CN206470533U - A kind of scraping blade locating tool and photoresist coating machine nozzle cleaning device - Google Patents
A kind of scraping blade locating tool and photoresist coating machine nozzle cleaning device Download PDFInfo
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- CN206470533U CN206470533U CN201720182879.5U CN201720182879U CN206470533U CN 206470533 U CN206470533 U CN 206470533U CN 201720182879 U CN201720182879 U CN 201720182879U CN 206470533 U CN206470533 U CN 206470533U
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- scraping blade
- nozzle
- locating surface
- plastic emitting
- blade locating
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Abstract
The utility model is related to display technology field, more particularly to a kind of scraping blade locating tool and photoresist coating machine nozzle cleaning device.The scraping blade location division being connected including nozzle location division and with nozzle location division, nozzle location division includes the first jet locating surface for being used to fit with the surface of the plastic emitting gap side of shower nozzle；Scraping blade location division includes the first scraping blade locating surface for being used to fit with a side surface of scraping blade；First scraping blade locating surface is parallel with plastic emitting gap, and when first jet locating surface is fitted with the surface of plastic emitting gap side, and the bearing of trend of the first scraping blade locating surface is towards plastic emitting gap.The scraping blade locating tool that the utility model is provided is after progress first jet locating surface is fitted with the surface of the plastic emitting gap side of shower nozzle and scraping blade is fitted with the first scraping blade locating surface of scraping blade locating tool, the contraposition in the plastic emitting gap of scraping blade and shower nozzle can be achieved, the contraposition efficiency of scraping blade is improved, so as to improve the stability of the cleaning effect of linear nozzle.
Description
Technical field
The utility model is related to display technology field, more particularly to a kind of scraping blade locating tool and photoresist coating machine nozzle
Cleaning device.
Background technology
In the production process of display panel, photoresist coating is the important procedure in photoetching process.Current photoresist is applied
Cloth process generally realizes that common coating machine has linear nozzle using coating machine, and linear nozzle is provided with for photoresist outflow
Gap, by the relative motion between linear nozzle and substrate, the photoresist flowed out by gap is coated on substrate, with
Photoresist layer is formed on substrate.
Because photoresist is easily crystallized, in the coating process of photoresist, after photoresist crystallization is formed at linear nozzle, meeting
Cause the gap at crystallization position to block, prevent the photoresist at blocking from flowing out, and then photoetching is caused when photoresist is coated with
Glue-line is unevenly coated, and reduces the yield of display panel product.
Solve spray nozzle clogging at present and common method that the photoresist layer that causes is unevenly coated problem is：Using manual side
Formula is inserted scraping blade in the gap of linear nozzle, the photoresist crystallization for blocking gap is struck off, to be cleaned to linear nozzle.So
And, during scraping blade is manually inserted into, because the gap of linear nozzle is narrower, the more difficult insertion of scraping blade causes linear nozzle
Cleaning efficiency is relatively low, and when each hand scraping photoresist is crystallized, it is more difficult to ensure depth and the angle of each inserted into gap of scraping blade
The uniformity of degree, reduces the stability of the cleaning effect of linear nozzle.
Utility model content
The utility model provides a kind of scraping blade locating tool and photoresist coating machine nozzle cleaning device, existing for solving
When having manual cleaning photoresist coating machine nozzle in technology, due to linear nozzle caused by the more difficult insertion die gap of scraping blade
The problem of cleaning efficiency and relatively low cleaning effect stability.
To achieve the above object, the utility model provides following technical scheme：
A kind of scraping blade locating tool, for the linear nozzle of photoetching rubber coating, the linear nozzle includes nozzle body
With the shower nozzle being connected with the nozzle body, including nozzle location division and the scraping blade location division that is connected with the nozzle location division,
Wherein：
The first jet that the nozzle location division includes being used to fit with the surface of the plastic emitting gap side of the shower nozzle is determined
Plane；
The scraping blade location division includes the first scraping blade locating surface for being used to fit with a side surface of scraping blade；
The first scraping blade locating surface is parallel with the plastic emitting gap, and when the first jet locating surface and the plastic emitting
During the surface laminating of gap side, the bearing of trend of the first scraping blade locating surface is towards the plastic emitting gap.
