(1) (1)1313622 玖、發明說明 【發明所屬之技術領域】 本發明是關於在薄片狀構件或面板狀構件等的被塗佈 構件的表面塗佈塗佈液之塗佈工具° 【先前技術】 以往，作爲裝設於進行在薄片狀構件的表面’薄且均 等地塗佈塗佈液，形成塗膜層之塗佈作業的突部裝置之塗 佈工具，使用具有使塗佈液通過的溝縫（s1 01 )之塗佈工 具。作爲如此的塗佈工具’有如第6圖所不的具備塗佈頭 (工具本體）之塗佈工具，塗佈頭1是對於行進於圖中箭 號A所示的行進方向之薄片狀構件s ’形成於延伸於薄片 狀構件的寬度方向之長條，使其前端部朝上可滑接於薄片 狀構件S，而配置於此薄片狀構件S之下（例如’曰本特 開昭6 2 - 2 4 1 5 7 4號公報（第1圖））。 又，亦如第7圖所示，使用：將塗佈頭1的前端部朝下 ，位於面板狀構件P的上方，使塗佈頭1滑接於面板狀構 件P，使其朝圖中箭號B所示的方向移動者。 這些塗佈頭1是藉由一對頭構件2、3的側面2 a、3 a具 有一定的間隙加以配設，來界定溝縫4 ’朝側面2 a、3 a的 長方向所形成的凹槽5、6界定穴7。溝縫4是開口於塗佈頭 1的前端面，供給塗佈液的供給口（未圖示）連通穴7的中 央而設置。爲了高精度地形成溝縫4之間隔，側面2 a ' 3 a 是藉由硏磨加工實施完工加工。又，在圖中，溝縫4及穴7 (2) (2)1313622 是開口於塗佈頭1的側方’但溝縫7及穴7的端部是形成被 封裝之結構。在塗佈作業由供給口所供給的塗佈液是受到 充滿於穴7而擴展於塗佈頭1的長方向’通過溝縫4由塗佈 頭1的前端噴出。被噴出的塗佈液是塗佈在對於塗佈頭1相 對地移動之薄片狀構件s的表面（下面）或面板狀構件p ，形成塗膜層。 作爲在具備如此塗佈頭1的塗佈工具所使用的塗佈液 ，使用液晶顯示器用的彩色膠或彩色過濾器用的光阻劑等 ，在這些的塗佈液含有碳纖維或玻璃纖維等的硬質之含有 物。又，爲了防止塗佈液之堵塞、或使用不同種類的塗佈 液之際，須要分解塗佈工具洗淨溝縫4或穴7。此洗淨作業 ，是例如以包含有溶劑的布等擦取附著於界定溝縫4的側 面2a、3a之塗佈液來進行。在將如此的塗佈工具使用於 將彩色過濾器用光阻劑塗佈於顯示器基板上的塗佈作業之 情況時，塗佈工具配置於上部、基板配置於下部，且塗佈 工具對於基板相對地動作，而隨著顯示器的大型化，被要 求塗佈寬度廣之塗佈工具。 但，在上述塗佈工具，塗佈液的含有物較界定溝縫的 _面更硬之情況時，會有在側面受到含有物所產生條狀損 傷’或含有物刺到側面之問題產生。又，在塗佈工具的洗 #作業，會有側面受到含有物所損傷之虞，而受到塗佈液 進入到已受到損傷的處所使得洗淨作業變得困難，且會有 &塗膜層的表面受到側面的損傷形成細微之條紋的問題產 生。又，以往以來，進行在不銹鋼製的頭構件之前端部分 -6- (8)1313622 第 之爹佈 ，第3 _ 此 以下稱 界定溝 件]6、 、l9e ' 構 呈半圓 又 ，在第 縫14# 如 成，比 著。 頭 4V (駄 、頭構 溝 鏡面處 面全區 ，通過 形狀之凹槽1 1 15° 圖疋由長方向觀看饈用於塗佈工具的第I實施形態 頭（工具本體} 1G的™ ’第2圖爲第1圖的右側面圖 ϋ是第2圖的B-B斷面圖。 塗佈頭1G是藉由-對頭構件16、1S的對向之側面（ 爲溝縫面）1 7 1 9具有—定的間隙而加以配設，來 縫14，溝縫14是在塗佈頭10的前端呈開口狀。頭構 18是在溝縫]4所開口的部分突出，形成前端面]7e 以該前端面丨7e、l9e塗佈塗佈劑。 成k佈J 1 〇的涓構件；! 6是在溝縫面丨7設置朝長方向 藉由與不具有凹槽之頭構件1 8，來 ，在八1 5連通g受置供給塗佈液的供給口（未圖示） 1圖，溝縫1 4及穴} 5開口於塗佈頭]〇的側方，但溝 穴]5的端面形成被封裝之結構。 第3圖所示，頭構件16、18是藉由結合螺栓2〇結合 起凹槽Π更iu於底端側之內側面〗6 c、1 8 c相互密 構件1 6、1 8是以α +召型鈦合金的—種之τ丨_ 6 a卜 合金）'密度4.43g/cm3、線膨脹係數8 6fxm/m · κ 件的全區域之硬度分佈爲H R C 3以下者來製作。 縫面17、19及前端面17e、19e藉由硏磨加工實施 理（Rz〇.2pm以下）。又’溝縫面〗7、19是在其表 域，實施鏡面處理，使得根據實體顯微鏡（6 0倍） 長度1 0 0 段間上的傷痕形成]〇條以下。在此，傷 -12- 1313622 ⑼ 痕是指藉由面粗糙計（.US B 06 0 1 )所檢測到的深度〇 2μηι 至1 _Ομιυ之凹槽。將傷痕的深度設成0.2μηι至1 〇_是由 於塗佈液進入到此範圍的傷痕會大大影響塗佈性能或洗性 之故。 說明關於具備如上述所形成的塗佈頭I 0的塗佈工具之 使用方法。 具備塗佈頭1 0的塗佈工具是裝設於塗佈裝置使用於塗 佈作業。在塗佈作業，由塗佈裝置供給塗佈液，塗佈液是 以充滿穴1 5來朝塗佈頭1 0的長方向擴展，通過溝縫〗4由塗 佈頭1 〇的前端也就是溝縫1 4之開口端噴出，塗佈於對於此 塗佈頭1 0的溝縫前端面1 7 e、1 9 e呈相對地移動的薄片狀 構件S (參照第5圖）或面板狀構件P (參照第6圖）。 在如此的塗佈作業，因溝縫面1 7、I 9是以具有上述特 性的鈦合金形成，所以即使塗佈液中含有硬的含有物，也 可抑制在溝縫面1 7、1 9產生損傷，即使在產生了損傷之情 況時，由於根據鈦的化學活性，在產生傷痕的部分形成穩 定的氧化皮膜，故腐蝕不易進行，可達到對於傷痕之壽命 延長。 表1所顯示者是在常溫下’使鈦合金（Ti6A14V )、不 錢鋼（S U S 6 3 0 ) 、W C - C 〇 - C r系超硬合金浸漬於氣热化納 的5 %水溶液，以中央線平均粗糙度（Ra )作爲代用特性 ，加以比較腐蝕的程度者。根據此比較實驗’可得知’欽 合金' 超硬合金是僅會產生不銹鋼之大約一半的腐蝕。 (10) 1313622 表] ----- 開始前 3天後 7天後 10天後 H天後 $太合金 (Ti6A14V ) RaO.〇 ο RaO. 〇3 RaO. 03 RaO.04 Ra 0 . 〇 3 不銹鋼 -- _ (SUS 63 0 ) Ra0 . 〇4 RaO.06 RaO.05 RaO.06 R a 0.0 6 超硬合金 (W C - C 〇 - c r ) RaO.〇3 RaO.〇3 RaO.04 RaO.04 RaO.〇4 因塗佈液不會進入到損傷處所，所以能夠容易進行洗 淨作業。 又’因提昇耐久性，不會產生損傷，所以可防止在藉 由塗佈的塗佈液所形成的塗膜層之表面形成細微的條紋。 又，因頭構件1 6、1 8 —體形成，沒有構件間之間隙， 故塗佈液的流動抵抗少，塗佈液不會進入，因而變得容易 進行洗淨作業。 又’由於溝縫面17、19及溝縫前端面〗7e、19e等之 塗佈液的流通部具有適度的撥水性，故塗佈性能變得理想 ，可提升塗佈作業的生產性。 如上所述，若根據此實施形態的塗佈工具，因以具有 優良機械性能且密度小之鈦合金，一體形成頭構件1 6、I 8 ，爲輕量，所以容易進行伴隨階段性更換作業 '洗淨作業 之作業。 又，由於以具有最密六方格子且機械特性良好的α相 -14 - (11) (11)1313622 、與熱處理性等的加工性良好的相之雙方特徵的β + θ 型鈦合金作爲材料，故可容易製作精度高的頭構件。 又，因線膨脹係數小，所以容易進行高精度的加工’ 不易受到使用時的溫度所影響，可提升塗佈性能。