先端面2b、3bに平行で面一な平坦面であり、刃先部4、5の互いに外側を向く外側面4b、5bはこれらの先端面2b、3b、4a、5aに垂直な平面状となる。なお、図1に示したように、刃先部4、5はヘッド部材2、3の長手方向の両端部には設けられておらず、その間の中央部にだけ長手方向に延びるように設けられている。   Further, the blade edge portions 4 and 5 have a rectangular shape as shown in FIG. 4 when viewed from the direction in which the opening of the groove 6 extends, that is, in the longitudinal direction. It is formed in a rectangular shape. Therefore, the tip surfaces 4a and 5a of the blade edge portions 4 and 5 are flat surfaces parallel to and flush with the tip surfaces 2b and 3b of the head members 2 and 3, and the outer surface 4b of the blade edge portions 4 and 5 facing the outside. Reference numeral 5b denotes a planar shape perpendicular to the tip surfaces 2b, 3b, 4a, and 5a. In addition, as shown in FIG. 1, the blade edge | tip parts 4 and 5 are not provided in the both ends of the longitudinal direction of the head members 2 and 3, and are provided so that it may extend in the longitudinal direction only in the center part between them. Yes.

さらに、図5に示すように工具本体1の先端側から見たときの溝6の開口部が延びる長手方向に垂直な方向における該溝6の溝面6a、6bと刃先部4、5の上記外側面4b、5bとの間隔である刃先部4、5の刃幅W4、W5もそれぞれ一定となり、本実施形態では、これらの刃幅W4、W5は0.2mm〜0.5mmの範囲内で互いに等しい幅とされている。なお、溝6の両端部には、この溝6が上述のように一方のヘッド部材2の上記側面2aに対して凹むように形成されることにより、溝面6a、6bに垂直な溝壁6cが形成される。なお、刃先部4、5の長手方向外側を向く端面と溝壁6cとの間隔は1mm以下とされるのが望ましい。   Furthermore, as shown in FIG. 5, the groove surfaces 6 a and 6 b of the groove 6 and the cutting edge portions 4 and 5 described above in the direction perpendicular to the longitudinal direction in which the opening of the groove 6 extends when viewed from the tip side of the tool body 1. The blade widths W4 and W5 of the blade edges 4 and 5 which are the distances from the outer side surfaces 4b and 5b are also constant, and in this embodiment, the blade widths W4 and W5 are within the range of 0.2 mm to 0.5 mm. The widths are equal to each other. The groove 6 is formed at both ends of the groove 6 so as to be recessed with respect to the side surface 2a of one head member 2 as described above, so that the groove wall 6c perpendicular to the groove surfaces 6a and 6b is formed. Is formed. In addition, as for the space | interval of the end surface which faces the longitudinal direction outer side of the blade edge | tip parts 4 and 5, and the groove wall 6c, it is desirable to set it as 1 mm or less.

そして、ヘッド部材2、3の少なくとも刃先部4、5は超硬合金によって形成されるとともに、ヘッド部材2、3の先端面2b、3bからの刃先部4、5の突き出し量P4、P5は、上記刃幅W4、W5の20倍以下とされており、望ましくは刃幅W4、W5の18倍以下とされる。また、この突き出し量P4、P5は、刃幅W4、W5の3倍以上とされるのが望ましい。   And at least the blade edge portions 4 and 5 of the head members 2 and 3 are formed of cemented carbide, and the protrusion amounts P4 and P5 of the blade edge portions 4 and 5 from the tip surfaces 2b and 3b of the head members 2 and 3 are The blade width is set to 20 times or less of the blade widths W4 and W5, and preferably 18 times or less of the blade widths W4 and W5. Further, it is desirable that the protrusion amounts P4 and P5 be three times or more of the blade widths W4 and W5.

さらにまた、本実施形態では、一対のヘッド部材2、3の互いに密着させられた側面2a、3aの先端部に、長手方向に沿って断面L字状の凹部2c、3cが形成されており、刃先部4、5は、これらの凹部2c、3cに基端部8a、9aが取り付けられる超硬合金製の刃先部材8、9に設けられている。ここで、この刃先部材8、9の基端部8a、9aは、上記刃幅W4、W5よりも十分に大きな幅の断面長方形状に形成されて、上記凹部2c、3cに取り付けられた状態で、その側面および先端面はヘッド部材2、3の側面2a、3aおよび先端面2b、3bとそれぞれ面一となり、刃先部4、5は基端部8a、9aと一体に焼結されて刃先部材8、9の先端側に形成される。   Furthermore, in the present embodiment, recesses 2c and 3c having an L-shaped cross section along the longitudinal direction are formed at the distal ends of the side surfaces 2a and 3a of the pair of head members 2 and 3 that are brought into close contact with each other. The blade edge portions 4 and 5 are provided on the cemented carbide blade edge members 8 and 9 to which the base end portions 8a and 9a are attached to the recesses 2c and 3c, respectively. Here, the base end portions 8a and 9a of the blade edge members 8 and 9 are formed in a rectangular cross section having a width sufficiently larger than the blade widths W4 and W5, and are attached to the recesses 2c and 3c. The side surfaces and the front end surfaces thereof are flush with the side surfaces 2a and 3a and the front end surfaces 2b and 3b of the head members 2 and 3, respectively, and the blade edge portions 4 and 5 are integrally sintered with the base end portions 8a and 9a. 8 and 9 are formed on the tip side.

