JP2016538236A - 単結晶グラフェンの製造方法 - Google Patents
単結晶グラフェンの製造方法 Download PDFInfo
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- JP2016538236A JP2016538236A JP2016555437A JP2016555437A JP2016538236A JP 2016538236 A JP2016538236 A JP 2016538236A JP 2016555437 A JP2016555437 A JP 2016555437A JP 2016555437 A JP2016555437 A JP 2016555437A JP 2016538236 A JP2016538236 A JP 2016538236A
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- C30B1/00—Single-crystal growth directly from the solid state
- C30B1/02—Single-crystal growth directly from the solid state by thermal treatment, e.g. strain annealing
- C30B1/06—Recrystallisation under a temperature gradient
- C30B1/08—Zone recrystallisation
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- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/194—After-treatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
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- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/184—Preparation
- C01B32/186—Preparation by chemical vapour deposition [CVD]
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- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/16—Controlling or regulating
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- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2204/00—Structure or properties of graphene
- C01B2204/20—Graphene characterized by its properties
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- Crystallography & Structural Chemistry (AREA)
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Abstract
Description
Claims (11)
- 基板上に炭化水素ガスを用いて多結晶グラフェンを形成する段階と、
前記多結晶グラフェン上に触媒を形成する段階と、
前記多結晶グラフェン及び前記触媒を熱処理することによって、前記多結晶グラフェンを単結晶グラフェンに再結晶化する段階と、
を含む単結晶グラフェンの製造方法。 - 前記基板は、Al2O3、AlN、Si3N4、SrTiO3またはBNを含んでなる絶縁基板である、請求項1に記載の単結晶グラフェンの製造方法。
- 前記基板は、前記絶縁基板上に遷移金属を0.5μm〜3μmの薄膜形態に成長させた複合基板である、請求項2に記載の単結晶グラフェンの製造方法。
- 前記単結晶グラフェンは、前記基板上に成長した単結晶グラフェンを含む、請求項2または請求項3に記載の単結晶グラフェンの製造方法。
- 前記基板は、WまたはMoを含んでなる金属基板である、請求項1に記載の単結晶グラフェンの製造方法。
- 前記基板は、ウェーハスケールの基板を含む、請求項1に記載の単結晶グラフェンの製造方法。
- 前記基板上に炭化水素ガスを用いて多結晶グラフェンを形成する段階は、600℃〜1100℃の温度で行われる、請求項1に記載の単結晶グラフェンの製造方法。
- 前記触媒は、アルミニウム、アルミニウムを含有する化合物または3d遷移金属系化合物を含む、請求項1に記載の単結晶グラフェンの製造方法。
- 前記多結晶グラフェン及び前記触媒を熱処理することによって、前記多結晶グラフェンを単結晶グラフェンに再結晶化する段階は、1400℃〜2000℃の温度で行われる、請求項8に記載の単結晶グラフェンの製造方法。
- 前記熱処理は、
局部的加熱源を用いて前記多結晶グラフェン及び前記触媒の第1部分を加熱する段階と、
前記局部的加熱源を移動させて前記第1部分を冷却させると共に、他の位置の第2部分を加熱する段階と、
を含んで行われる、請求項1に記載の単結晶グラフェンの製造方法。 - 前記熱処理は、前記基板の一側から他側に一方向に前記局部的加熱源を移動させて行われる、請求項10に記載の単結晶グラフェンの製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020130167109A KR101572066B1 (ko) | 2013-12-30 | 2013-12-30 | 단결정 그래핀의 제조방법 |
KR10-2013-0167109 | 2013-12-30 | ||
PCT/KR2014/012902 WO2015102318A1 (ko) | 2013-12-30 | 2014-12-26 | 단결정 그래핀의 제조방법 |
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JP2016538236A true JP2016538236A (ja) | 2016-12-08 |
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JP2016555437A Pending JP2016538236A (ja) | 2013-12-30 | 2014-12-26 | 単結晶グラフェンの製造方法 |
Country Status (5)
Country | Link |
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US (1) | US9834855B2 (ja) |
EP (1) | EP3091106B1 (ja) |
JP (1) | JP2016538236A (ja) |
KR (1) | KR101572066B1 (ja) |