且’因 頭構件I 6、1 8爲輕量’所以在常方向形成長且塗佈寬度寬 廣的情況時，可抑制因自重所引起的溝縫1 4之彎曲變形’ 而能均等地塗佈塗佈液。 又，由於在頭構件〗6 ' 1 8全體，將硬度分佈抑制於 HRC3以下，故能抑制因切削所引起之內部應力產生’並 且可抑制因硏磨加工所引起的應力解放，能夠達到真直度 5 μηι以下/m，例如達到真直度4 μπι，進一步可防止因隨著 使用之際的時間變化所引起的精度劣化。 又，由於能夠形成真直度5 μηι以下/m之高精度的頭 構件，故即使今後的塗佈工具的大型化之際，頭構件1 6、 1 8的長度成爲1公尺以上的情況時，也能夠以低成本製作 高精度的頭構件1 6、1 8。 又，以進行了鏡面處理的鈦合金形成溝縫面1 7、1 9 ’ 所以具有適度的撥水性，不僅可達捌洗淨作業的容易化， 且因具有理想的塗佈性能，所以能提昇塗佈作業的生產性 〇 又，因頭構件1 6、1 8的耐磨性及耐蝕性高，溝縫面1 7 、：1 9不易受到損傷，所以可容易進行檢修作業、洗淨作業 ，且因容易維持性能，所以可延長工具壽命。 又，能夠將莊射入此塗佈頭]0的塗佈裝置之剛性設計 -15- (12) 1313622 成低’作爲用來驅動塗佈頭1 〇的驅動手段也可使用小型電 動機。即’即使塗佈頭〗〇大型化，亦可抑制塗佈裝置的大 型化，可謀求成本降低。又，藉由塗佈頭〗〇之輕量化，變 得不需要處理塗佈工具之操縱裝置等，能在短時間下容易 進行伴隨著洗淨作業之分解作業、或洗淨作業。 第4圖是顯示使用於本發明的第2實施形態之塗佈頭1 〇 的重要部分的圖。在此第2實施形態，對於與第1實施形態 相同的部分’賦予相同圖號，省略其說明。 第2實施形態與第1實施形態之不同點是在於：在溝縫 面17、19及溝縫前端面17e、19e，藉由表面處理TiC，作 爲具有耐磨性及耐蝕性的層（以下稱爲表面處理層）1 7 f 、：1 9f加以形成，進行鏡面處理的點。 在此第2實施形態，亦可獲得與上述第1實施形態同樣 之效果，且藉由在溝縫面1 7、1 9及溝縫前端面1 7 e ' 1 9 e 形成表面處理層】7f、19f，可減少溝縫面17、19及溝縫前 端面]7e、1 9e受到損傷或磨損，容易維持頭構件之製作 當初的性能，可延長作爲塗佈工具之壽命，或能削減檢修 、分解維修所需的時間及成本。 再者，在本實施形態，說明過關於塗佈頭1 〇的穴1 5爲 半圓形狀之情況，但關於穴1 5的形狀’亦可使用圓形、水 滴形狀、或在不接觸溝縫的角部分設置R字型的緩和形狀 之矩形形狀等的半圓形狀以外的形狀。 作爲形成於溝縫面]7、1 9的表面處理層之材料，說明 過使用T i C的情況，但亦可使用T iN作爲材料’或亦可在 -16 - (13) (13)1313622 構成頭構件的鈦合金之表面藉由電解在制修正硏磨，以於 頭構件]6、1 8的表面形成穩定的氧化皮膜層，來形成表面 處理層。在此，所謂電解在制修正硏磨是指以將燒結有以 鑄鐵、鈷爲主成分的結合材與修整粒之金屬結合砥石作爲 陽極，在與此相對向所設置的陰極之間供給直流脈衝電流 ，藉由電解作用，僅選擇性地除去砥石的金屬結合部，抑 制因堵塞所引起之砥石的切削度降度，而可進行高效率的 鏡面硏磨作業之硏磨，作爲其次作用，可在硏磨材表面獲 得穩定的氧化皮膜。 又，被塗佈構件是不限於薄片狀構件S，例如在將塗 佈液塗佈於電子基板等的面板狀構件亦可使用本發明。 第5圖是顯示使用於本發明的第3實施形態之塗佈頭]〇 的重要部分的圖。在此第2實施形態，對於與第1實施形態 相同的部分，賦予相同圖號，省略其說明。 溝縫構件2 1、2 3是超硬合金製的剖面大致呈長方形之 板狀構件，形成溝縫構件2 3的底端側部與凹槽1 1相對向， 溝縫構件2 3是由溝縫構件2 1朝底端方向長長地形成。又， 溝縫構件2 1、2 3是相互對向的側面作爲界定溝縫1 4的溝縫 面1 7、1 9，溝縫面1 7、1 9配設成具有一定的間隔。 又’穴】5是藉由對向的凹槽1 1與溝縫構件2 3的底端側 部分來界定。 若根據此實施形態的塗佈工具的話，因溝縫面1 7、1 9 是以較鈦合金更硬質的材質所形成的，所以即使在塗佈液 中含有碳纖維或玻璃纖維等之硬質含有物，使得在碳台金 -17- (14) 1313622 的部位產生損傷，也能抑制在以 產生傷痕等。又，即使在溝縫面 抑制因含有物所造成的損傷，且 處所，所以容易進行洗淨作業。 又，因在鈦合金製的頭構件 溝縫構件2 1、2 3加以構成，所以 能謀求塗佈頭1 〇全體之輕量化。 而可由以超硬合金形成溝縫構件 成輕量之塗佈頭1 〇。 又，在藉由使用3個以上頭吾 的溝縫之塗佈頭，可在薄片狀構 個塗膜層之塗佈工具，亦可使用 又，被塗佈構件不限於薄片 液塗佈於電子基板等的面板狀構 發明，且亦可作成對於固定狀態 件，塗佈工具移動之結構。 【產業上的利用可能性】 本發明是關於在薄片狀構件 構件的表面塗佈塗佈液之塗佈工 若根據此發明的塗佈工具及 行階段性更換作業、洗淨作業’ 塗佈工具之壽命。 超硬合金所形成的溝縫面 1 7、1 9的洗淨作業，也可 因塗佈液不易進入到損傷 16、18裝設超硬合金製的 可獲得上述的效果，並且 即’爲了獲得上述效果， 2 1、2 3全體的情況，來構 B構成體構成具有2個以上 件S的表面同時形成複數 本發明。 狀構件S，例如在將塗佈 件之塗佈工具亦可使用本 之薄片狀構件或面板狀構 或面板狀構件等之被塗佈 具。 塗佈裝置的話，可容易進 並且可提升生產性，延長 -18- (15) 1313622 【圖式簡單說明】 第1圖是使用於本發明的第]實施形態之塗佈工具的工 具本體之側面圖。 第2圖是第1圖所示的工具本體之右側面圖。 第3圖是第2圖的B-B斷面圖。 第4圖是顯示使用於本發明的第2實施形態之塗佈工具 的工具本體之側面的重要部分的圖。 第5圖是顯示使用於本發明的第3實施形態之塗佈工具 的工具本體之側面的重要部分的圖。 第6圖是顯示以往的工具本體之斜視圖。 第7圖是顯示以往的工具本體之斜視圖。 [圖號說明] S 薄片狀構件 P 面板狀構件 1 塗佈頭（工具本體） 2 頭構件 2a 側面 3 頭構件 3 a 側面 4 溝縫 5 凹槽 6 凹槽 穴 7 -19- (16)1313622 1 0 塗 佈 頭 11 凹 槽 14 溝 縫 15 穴 1 6 頭 構 件 17 溝 縫 面 1 7e 溝 縫 前 丄山 辆 面 1 7f 表 面 處 理 層 18 頭 構 件 19 框 形 構 件 1 9e 溝 縫 刖 端 面 1 9f 表 面 處 理 層 20 結 合 螺 栓 2 1 溝 縫 構 件 23 溝 縫 構 件 -20-(1) (1) 1313622 玖 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 涂布 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前In the past, a coating tool that is attached to a projection device that performs a coating operation of coating a coating layer on a surface of a sheet-like member to form