The scraping blade locating tool that the utility model is provided includes nozzle location division and the scraping blade being connected with nozzle location division is determined
Position portion, nozzle location division includes the first jet locating surface for being used to fit with the surface of the plastic emitting gap side of shower nozzle；Scraping blade is determined
Position portion includes the first scraping blade locating surface for being used to fit with scraping blade；First scraping blade locating surface is parallel with plastic emitting gap, and when first
When nozzle locating surface is fitted with the surface of plastic emitting gap side, the bearing of trend of the first scraping blade locating surface is towards plastic emitting gap；
When carrying out nozzle cleaning, the first jet locating surface for the scraping blade locating tool that the utility model is provided and the plastic emitting gap of shower nozzle
The surface laminating of side, because the first scraping blade locating surface is parallel with plastic emitting gap, and when first jet locating surface and plastic emitting gap
During the surface laminating of side, the bearing of trend of the first scraping blade locating surface is towards plastic emitting gap, then by scraping blade and scraping blade locating tool
The first scraping blade locating surface laminating after, scraping blade is parallel with plastic emitting gap, and scraping blade bearing of trend towards plastic emitting gap, to plastic emitting
Direction promotes scraping blade where gap, you can inserts in plastic emitting gap scraping blade, now moves scraping blade along plastic emitting gap bearing of trend,
The crystallization of photoresist inside plastic emitting gap can be struck off.
In summary, the scraping blade locating tool that the utility model is provided is carrying out the plastic emitting of first jet locating surface and shower nozzle
After the surface of gap side is fitted and scraping blade is fitted with the first scraping blade locating surface of scraping blade locating tool, you can realization is scraped
The contraposition in the plastic emitting gap of piece and shower nozzle, improves the contraposition efficiency of scraping blade, so that improve the cleaning effect of linear nozzle
Stability.
Preferably, the scraping blade location division also includes the second scraping blade locating surface vertical with the first scraping blade locating surface,
The second scraping blade locating surface is used to fit with a side of the scraping blade.
Further, when the first jet locating surface is fitted with the surface of plastic emitting gap side, described second
The bearing of trend of scraping blade locating surface and the bearing of trend out of plumb in the plastic emitting gap.
Further, the folder between the bearing of trend of the second scraping blade locating surface and the bearing of trend in the plastic emitting gap
Angle is 30 °~60 °.
Further, the scraping blade location division includes the bearing of trend scraping blade guiding parallel with the first scraping blade locating surface
Groove, the opening direction of the scraping blade guide groove is parallel with the first scraping blade locating surface；The bottom surface of the scraping blade guide groove is formed
The second scraping blade locating surface.
Further, edge is oriented to by the scraping blade guide groove close to one end of the first jet locating surface to the scraping blade
On the direction of the one end of groove away from the first jet locating surface, the distance between two sides of the scraping blade guide groove are gradually
Reduce.
Preferably, the first scraping blade locating surface is provided with multiple lug bosses.
Further, each lug boss is strip, and the multiple lug boss is parallel on the first scraping blade locating surface
Distribution；Or,
Each lug boss is bulk, and the multiple lug boss array distribution on the first scraping blade locating surface.
Preferably, the nozzle location division also includes being used for fitting with the surface that the nozzle body is connected with the shower nozzle
Second nozzle locating surface.
The utility model additionally provides a kind of photoresist coating machine nozzle cleaning device, including scraping blade, in addition to as above institute
The scraping blade locating tool stated.
Brief description of the drawings
Fig. 1 is a kind of structural representation for scraping blade locating tool that embodiment one is provided；
Fig. 2 is the course of work schematic diagram for the scraping blade locating tool that embodiment one is provided；
Fig. 3 is the course of work schematic diagram for the scraping blade locating tool that embodiment one is provided.
Reference：
10, linear nozzle；11, nozzle body；12, shower nozzle；
20, scraping blade locating tool；21, nozzle location division；211, first jet locating surface；
212, second nozzle locating surface；22, scraping blade location division；221, the first scraping blade locating surface；
222, the second scraping blade locating surface；223, scraping blade guide groove；30, scraping blade.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole realities
Apply example.Based on the embodiment in the utility model, those of ordinary skill in the art institute under the premise of creative work is not made
The every other embodiment obtained, belongs to the scope of the utility model protection.
Embodiment one
A kind of scraping blade locating tool is present embodiments provided, for the linear nozzle of photoetching rubber coating, scraping blade contraposition
The structure schematic diagram of tool 20 is shown in Figure 1, including nozzle location division 21 and the scraping blade location division 22 that is connected with nozzle location division 21.
Specifically, the scraping blade locating tool 20 can be prepared using metal or plastic material by cutting or Shooting Technique, and material specifically may be used
For materials such as aluminium alloy, stainless steel, nylon.