なお、ヘッド部材2、3の刃先部材8、9以外の部分は、例えばステンレス鋼等の金属材料により形成されており、超硬合金製の刃先部材8、9の基端部8a、9aは上記凹部2c、3cにロウ付け等によって接合されて取り付けられる。そして、これらヘッド部材2、3の刃先部材8、9以外の部分には、上記凹部2c、3cと溝6、マニホールド7および供給孔7aを避けるようにして、段付きの貫通孔とネジ孔とが複数組ずつ同軸に形成されており、貫通孔に挿通されたクランプボルト10がネジ孔にねじ込まれることによって複数(一対)のヘッド部材2、3が取り付けられて工具本体1を構成する。   The portions other than the blade edge members 8 and 9 of the head members 2 and 3 are made of a metal material such as stainless steel, for example, and the base end portions 8a and 9a of the cemented carbide blade edge members 8 and 9 are as described above. The recesses 2c and 3c are attached by being joined by brazing or the like. Further, in the portions other than the blade edge members 8 and 9 of the head members 2 and 3, stepped through holes and screw holes are provided so as to avoid the recesses 2c and 3c, the groove 6, the manifold 7 and the supply hole 7a. Are formed coaxially, and the clamp bolt 10 inserted through the through hole is screwed into the screw hole, whereby a plurality (a pair) of head members 2 and 3 are attached to constitute the tool body 1.

このように構成された塗布工具は、通常は工具本体1の先端部が下向きに支持されて、刃先部4、5の先端面4a、5aを例えば板状の被塗布物の上面(被塗布面)に間隔をあけて対向させ、上記供給孔7aからマニホールド7に供給された塗布液を溝6から吐出しつつ、先端側から見てこの溝6の開口部が延びる長手方向に垂直な方向に被塗布物に対して相対移動させることにより、塗布液を塗布する。ここで、この被塗布面が、例えば平面視に方形状をなす凹所の底面であって、工具本体1の相対移動の方向に凹所の壁面が存在するような場合でも、上記構成の塗布工具では、長手方向に見て刃先部4、5が方形状であるので、この刃先部4、5の外側面4b、5bを上記壁面の近くにまで接近させることができる。   In the coating tool configured in this way, the tip end portion of the tool body 1 is normally supported downward, and the tip surfaces 4a and 5a of the blade edge portions 4 and 5 are, for example, the upper surface of the plate-like object (the surface to be coated). ) In a direction perpendicular to the longitudinal direction in which the opening of the groove 6 extends as seen from the front end side while discharging the coating liquid supplied from the supply hole 7a to the manifold 7 from the groove 6 The coating solution is applied by moving the coating relative to the object to be coated. Here, even when the surface to be coated is a bottom surface of a recess having a square shape in plan view and the wall surface of the recess is present in the direction of relative movement of the tool body 1, the application of the above configuration is performed. In the tool, since the blade edge portions 4 and 5 are square when viewed in the longitudinal direction, the outer surfaces 4b and 5b of the blade edge portions 4 and 5 can be brought close to the wall surface.

そして、さらに上記構成の塗布工具においては、ヘッド部材2、3の少なくとも刃先部4、5がヤング率の高い超硬合金により形成されており、刃先部4、5の真直度を2μm/m以下の高精度に維持することができる。このため、上記刃幅W4、W5が上述のように0.2mm〜0.5mmの範囲の極薄の刃先部4、5であり、しかもこの刃先部4、5の突き出し量P4、P5を刃幅W4、W5の最大20倍としても、塗布液の内圧による溝6の溝幅W6の偏差を抑えることができる。   And in the coating tool of the said structure, at least the blade edge | tip parts 4 and 5 of the head members 2 and 3 are formed with the cemented carbide with a high Young's modulus, and the straightness of the blade edge | tip parts 4 and 5 is 2 micrometers / m or less. High accuracy can be maintained. Therefore, the blade widths W4 and W5 are the extremely thin blade edge portions 4 and 5 in the range of 0.2 mm to 0.5 mm as described above, and the protrusion amounts P4 and P5 of the blade edge portions 4 and 5 are set to the blade edges. Even when the widths W4 and W5 are set to a maximum of 20 times, the deviation of the groove width W6 of the groove 6 due to the internal pressure of the coating liquid can be suppressed.

