JP2016521913A5 - - Google Patents

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Publication number
JP2016521913A5
JP2016521913A5 JP2016519682A JP2016519682A JP2016521913A5 JP 2016521913 A5 JP2016521913 A5 JP 2016521913A5 JP 2016519682 A JP2016519682 A JP 2016519682A JP 2016519682 A JP2016519682 A JP 2016519682A JP 2016521913 A5 JP2016521913 A5 JP 2016521913A5
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JP
Japan
Prior art keywords
core portion
annular core
fluid coolant
sectional
internal fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016519682A
Other languages
English (en)
Japanese (ja)
Other versions
JP6429407B2 (ja
JP2016521913A (ja
Filing date
Publication date
Priority claimed from US13/966,611 external-priority patent/US9177708B2/en
Application filed filed Critical
Publication of JP2016521913A publication Critical patent/JP2016521913A/ja
Publication of JP2016521913A5 publication Critical patent/JP2016521913A5/ja
Application granted granted Critical
Publication of JP6429407B2 publication Critical patent/JP6429407B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2016519682A 2013-06-14 2014-06-13 イオン装置で利用する磁石およびイオン装置 Active JP6429407B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361835089P 2013-06-14 2013-06-14
US61/835,089 2013-06-14
US13/966,611 US9177708B2 (en) 2013-06-14 2013-08-14 Annular cooling fluid passage for magnets
US13/966,611 2013-08-14
PCT/US2014/042321 WO2014201363A1 (en) 2013-06-14 2014-06-13 Annular cooling fluid passage for magnets

Publications (3)

Publication Number Publication Date
JP2016521913A JP2016521913A (ja) 2016-07-25
JP2016521913A5 true JP2016521913A5 (enExample) 2017-04-27
JP6429407B2 JP6429407B2 (ja) 2018-11-28

Family

ID=52018423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016519682A Active JP6429407B2 (ja) 2013-06-14 2014-06-13 イオン装置で利用する磁石およびイオン装置

Country Status (6)

Country Link
US (2) US9177708B2 (enExample)
JP (1) JP6429407B2 (enExample)
KR (1) KR102161231B1 (enExample)
CN (1) CN105283975B (enExample)
TW (1) TWI624856B (enExample)
WO (1) WO2014201363A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9177708B2 (en) * 2013-06-14 2015-11-03 Varian Semiconductor Equipment Associates, Inc. Annular cooling fluid passage for magnets
US10486232B2 (en) * 2015-04-21 2019-11-26 Varian Semiconductor Equipment Associates, Inc. Semiconductor manufacturing device with embedded fluid conduits
EP3707756B1 (en) 2017-11-07 2022-08-24 Gallium Enterprises Pty Ltd Buried activated p-(al,in)gan layers
CN110300487A (zh) * 2019-07-12 2019-10-01 兰州科近泰基新技术有限责任公司 一种多通道冷却真空四极磁铁装置
US10971327B1 (en) * 2019-12-06 2021-04-06 Applied Materials, Inc. Cryogenic heat transfer system
CN111601449B (zh) * 2020-05-28 2023-01-10 兰州科近泰基新技术有限责任公司 真空内超大型四极透镜的制造方法
US12100541B2 (en) * 2020-09-14 2024-09-24 Intel Corporation Embedded cooling channel in magnetics

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US9177708B2 (en) * 2013-06-14 2015-11-03 Varian Semiconductor Equipment Associates, Inc. Annular cooling fluid passage for magnets

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