JP2016514324A5 - - Google Patents

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Publication number
JP2016514324A5
JP2016514324A5 JP2016500345A JP2016500345A JP2016514324A5 JP 2016514324 A5 JP2016514324 A5 JP 2016514324A5 JP 2016500345 A JP2016500345 A JP 2016500345A JP 2016500345 A JP2016500345 A JP 2016500345A JP 2016514324 A5 JP2016514324 A5 JP 2016514324A5
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JP
Japan
Prior art keywords
response
mass flow
flow controller
valve
zero
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JP2016500345A
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English (en)
Japanese (ja)
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JP6680669B2 (ja
JP2016514324A (ja
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Priority claimed from PCT/US2014/017859 external-priority patent/WO2014158530A1/en
Publication of JP2016514324A publication Critical patent/JP2016514324A/ja
Publication of JP2016514324A5 publication Critical patent/JP2016514324A5/ja
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Publication of JP6680669B2 publication Critical patent/JP6680669B2/ja
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JP2016500345A 2013-03-14 2014-02-22 質量流量制御器のバルブペデスタルを自動的に自己調整するシステム及び方法 Active JP6680669B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361783346P 2013-03-14 2013-03-14
US61/783,346 2013-03-14
PCT/US2014/017859 WO2014158530A1 (en) 2013-03-14 2014-02-22 System and method to automatically self-adjust a valve pedestal of a mass flow controller

Publications (3)

Publication Number Publication Date
JP2016514324A JP2016514324A (ja) 2016-05-19
JP2016514324A5 true JP2016514324A5 (https=) 2017-03-30
JP6680669B2 JP6680669B2 (ja) 2020-04-15

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ID=50240053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016500345A Active JP6680669B2 (ja) 2013-03-14 2014-02-22 質量流量制御器のバルブペデスタルを自動的に自己調整するシステム及び方法

Country Status (6)

Country Link
US (1) US20160003665A1 (https=)
EP (1) EP2972138B1 (https=)
JP (1) JP6680669B2 (https=)
KR (1) KR102201641B1 (https=)
CN (1) CN105051505B (https=)
WO (1) WO2014158530A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108027621B (zh) * 2015-09-28 2021-12-31 皇家飞利浦有限公司 用于使用比例流量阀控制气体流的方法和系统
US12379238B2 (en) * 2018-10-26 2025-08-05 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics
US11675374B2 (en) * 2018-10-26 2023-06-13 Illinois Tool Works Inc. Mass flow controller with advanced zero trending diagnostics
JP7262745B2 (ja) * 2018-12-27 2023-04-24 株式会社フジキン マスフローコントローラ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4877051A (en) * 1988-11-28 1989-10-31 Mks Instruments, Inc. Flow controller
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
US6445980B1 (en) * 1999-07-10 2002-09-03 Mykrolis Corporation System and method for a variable gain proportional-integral (PI) controller
US6712084B2 (en) * 2002-06-24 2004-03-30 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
CN100344941C (zh) * 2002-07-19 2007-10-24 迅捷公司 具有公共参考臂的可变电阻传感器
KR20050031109A (ko) * 2002-07-19 2005-04-01 셀레리티 그룹 아이엔씨 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치
US8321060B2 (en) * 2010-04-27 2012-11-27 Hitachi Metals, Ltd Method and system of on-tool and on-site MFC optimization providing consistent response
US8915262B2 (en) * 2011-08-09 2014-12-23 Hitachi Metals, Ltd. Mass flow controller algorithm with adaptive valve start position

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