WO (1) | WO2015102318A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2017031005A (ja) * | 2015-07-31 | 2017-02-09 | 川研ファインケミカル株式会社 | グラフェン被覆窒化アルミニウムフィラー、その製造方法、電子材料、樹脂複合体、及び疎水化処理方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2019504290A (ja) | 2015-10-07 | 2019-02-14 | ザ・リージェンツ・オブ・ザ・ユニバーシティー・オブ・カリフォルニアThe Regents Of The University Of California | グラフェン系マルチモーダルセンサー |
KR102106781B1 (ko) * | 2017-11-30 | 2020-05-06 | 성균관대학교산학협력단 | 단결정 금속 박막 및 이의 제조 방법 |
KR102082694B1 (ko) * | 2018-05-09 | 2020-02-28 | 한국과학기술연구원 | 그래핀 적용 대상의 표면에 그래핀을 직접 합성하는 방법 및 상기 방법을 이용하여 형성된 그래핀을 포함하는 소자 |
KR102672480B1 (ko) * | 2019-08-30 | 2024-06-07 | 한국전력공사 | 도핑 그래핀의 제조 방법 및 이에 의해 제조된 도핑 그래핀 |
Citations (5)
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JPH06326022A (ja) * | 1993-03-16 | 1994-11-25 | Mitsubishi Electric Corp | 半導体基板の製造方法,半導体装置の製造方法,及び,半導体製造装置 |
JP2009143799A (ja) * | 2007-12-17 | 2009-07-02 | Samsung Electronics Co Ltd | 単結晶グラフェンシートおよびその製造方法 |
JP2010241680A (ja) * | 2009-04-07 | 2010-10-28 | Samsung Electronics Co Ltd | グラフェンの製造方法 |
KR20120099917A (ko) * | 2011-03-02 | 2012-09-12 | 세종대학교산학협력단 | 그래핀 배선 형성 방법 |
US20120282489A1 (en) * | 2011-05-06 | 2012-11-08 | Samsung Electronics Co., Ltd. | Direct graphene growing method |
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EP2460481A1 (de) * | 2010-12-01 | 2012-06-06 | FACET-LINK Inc. | Fusionsimplantat für Facettengelenke |
KR101878736B1 (ko) * | 2011-06-24 | 2018-07-17 | 삼성전자주식회사 | 그래핀 제조방법 |
KR101165354B1 (ko) * | 2011-10-24 | 2012-07-18 | 성균관대학교산학협력단 | 단일 방위의 면을 가지는 면심입방격자 금속촉매상에서 그래핀을 제조하는 방법 |
US9845551B2 (en) * | 2012-07-10 | 2017-12-19 | William Marsh Rice University | Methods for production of single-crystal graphenes |
US10053366B2 (en) * | 2012-12-12 | 2018-08-21 | William Marsh Rice Univerisity | Methods of controllably forming bernal-stacked graphene layers |
US9284640B2 (en) * | 2013-11-01 | 2016-03-15 | Advanced Graphene Products Sp. Z.O.O. | Method of producing graphene from liquid metal |
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2013
- 2013-12-30 KR KR1020130167109A patent/KR101572066B1/ko active IP Right Grant
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2014
- 2014-12-26 JP JP2016555437A patent/JP2016538236A/ja active Pending
- 2014-12-26 WO PCT/KR2014/012902 patent/WO2015102318A1/ko active Application Filing
- 2014-12-26 US US15/103,368 patent/US9834855B2/en active Active
- 2014-12-26 EP EP14877483.9A patent/EP3091106B1/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06326022A (ja) * | 1993-03-16 | 1994-11-25 | Mitsubishi Electric Corp | 半導体基板の製造方法,半導体装置の製造方法,及び,半導体製造装置 |
JP2009143799A (ja) * | 2007-12-17 | 2009-07-02 | Samsung Electronics Co Ltd | 単結晶グラフェンシートおよびその製造方法 |
JP2010241680A (ja) * | 2009-04-07 | 2010-10-28 | Samsung Electronics Co Ltd | グラフェンの製造方法 |
KR20120099917A (ko) * | 2011-03-02 | 2012-09-12 | 세종대학교산학협력단 | 그래핀 배선 형성 방법 |
US20120282489A1 (en) * | 2011-05-06 | 2012-11-08 | Samsung Electronics Co., Ltd. | Direct graphene growing method |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017031005A (ja) * | 2015-07-31 | 2017-02-09 | 川研ファインケミカル株式会社 | グラフェン被覆窒化アルミニウムフィラー、その製造方法、電子材料、樹脂複合体、及び疎水化処理方法 |
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EP3091106A1 (en) | 2016-11-09 |
WO2015102318A1 (ko) | 2015-07-09 |
EP3091106A4 (en) | 2017-08-02 |
KR20150078047A (ko) | 2015-07-08 |
EP3091106B1 (en) | 2019-02-13 |
US9834855B2 (en) | 2017-12-05 |
US20170009371A1 (en) | 2017-01-12 |
KR101572066B1 (ko) | 2015-11-26 |
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