a coating layer is used to pass the coating liquid. The coating tool for the groove (s1 01). As such a coating tool, there is a coating tool having a coating head (tool body) as shown in Fig. 6, and the coating head 1 is a sheet-like member s for traveling in the traveling direction indicated by an arrow A in the drawing. The strip formed in the width direction extending from the sheet-like member is slidably attached to the sheet-like member S with its front end portion facing upward, and is disposed under the sheet-like member S (for example, '曰本特开昭6 2 - 2 4 1 5 7 Bulletin No. 4 (Fig. 1)). Further, as shown in Fig. 7, the front end portion of the coating head 1 is placed downward, and is positioned above the panel-like member P, and the coating head 1 is slidably attached to the panel-like member P so as to face the arrow in the figure. The direction mover shown by the number B. These coating heads 1 are disposed by a certain gap between the side faces 2a, 3a of the pair of head members 2, 3 to define grooves formed by the slit 4' toward the longitudinal direction of the side faces 2a, 3a. 5, 6 define the hole 7. The groove 4 is provided so as to open to the front end surface of the coating head 1 and to supply a supply port (not shown) of the coating liquid to the center of the communication hole 7. In order to form the interval of the slits 4 with high precision, the side faces 2 a ' 3 a are finished by honing processing. Further, in the figure, the groove 4 and the hole 7 (2) (2) 1313622 are opened to the side of the coating head 1 but the groove 7 and the end of the hole 7 are formed to be packaged. The coating liquid supplied from the supply port in the coating operation is filled in the longitudinal direction of the coating head 1 by being filled in the pockets 7 and is ejected from the leading end of the coating head 1 through the slits 4. The coating liquid to be ejected is applied to the surface (lower surface) or the panel-like member p of the sheet-like member s which moves relative to the coating head 1, and a coating layer is formed. As the coating liquid used for the coating tool having the coating head 1 described above, a color paste for a liquid crystal display or a photoresist for a color filter or the like is used, and the coating liquid contains hard fibers such as carbon fibers or glass fibers. Contains. Further, in order to prevent clogging of the coating liquid or use of a different type of coating liquid, it is necessary to disassemble the coating tool to wash the groove 4 or the hole 7. This cleaning operation is carried out, for example, by rubbing a coating liquid adhering to the side faces 2a, 3a defining the slit 4 with a cloth containing a solvent or the like. When such a coating tool is used for a coating operation in which a color filter photoresist is applied onto a display substrate, the coating tool is disposed on the upper portion, the substrate is disposed on the lower portion, and the coating tool is opposed to the substrate. The operation is required, and as the display is enlarged, it is required to apply a coating