JP2017034128A - 被加工物の加工方法 - Google Patents
被加工物の加工方法 Download PDFInfo
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- JP2017034128A JP2017034128A JP2015153566A JP2015153566A JP2017034128A JP 2017034128 A JP2017034128 A JP 2017034128A JP 2015153566 A JP2015153566 A JP 2015153566A JP 2015153566 A JP2015153566 A JP 2015153566A JP 2017034128 A JP2017034128 A JP 2017034128A
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- JP
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- Prior art keywords
- workpiece
- polishing
- dividing
- abrasive grains
- back surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000003672 processing method Methods 0.000 title claims abstract description 15
- 239000006061 abrasive grain Substances 0.000 claims abstract description 34
- 239000007788 liquid Substances 0.000 claims abstract description 16
- 238000005498 polishing Methods 0.000 claims description 80
- 238000005247 gettering Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 10
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 6
- 239000012670 alkaline solution Substances 0.000 claims description 4
- 230000006835 compression Effects 0.000 claims description 4
- 238000007906 compression Methods 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims description 3
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims description 3
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims 1
- 230000001681 protective effect Effects 0.000 description 9
- 238000007517 polishing process Methods 0.000 description 7
- 238000005452 bending Methods 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000011218 segmentation Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 235000015497 potassium bicarbonate Nutrition 0.000 description 1
- 229910000028 potassium bicarbonate Inorganic materials 0.000 description 1
- 239000011736 potassium bicarbonate Substances 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 235000011181 potassium carbonates Nutrition 0.000 description 1
- TYJJADVDDVDEDZ-UHFFFAOYSA-M potassium hydrogencarbonate Chemical compound [K+].OC([O-])=O TYJJADVDDVDEDZ-UHFFFAOYSA-M 0.000 description 1
- 229940086066 potassium hydrogencarbonate Drugs 0.000 description 1
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 1
- 235000017557 sodium bicarbonate Nutrition 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02013—Grinding, lapping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02021—Edge treatment, chamfering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Dicing (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
Description
11a 表面
11b 裏面
13 デバイス
15 分割溝
17 デバイスチップ
17a エッジ部
21 保護部材
21a 第1面
21b 第2面
2 切削装置
4 チャックテーブル
6 切削ユニット
8 スピンドルハウジング
10 切削ブレード
12 研削装置
14 チャックテーブル
14a 保持面
16 研削ユニット
18 スピンドルハウジング
20 スピンドル
22 マウント
24 研削ホイール
26 ホイール基台
28 研削砥石
32 研磨装置
34 チャックテーブル
34a 保持面
36 研磨ユニット
38 スピンドルハウジング
40 スピンドル
42 マウント
44 研磨パッド
Claims (4)
- 板状の被加工物を分割予定ラインに沿って複数のデバイスチップに分割する被加工物の加工方法であって、
該被加工物の表面から該分割予定ラインに沿って該デバイスチップの仕上がり厚さに相当する深さの分割溝を形成し、該被加工物の裏面を研削して該分割溝を該裏面側に表出させることで、該被加工物を個々の該デバイスチップに分割する分割工程と、
該分割工程を実施した後、砥粒を含まない研磨液を該被加工物に供給しながら砥粒を含む研磨パッドを用いて該被加工物の裏面を研磨することで、該被加工物の該裏面の研削歪を除去するとともに、分割された個々の該デバイスチップのエッジ部を曲面状に加工する研磨工程と、
を備えることを特徴とする被加工物の加工方法。 - 該研磨工程を実施した後、該被加工物の該裏面にゲッタリング層を形成するゲッタリング層形成工程を更に備えることを特徴とする請求項1に記載の被加工物の加工方法。
- 該研磨パッドの硬度(Asker−C)は、55度〜90度であり、
該研磨パッドの圧縮率は、2%〜15%であり、
