JP2017020000A5 - - Google Patents
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- JP2017020000A5 JP2017020000A5 JP2016111352A JP2016111352A JP2017020000A5 JP 2017020000 A5 JP2017020000 A5 JP 2017020000A5 JP 2016111352 A JP2016111352 A JP 2016111352A JP 2016111352 A JP2016111352 A JP 2016111352A JP 2017020000 A5 JP2017020000 A5 JP 2017020000A5
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- monomers
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- 229920000642 polymer Polymers 0.000 claims 4
- -1 hydroxy, mercapto Chemical class 0.000 claims 3
- 125000005373 siloxane group Chemical group [SiH2](O*)* 0.000 claims 2
- 239000004593 Epoxy Substances 0.000 claims 1
- 125000003342 alkenyl group Chemical group 0.000 claims 1
- 125000000217 alkyl group Chemical group 0.000 claims 1
- 125000005529 alkyleneoxy group Chemical group 0.000 claims 1
- 125000003710 aryl alkyl group Chemical group 0.000 claims 1
- 125000003118 aryl group Chemical group 0.000 claims 1
- 125000004093 cyano group Chemical group *C#N 0.000 claims 1
- 125000003700 epoxy group Chemical group 0.000 claims 1
Claims (1)
- 本発明は、式(1)の1つ以上の第1のモノマーまたはそのダイマーと、式(2)の1つ以上の第2のモノマーまたはそのダイマーとを重合単位として含むシロキサンポリマーを提供し、
R2SiX2 (1) RSiX3 (2)
式中、各Rが、独立して、アリール、アラルキル、アルキル、アルケニル、アラルケニル、及びR1から選択され、R1が、1つ以上の−C(O)−O−C(O)−部分を含む
C2−30有機ラジアルであり、各Xが、加水分解性部分であり、
少なくとも1つのRが、R1であり、前記ポリマーを構成する前記モノマーの≧30%が、ヒドロキシ、メルカプト、エポキシ、グリシジルオキシ、シアノ、アルキレンオキシ、スルホラニル、及び−C(O)−O−C(O)−から選択される1つ以上の官能部分を含み、前記ポリマーが、式HSiX3及びSiX4のモノマーを重合単位として含まない、前記シロキサンポリマー。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/739,402 | 2015-06-15 | ||
US14/739,402 US9442377B1 (en) | 2015-06-15 | 2015-06-15 | Wet-strippable silicon-containing antireflectant |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018128294A Division JP6643411B2 (ja) | 2015-06-15 | 2018-07-05 | 湿式剥離性シリコン含有反射防止剤 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017020000A JP2017020000A (ja) | 2017-01-26 |
JP2017020000A5 true JP2017020000A5 (ja) | 2017-10-19 |
Family
ID=56881349
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016111352A Pending JP2017020000A (ja) | 2015-06-15 | 2016-06-02 | 湿式剥離性シリコン含有反射防止剤 |
JP2018128294A Expired - Fee Related JP6643411B2 (ja) | 2015-06-15 | 2018-07-05 | 湿式剥離性シリコン含有反射防止剤 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018128294A Expired - Fee Related JP6643411B2 (ja) | 2015-06-15 | 2018-07-05 | 湿式剥離性シリコン含有反射防止剤 |
Country Status (5)
Country | Link |
---|---|
US (2) | US9442377B1 (ja) |
JP (2) | JP2017020000A (ja) |
KR (1) | KR101849638B1 (ja) |
CN (1) | CN106243357B (ja) |
TW (1) | TWI600724B (ja) |
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2015
- 2015-06-15 US US14/739,402 patent/US9442377B1/en not_active Expired - Fee Related
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2016
- 2016-05-24 TW TW105116160A patent/TWI600724B/zh not_active IP Right Cessation
- 2016-06-02 CN CN201610389823.7A patent/CN106243357B/zh not_active Expired - Fee Related
- 2016-06-02 KR KR1020160068651A patent/KR101849638B1/ko active IP Right Grant
- 2016-06-02 JP JP2016111352A patent/JP2017020000A/ja active Pending
- 2016-08-11 US US15/234,124 patent/US10031420B2/en not_active Expired - Fee Related
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2018
- 2018-07-05 JP JP2018128294A patent/JP6643411B2/ja not_active Expired - Fee Related