tool having a wide width. However, in the above-mentioned coating tool, when the content of the coating liquid is harder than the _ plane defining the groove, there is a problem that the side surface is damaged by the stripe caused by the inclusion or the substance is stuck to the side surface. Further, in the washing operation of the coating tool, the side surface is damaged by the inclusions, and the coating liquid enters the damaged space, making the washing operation difficult, and there is a coating layer. The surface is created by the problem of side damage forming fine stripes. Further, in the past, the front end portion of the head member of stainless steel is 6-(8) 1313622, and the third portion is hereinafter defined as the groove member] 6, and the l9e' is semicircular and in the first slit. 14# Rucheng, compare. Head 4V (駄, head groove mirror surface full area, through the shape of the groove 1 1 15 ° Figure 疋 view from the long direction 第 first coating head for coating tools (tool body} 1G TM ' 2 is a right side view of Fig. 1 and is a cross-sectional view taken along line BB of Fig. 2. The coating head 1G has a side surface (which is a groove surface) by the counter-members 16 and 1S. a predetermined gap is provided to form the slit 14, and the groove 14 is opened at the front end of the coating head 10. The head structure 18 is protruded at a portion where the slit 4 is opened, and the front end surface 7e is formed. The front end faces e7e, l9e are coated with a coating agent. The k-shaped J 1 〇 涓 member; ! 6 is disposed in the sipe face 朝 7 in the longitudinal direction by the head member 1 8 having no groove, The supply port (not shown) for supplying the coating liquid is connected to 185. The groove 14 and the hole 5 are opened to the side of the coating head, but the end surface of the groove 5 is formed. The structure of the package is shown in Fig. 3. The head members 16, 18 are joined to the inner side of the bottom end side by the joint of the bolts 2, 6 c, 1 8 c, and the mutual members 16. 1 8 is α + call type titanium alloy - τ丨_ 6 ab alloy) 'density 4.43g/cm3, linear expansion coefficient 8 6fxm/m · The hardness distribution of the entire area of the κ piece is made of HRC 3 or less. The seam faces 17, 19 and the front face 17e, 19e by honing processing (Rz 〇. 2pm or less). Also 'groove surface〗 7, 19 is in its surface, mirror treatment, so that according to the stereoscopic microscope (60 times) length 1 0 0 The scar on the segment is formed below the purlin. Here, the injury-12-1313622 (9) mark refers to the groove of the depth 〇2μηι to 1 _Ομιυ detected by the surface roughness meter (.US B 06 0 1 ). The depth of the flaw is set to 0.2 μm to 1 〇 _ because the flaw of the coating liquid entering this range greatly affects the coating property or the washability. Description Regarding the coating having the coating head I 0 formed as described above A method of using a cloth tool. The coating tool having the coating head 10 is installed in a coating device for use in a coating operation. In the coating operation, a coating