従って、上記構成の塗布工具によれば、比較的深い凹所にも刃先部4、5を挿入するとともに、上記壁面の極近くに溝6を位置させた上で、この凹所の底面に膜厚偏差の小さい塗布膜を形成することができる。さらに、塗布液は刃先部4、5の先端面4a、5aにおいて、溝6の開口部が延びる長手方向に垂直な方向に広がって塗布されるので、例えばこのような凹所の壁面から0.1mmの位置にまで満遍なく均一な膜厚の塗布膜を確実に形成することが可能となる。なお、刃先部4、5の突き出し量P4、P5が刃幅W4、W5の20倍を越えると、後述する実施例で示すようにCoating Uniformity(Unif)が3%を上回って膜厚偏差が大きくなりすぎるおそれがある。   Therefore, according to the coating tool having the above-described configuration, the blade tips 4 and 5 are inserted into the relatively deep recess, and the groove 6 is positioned very close to the wall surface, and the film is formed on the bottom surface of the recess. A coating film having a small thickness deviation can be formed. Further, since the coating liquid spreads and is applied in the direction perpendicular to the longitudinal direction in which the opening of the groove 6 extends on the tip surfaces 4a and 5a of the blade edge portions 4 and 5, for example, 0. It becomes possible to reliably form a coating film having a uniform film thickness evenly up to a position of 1 mm. When the protrusion amounts P4 and P5 of the blade edge portions 4 and 5 exceed 20 times the blade widths W4 and W5, the coating uniformity (Unif) exceeds 3% and the film thickness deviation becomes large as shown in an example described later. There is a risk of becoming too much.

ここで、刃先部4、5の突き出し量P4、P5が上記刃幅W4、W5の18倍以下に設定されていれば、一層均一な膜厚の塗布膜を形成することが可能である。ただし、この刃先部4、5の突き出し量P4、P5が小さすぎると、上述のような深い凹所の底面には塗布液を塗布することができなくなるおそれが生じるので、この刃先部4、5の突き出し量P4、P5は、本実施形態のように刃幅W4、W5の3倍以上とされるのが望ましく、5倍以上とされるのがより望ましく、10倍以上とされるのがさらに望ましい。   Here, if the protrusion amounts P4 and P5 of the blade edge portions 4 and 5 are set to 18 times or less of the blade widths W4 and W5, it is possible to form a coating film with a more uniform film thickness. However, if the protruding amounts P4 and P5 of the blade edge portions 4 and 5 are too small, the coating liquid may not be applied to the bottom surface of the deep recess as described above. The protrusion amounts P4 and P5 are preferably 3 times or more of the blade widths W4 and W5 as in this embodiment, more preferably 5 times or more, and more preferably 10 times or more. desirable.

一方、本実施形態では、このような刃先部4、5をヘッド部材2、3の互いに密着させられた側面2a、3aの先端部に設けるのに、これらの側面2a、3aの先端部に、上記溝6の開口部が延びる長手方向に沿って凹部2c、3cを形成し、これらの凹部に取り付けられる超硬合金製の刃先部材8、9の先端側に、上記刃先部4、5を設けている。   On the other hand, in the present embodiment, in order to provide such blade edge portions 4 and 5 at the front end portions of the side surfaces 2a and 3a of the head members 2 and 3 which are brought into close contact with each other, at the front end portions of these side surfaces 2a and 3a, Concave portions 2c and 3c are formed along the longitudinal direction in which the opening of the groove 6 extends, and the cutting edge portions 4 and 5 are provided on the distal end side of the cutting edge members 8 and 9 made of cemented carbide attached to these concave portions. ing.

しかるに、この点、例えばヘッド部材2、3の全体を超硬合金によって形成することも可能であるが、そのような場合に、例えば本実施形態のようにこれらのヘッド部材2、3を取り付けるのにクランプボルト10を用いると、このクランプボルト10をねじ込むネジ孔の形成が困難となるのに対し、本実施形態では刃先部材8、9以外の部分のヘッド部材2、3は上述のようなステンレス鋼等の金属材料により形成することができるので、ネジ加工を容易とすることができる。また、ヘッド部材2、3のコストダウンを図ることもできる。   However, in this respect, for example, the entire head members 2 and 3 can be formed of cemented carbide. In such a case, for example, the head members 2 and 3 are attached as in the present embodiment. When the clamp bolt 10 is used, it is difficult to form a screw hole into which the clamp bolt 10 is screwed. In the present embodiment, the head members 2 and 3 other than the blade edge members 8 and 9 are made of stainless steel as described above. Since it can form with metal materials, such as steel, screwing can be made easy. Further, the cost of the head members 2 and 3 can be reduced.

さらに、本実施形態では、この刃先部材8、9が、刃先部4、5の上記刃幅W4、W5よりも大きな幅の基端部8a、9aを有していて、この基端部8a、9aが凹部2c、3cに取り付けられている。このため、刃先部4、5を、これより幅の大きな基端部8a、9aによって高い剛性で支持してヘッド部材2、3に配設することができるので、塗布膜の膜厚の一層の均一化を図ることができる。しかも、本実施形態では、この基端部8a、9aの先端面がヘッド部材2の先端面2b、3bと面一とされていて、刃先部4、5の外側面4b、5bは、この基端部8a、9aの先端面と垂直に交差しているので、さらに高い剛性で刃先部4、5を支持することが可能となる。   Further, in the present embodiment, the blade edge members 8 and 9 have base end portions 8a and 9a having a width larger than the blade widths W4 and W5 of the blade edge portions 4 and 5, and the base end portions 8a and 8a, 9a is attached to the recesses 2c and 3c. For this reason, since the blade edge portions 4 and 5 can be disposed on the head members 2 and 3 with high rigidity supported by the base end portions 8a and 9a having a larger width than this, the thickness of the coating film can be further increased. Uniformity can be achieved. In addition, in the present embodiment, the distal end surfaces of the base end portions 8a and 9a are flush with the distal end surfaces 2b and 3b of the head member 2, and the outer side surfaces 4b and 5b of the blade edge portions 4 and 5 Since it intersects perpendicularly with the tip surfaces of the end portions 8a, 9a, the blade edge portions 4, 5 can be supported with higher rigidity.

