JP2017017355A5 - - Google Patents

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Publication number
JP2017017355A5
JP2017017355A5 JP2016202315A JP2016202315A JP2017017355A5 JP 2017017355 A5 JP2017017355 A5 JP 2017017355A5 JP 2016202315 A JP2016202315 A JP 2016202315A JP 2016202315 A JP2016202315 A JP 2016202315A JP 2017017355 A5 JP2017017355 A5 JP 2017017355A5
Authority
JP
Japan
Prior art keywords
robot
wall
arm
turning axis
turning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016202315A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017017355A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2016202315A priority Critical patent/JP2017017355A/ja
Priority claimed from JP2016202315A external-priority patent/JP2017017355A/ja
Publication of JP2017017355A publication Critical patent/JP2017017355A/ja
Publication of JP2017017355A5 publication Critical patent/JP2017017355A5/ja
Pending legal-status Critical Current

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JP2016202315A 2016-10-14 2016-10-14 基板搬送ロボット Pending JP2017017355A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016202315A JP2017017355A (ja) 2016-10-14 2016-10-14 基板搬送ロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016202315A JP2017017355A (ja) 2016-10-14 2016-10-14 基板搬送ロボット

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2015195147A Division JP6027661B2 (ja) 2015-09-30 2015-09-30 基板搬送ロボット

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP2018119326A Division JP6640923B2 (ja) 2018-06-22 2018-06-22 基板搬送ロボット
JP2018119324A Division JP2018152609A (ja) 2018-06-22 2018-06-22 基板搬送ロボット
JP2018119320A Division JP6649995B2 (ja) 2018-06-22 2018-06-22 基板搬送ロボット

Publications (2)

Publication Number Publication Date
JP2017017355A JP2017017355A (ja) 2017-01-19
JP2017017355A5 true JP2017017355A5 (enExample) 2017-03-30

Family

ID=57829372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016202315A Pending JP2017017355A (ja) 2016-10-14 2016-10-14 基板搬送ロボット

Country Status (1)

Country Link
JP (1) JP2017017355A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101829397B1 (ko) * 2011-09-16 2018-02-19 퍼시몬 테크놀로지스 코포레이션 낮은 가변성을 가진 로봇
JP7510288B2 (ja) 2020-07-10 2024-07-03 ニデックインスツルメンツ株式会社 産業用ロボット

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58165978A (ja) * 1982-03-24 1983-10-01 三菱電機株式会社 工業用ロボツト
JP3453223B2 (ja) * 1994-08-19 2003-10-06 東京エレクトロン株式会社 処理装置
JP2002176092A (ja) * 2000-09-21 2002-06-21 Nikon Corp ウエハ調整方法及びウエハ調整装置
JP2002264065A (ja) * 2001-03-13 2002-09-18 Yaskawa Electric Corp ウエハ搬送ロボット
JP2003170384A (ja) * 2001-12-04 2003-06-17 Rorze Corp 平板状物の搬送用スカラ型ロボットおよび平板状物の処理システム
JP4070994B2 (ja) * 2001-12-20 2008-04-02 株式会社ダイヘン ワーク搬送用ロボット及びこのロボットを備えたワーク加工装置
SG115632A1 (en) * 2003-03-11 2005-10-28 Asml Netherlands Bv Lithographic projection assembly, handling apparatus for handling substrates and method of handling a substrate
US9248568B2 (en) * 2005-07-11 2016-02-02 Brooks Automation, Inc. Unequal link SCARA arm

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