liquid is supplied from a coating device, and the coating liquid is filled with a hole. 1 5 is extended toward the longitudinal direction of the coating head 10, and the leading end of the coating head 1 is the groove 1 through the groove 4 The open end of 4 is ejected, and is applied to the sheet-like member S (see FIG. 5) or the panel-shaped member P which is relatively moved toward the leading end surface 1 7 e and 1 9 e of the coating head 10 (refer to FIG. 5). (Fig. 6). In the coating operation, since the groove surfaces 17 and I9 are formed of a titanium alloy having the above characteristics, even if the coating liquid contains a hard substance, the groove surface can be suppressed. In the case of damage, even if damage occurs, a stable oxide film is formed in the portion where the flaw is generated depending on the chemical activity of titanium, so corrosion is difficult to proceed, and the life of the flaw can be extended. Table 1 shows that the titanium alloy (Ti6A14V), the SUS 6 3 0 , and the WC - C 〇-C r superalloy are immersed in a 5 % aqueous solution of gas-heated sodium at normal temperature. The average roughness (Ra) of the center line is used as a substitute characteristic to compare the degree of corrosion. According to this comparative experiment, it can be known that the 'Qin Alloy' superhard alloy is only about half of the corrosion of stainless steel. (10) 1313622 Table] ----- 3 days after the start 3 days after 7 days, 10 days after H days, $Tai alloy (Ti6A14V) RaO.〇ο RaO. 〇3 RaO. 03 RaO.04 Ra 0 . 〇3 Stainless steel -- _ (SUS 63 0 ) Ra0 . 〇4 RaO.06 RaO.05 RaO.06 R a 0.0 6 Superhard alloy (WC - C 〇- cr ) RaO.〇3 RaO.〇3 RaO.04 RaO. 04 RaO.〇4 Since the coating liquid does not enter the damaged area, the cleaning operation can be easily performed. Further, since damage is not caused by the durability, it is possible to prevent fine streaks from being formed on the surface of the coating layer formed by the coating liquid applied. Further, since the head members 16 and 18 are integrally formed, there is no gap between the members, so that the flow resistance of the coating liquid is small, and the coating liquid does not enter, so that the cleaning operation can be easily performed. Further, since the flow portion of the coating liquid such as the groove surface 17 and 19 and the groove front end surface 7e, 19e has an appropriate water repellency, the coating performance is satisfactory, and the productivity of the coating operation can be improved. As described above, according to the coating tool of this embodiment, since the head members 16 and I 8 are integrally formed by the titanium alloy having excellent mechanical properties and low density, it is easy to carry out the step-by-step replacement work. Washing operations. In addition, the β + θ type titanium alloy having the characteristics of the α phase 14 - (11) (11) 1313622 having the most dense hexagonal lattice and excellent mechanical properties, and the phase having good workability such as heat treatment property is used as the material. Therefore, it is easy to produce a head