JP2016522896A - 加速度センサ及び加速度センサの製造方法 - Google Patents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0882—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing damping of vibrations
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Abstract
Description
可動電極7a,7bに対向して、固定電極3a,3bが配置される。適切な電圧が印加されると、後者は可動構造6に静電力を与える。固定電極3a,3bと、可動構造6上に配置された可動電極7a,7bとは、断続的に互いに係合する。従って、平板キャパシタ配置の効果と、それによる非線形性の効果とが従属して残るように、1つの電極歯の先端と、対向する歯の基端との間に十分な自由空間が残されることに留意すべきである。
[先行技術文献]
[特許文献1]ドイツ公開公報第10 2011 083487号
[特許文献2]米国公開公報第2012/031185号
[特許文献3]国際公開公報第2006/105314号
[特許文献4]米国公開公報第2007/029629号
Claims (10)
- 基板面を有する基板と、
前記基板面に略平行な正の偏位方向(x)に沿って、前記基板に対し相対的に移動可能な標本おもりであって、前記標本おもりとともに移動可能な櫛型電極を有し、前記可動櫛型電極が、前記正の偏位方向(x)に沿って延びる複数の歯を有する標本おもりと、
前記基板へ固定的に連結された対向電極であって、固定櫛型電極により構成され、前記固定櫛型電極が、前記正の偏位方向(x)とは反対の方向に沿って延びる複数の歯を有し、前記可動櫛型電極の前記歯が、前記固定櫛型電極の前記歯と係合する対向電極と、
前記基板へ固定的に連結されたシールド電極であって、前記標本おもりの偏位動作中における前記標本おもりの空気圧減衰を増大するのに適したシールド電極とを備えた加速度センサ。 - 前記可動櫛型電極は、前記正の偏位方向(x)に略垂直な櫛前方面を有する櫛前方辺を有し、
前記シールド電極は、前記櫛前方面に略平行なシールド電極面を有し、
前記櫛前方面及び前記シールド電極面は、互いに対向し、
前記櫛前方面及び前記シールド電極面の距離は、前記標本おもりの偏位動作中に変化し、
前記距離の変化は、前記標本おもりの空気圧減衰を増大させるのに適していることを特徴とする請求項1に記載の加速度センサ。 - 前記標本おもり及び前記シールド電極は同電位であることを特徴とする請求項1又は2に記載の加速度センサ。
- 前記対向電極及び前記シールド電極は、分離層を介して互いに連結されていることを特徴とする請求項1〜3のいずれか一項に記載の加速度センサ。
- 前記標本おもりは、前記標本おもりとともに移動可能な第2の可動櫛型電極を有し、前記第2の可動櫛型電極が、前記正の偏位方向(x)とは反対の方向に沿って延びる複数の歯を有し、
前記加速度センサは、前記基板へ固定的に連結された第2の対向電極を備え、前記第2の対向電極が、第2の固定櫛型電極により構成され、前記第2の固定櫛型電極が、前記正の偏位方向(x)に沿って延びる複数の歯を有し、前記第2の可動櫛型電極の前記歯が、前記第2の固定櫛型電極の前記歯と係合し、
前記加速度センサは、前記基板へ固定的に連結された第2のシールド電極を備え、前記シールド電極が、前記標本おもりの偏位動作中における前記標本おもりの空気圧減衰を増大させるのに適していることを特徴とする請求項1〜4のいずれか一項に記載の加速度センサ。 - 前記シールド電極及び前記第2のシールド電極は、互いに一体的に連結されていることを特徴とする請求項5に記載の加速度センサ。
- 前記標本おもりが、前記正の偏位方向(x)に沿って偏位動作でき、かつ、前記正の偏位方向(x)に垂直かつ前記基板面に平行な方向(y)について実質的に固定的に支持されるように、ばね部材が、前記標本おもり及び前記基板を互いに結合することを特徴とする請求項1〜6のいずれか一項に記載の加速度センサ。
- 基板面を有する基板を形成し、
前記基板面に略平行な正の偏位方向(x)に沿って、前記基板に対し相対的に移動可能な標本おもりであって、前記標本おもりとともに移動可能な櫛型電極を有し、前記可動櫛型電極が、前記正の偏位方向(x)に沿って延びる複数の歯を有する標本おもりを形成し、
前記基板へ固定的に連結された対向電極であって、固定櫛型電極により構成され、前記固定櫛型電極が、前記正の偏位方向(x)とは反対の方向に沿って延びる複数の歯を有し、前記可動櫛型電極の前記歯が、前記固定櫛型電極の前記歯と係合する対向電極を形成し、
前記基板へ固定的に連結されたシールド電極であって、前記標本おもりの偏位動作中における前記標本おもりの空気圧減衰を増大するのに適しているシールド電極を形成する加速度センサの製造方法。 - さらに、前記標本おもりの偏位動作の最適な減衰を調整するために、前記加速度センサのガス圧を調整することを特徴とする請求項8に記載の加速度センサの製造方法。
- さらに、前記標本おもりの偏位動作の最適な減衰を調整するために、予め定められたガス圧における、前記加速度センサの前記可動櫛型電極及び前記シールド電極の間の距離を選択することを特徴とする請求項8又は9に記載の加速度センサの製造方法。