ただし、このように刃先部材8、9の基端部8a、9aを刃先部4、5の刃幅W4、W5よりも大きな幅とすることなく、例えば図6および図7に示す上記実施形態の変形例のように、刃先部材8、9を刃先部4、5から基端部8a、9aに亙って上記刃幅W4、W5と等しい幅の板状に形成して、この刃幅W4、W5に応じた幅の凹部2c、3cに取り付けてもよい。なお、この変形例において、図1ないし図5に示した実施形態と共通する部分には、同一の符号を配してある。このような変形例によれば、超硬合金使用量をさらに削減して一層のコストダウンを図ることができる。   However, without making the base end portions 8a and 9a of the blade edge members 8 and 9 larger than the blade widths W4 and W5 of the blade edge portions 4 and 5 in this way, for example, in the above embodiment shown in FIGS. As in the modification, the blade members 8 and 9 are formed in a plate shape having a width equal to the blade widths W4 and W5 from the blade edge portions 4 and 5 to the base end portions 8a and 9a, and the blade width W4, You may attach to the recessed parts 2c and 3c of the width | variety according to W5. In this modification, the same reference numerals are assigned to portions common to the embodiment shown in FIGS. According to such a modification, it is possible to further reduce the cost by further reducing the amount of cemented carbide used.

また、上記実施形態やその変形例では、ヘッド部材2、3の互いに密着させられた側面2a、3aのうち、一方のヘッド部材2の側面2aは刃先部4の先端まで平面状に形成されているとともに、他方のヘッド部材3の側面3aには、一方のヘッド部材2の側面2aに対して凹んだ上記溝6が形成されて、この溝6がそのまま刃先部4、5の先端面4a、5aに開口している。そして、このような平面状の一方の側面2aや他方の側面3aの溝6の超硬合金製の刃先部4、5における溝面6a、6bや溝壁6c、および刃先部4、5の先端面4a、5aの仕上げは、研削加工により行われる。   Further, in the above-described embodiment and its modifications, of the side surfaces 2 a and 3 a of the head members 2 and 3 that are brought into close contact with each other, the side surface 2 a of one head member 2 is formed in a planar shape up to the tip of the blade edge portion 4. In addition, the groove 6 that is recessed with respect to the side surface 2a of the one head member 2 is formed on the side surface 3a of the other head member 3, and the groove 6 is directly used as the tip surface 4a of the cutting edge portions 4 and 5, It opens to 5a. And the groove surface 6a, 6b, the groove wall 6c, and the front-end | tip of the blade edge | tip parts 4 and 5 in the cutting edge parts 4 and 5 of the cemented carbide of the groove | channel 6 of such one planar side surface 2a or the other side surface 3a. The finishing of the surfaces 4a and 5a is performed by grinding.

しかるに、この点についても、上述のような溝6を形成するのに、他方の側面3aに溝6を形成するのに代えて、この他方の側面3aも平面状とし、同じ平面状の一方の側面2aとの間にシムを介装して溝6を形成することも可能であるが、そのような場合には、通常は刃幅W4、W5と同程度の大きさの溝幅W6となる溝6を形成するのに、刃先部4、5と同じ超硬合金製のシムを製造することは難しく、例えばステンレス鋼等の金属シムを使用せざるを得ない。ところが、この場合には、そのような金属シムは、塗布液に接する溝壁や先端面の加工がワイヤーカット加工やエッチング加工となるため、研削加工によって仕上げられた刃先部4、5の溝6の溝面6a、6bや溝壁6cおよび先端面4a、5aに対して、シムに形成される溝壁や先端面の表面粗さが粗くなってしまう。   However, also in this respect, in order to form the groove 6 as described above, instead of forming the groove 6 on the other side surface 3a, the other side surface 3a is also planar, and one of the same planar shape is formed. It is possible to form a groove 6 with a shim interposed between the side surface 2a, but in such a case, the groove width W6 is usually about the same size as the blade widths W4 and W5. In order to form the groove 6, it is difficult to manufacture the same cemented carbide shim as the cutting edge portions 4 and 5, and a metal shim such as stainless steel must be used. However, in this case, such a metal shim has a groove wall 6 or a tip end surface that is in contact with the coating solution, which is processed by wire cutting or etching. In contrast to the groove surfaces 6a and 6b, the groove wall 6c, and the tip surfaces 4a and 5a, the surface roughness of the groove wall and the tip surface formed in the shim becomes rough.