member with high precision. Further, since the coefficient of linear expansion is small, it is easy to perform high-precision processing. The temperature is not easily affected by the temperature at the time of use, and the coating performance can be improved. Further, when the head members I 6 and 18 are lightweight, when the length is formed in the normal direction and the coating width is wide, the bending deformation of the groove 14 due to the own weight can be suppressed, and the coating can be uniformly applied. Coating solution. In addition, since the hardness distribution is suppressed to be less than or equal to HRC3 in the entire head member 〖6'18, it is possible to suppress the occurrence of internal stress caused by cutting and to suppress stress liberation due to honing processing, and to achieve true straightness. 5 μηι or less/m, for example, a true straightness of 4 μm, further preventing deterioration in accuracy due to time variation with use. In addition, since it is possible to form a high-precision head member having a trueness of 5 μm or less/m, when the length of the head member 16 and 18 is 1 meter or more, even if the size of the coating tool is increased in the future, High-precision head members 16 and 18 can also be produced at low cost. In addition, the titanium alloy which has been mirror-finished forms the groove surface 17 and 19', so it has moderate water repellency, which not only facilitates the cleaning operation, but also improves the coating performance. The productivity of the coating operation is high, and the wear resistance and corrosion resistance of the head members 16 and 18 are high, and the groove surface 17 7 :: 19 is not easily damaged, so that the inspection work and the cleaning operation can be easily performed. And because it is easy to maintain performance, it can extend tool life. Further, it is also possible to use a compact motor as the driving means for driving the coating head 1 by applying the rigid design of the coating device of the coating head]0 to -15-(12) 1313622. In other words, even if the size of the coating head is increased, the size of the coating device can be suppressed, and the cost can be reduced. Further, the weight of the coating head is reduced, and it is possible to easily perform the decomposition operation or the cleaning operation accompanying the cleaning operation in a short period of time without requiring an operation device or the like for processing the coating tool. Fig. 4 is a view showing an important part of the coating head 1 使用 used in the second embodiment of the present invention. In the second embodiment, the same portions as those in the first embodiment are denoted by the same reference numerals, and their description will be omitted. The second embodiment differs from the first embodiment in that the groove surfaces 17 and 19 and the groove end faces 17e and 19e are surface-treated with TiC as a layer having wear resistance and corrosion resistance (hereinafter referred to as A point where the surface treatment layer) 1 7 f , :1 9f is formed and mirror-finished. In