For ease of illustration the present embodiment provide scraping blade locating tool 20 operation principle, the present embodiment combination linear nozzle
The structure and the course of work of 10 pairs of scraping blade locating tools 20 are illustrated.The structural representation of linear nozzle 10 is referring to Fig. 2 and Fig. 3
Shown, the linear nozzle 10 shown in Fig. 2 and Fig. 3 includes nozzle body 11, and the shower nozzle 12 be connected with nozzle body 11, joins
As shown in Figure 2, shower nozzle 12 is wedge structure, has plastic emitting gap (not shown) at its tip, photoresist is by plastic emitting gap
It is in wire after outflow, when linear nozzle 10 carries out photoresist coating, the overall side along perpendicular to plastic emitting gap of linear nozzle 10
To motion, you can photoresist is applied into planar on substrate.
Shown in Figure 2, nozzle location division 21 includes be used to fit with the surface of the plastic emitting gap side of shower nozzle 12 the
One nozzle locating surface 211, scraping blade location division 22 includes the first scraping blade locating surface 221 for being used to fit with a side surface of scraping blade；
First scraping blade locating surface 221 is parallel with plastic emitting gap, and when first jet locating surface 211 is fitted with the surface of plastic emitting gap side
When, the bearing of trend of the first scraping blade locating surface 221 is towards plastic emitting gap.
When being fitted on the surface of first jet locating surface 211 with plastic emitting gap side, you can by scraping blade locating tool 20 with
Linear nozzle 10 is positioned.The width of first jet locating surface 211 should be less than or surface equal to plastic emitting gap side width
Degree, so that the bearing of trend of the first scraping blade locating surface 221 can be towards plastic emitting gap, for guarantee scraping blade locating tool 20 and linearly
Position stability between nozzle 10, the width of the width of first jet locating surface 211 preferably with the surface of plastic emitting gap side
It is equal.Angle between first scraping blade locating surface 221 and first jet locating surface 211 should ensure that scraping blade insert plastic emitting gap when with
Shower nozzle 12 does not produce interference, it is preferable that when being fitted on the surface of first jet locating surface 211 with plastic emitting gap side, first scrapes
The center line of angle between the bearing of trend of piece locating surface 221 and two wedge surfaces of shower nozzle 12 is parallel.
To further illustrate the operation principle for the scraping blade locating tool 20 that the present embodiment is provided, the present embodiment is herein in connection with scraping blade
Structure and the course of work to scraping blade locating tool 20 are illustrated.Referring to shown in Fig. 2 and Fig. 3, the shape thin slice of scraping blade 30 need to have
Certain toughness, it is to avoid be broken when inserting plastic emitting gap, blocks plastic emitting gap, and its thickness need to be less than the plastic emitting gap of nozzle
Width, concretely 0.05mm or so.The shape of scraping blade 30 can using the rectangle shown in Fig. 3, or triangle, quadrangle or
Other carry the polygonized structure of corner angle.
When carrying out nozzle cleaning, referring to shown in Fig. 2 and Fig. 3, the of the scraping blade locating tool 20 that the present embodiment is provided
One nozzle locating surface 211 is fitted with the surface of the plastic emitting gap side of shower nozzle 12, it is necessary to illustrate, because linear nozzle 10 exists
During carrying out gluing relative to substrate translation, photoresist is had towards the side of the direction of motion of linear nozzle 10 in shower nozzle 12
Accumulation, to reduce influence of the photoresist to the positioning precision of scraping blade locating tool 20 of accumulation, first jet locating surface 211 should be with
Surface laminating of the shower nozzle 12 away from the side of the direction of motion of linear nozzle 10.Due to the first scraping blade locating surface 221 and plastic emitting gap
It is parallel, and when first jet locating surface 211 is fitted with the surface of plastic emitting gap side, the extension of the first scraping blade locating surface 221
Direction is towards plastic emitting gap, then after scraping blade 30 is fitted with the first scraping blade locating surface 221 of scraping blade locating tool 20, scraping blade 30 with
Plastic emitting gap is parallel, and scraping blade 30 bearing of trend towards plastic emitting gap, direction promotes scraping blade 30 where to plastic emitting gap, you can
Scraping blade 30 is inserted in plastic emitting gap, now scraping blade 30 is moved along plastic emitting gap bearing of trend leg, you can inside plastic emitting gap
Photoresist crystallization is struck off.