そのような場合に比べて、上記実施形態によれば、溝面6a、6bおよび溝壁6cよりなる溝6の内面や刃先部4、5の先端面4a、5aを全体に亙って研削加工により均一な表面粗さに形成することができ、特に溝壁6cが位置する溝6の両端部や溝壁6cに連なる先端面4a、5aにおける塗布液の流速のバラツキを小さく抑え、さらに均一な塗布膜を形成することができる。また、上記実施形態では、一方のヘッド部材2の上記側面2aは平面状であるので、このような研削加工も比較的容易に行うことができる。   Compared with such a case, according to the said embodiment, it grinds over the inner surface of the groove | channel 6 which consists of groove surface 6a, 6b, and the groove wall 6c, and the front end surface 4a, 5a of the blade edge | tip part 4,5. Can be formed with a uniform surface roughness. In particular, variations in the flow rate of the coating liquid at both ends of the groove 6 where the groove wall 6c is located and the end faces 4a and 5a connected to the groove wall 6c are suppressed to be small, and more uniform. A coating film can be formed. Moreover, in the said embodiment, since the said side surface 2a of one head member 2 is planar shape, such a grinding process can also be performed comparatively easily.

なお、上記実施形態では、被塗布物の形成された凹所の底面を被塗布面として塗布膜を形成する場合について説明したが、上記構成の塗布工具は、このような凹所の底面だけでなく、被塗布面に隣接して突壁や突起が形成されている場合に、これらの突壁や突起の極近くにまで均一な膜厚の塗布膜を形成するのに用いることも可能である。また、このような凹所の底面や、突壁や突起が形成された被塗布面ではなく、例えば板状の被塗布物の平坦な被塗布面に塗布液を塗布するのに用いても、勿論構わない。   In the above-described embodiment, the case where the coating film is formed using the bottom surface of the recess where the coating object is formed as the coating surface has been described. However, the coating tool having the above-described configuration can be used only for the bottom surface of such a recess. In the case where protruding walls and protrusions are formed adjacent to the surface to be coated, it can also be used to form a coating film having a uniform film thickness very close to the protruding walls and protrusions. . Moreover, even if it is used to apply the coating liquid to a flat coated surface of a plate-shaped coated object, for example, instead of the bottom surface of such a recess, the coated surface on which protruding walls or protrusions are formed, Of course.

次に、本発明の実施例を挙げて、本発明の効果について実証する。本実施例では、まず図1ないし図5に示した実施形態に基づいて、刃先部4、5の刃幅W4、W5がともに0.3mm、溝6の溝幅W6が0.5mm、図5に示すように刃先部4、5の先端面4a、5aにおいて溝6の開口部が延びる長手方向における該溝6の開口幅Lが70mm、同じく図5に示すように溝6の開口部が延びる長手方向における刃先部4、5の塗工幅Mが72mmの塗布工具を、図4に示した刃先部4、5の突き出し量P4、P5が刃幅W4、W5の18倍の5.4mmのものと、20倍の6.0mmのものの2種製造した。これらを実施例1、2とする。   Next, examples of the present invention will be given to demonstrate the effects of the present invention. In this example, first, based on the embodiment shown in FIGS. 1 to 5, the blade widths W4 and W5 of the blade edge portions 4 and 5 are both 0.3 mm, and the groove width W6 of the groove 6 is 0.5 mm. As shown in FIG. 5, the opening width L of the groove 6 in the longitudinal direction in which the opening of the groove 6 extends on the tip surfaces 4a and 5a of the blade edges 4 and 5 is 70 mm, and the opening of the groove 6 also extends as shown in FIG. In the longitudinal direction, a coating tool having a coating width M of 72 mm in the blade edge portions 4 and 5, the protrusion amounts P4 and P5 of the blade edge portions 4 and 5 shown in FIG. 4 are 5.4 mm which is 18 times the blade widths W4 and W5. Two types were manufactured, one with a size of 6.0 mm and 20 times. These are referred to as Examples 1 and 2.

また、これら実施例1、2に対する比較例1として、刃幅W4、W5、溝幅W6、開口幅L、および塗工幅Mが実施例1、2と等しく、刃先部4、5の突き出し量P4、P5を刃幅W4、W5の20倍よりも大きい22倍の6.6mmとした塗布工具も製造した。そして、これら実施例1、2および比較例1の塗布工具により塗布液を被塗布物に塗布して、その際の溝6の開口部が延びる方向における塗布膜の一端から他端までの測定距離に対する膜厚を測定した。この結果を、実施例1、2および比較例1の順に図8(a)〜(c)に示す。   Further, as Comparative Example 1 with respect to Examples 1 and 2, the blade widths W4 and W5, the groove width W6, the opening width L, and the coating width M are equal to those in Examples 1 and 2, and the protrusion amounts of the blade edge portions 4 and 5 are as follows. An application tool was also manufactured in which P4 and P5 were 6.6 mm, 22 times larger than 20 times the blade widths W4 and W5. And the coating distance is applied to the object to be coated with the coating tools of Examples 1 and 2 and Comparative Example 1, and the measurement distance from one end to the other end of the coating film in the direction in which the opening of the groove 6 extends. The film thickness with respect to was measured. The results are shown in FIGS. 8A to 8C in the order of Examples 1 and 2 and Comparative Example 1.