the second embodiment, the same effects as those of the first embodiment described above can be obtained, and the surface treatment layer 7f can be formed by the groove surface 17 and 19 and the groove front end surface 1 7 e ' 1 9 e. 19f, which can reduce the damage or wear of the groove surface 17 and 19 and the groove front end surface 7e, 19e, and it is easy to maintain the original performance of the head member, and can extend the life of the coating tool, or can reduce maintenance, Decompose the time and cost of repairs. Further, in the present embodiment, the case where the hole 15 of the coating head 1 is semicircular is described, but the shape of the hole 15 may be a circular shape, a water droplet shape, or a contact with the groove. The corner portion is provided with a shape other than a semicircular shape such as a rectangular shape of an R-shaped relief shape. As the material of the surface treatment layer formed on the groove surface 7 and 19, the case of using T i C has been described, but T iN may be used as the material 'or may be -16 - (13) (13) 1313622 The surface of the titanium alloy constituting the head member is subjected to electrolytic tempering to form a stable oxide film layer on the surface of the head members 6 and 18 to form a surface treatment layer. Here, the term "electrolytic correction" refers to the use of a combination of cast iron and cobalt as a main component and a metal of the trimmed grain as the anode, and a DC pulse is supplied between the cathode and the cathode. The current, by electrolysis, selectively removes only the metal joint of the vermiculite, suppresses the degree of cut of the vermiculite caused by the blockage, and can perform high-efficiency mirror honing work as a secondary action. A stable oxide film is obtained on the surface of the honed material. Further, the member to be coated is not limited to the sheet member S, and the present invention can also be used, for example, in a panel member in which a coating liquid is applied to an electronic substrate or the like. Fig. 5 is a view showing an important part of the coating head 〇 used in the third embodiment of the present invention. In the second embodiment, the same portions as those in the first embodiment are denoted by the same reference numerals, and their description will be omitted. The groove members 2 1 and 2 3 are plate-like members having a substantially rectangular cross section made of a superhard alloy, and the bottom end side portion of the groove member 23 is formed to face the groove 1 1 , and the groove member 23 is a groove. The slit member 2 1 is formed long toward the bottom end. Further, the groove members 2 1 and 2 3 are opposite to each other as the groove faces 17 and 19 defining the groove 14 , and the groove faces 17 and 19 are disposed at a constant interval. Further, the hole 5 is defined by the opposite groove 1 1 and the bottom end side portion of the groove member 23. According to the coating tool of this embodiment, since the groove surface 17 and 19 are formed of a harder material than the titanium