JP2017033021A5 - - Google Patents

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Publication number
JP2017033021A5
JP2017033021A5 JP2016213437A JP2016213437A JP2017033021A5 JP 2017033021 A5 JP2017033021 A5 JP 2017033021A5 JP 2016213437 A JP2016213437 A JP 2016213437A JP 2016213437 A JP2016213437 A JP 2016213437A JP 2017033021 A5 JP2017033021 A5 JP 2017033021A5
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Japan
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sound pressure
holding
pressure source
holding member
holding device
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JP2016213437A
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English (en)
Japanese (ja)
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JP6380506B2 (ja
JP2017033021A (ja
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Publication of JP2017033021A5 publication Critical patent/JP2017033021A5/ja
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JP2016213437A 2016-10-31 2016-10-31 保持装置及び保持方法、露光装置及び露光方法、並びにデバイス製造方法 Active JP6380506B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016213437A JP6380506B2 (ja) 2016-10-31 2016-10-31 保持装置及び保持方法、露光装置及び露光方法、並びにデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016213437A JP6380506B2 (ja) 2016-10-31 2016-10-31 保持装置及び保持方法、露光装置及び露光方法、並びにデバイス製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2013004300A Division JP2014138004A (ja) 2013-01-15 2013-01-15 保持装置及び保持方法、露光装置及び露光方法、並びにデバイス製造方法

Related Child Applications (1)

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JP2018141982A Division JP6653068B2 (ja) 2018-07-30 2018-07-30 保持装置及び保持方法、露光装置及び露光方法、並びにデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2017033021A JP2017033021A (ja) 2017-02-09
JP2017033021A5 true JP2017033021A5 (enExample) 2017-06-08
JP6380506B2 JP6380506B2 (ja) 2018-08-29

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ID=57989444

Family Applications (1)

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JP2016213437A Active JP6380506B2 (ja) 2016-10-31 2016-10-31 保持装置及び保持方法、露光装置及び露光方法、並びにデバイス製造方法

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JP (1) JP6380506B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6653068B2 (ja) * 2018-07-30 2020-02-26 株式会社ニコン 保持装置及び保持方法、露光装置及び露光方法、並びにデバイス製造方法
JP7394534B2 (ja) * 2019-03-26 2023-12-08 株式会社東京精密 ウエハ搬送装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05226221A (ja) * 1992-02-18 1993-09-03 Mitsubishi Electric Corp ウェハ位置決め装置およびその位置決め方法
JPH07273004A (ja) * 1994-03-29 1995-10-20 Hitachi Ltd 試料保持装置
JP2005093968A (ja) * 2003-09-19 2005-04-07 Kazumasa Onishi 真空チャック
JP2010245332A (ja) * 2009-04-07 2010-10-28 Canon Inc 半導体露光装置
JP5682106B2 (ja) * 2009-09-11 2015-03-11 株式会社ニコン 基板処理方法、及び基板処理装置

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