JP2017020000A5 - - Google Patents

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Publication number
JP2017020000A5
JP2017020000A5 JP2016111352A JP2016111352A JP2017020000A5 JP 2017020000 A5 JP2017020000 A5 JP 2017020000A5 JP 2016111352 A JP2016111352 A JP 2016111352A JP 2016111352 A JP2016111352 A JP 2016111352A JP 2017020000 A5 JP2017020000 A5 JP 2017020000A5
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JP
Japan
Prior art keywords
monomers
polymer
formula
dimers
polymerized units
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Pending
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JP2016111352A
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English (en)
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JP2017020000A (ja
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Priority claimed from US14/739,402 external-priority patent/US9442377B1/en
Application filed filed Critical
Publication of JP2017020000A publication Critical patent/JP2017020000A/ja
Publication of JP2017020000A5 publication Critical patent/JP2017020000A5/ja
Pending legal-status Critical Current

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Claims (1)

  1. 本発明は、式(1)の1つ以上の第1のモノマーまたはそのダイマーと、式(2)の1つ以上の第2のモノマーまたはそのダイマーとを重合単位として含むシロキサンポリマーを提供し、
    SiX (1) RSiX (2)
    式中、各Rが、独立して、アリール、アラルキル、アルキル、アルケニル、アラルケニル、及びRから選択され、Rが、1つ以上の−C(O)−O−C(O)−部分を含む
    2−30有機ラジアルであり、各Xが、加水分解性部分であり、
    少なくとも1つのRが、Rであり、前記ポリマーを構成する前記モノマー≧30%が、ヒドロキシ、メルカプト、エポキシ、グリシジルオキシ、シアノ、アルキレンオキシ、スルホラニル、及び−C(O)−O−C(O)−から選択される1つ以上の官能部分を含み、前記ポリマーが、式HSiX及びSiXのモノマーを重合単位として含まない、前記シロキサンポリマー。
JP2016111352A 2015-06-15 2016-06-02 湿式剥離性シリコン含有反射防止剤 Pending JP2017020000A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/739,402 2015-06-15
US14/739,402 US9442377B1 (en) 2015-06-15 2015-06-15 Wet-strippable silicon-containing antireflectant

Related Child Applications (1)

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JP2018128294A Division JP6643411B2 (ja) 2015-06-15 2018-07-05 湿式剥離性シリコン含有反射防止剤

Publications (2)

Publication Number Publication Date
JP2017020000A JP2017020000A (ja) 2017-01-26
JP2017020000A5 true JP2017020000A5 (ja) 2017-10-19

Family

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Family Applications (2)

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JP2016111352A Pending JP2017020000A (ja) 2015-06-15 2016-06-02 湿式剥離性シリコン含有反射防止剤
JP2018128294A Expired - Fee Related JP6643411B2 (ja) 2015-06-15 2018-07-05 湿式剥離性シリコン含有反射防止剤

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JP2018128294A Expired - Fee Related JP6643411B2 (ja) 2015-06-15 2018-07-05 湿式剥離性シリコン含有反射防止剤

Country Status (5)

Country Link
US (2) US9442377B1 (ja)
JP (2) JP2017020000A (ja)
KR (1) KR101849638B1 (ja)
CN (1) CN106243357B (ja)
TW (1) TWI600724B (ja)

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