JP2017017355A - 基板搬送ロボット - Google Patents

基板搬送ロボット Download PDF

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Publication number
JP2017017355A
JP2017017355A JP2016202315A JP2016202315A JP2017017355A JP 2017017355 A JP2017017355 A JP 2017017355A JP 2016202315 A JP2016202315 A JP 2016202315A JP 2016202315 A JP2016202315 A JP 2016202315A JP 2017017355 A JP2017017355 A JP 2017017355A
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JP
Japan
Prior art keywords
arm
motor
arm portion
substrate transfer
robot
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Pending
Application number
JP2016202315A
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English (en)
Japanese (ja)
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JP2017017355A5 (enrdf_load_stackoverflow
Inventor
本 康 彦 橋
Yasuhiko Hashimoto
本 康 彦 橋
田 俊 明 吉
Toshiaki Yoshida
田 俊 明 吉
田 哲 也 吉
Tetsuya Yoshida
田 哲 也 吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kawasaki Heavy Industries Ltd
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Kawasaki Heavy Industries Ltd
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Publication date
Application filed by Kawasaki Heavy Industries Ltd filed Critical Kawasaki Heavy Industries Ltd
Priority to JP2016202315A priority Critical patent/JP2017017355A/ja
Publication of JP2017017355A publication Critical patent/JP2017017355A/ja
Publication of JP2017017355A5 publication Critical patent/JP2017017355A5/ja
Pending legal-status Critical Current

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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2016202315A 2016-10-14 2016-10-14 基板搬送ロボット Pending JP2017017355A (ja)

Priority Applications (1)

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JP2016202315A JP2017017355A (ja) 2016-10-14 2016-10-14 基板搬送ロボット

Applications Claiming Priority (1)

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JP2016202315A JP2017017355A (ja) 2016-10-14 2016-10-14 基板搬送ロボット

Related Parent Applications (1)

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JP2015195147A Division JP6027661B2 (ja) 2015-09-30 2015-09-30 基板搬送ロボット

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP2018119326A Division JP6640923B2 (ja) 2018-06-22 2018-06-22 基板搬送ロボット
JP2018119324A Division JP2018152609A (ja) 2018-06-22 2018-06-22 基板搬送ロボット
JP2018119320A Division JP6649995B2 (ja) 2018-06-22 2018-06-22 基板搬送ロボット

Publications (2)

Publication Number Publication Date
JP2017017355A true JP2017017355A (ja) 2017-01-19
JP2017017355A5 JP2017017355A5 (enrdf_load_stackoverflow) 2017-03-30

Family

ID=57829372

Family Applications (1)

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JP2016202315A Pending JP2017017355A (ja) 2016-10-14 2016-10-14 基板搬送ロボット

Country Status (1)

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JP (1) JP2017017355A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20200384657A1 (en) * 2011-09-16 2020-12-10 Persimmon Technologies Corporation Robot Linear Drive Heat Transfer
WO2022009808A1 (ja) * 2020-07-10 2022-01-13 日本電産サンキョー株式会社 産業用ロボット

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58165978A (ja) * 1982-03-24 1983-10-01 三菱電機株式会社 工業用ロボツト
JPH08111449A (ja) * 1994-08-19 1996-04-30 Tokyo Electron Ltd 処理装置
JP2002176092A (ja) * 2000-09-21 2002-06-21 Nikon Corp ウエハ調整方法及びウエハ調整装置
JP2002264065A (ja) * 2001-03-13 2002-09-18 Yaskawa Electric Corp ウエハ搬送ロボット
JP2003170384A (ja) * 2001-12-04 2003-06-17 Rorze Corp 平板状物の搬送用スカラ型ロボットおよび平板状物の処理システム
JP2003188231A (ja) * 2001-12-20 2003-07-04 Daihen Corp ワーク搬送用ロボット及びこのロボットを備えたワーク加工装置
JP2004343063A (ja) * 2003-03-11 2004-12-02 Asml Netherlands Bv リソグラフィ投影装置、基板を取扱う取扱い装置および基板を取扱う方法
WO2007008702A2 (en) * 2005-07-11 2007-01-18 Brooks Automation, Inc. Unequal link scara arm

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58165978A (ja) * 1982-03-24 1983-10-01 三菱電機株式会社 工業用ロボツト
JPH08111449A (ja) * 1994-08-19 1996-04-30 Tokyo Electron Ltd 処理装置
JP2002176092A (ja) * 2000-09-21 2002-06-21 Nikon Corp ウエハ調整方法及びウエハ調整装置
JP2002264065A (ja) * 2001-03-13 2002-09-18 Yaskawa Electric Corp ウエハ搬送ロボット
JP2003170384A (ja) * 2001-12-04 2003-06-17 Rorze Corp 平板状物の搬送用スカラ型ロボットおよび平板状物の処理システム
JP2003188231A (ja) * 2001-12-20 2003-07-04 Daihen Corp ワーク搬送用ロボット及びこのロボットを備えたワーク加工装置
JP2004343063A (ja) * 2003-03-11 2004-12-02 Asml Netherlands Bv リソグラフィ投影装置、基板を取扱う取扱い装置および基板を取扱う方法
WO2007008702A2 (en) * 2005-07-11 2007-01-18 Brooks Automation, Inc. Unequal link scara arm

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20200384657A1 (en) * 2011-09-16 2020-12-10 Persimmon Technologies Corporation Robot Linear Drive Heat Transfer
WO2022009808A1 (ja) * 2020-07-10 2022-01-13 日本電産サンキョー株式会社 産業用ロボット
JP7510288B2 (ja) 2020-07-10 2024-07-03 ニデックインスツルメンツ株式会社 産業用ロボット

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