該研磨パッドに含まれる該砥粒の材質は、ダイヤモンド、グリーンカーボランダム、ホワイトアランダム、セリア又はジルコニアであり、
該研磨パッドに含まれる該砥粒の粒径は、0.01μm〜10μmであることを特徴とする請求項1又は請求項2に記載の被加工物の加工方法。 - 該研磨液は、アルカリ溶液であることを特徴とする請求項1から請求項3のいずれかに記載の被加工物の加工方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015153566A JP2017034128A (ja) | 2015-08-03 | 2015-08-03 | 被加工物の加工方法 |
TW105121235A TW201712746A (zh) | 2015-08-03 | 2016-07-05 | 被加工物的加工方法 |
KR1020160094694A KR20170016284A (ko) | 2015-08-03 | 2016-07-26 | 피가공물의 가공 방법 |
CN201610616617.5A CN106409761A (zh) | 2015-08-03 | 2016-07-29 | 被加工物的加工方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015153566A JP2017034128A (ja) | 2015-08-03 | 2015-08-03 | 被加工物の加工方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2017034128A true JP2017034128A (ja) | 2017-02-09 |
Family
ID=57988695
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015153566A Pending JP2017034128A (ja) | 2015-08-03 | 2015-08-03 | 被加工物の加工方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2017034128A (ja) |
KR (1) | KR20170016284A (ja) |
CN (1) | CN106409761A (ja) |
TW (1) | TW201712746A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019140387A (ja) * | 2018-02-14 | 2019-08-22 | 株式会社ディスコ | ウェハの処理方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005311025A (ja) * | 2004-04-21 | 2005-11-04 | Naoetsu Electronics Co Ltd | シリコンウエーハの製造方法及びそれにより製造されたシリコンウエーハ |
JP2006080329A (ja) * | 2004-09-10 | 2006-03-23 | Disco Abrasive Syst Ltd | 化学的機械的研磨装置 |
JP2007194471A (ja) * | 2006-01-20 | 2007-08-02 | Disco Abrasive Syst Ltd | ウェーハの研磨方法 |
JP2010182753A (ja) * | 2009-02-03 | 2010-08-19 | Disco Abrasive Syst Ltd | ウエーハの分割方法 |
JP2013235876A (ja) * | 2012-05-02 | 2013-11-21 | Disco Abrasive Syst Ltd | ウエーハの加工方法 |
JP2015046550A (ja) * | 2013-08-29 | 2015-03-12 | 株式会社ディスコ | 研磨パッドおよびウエーハの加工方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS624341A (ja) | 1985-06-29 | 1987-01-10 | Toshiba Corp | 半導体装置の製造方法 |
JP3464388B2 (ja) | 1998-07-01 | 2003-11-10 | 株式会社東芝 | 半導体ウェーハの分割加工方法 |
-
2015
- 2015-08-03 JP JP2015153566A patent/JP2017034128A/ja active Pending
-
2016
- 2016-07-05 TW TW105121235A patent/TW201712746A/zh unknown
- 2016-07-26 KR KR1020160094694A patent/KR20170016284A/ko unknown
- 2016-07-29 CN CN201610616617.5A patent/CN106409761A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005311025A (ja) * | 2004-04-21 | 2005-11-04 | Naoetsu Electronics Co Ltd | シリコンウエーハの製造方法及びそれにより製造されたシリコンウエーハ |
JP2006080329A (ja) * | 2004-09-10 | 2006-03-23 | Disco Abrasive Syst Ltd | 化学的機械的研磨装置 |
JP2007194471A (ja) * | 2006-01-20 | 2007-08-02 | Disco Abrasive Syst Ltd | ウェーハの研磨方法 |
JP2010182753A (ja) * | 2009-02-03 | 2010-08-19 | Disco Abrasive Syst Ltd | ウエーハの分割方法 |
JP2013235876A (ja) * | 2012-05-02 | 2013-11-21 | Disco Abrasive Syst Ltd | ウエーハの加工方法 |
JP2015046550A (ja) * | 2013-08-29 | 2015-03-12 | 株式会社ディスコ | 研磨パッドおよびウエーハの加工方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019140387A (ja) * | 2018-02-14 | 2019-08-22 | 株式会社ディスコ | ウェハの処理方法 |
KR20190098722A (ko) * | 2018-02-14 | 2019-08-22 | 가부시기가이샤 디스코 | 웨이퍼 처리 방법 |
US10727128B2 (en) | 2018-02-14 | 2020-07-28 | Disco Corporation | Method of processing a wafer |
KR102351842B1 (ko) * | 2018-02-14 | 2022-01-18 | 가부시기가이샤 디스코 | 웨이퍼 처리 방법 |
Also Published As
Publication number | Publication date |
---|---|
TW201712746A (zh) | 2017-04-01 |
CN106409761A (zh) | 2017-02-15 |
KR20170016284A (ko) | 2017-02-13 |
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