alloy, the coating liquid contains a hard substance such as carbon fiber or glass fiber. This causes damage to the carbon gold -17-(14) 1313622 part, and can also suppress the occurrence of scratches and the like. Further, even if the damage is caused by the inclusions on the groove surface, the cleaning operation is easy. Further, since the head member groove members 2 1 and 2 3 made of a titanium alloy are configured, it is possible to reduce the weight of the entire coating head 1 . Instead, the coating head can be formed into a lightweight coating head made of a super-hard alloy. Further, by using a coating head of three or more gulls, a coating tool for forming a coating layer in a sheet shape can be used, and the coated member is not limited to a sheet liquid applied to the electron. A panel-like structure such as a substrate can be used as a structure for moving the coating tool to a fixed state. [Industrial Applicability] The present invention relates to a coating tool for applying a coating liquid on the surface of a sheet-like member member, a coating tool according to the invention, and a step-by-step replacement operation and a cleaning operation. Life expectancy. The cleaning operation of the groove surface 17 and 19 formed by the cemented carbide may also be obtained by the coating liquid being difficult to enter the damage 16 and 18, and the above-mentioned effect can be obtained, and In the case of the above-described effects, in the case of the entire 2 1 and 2 3, the B-constituting body constitutes a surface having two or more pieces S, and the present invention is formed in plural. For example, in the coating tool for applying the coating material, the sheet-like member, the panel-like structure, or the panel-shaped member may be used. In the case of the coating device, it is easy to advance and the productivity can be improved, and the extension is -18-(15) 1313622. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view of the tool body used in the coating tool of the first embodiment of the present invention. Figure. Fig. 2 is a right side view of the tool body shown in Fig. 1. Fig. 3 is a cross-sectional view taken along line B-B of Fig. 2. Fig. 4 is a view showing an important part of the side surface of the tool body used in the coating tool of the second embodiment of the present invention. Fig. 5 is a view showing an important part of the side surface of the tool body used in the coating tool of the third embodiment of the present invention. Fig. 6 is a perspective view showing a conventional tool body. Fig. 7 is a perspective view showing the conventional tool body. [Description of the figure] S Sheet member P Panel member 1 Coating head (tool body) 2 Head member 2a Side 3 Head member 3 a Side 4 Groove 5 Groove 6 Groove 7 -19- (16) 1313622 1 0 Coating head 11 Groove 14 Groove 15 Hole 1 6 Head member 17 Groove surface 1 7e Front seam of the mountain side 1 7f Surface treatment layer 18 Head member 19 Frame member 1 9e Groove end face 1 9f Surface treatment layer 20 in combination with bolt 2 1 groove member 23 groove member -20-