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DE102013007593.9A DE102013007593B4 (de) | 2013-05-02 | 2013-05-02 | Beschleunigungssensor sowie verfahren zur herstellung eines beschleunigungssensors |
DE102013007593.9 | 2013-05-02 | ||
PCT/EP2014/000833 WO2014177243A1 (de) | 2013-05-02 | 2014-03-27 | Beschleunigungssensor sowie verfahren zur herstellung eines beschleunigungssensors |
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DE102015000158A1 (de) * | 2015-01-05 | 2016-07-07 | Northrop Grumman Litef Gmbh | Beschleunigungssensor mit reduziertem Bias und Herstellungsverfahren eines Beschleunigungssensors |
DE102015001128B4 (de) | 2015-01-29 | 2021-09-30 | Northrop Grumman Litef Gmbh | Beschleunigungssensor mit Federkraftkompensation |
JP6513519B2 (ja) * | 2015-07-17 | 2019-05-15 | 株式会社日立製作所 | 物理量センサ |
GB201514319D0 (en) | 2015-08-12 | 2015-09-23 | Atlantic Inertial Systems Ltd | Accelerometers |
CN107188108B (zh) * | 2017-05-23 | 2023-07-21 | 深迪半导体(绍兴)有限公司 | 一种mems器件及其防吸附方法 |
US10816568B2 (en) | 2017-12-26 | 2020-10-27 | Physical Logic Ltd. | Closed loop accelerometer |
KR20200043816A (ko) * | 2018-10-18 | 2020-04-28 | 엘지전자 주식회사 | Mems 가속도계 및 이의 제조 방법 |
US11567100B2 (en) * | 2019-11-07 | 2023-01-31 | Honeywell International Inc. | Vibrating beam accelerometer with additional support flexures to avoid nonlinear mechanical coupling |
CN111751574B (zh) * | 2020-07-30 | 2022-01-28 | 保定开拓精密仪器制造有限责任公司 | 一种温度加速度复合型石英摆片的制备方法 |
CN114088976B (zh) * | 2022-01-24 | 2022-04-12 | 成都华托微纳智能传感科技有限公司 | 一种梳齿间隙可调式mems加速度计 |
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DE102013007593B4 (de) | 2022-12-29 |
CA2915176C (en) | 2020-06-16 |
US9709596B2 (en) | 2017-07-18 |
IL242052A (en) | 2016-07-31 |
AU2014261760B2 (en) | 2016-10-13 |
CN105190319B (zh) | 2017-12-15 |
BR112015026651A2 (pt) | 2017-07-25 |
AU2014261760A1 (en) | 2015-12-17 |
CA2915176A1 (en) | 2014-11-06 |
EP2992336A1 (de) | 2016-03-09 |
TR201819239T4 (tr) | 2019-01-21 |
RU2618482C1 (ru) | 2017-05-03 |
WO2014177243A1 (de) | 2014-11-06 |
CN105190319A (zh) | 2015-12-23 |
BR112015026651B1 (pt) | 2022-03-15 |
KR20150136131A (ko) | 2015-12-04 |
JP6067926B2 (ja) | 2017-01-25 |
DE102013007593A1 (de) | 2014-11-06 |
KR101818027B1 (ko) | 2018-01-12 |
US20160069928A1 (en) | 2016-03-10 |
EP2992336B1 (de) | 2018-12-05 |
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