JP2016530710A - エピタキシャル反応器 - Google Patents
エピタキシャル反応器 Download PDFInfo
- Publication number
- JP2016530710A JP2016530710A JP2016527913A JP2016527913A JP2016530710A JP 2016530710 A JP2016530710 A JP 2016530710A JP 2016527913 A JP2016527913 A JP 2016527913A JP 2016527913 A JP2016527913 A JP 2016527913A JP 2016530710 A JP2016530710 A JP 2016530710A
- Authority
- JP
- Japan
- Prior art keywords
- hole
- gas
- epitaxial reactor
- reactor according
- baffle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002347 injection Methods 0.000 claims abstract description 82
- 239000007924 injection Substances 0.000 claims abstract description 82
- 238000005192 partition Methods 0.000 claims description 19
- 230000002093 peripheral effect Effects 0.000 claims description 13
- 239000007789 gas Substances 0.000 description 122
- 235000012431 wafers Nutrition 0.000 description 27
- 239000002994 raw material Substances 0.000 description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- -1 Si 2 H 6 Substances 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45587—Mechanical means for changing the gas flow
- C23C16/45591—Fixed means, e.g. wings, baffles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
Abstract
Description
Claims (18)
- 反応室と、
前記反応室内に位置し、ウエハを載置させるサセプタと、
前記反応室内に流入するガスの流動を制御するガス流動制御部とを含み、
前記ガス流動制御部は、
ガスの流れを分離する複数の流出口を有するインジェクトキャップ(inject cap)と、
前記複数の流出口のそれぞれに対応する第1貫通孔を含み、前記第1貫通孔は前記複数の流出口から排出されるガスを通過させる、インジェクトバッファ(inject buffer)と、
前記第1貫通孔のそれぞれに対応する第2貫通孔を含み、前記第2貫通孔は前記第1貫通孔を通過したガスを通過させる、バッフル(baffle)とを含み、
前記第1貫通孔のそれぞれの面積は、前記第2貫通孔のそれぞれの面積よりも大きく、前記流出口のそれぞれの面積よりは小さい、エピタキシャル反応器。 - 隔壁によって互いに隔離され、前記第2貫通孔を通過したガスを通過させる複数の区画を含むインサート(insert)をさらに含み、
前記第1貫通孔のそれぞれは、前記複数の区画のうち対応するいずれか1つに整列する、請求項1に記載のエピタキシャル反応器。 - 前記複数の区画を通過したガスを前記反応室に誘導する段差部を有するライナー(liner)をさらに含む、請求項2に記載のエピタキシャル反応器。
- 前記複数の区画のそれぞれの開口面積は、前記第1貫通孔の開口面積及び前記第2貫通孔の開口面積よりは大きく、前記複数の流出口のそれぞれの開口面積よりは小さい、請求項2に記載のエピタキシャル反応器。
- 前記インジェクトキャップは、互いに隔離される少なくとも2つ以上の部分を含み、
前記複数の流出口のいずれか1つは、少なくとも2つ以上の部分のうち対応するいずれか1つに設けられる、請求項1に記載のエピタキシャル反応器。 - 前記インジェクトキャップは、一面に側壁及び底部からなるキャビティ(cavity)を備え、
前記インジェクトキャップの他面と前記キャビティの底部との間の空間は前記第1〜第3部分に区分され、前記キャビティの底部には前記複数の流出口が設けられ、前記第1貫通孔及び前記第2貫通孔が前記キャビティの底部に対向するように、前記インジェクトバッファと前記バッフルは前記キャビティに順次挿入される、請求項5に記載のエピタキシャル反応器。 - 前記バッフルの一面は前記インジェクトバッファと接触し、前記バッフルの他面は前記インジェクトキャップの一面と同一平面に位置する、請求項6に記載のエピタキシャル反応器。
- 前記第2貫通孔と前記第1貫通孔との比率は1:5〜1:20である、請求項1に記載のエピタキシャル反応器。
- 前記複数の区画のそれぞれに対応する前記第2貫通孔の数は、前記複数の区画のそれぞれに対応する前記第1貫通孔の数よりも多い、請求項2に記載のエピタキシャル反応器。
- 前記インジェクトキャップは、
互いに隔離される2つ以上の部分に区分され、前記複数のガス流出口のいずれか1つは、前記2つ以上の部分のうち対応するいずれか1つに設けられる、請求項1に記載のエピタキシャル反応器。 - 前記複数の区画のそれぞれは、
前記第1貫通孔に対応する第2貫通孔に整列する、請求項2に記載のエピタキシャル反応器。 - 前記複数の区画のそれぞれに対応する第2貫通孔の数は、前記複数の区画のそれぞれに対応する第1貫通孔の数よりも多い、請求項2に記載のエピタキシャル反応器。
- 前記第1貫通孔は、前記インジェクトバッファの長手方向に離隔して配列される、請求項2に記載のエピタキシャル反応器。
- 前記第2貫通孔は、前記バッフルの長手方向に離隔して配列される、請求項2に記載のエピタキシャル反応器。
- 前記第1貫通孔のそれぞれの開口面積は100mm2〜200mm2である、請求項1に記載のエピタキシャル反応器。
- 前記第2貫通孔のそれぞれの開口面積は10mm2〜20mm2である、請求項1に記載のエピタキシャル反応器。
- 挿入された前記インジェクトバッファの外周面及び前記バッフルの外周面は、前記キャビティの内面に密着する、請求項6に記載のエピタキシャル反応器。
- 前記キャビティの深さは、前記インジェクトバッファの厚さと前記バッフルの厚さとの和と同一である、請求項6に記載のエピタキシャル反応器。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2013-0085222 | 2013-07-19 | ||
KR20130085222A KR101487409B1 (ko) | 2013-07-19 | 2013-07-19 | 에피텍셜 반응기 |
PCT/KR2014/006096 WO2015008963A1 (ko) | 2013-07-19 | 2014-07-08 | 에피텍셜 반응기 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016530710A true JP2016530710A (ja) | 2016-09-29 |
JP6118467B2 JP6118467B2 (ja) | 2017-04-19 |
Family
ID=52346369
