JP2016207848A - Transfer method and transfer device for substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a transfer method and a transfer device that enables substrate transfer that can minimize a contact surface of a substrate and a transfer mechanism with a very simple mechanism.SOLUTION: Before a substrate 104 is supplied, a plurality of sets of pairs of rollers 105 located at an upstream end in a transfer direction are separated from each other, and when the substrate 104 is supplied, a roller movement mechanism 102 makes the plurality of sets of pairs of rollers 105 approach each other. Thereby, two sides of the substrate 104 abut on a corner of a small diameter part 105A and an end surface 105B to form such a curved state of the substrate 104 that a part of the substrate 104 which is located in the middle of the two sides is displaced upward to the two sides. A roller rotation mechanism rotates the plurality of sets of pairs of rollers 105 in such a direction that the substrate 104 is transferred in the transfer direction. The substrate 104 is transferred in a state curved by the plurality of sets of pairs of rollers 105.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a substrate transport method and a transport apparatus for transporting a glass substrate such as a color filter substrate used for manufacturing a liquid crystal display panel or the like, and various plate-like single wafer substrates (hereinafter referred to as substrates) such as a printed circuit board.

  At present, the mainstream of substrate transport is horizontal transport in which a plurality of transport rollers each having a plurality of rollers arranged on the same axis are arranged in the transport direction and the shafts of all transport rollers are rotated in the same direction. is there.

  However, when transporting a circuit board with circuit patterns formed on both sides, such as a printed circuit board, at least one surface may contact the transport roller, which may cause poor quality due to roller marks or adhesion of dust from the roller surface. .

  In order to solve this problem, the substrate is transported and transferred without physical contact by using the pressure generated by the flow of a fluid such as gas or liquid without using a transport roller. An apparatus has been developed (Patent Document 1). In this technique, a fluid flow is generated between the back surface of the substrate and the surface of the transfer device, and the pressure in the region is maintained slightly higher than the atmospheric pressure, thereby floating the substrate.

This technique is very excellent in that there is no physical contact, but the scale of the transfer device itself is large, and it is difficult to control the fluid used for floating the substrate.
Also, since it is necessary to generate a fluid flow on the lower surface side of the substrate, for example, in the glass substrate cleaning process, the surface on the back surface side of the substrate is removed, such as removal of fine particles adhering to the back surface of the glass substrate. It is impossible to perform the same process.

JP2012-186325

  The present invention solves the above-described conventional problems, and provides a transport method and a transport apparatus that enable transport of a substrate with a very simple mechanism while minimizing the contact surface between the substrate and the transport mechanism. .

  As a means for solving the above-mentioned problem, the invention according to claim 1 is a method of transporting a substrate having two sides facing each other, wherein the location of the substrate located between the two sides is The substrate is curved by being displaced in the thickness direction of the substrate with respect to two sides, and the substrate is transported while maintaining the curved state.

  The invention described in claim 2 is characterized in that the substrate is transported along the extending direction of the two sides.

The invention described in claim 3 is characterized in that the substrate is transported along a direction orthogonal to the extending direction of the two sides.
According to a fourth aspect of the present invention, one of the two surfaces located at both ends in the thickness direction of the substrate is directed upward, and is in the middle of the two sides when the substrate is curved. The location of the board | substrate located is displaced upwards with respect to the said 2 sides, It is characterized by the above-mentioned.

The invention according to claim 5 is a substrate transport apparatus for transporting a substrate having two sides facing each other along the extending direction of the two sides, and is coaxial with each other in a direction perpendicular to the transport direction. A pair of rollers arranged opposite to each other and spaced apart in the transport direction, and at least one of the pair of rollers positioned at the upstream end in the transport direction with respect to the other roller And a roller rotation mechanism that rotates the plurality of pairs of rollers in a direction in which the substrate is conveyed in the conveyance direction, and the roller includes a small diameter portion, A large-diameter portion having an end surface rising from the small-diameter portion, and the interval between the remaining pair of rollers excluding the plurality of pairs of rollers located at the upstream end in the transport direction is the small-diameter The two sides abut on the corners of the substrate and the end face, and the substrate is located in the middle of the two sides so that the substrate is displaced upward with respect to the two sides. It is characterized by.
The invention described in claim 6 further includes a gas injection mechanism for injecting gas from below the substrate toward the substrate.