Therefore, the scraping blade locating tool 20 that the present embodiment is provided is carrying out going out for first jet locating surface 211 and shower nozzle 12
After the surface of glue-line gap side is fitted and scraping blade is fitted with the first scraping blade locating surface 221 of scraping blade locating tool 20, you can
Scraping blade and the contraposition in the plastic emitting gap of shower nozzle 12 are realized, should compared with not by the Manual-alignment mode of scraping blade locating tool 20
Scraping blade locating tool 20 improves the contraposition efficiency of scraping blade, so as to improve the stability of the cleaning effect of linear nozzle 10.
Shown in Figure 2, to improve scraping blade 30 and the stability in the position fixing process of plastic emitting gap, scraping blade location division 22 is also wrapped
The second scraping blade locating surface 222 vertical with the first scraping blade locating surface 221 is included, the second scraping blade locating surface 222 is used for one with scraping blade
Individual side laminating, in the position fixing process for carrying out scraping blade 30, a side surface of scraping blade 30 and a side are limited simultaneously, are improved
Stability of the scraping blade in position fixing process.
, should be preferentially by a point of scraping blade during scraping blade insertion plastic emitting gap to improve the location efficiency of scraping blade
Angle insertion plastic emitting gap, to improve due to the scraping blade and plastic emitting gap unparalleled phenomenon that the reasons such as scraping blade deformation are caused, and causes
Scraping blade and plastic emitting gap between contraposition accuracy the problem of decline.Further, it is shown in Figure 3, when first jet is fixed
When plane 211 is fitted with the surface of plastic emitting gap side, the bearing of trend of the second scraping blade locating surface 222 and the extension in plastic emitting gap
Direction out of plumb.Scraping blade 30 can be made to form angle towards between the side and plastic emitting gap in plastic emitting gap, positioned along the second scraping blade
The bearing of trend in face 222 promotes scraping blade 30, you can an angle of scraping blade 30 is firstly inserted into plastic emitting gap, improves scraping blade
Location efficiency.
Specifically, it is shown in Figure 3, the bearing of trend of the second scraping blade locating surface 222 and the bearing of trend in plastic emitting gap it
Between angle α be 30 °~60 °, concretely 30 °, 45 ° or 60 °.
Due to scraping blade thinner thickness, Bending Deformation is also easy to produce after stress, can reduce flat between scraping blade and plastic emitting gap
Row degree, causes scraping blade to be difficult in insertion plastic emitting gap, the problem of declining for contraposition efficiency caused by improving after scraping blade bending, referring to
Shown in Fig. 2, scraping blade location division 22 includes the bearing of trend scraping blade guide groove 223 parallel with the first scraping blade locating surface 221, and scraping blade is led
It is parallel with the first scraping blade locating surface 221 to the opening direction of groove 223；The bottom surface of scraping blade guide groove 223 forms the positioning of the second scraping blade
Face 222.During the insertion plastic emitting of scraping blade 30 gap, a part for scraping blade 30 is located in scraping blade guide groove 223, and scraping blade is oriented to
The flexural deformation size for a part of scraping blade 30 being located therein is limited in the distance between two sides by two sides of groove 223
In the range of, the problem of contraposition efficiency declines caused by improving after scraping blade bending.
Further to reduce the Bending Deformation of scraping blade, further, positioned along by scraping blade guide groove 223 close to first jet
The one end in face 211 on the direction of the one end of scraping blade guide groove 223 away from first jet locating surface 211, scraping blade guide groove 223
The distance between two sides are gradually reduced.Then when promoting scraping blade to plastic emitting gap direction, scraping blade is located at scraping blade guide groove 223
Interior part is when moving closer to plastic emitting gap, and its flexural deformation is limited and can be gradually reduced by two side, further reduces
The Bending Deformation of scraping blade.
When scraping blade is the laminating of the first scraping blade locating surface 221, negative pressure can be formed during laminating tension therebetween, causes scraping blade
Adhesion is produced with the first scraping blade locating surface 221, causes scraping blade dyskinesia, reduces the location efficiency of scraping blade, a kind of preferred side
In formula, the first scraping blade locating surface 221 is provided with multiple lug bosses, reduces connecing between scraping blade and the first scraping blade locating surface 221
Contacting surface is accumulated, and reduces negative pressure therebetween, is improved scraping blade and is produced adhesion with the first scraping blade locating surface 221 and cause scraping blade to be transported
Dynamic difficult the problem of.
Specifically, each lug boss 2211 shown in Figure 1 is strip, and multiple lug bosses 2211 are in the positioning of the first scraping blade
Parallel distribution on face 221.
In addition, in another specific implementation, each lug boss positions for bulk, and multiple lug bosses in the first scraping blade
Array distribution on face 221.