なお、このときの塗布条件は、塗布液は光学用弾性樹脂であって粘度は5000〜7000cps、目標膜厚は100μmで塗工速度(塗布工具と被塗布物との相対移動速度)は0.9m/minであった。また、この図8(a)〜(c)の測定結果に基づいて、各図の測定距離の両端の塗れ端から目標膜厚100μmに移行する部分を除いた部分について、実施例1、2および比較例1による膜厚の最大値、最小値、膜厚の範囲、平均値、およびCoating Uniformity(Unif)を計算した。なお、Coating Uniformity(Unif)は(膜厚の範囲)/(平均値×2)の百分率(%)であり、値が小さいほど均一な膜厚であって、一般的には3%以下であれば均一な膜厚と評価できる。この結果を、実施例1、2および比較例1の順に次表1〜3に示す。   The coating conditions at this time are as follows: the coating liquid is an optical elastic resin, the viscosity is 5000 to 7000 cps, the target film thickness is 100 μm, and the coating speed (relative movement speed between the coating tool and the object to be coated) is 0. It was 9 m / min. Further, on the basis of the measurement results of FIGS. 8A to 8C, Examples 1 and 2 and Examples 1 and 2 except for the part that shifts from the painted end at both ends of the measurement distance in each figure to the target film thickness 100 μm. The maximum value, minimum value, film thickness range, average value, and Coating Uniformity (Unif) of Comparative Example 1 were calculated. Coating Uniformity (Unif) is a percentage (%) of (film thickness range) / (average value × 2). The smaller the value, the more uniform the film thickness, and generally 3% or less. It can be evaluated as a uniform film thickness. The results are shown in Tables 1 to 3 in the order of Examples 1 and 2 and Comparative Example 1.

Figure 2017035664
Figure 2017035664

Figure 2017035664
Figure 2017035664

Figure 2017035664
Figure 2017035664

これらの図8(a)〜(c)および表1〜3の結果より、刃先部4、5の突き出し量P4、P5が刃幅W4、W5の22倍である比較例1ではCoating Uniformity(Unif)が3.48%と3%を上回っていたのに対し、20倍である実施例2では2.52%と3%を下回り、さらに18倍である実施例1では1.41%と3%の1/2である1.5%をも下回っていた。これより、本発明のように刃先部4、5の突き出し量P4、P5が刃幅W4、W5の20倍以下であれば均一な膜厚の塗布膜を形成することが可能で、18倍以下であれば一層の膜厚の均一化を図ることができるのが確認できた。   From these results of FIGS. 8A to 8C and Tables 1 to 3, in Comparative Example 1 in which the protrusion amounts P4 and P5 of the blade edge portions 4 and 5 are 22 times the blade widths W4 and W5, Coating Uniformity (Unif ) Was 3.48% and 3% higher than 20%, but in Example 2, which is 20 times lower than 2.52% and 3%, and in Example 1, which is 18 times, 1.41% and 3%. It was also less than 1.5% which is 1/2 of%. From this, it is possible to form a coating film with a uniform film thickness when the protruding amounts P4, P5 of the blade edge portions 4, 5 are 20 times or less of the blade widths W4, W5 as in the present invention, and 18 times or less. Then, it was confirmed that the film thickness can be made even more uniform.

次に、工具本体の先端部に開口する溝を形成するのに、上記実施形態のように他方のヘッド部材3の側面3aの超硬合金よりなる刃先部5に溝面6bと溝壁6cとを有する溝6を先端面5aに開口するように形成するのに代えて、一方のヘッド部材2と同様に刃先部4の先端面4aまで平面状の側面2aを有する一対のヘッド部材の該側面2aの間に、図9に正面図を示すようなステンレス鋼製のシムSを介装することにより溝を形成した塗布工具を比較例2として製造した。なお、この比較例2における刃先部の刃幅W4、W5、溝の溝幅W6、溝の開口幅L、刃先部の塗工幅M、刃先部の突き出し量P4、P5は実施例1と同じである。   Next, in order to form a groove opened at the tip of the tool body, the groove surface 6b and the groove wall 6c are formed on the cutting edge portion 5 made of cemented carbide on the side surface 3a of the other head member 3 as in the above embodiment. Instead of forming the groove 6 having an opening to the front end surface 5a, the side surfaces of the pair of head members having the flat side surface 2a up to the front end surface 4a of the blade edge portion 4 as in the case of the one head member 2. A coating tool having a groove formed by interposing a stainless steel shim S as shown in the front view of FIG. In Comparative Example 2, the blade widths W4 and W5 of the blade edge portion, the groove width W6 of the groove, the opening width L of the groove, the coating width M of the blade edge portion, and the protrusion amounts P4 and P5 of the blade edge portion are the same as in the first embodiment. It is.