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016527913A Active JP6118467B2 (ja) | 2013-07-19 | 2014-07-08 | エピタキシャル反応器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20160145766A1 (ja) |
JP (1) | JP6118467B2 (ja) |
KR (1) | KR101487409B1 (ja) |
CN (1) | CN105393335B (ja) |
DE (1) | DE112014003341B4 (ja) |
WO (1) | WO2015008963A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102127715B1 (ko) * | 2013-08-09 | 2020-06-29 | 에스케이실트론 주식회사 | 에피텍셜 반응기 |
CN107306473B (zh) * | 2016-04-25 | 2019-04-30 | 中微半导体设备(上海)股份有限公司 | 一种半导体处理装置及处理基片的方法 |
WO2018042876A1 (ja) * | 2016-09-05 | 2018-03-08 | 信越半導体株式会社 | 気相成長装置及びエピタキシャルウェーハの製造方法 |
TWI754765B (zh) * | 2017-08-25 | 2022-02-11 | 美商應用材料股份有限公司 | 用於磊晶沉積製程之注入組件 |
CN114457321B (zh) * | 2022-01-21 | 2023-03-28 | 深圳市纳设智能装备有限公司 | 一种进气装置及cvd设备 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000269147A (ja) * | 1999-03-18 | 2000-09-29 | Shin Etsu Handotai Co Ltd | 気相成長装置、気相成長方法及びシリコンエピタキシャルウェーハ |
JP2003086524A (ja) * | 2001-06-29 | 2003-03-20 | Shin Etsu Handotai Co Ltd | 気相成長装置及びエピタキシャルウェーハの製造方法 |
JP2005353775A (ja) * | 2004-06-09 | 2005-12-22 | Sumco Corp | エピタキシャル装置 |
JP2006073713A (ja) * | 2004-09-01 | 2006-03-16 | Toyota Motor Corp | Cvd装置 |
Family Cites Families (10)
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JPS61263118A (ja) | 1985-05-15 | 1986-11-21 | Sharp Corp | プラズマcvd装置 |
US5551982A (en) | 1994-03-31 | 1996-09-03 | Applied Materials, Inc. | Semiconductor wafer process chamber with susceptor back coating |
JP2005183511A (ja) | 2003-12-17 | 2005-07-07 | Shin Etsu Handotai Co Ltd | 気相成長装置およびエピタキシャルウェーハの製造方法 |
DE102005035247B9 (de) | 2005-07-25 | 2012-01-12 | Von Ardenne Anlagentechnik Gmbh | Fluidverteiler mit binärer Struktur |
JP4978554B2 (ja) | 2008-05-12 | 2012-07-18 | 信越半導体株式会社 | 薄膜の気相成長方法および気相成長装置 |
JP5131094B2 (ja) | 2008-08-29 | 2013-01-30 | 東京エレクトロン株式会社 | 熱処理装置及び熱処理方法並びに記憶媒体 |
US8298629B2 (en) * | 2009-02-25 | 2012-10-30 | Crystal Solar Incorporated | High throughput multi-wafer epitaxial reactor |
JP5413305B2 (ja) | 2010-05-25 | 2014-02-12 | 信越半導体株式会社 | エピタキシャル成長装置 |
KR20130051013A (ko) * | 2010-06-09 | 2013-05-16 | 솔렉셀, 인크. | 고생산성 박막 증착 방법 및 시스템 |
TWI496918B (zh) | 2013-02-05 | 2015-08-21 | Adpv Technology Ltd Intetrust | Gas release device for coating process |
-
2013
- 2013-07-19 KR KR20130085222A patent/KR101487409B1/ko active IP Right Grant
-
2014
- 2014-07-08 US US14/904,943 patent/US20160145766A1/en not_active Abandoned
- 2014-07-08 WO PCT/KR2014/006096 patent/WO2015008963A1/ko active Application Filing
- 2014-07-08 CN CN201480040741.0A patent/CN105393335B/zh active Active
- 2014-07-08 DE DE112014003341.3T patent/DE112014003341B4/de active Active
- 2014-07-08 JP JP2016527913A patent/JP6118467B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000269147A (ja) * | 1999-03-18 | 2000-09-29 | Shin Etsu Handotai Co Ltd | 気相成長装置、気相成長方法及びシリコンエピタキシャルウェーハ |
JP2003086524A (ja) * | 2001-06-29 | 2003-03-20 | Shin Etsu Handotai Co Ltd | 気相成長装置及びエピタキシャルウェーハの製造方法 |
JP2005353775A (ja) * | 2004-06-09 | 2005-12-22 | Sumco Corp | エピタキシャル装置 |
JP2006073713A (ja) * | 2004-09-01 | 2006-03-16 | Toyota Motor Corp | Cvd装置 |
Also Published As
Publication number | Publication date |
---|---|
DE112014003341B4 (de) | 2021-07-29 |
DE112014003341T5 (de) | 2016-03-31 |
CN105393335A (zh) | 2016-03-09 |
WO2015008963A1 (ko) | 2015-01-22 |
CN105393335B (zh) | 2018-01-02 |
KR101487409B1 (ko) | 2015-01-29 |
US20160145766A1 (en) | 2016-05-26 |
JP6118467B2 (ja) | 2017-04-19 |
KR20150010341A (ko) | 2015-01-28 |
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