Further to improve the position stability between scraping blade locating tool 20 and linear nozzle 10, shown in Figure 2, spray
Mouth location division 21 also includes the second nozzle locating surface 212 for being used to fit with the surface that nozzle body 11 is connected with shower nozzle 12.Then
When scraping blade locating tool 20 is positioned with linear nozzle 10, there are two faces with linear nozzle 10 while being fitted, it is positioned
Stability is higher.
Embodiment two
A kind of photoresist coating machine nozzle cleaning device, including scraping blade are present embodiments provided, in addition to is implemented as described above
The scraping blade locating tool 20 that example one is provided.
The photoresist coating machine nozzle cleaning device can equally improve the contraposition efficiency of scraping blade, so as to improve linear nozzle
The stability of cleaning effect.Its principle is repeated no more referring to above-described embodiment one.
Obviously, those skilled in the art can to the utility model embodiment carry out it is various change and modification without departing from
Spirit and scope of the present utility model.So, if these modifications and variations of the present utility model belong to the utility model right
It is required that and its within the scope of equivalent technologies, then the utility model be also intended to comprising these change and modification including.
Claims (10)
1. a kind of scraping blade locating tool, for the linear nozzle of photoetching rubber coating, the linear nozzle include nozzle body and
The shower nozzle being connected with the nozzle body, it is characterised in that including nozzle location division and with scraping that the nozzle location division is connected
Piece location division, wherein：
The nozzle location division includes the first jet locating surface for being used to fit with the surface of the plastic emitting gap side of the shower nozzle；
The scraping blade location division includes the first scraping blade locating surface for being used to fit with a side surface of scraping blade；
The first scraping blade locating surface is parallel with the plastic emitting gap, and when the first jet locating surface and the plastic emitting gap
During the surface laminating of side, the bearing of trend of the first scraping blade locating surface is towards the plastic emitting gap.
2. scraping blade locating tool according to claim 1, it is characterised in that the scraping blade location division also includes and described the
The second vertical scraping blade locating surface of one scraping blade locating surface, the second scraping blade locating surface is used to paste with a side of the scraping blade
Close.
3. scraping blade locating tool according to claim 2, it is characterised in that when the first jet locating surface with it is described go out
During the surface laminating of glue-line gap side, the bearing of trend in the bearing of trend of the second scraping blade locating surface and the plastic emitting gap is not
Vertically.
4. scraping blade locating tool according to claim 3, it is characterised in that the bearing of trend of the second scraping blade locating surface
Angle between the bearing of trend in the plastic emitting gap is 30 °~60 °.
5. the scraping blade locating tool according to claim any one of 2-4, it is characterised in that the scraping blade location division includes prolonging
Stretch the direction scraping blade guide groove parallel with the first scraping blade locating surface, the opening direction of the scraping blade guide groove and described first
Scraping blade locating surface is parallel；The bottom surface of the scraping blade guide groove forms the second scraping blade locating surface.
6. scraping blade locating tool according to claim 5, it is characterised in that along by the scraping blade guide groove close to described the
One end of one nozzle locating surface is described to scrape on the direction of the one end of the scraping blade guide groove away from the first jet locating surface
The distance between two sides of piece guide groove are gradually reduced.
7. scraping blade locating tool according to claim 1, it is characterised in that the first scraping blade locating surface is provided with multiple
Lug boss.
8. scraping blade locating tool according to claim 7, it is characterised in that each lug boss is strip, and the multiple
Lug boss parallel distribution on the first scraping blade locating surface；Or,
Each lug boss is bulk, and the multiple lug boss array distribution on the first scraping blade locating surface.
9. scraping blade locating tool according to claim 1, it is characterised in that the nozzle location division also includes being used for and institute
State the second nozzle locating surface for the surface laminating that nozzle body is connected with the shower nozzle.
10. a kind of photoresist coating machine nozzle cleaning device, it is characterised in that including scraping blade, in addition to as claim 1-9 appoints
Scraping blade locating tool described in one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720182879.5U CN206470533U (en) | 2017-02-27 | 2017-02-27 | A kind of scraping blade locating tool and photoresist coating machine nozzle cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720182879.5U CN206470533U (en) | 2017-02-27 | 2017-02-27 | A kind of scraping blade locating tool and photoresist coating machine nozzle cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206470533U true CN206470533U (en) | 2017-09-05 |
Family
ID=59713355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720182879.5U Active CN206470533U (en) | 2017-02-27 | 2017-02-27 | A kind of scraping blade locating tool and photoresist coating machine nozzle cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206470533U (en) |
-
2017
- 2017-02-27 CN CN201720182879.5U patent/CN206470533U/en active Active
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