そして、まずこの比較例2におけるシムSの図9に符号S1で示す先端面と、符号S2で示す溝の溝壁の位置の表面粗さを測定したところ、JIS B 0601−2001における算術平均粗さRaにおいて、先端面S1は1.557μm、溝壁S2は2.034μmであった。これに対して、上記実施例1の塗布工具の刃先部4、5の表面粗さは、同じくJIS B 0601−2001における算術平均粗さRaにおいて、先端面4a、5aが0.010μm、溝6の溝面6a、6bが0.008μm、溝壁6cが0.014μmであった。   First, the surface roughness of the position of the tip surface of the shim S in Comparative Example 2 indicated by reference numeral S1 in FIG. 9 and the position of the groove wall of the groove indicated by reference numeral S2 was measured, and the arithmetic average roughness in JIS B 0601-2001 was measured. At the depth Ra, the tip surface S1 was 1.557 μm, and the groove wall S2 was 2.034 μm. On the other hand, the surface roughness of the cutting edge portions 4 and 5 of the coating tool of Example 1 is the same as the arithmetic average roughness Ra in JIS B 0601-2001, the tip surfaces 4a and 5a are 0.010 μm, and the groove 6 The groove surfaces 6a and 6b were 0.008 μm and the groove wall 6c was 0.014 μm.

次いで、これら実施例1と比較例2により、上述した実施例1、2および比較例1と同じ塗布条件で塗布膜を形成し、その際の溝の開口部が延びる方向における塗布膜の一端から他端までの測定距離(mm)に対する膜厚(μm)を測定するとともに、これに基づいて膜厚の最大値、最小値、膜厚の範囲、平均値、およびCoating Uniformity(Unif)と、さらに溝の開口部が延びる方向における塗布膜の両端のダレ距離(塗布膜両端の塗れ端から目標膜厚100μmになるまでの距離)を計算した。これらの結果を、比較例2、実施例1の順に図10(a)、(b)および表4、5に示す。従って、実施例1の結果である図10(b)と表5の膜厚の最大値、最小値、膜厚の範囲、平均値、Coating Uniformity(Unif)は、図1(a)と表1に等しい。   Next, according to Example 1 and Comparative Example 2, a coating film is formed under the same coating conditions as in Examples 1 and 2 and Comparative Example 1 described above, and from one end of the coating film in the direction in which the groove opening extends. Measure the film thickness (μm) against the measurement distance (mm) to the other end, and based on this, the maximum value, minimum value, film thickness range, average value, and Coating Uniformity (Unif) The sagging distance between the two ends of the coating film in the direction in which the opening of the groove extends (distance from the coating end of both ends of the coating film to the target film thickness of 100 μm) was calculated. These results are shown in FIGS. 10A and 10B and Tables 4 and 5 in the order of Comparative Example 2 and Example 1. FIG. Accordingly, the maximum value, minimum value, film thickness range, average value, and coating uniformity (Unif) of FIG. 10 (b) and Table 5, which are the results of Example 1, are shown in FIG. 1 (a) and Table 1. be equivalent to.

Figure 2017035664
Figure 2017035664

Figure 2017035664
Figure 2017035664

これら図10(a)、(b)および表4、5の結果より、比較例2の塗布工具ではダレ距離が1.16mmと長く、またCoating Uniformity(Unif)も5.09%と、上述した実施例2はもとより、比較例1よりも大きく、膜厚の偏差が著しかった。これに対して、実施例1では、上述したようにCoating Uniformity(Unif)が小さく抑えられているのは勿論、ダレ距離も0.72mmと短く、溝6の開口部が延びる方向における開口幅Lや塗工幅Mの範囲内で、より幅広く均一な膜厚の塗布膜を形成することが可能であることが分かる。   10 (a) and 10 (b) and Tables 4 and 5, the application tool of Comparative Example 2 has a sag distance as long as 1.16 mm and a coating uniformity (Unif) of 5.09% as described above. Example 2 was larger than Comparative Example 1 as well as Example 2, and the deviation in film thickness was remarkable. On the other hand, in Example 1, as described above, the coating uniformity (Unif) is suppressed to be small, the sagging distance is also as short as 0.72 mm, and the opening width L in the direction in which the opening of the groove 6 extends. It can be seen that a wider and uniform coating film can be formed within the range of the coating width M.

以上説明したように、本発明によれば、被塗布物に形成された凹所の底面に塗布液を塗布するような場合でも、この凹所の壁面の極近傍にまで満遍なく偏差の少ない均一な膜厚の塗布膜を確実に形成することが可能となる。   As described above, according to the present invention, even in the case where the coating liquid is applied to the bottom surface of the recess formed in the object to be coated, the uniform evenly with little deviation even to the very vicinity of the wall surface of the recess. It becomes possible to reliably form a coating film having a thickness.

