JP2016516215A5 - - Google Patents

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Publication number
JP2016516215A5
JP2016516215A5 JP2016500670A JP2016500670A JP2016516215A5 JP 2016516215 A5 JP2016516215 A5 JP 2016516215A5 JP 2016500670 A JP2016500670 A JP 2016500670A JP 2016500670 A JP2016500670 A JP 2016500670A JP 2016516215 A5 JP2016516215 A5 JP 2016516215A5
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JP
Japan
Prior art keywords
shutter
level
anchor
substrate
proximal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2016500670A
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English (en)
Japanese (ja)
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JP6216032B2 (ja
JP2016516215A (ja
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Publication date
Priority claimed from US13/800,459 external-priority patent/US9632307B2/en
Application filed filed Critical
Publication of JP2016516215A publication Critical patent/JP2016516215A/ja
Publication of JP2016516215A5 publication Critical patent/JP2016516215A5/ja
Application granted granted Critical
Publication of JP6216032B2 publication Critical patent/JP6216032B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2016500670A 2013-03-13 2014-03-05 高解像度ディスプレイのためのｍｅｍｓシャッターアセンブリ Expired - Fee Related JP6216032B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/800,459 2013-03-13
US13/800,459 US9632307B2 (en) 2013-03-13 2013-03-13 MEMS shutter assemblies for high-resolution displays
PCT/US2014/020796 WO2014164140A1 (en) 2013-03-13 2014-03-05 Mems shutter assemblies for high-resolution displays

Publications (3)

Publication Number Publication Date
JP2016516215A JP2016516215A (ja) 2016-06-02
JP2016516215A5 true JP2016516215A5 (cg-RX-API-DMAC10.html) 2017-09-07
JP6216032B2 JP6216032B2 (ja) 2017-10-18

Family

ID=50390230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016500670A Expired - Fee Related JP6216032B2 (ja) 2013-03-13 2014-03-05 高解像度ディスプレイのためのｍｅｍｓシャッターアセンブリ

Country Status (7)

Country Link
US (1) US9632307B2 (cg-RX-API-DMAC10.html)
EP (1) EP2972553A1 (cg-RX-API-DMAC10.html)
JP (1) JP6216032B2 (cg-RX-API-DMAC10.html)
KR (1) KR101822099B1 (cg-RX-API-DMAC10.html)
CN (1) CN105122115B (cg-RX-API-DMAC10.html)
TW (1) TWI518366B (cg-RX-API-DMAC10.html)
WO (1) WO2014164140A1 (cg-RX-API-DMAC10.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9134532B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. MEMS shutter assemblies for high-resolution displays
CN105467579B (zh) * 2016-02-03 2017-03-22 京东方科技集团股份有限公司 一种mems光阀、显示装置
US11460688B2 (en) * 2019-08-23 2022-10-04 Tohoku University Mirror device, scanning laser device and scanning laser display including same mirror device, and method for manufacturing mirror device
CN114690398A (zh) * 2020-12-30 2022-07-01 无锡华润上华科技有限公司 一种静电驱动式mems显示屏及其制备方法
US11659759B2 (en) * 2021-01-06 2023-05-23 Applied Materials, Inc. Method of making high resolution OLED fabricated with overlapped masks
CN116184741A (zh) * 2023-02-28 2023-05-30 维沃移动通信有限公司 可变光圈模组、摄像装置以及电子设备

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JPH09218360A (ja) 1996-02-08 1997-08-19 Ricoh Co Ltd メカニカル光シャッタ
US6214633B1 (en) 1997-08-28 2001-04-10 Mems Optical Inc. System for controlling light including a micromachined foucault shutter array and a method of manufacturing the same
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JP2005221917A (ja) 2004-02-09 2005-08-18 Fuji Photo Film Co Ltd 電気機械式光シャッター素子及び光シャッターアレイ
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JP2007179751A (ja) * 2005-12-26 2007-07-12 Matsushita Electric Works Ltd 平面発光装置、及び平面発光装置を備えた液晶表示装置
US8526096B2 (en) * 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
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JP2010181495A (ja) 2009-02-03 2010-08-19 Seiko Epson Corp 光制御装置
JP2010210813A (ja) 2009-03-09 2010-09-24 Seiko Epson Corp アクチュエーター、光制御装置、電気光学装置、及び電子機器
KR20110133250A (ko) 2010-06-04 2011-12-12 삼성전자주식회사 입체 영상 표시 장치용 셔터 안경 및 이를 포함하는 입체 영상 표시 시스템, 그리고 입체 영상 표시 시스템의 제조 방법
KR20120102387A (ko) * 2011-03-08 2012-09-18 삼성전자주식회사 표시 장치와 이의 제조 방법
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CN102279463B (zh) * 2011-04-18 2013-10-23 上海丽恒光微电子科技有限公司 具有mems光阀的显示装置及其形成方法
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JP5856758B2 (ja) * 2011-05-23 2016-02-10 ピクストロニクス，インコーポレイテッド 表示装置及びその製造方法
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JP2012252188A (ja) * 2011-06-03 2012-12-20 Japan Display East Co Ltd 表示装置
JP5856759B2 (ja) 2011-06-03 2016-02-10 ピクストロニクス，インコーポレイテッド 表示装置
KR20130021104A (ko) * 2011-08-22 2013-03-05 삼성디스플레이 주식회사 표시 기판 및 이의 제조 방법
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