JP2017017355A5 - - Google Patents

Download PDF

Info

Publication number
JP2017017355A5
JP2017017355A5 JP2016202315A JP2016202315A JP2017017355A5 JP 2017017355 A5 JP2017017355 A5 JP 2017017355A5 JP 2016202315 A JP2016202315 A JP 2016202315A JP 2016202315 A JP2016202315 A JP 2016202315A JP 2017017355 A5 JP2017017355 A5 JP 2017017355A5
Authority
JP
Japan
Prior art keywords
robot
wall
arm
turning axis
turning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016202315A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017017355A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2016202315A priority Critical patent/JP2017017355A/ja
Priority claimed from JP2016202315A external-priority patent/JP2017017355A/ja
Publication of JP2017017355A publication Critical patent/JP2017017355A/ja
Publication of JP2017017355A5 publication Critical patent/JP2017017355A5/ja
Pending legal-status Critical Current

Links

JP2016202315A 2016-10-14 2016-10-14 基板搬送ロボット Pending JP2017017355A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016202315A JP2017017355A (ja) 2016-10-14 2016-10-14 基板搬送ロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016202315A JP2017017355A (ja) 2016-10-14 2016-10-14 基板搬送ロボット

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2015195147A Division JP6027661B2 (ja) 2015-09-30 2015-09-30 基板搬送ロボット

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP2018119326A Division JP6640923B2 (ja) 2018-06-22 2018-06-22 基板搬送ロボット
JP2018119324A Division JP2018152609A (ja) 2018-06-22 2018-06-22 基板搬送ロボット
JP2018119320A Division JP6649995B2 (ja) 2018-06-22 2018-06-22 基板搬送ロボット

Publications (2)

Publication Number Publication Date
JP2017017355A JP2017017355A (ja) 2017-01-19
JP2017017355A5 true JP2017017355A5 (enrdf_load_stackoverflow) 2017-03-30

Family

ID=57829372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016202315A Pending JP2017017355A (ja) 2016-10-14 2016-10-14 基板搬送ロボット

Country Status (1)

Country Link
JP (1) JP2017017355A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10569430B2 (en) * 2011-09-16 2020-02-25 Persimmon Technologies Corporation Low variability robot
JP7510288B2 (ja) * 2020-07-10 2024-07-03 ニデックインスツルメンツ株式会社 産業用ロボット

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58165978A (ja) * 1982-03-24 1983-10-01 三菱電機株式会社 工業用ロボツト
JP3453223B2 (ja) * 1994-08-19 2003-10-06 東京エレクトロン株式会社 処理装置
JP2002176092A (ja) * 2000-09-21 2002-06-21 Nikon Corp ウエハ調整方法及びウエハ調整装置
JP2002264065A (ja) * 2001-03-13 2002-09-18 Yaskawa Electric Corp ウエハ搬送ロボット
JP2003170384A (ja) * 2001-12-04 2003-06-17 Rorze Corp 平板状物の搬送用スカラ型ロボットおよび平板状物の処理システム
JP4070994B2 (ja) * 2001-12-20 2008-04-02 株式会社ダイヘン ワーク搬送用ロボット及びこのロボットを備えたワーク加工装置
SG115632A1 (en) * 2003-03-11 2005-10-28 Asml Netherlands Bv Lithographic projection assembly, handling apparatus for handling substrates and method of handling a substrate
US9248568B2 (en) * 2005-07-11 2016-02-02 Brooks Automation, Inc. Unequal link SCARA arm

Similar Documents

Publication Publication Date Title
JP2016221642A5 (enrdf_load_stackoverflow)
JP5653073B2 (ja) ロボットセル装置及び生産システム
JP2017071018A5 (enrdf_load_stackoverflow)
WO2014133389A3 (en) Tubulars handling system and apparatus
EP3100830A3 (en) Robot, robot control apparatus, robot control method, and robot system
WO2015179007A3 (en) Systems and methods for dynamic machine stability
JP2018192568A5 (enrdf_load_stackoverflow)
MX368038B (es) Sistema, método y chasis de propulsión asistida.
JP2014522747A5 (enrdf_load_stackoverflow)
WO2015168511A3 (en) Robotic carcass processing method and system
JP2015231651A5 (enrdf_load_stackoverflow)
JP2016500473A5 (enrdf_load_stackoverflow)
EP2774728A3 (en) Robotic system comprising a robot attached to a ceiling and including a plurality of arms
EP2783799A3 (en) Robot system and method for transferring workpiece
EP3495064A3 (en) Workpiece transfer apparatus
JP2017218268A5 (enrdf_load_stackoverflow)
RU2016144508A (ru) Манипулятор буровых штанг
EP2886265A3 (en) Robot and maintenance method for robot
WO2015081224A3 (en) Multiple axis work-piece transfer apparatus
Hu et al. Maneuver and vibration control of flexible manipulators using variable-speed control moment gyros
EP2829933A3 (en) Robot system, robot management computer, and method of manufacturing a robot system
WO2016087332A8 (en) Device for orienting parts, particularly for gripping by robots, automation means and the like
EP4063086A4 (en) GRIPPER FOR ROBOTIC ARM
JP2018534984A5 (enrdf_load_stackoverflow)
JP2017017355A5 (enrdf_load_stackoverflow)