1 工具本体
2、3 ヘッド部材
2a、3a ヘッド部材2、3の互いに密着させられる側面
2b、3b ヘッド部材2、3の先端面
2c、3c 凹部
4、5 刃先部
4a、5a 刃先部4、5の先端面
4b、5b 刃先部4、5の外側面
6 溝
6a、6b 溝面
6c 溝壁
7 マニホールド
8、9 刃先部材
8a、9a 刃先部材8、9の基端部
10 クランプボルト
W4、W5 刃先部4、5の刃幅
P4、P5 刃先部4、5の突き出し量
W6 溝6の溝幅
L 溝6の開口幅
M 刃先部4、5の塗工幅
DESCRIPTION OF SYMBOLS 1 Tool body 2, 3 Head member 2a, 3a Side surface 2b, 3b head member 2 and 3 contact | adhered mutually The front end surface 2c of the head member 2, 3 3c Recessed part 4, 5 Blade edge part 4a, 5a Tip surface 4b, 5b outer surface of blade edge portion 4, 5 6 groove 6a, 6b groove surface 6c groove wall 7 manifold 8, 9 blade edge member 8a, 9a proximal end portion of blade edge member 8, 9 10 clamp bolt W4, W5 blade edge Blade width P4, P5 Protrusion amount of the blade edge portions 4, 5 W6 Groove width of the groove 6 L Opening width of the groove 6 M Coating width of the blade edge portions 4, 5

Claims (6)

複数のヘッド部材が互いの長手方向に延びる側面を密着させて取り付けられることにより工具本体が構成され、上記側面に沿って延びる上記工具本体の先端部に開口した溝から塗布液を吐出して被塗布物に塗布する塗布工具であって、
上記複数のヘッド部材の互いに密着させられた上記側面の先端部には、該ヘッド部材の先端面から突き出る刃先部が上記側面に沿ってそれぞれ設けられていて、上記溝はこれらの刃先部の先端に開口しており、
上記ヘッド部材の少なくとも上記刃先部は超硬合金によって形成され、
この刃先部は、上記長手方向に見て方形状であるとともに、
上記ヘッド部材の先端面からの該刃先部の突き出し量が、先端側から見たときの上記長手方向に垂直な方向における該溝の溝面と上記刃先部の外側面との間隔である該刃先部の刃幅の20倍以下とされていることを特徴とする塗布工具。
A plurality of head members are attached with their side surfaces extending in the longitudinal direction in close contact with each other to constitute a tool body, and a coating liquid is discharged from a groove opened at the tip of the tool body extending along the side surface. An application tool for applying to an application,
The front end portions of the side surfaces of the plurality of head members that are in close contact with each other are provided with cutting edge portions protruding from the front end surfaces of the head members along the side surfaces, respectively, and the grooves are the front ends of these cutting edge portions. Open to
At least the cutting edge portion of the head member is formed of a cemented carbide,
The cutting edge is rectangular when viewed in the longitudinal direction,
The cutting edge whose protrusion amount of the cutting edge portion from the tip surface of the head member is a distance between the groove surface of the groove and the outer surface of the cutting edge portion in a direction perpendicular to the longitudinal direction when viewed from the tip side. An application tool characterized by being 20 times or less the blade width of the part.
上記刃先部の突き出し量が、上記刃幅の18倍以下とされていることを特徴とする請求項1に記載の塗布工具。   The coating tool according to claim 1, wherein an amount of protrusion of the blade edge portion is 18 times or less of the blade width. 上記刃先部の突き出し量が、上記刃幅の3倍以上とされていることを特徴とする請求項1または請求項2に記載の塗布工具。   The coating tool according to claim 1 or 2, wherein an amount of protrusion of the blade edge portion is set to three times or more of the blade width. 上記複数のヘッド部材の互いに密着させられた上記側面の先端部には、上記長手方向に沿って凹部が形成されており、上記刃先部は、上記凹部に取り付けられる超硬合金製の刃先部材の先端側に設けられていることを特徴とする請求項1から請求項3のうちいずれか一項に記載の塗布工具。   A concave portion is formed along the longitudinal direction at the distal end portion of the side surface of the plurality of head members that are brought into close contact with each other, and the cutting edge portion is a cutting edge member made of cemented carbide that is attached to the concave portion. The coating tool according to any one of claims 1 to 3, wherein the coating tool is provided on a distal end side. 上記刃先部材は、上記刃幅よりも大きな幅を有して上記凹部に取り付けられる基端部を備えていることを特徴とする請求項4に記載の塗布工具。   The coating tool according to claim 4, wherein the blade edge member has a base end portion that has a width larger than the blade width and is attached to the concave portion. 上記複数のヘッド部材の互いに密着させられた上記側面のうち、一方の側面は上記刃先部の先端まで平面状に形成されるとともに、他方の側面に、上記一方の側面に対して凹んだ上記溝が形成されていることを特徴とする請求項1から請求項5のうちいずれか一項に記載の塗布工具。   Of the side surfaces of the plurality of head members that are in close contact with each other, one side surface is formed in a planar shape up to the tip of the blade edge portion, and the other side surface is recessed with respect to the one side surface. The coating tool according to any one of claims 1 to 5, wherein the coating tool is formed.
JP2015159077A 2015-08-11 2015-08-11 Application tool Active JP6631081B2 (en)

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PCT/JP2016/064487 WO2017026153A1 (en) 2015-08-11 2016-05-16 Coating tool

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