  According to the substrate transfer method and the transfer apparatus of the present invention, the transfer can be easily performed with the contact surface between the substrate and the transfer mechanism being minimized. As a result, compared with the conventional method, the scale of the apparatus is significantly reduced, and the apparatus cost is suppressed. In addition, since a mechanism that contributes to the convex shape on the upper surface exists on the side surface of the substrate, there is no obstacle in the process processing from the lower surface of the substrate, and the same process processing is possible on both sides.

BRIEF DESCRIPTION OF THE DRAWINGS (A) is a top view of the conveying apparatus of the state in which the board | substrate was supplied to the upstream end of the conveying apparatus, (B) is the cross-sectional side view of the board | substrate conveying apparatus. BRIEF DESCRIPTION OF THE DRAWINGS (A) is a top view of the conveying apparatus of the state which curved the supplied board | substrate, (B) is the same sectional side view. It is a perspective view of a roller.

First, the transfer method according to the present invention will be described together with a substrate transfer apparatus.
As shown in FIG. 1, the transport device includes a plurality of pairs of rollers 105, a roller moving mechanism 102, a roller rotating mechanism, and a gas ejecting mechanism 103.
The pair of rollers 105 are coaxially opposed to each other in a direction orthogonal to the transport direction of the substrate 104, and a plurality of pairs are disposed at intervals in the transport direction, and the rotation shafts 1051 of the pair of rollers 105 are separated from each other. It is.

In the present embodiment, the substrate installation unit 101 is provided between a plurality of pairs of rollers 105 located at the upstream end in the conveyance direction of the substrate 104. That is, the substrate placement unit 101 is provided at a location where the substrate 104 is supplied to the transfer device. The board installation unit 101 has a role of installing the board 104. In the case where the contact between the lower surface of the substrate 104 and the substrate setting portion 101 is a minimum contact, it is preferable to hold only the end portion and the side surface of the substrate 104, and a method of supporting the outer side of the substrate 104 as much as possible with four support pins. preferable. In the case where the substrate installation unit 101 is configured by four support pins, the support pins are provided so as to be movable up and down, and the substrate 104 is supported by the support pins at a location above the imaginary line connecting the upper surfaces of the small diameter portions 105A of the pair of rollers 105. When the distance between the pair of rollers 105 is such that the two opposite sides of the substrate 104 are placed on the small-diameter portion 105A of the pair of rollers 105, the support pins are lowered, and the substrate 104 These two opposite sides may be placed on the small-diameter portion 105A of the pair of rollers 105, and then the interval between the pair of rollers 105 may be narrowed to curve the substrate 104. Alternatively, the height of the support pins is set so that the substrate 104 supported by the support pins is positioned slightly above the imaginary line connecting the upper surfaces of the small diameter portions 105A of the pair of rollers 105, and the pair of rollers The distance between the 105 may be narrowed, the substrate 104 may be curved, and the substrate 104 may be separated from the support pins.
However, in the present invention, there is no contact with the central surface of the substrate 104, there is no interference with the roller 105 when the substrate 104 is pushed and bent using the roller 105, and the bending deformation of the substrate 104 is not hindered. As long as this is satisfied, the present invention is not limited to this. For example, the support pins are omitted, and the interval between the plurality of pairs of rollers 105 positioned at the upstream end in the conveyance direction of the substrate 104 is set so that the two opposite sides of the substrate 104 are arranged on the small diameter portion 105A of the pair of rollers 105. It is good also as the board | substrate installation part 101 by setting with the dimension mounted.

As shown in FIG. 2, the roller moving mechanism 102 moves at least one of the plurality of pairs of rollers 105 positioned at the upstream end in the conveyance direction of the substrate 104 toward and away from the other roller 105. The substrate 104 is moved in a bending direction and plays a role of bending the substrate 104. In the present embodiment, the roller moving mechanism 102 moves both the pair of rollers 105 in a direction of approaching and separating from each other.
Each time the substrate 104 is supplied to the upstream end in the transport direction, the roller moving mechanism 102 approaches and separates a plurality of pairs of rollers 105 positioned at the upstream end in the transport direction. That is, before the substrate 104 is supplied, the plural pairs of rollers 105 are separated from each other. When the substrate 104 is supplied, the plural pairs of rollers 105 are brought close to each other and the substrate 104 is curved. The plurality of pairs of rollers 105 are respectively supported by a frame, and the approaching and separation of the plurality of pairs of rollers 105 is performed by moving the frames in the direction of approaching and separating each by an actuator.
The roller moving mechanism 102 narrows the distance between the pair of rollers 105 and causes the substrate 104 to bend as the roller 105 and the substrate 104 come into contact with each other. At that time, it is preferable that the position of the contact point between the substrate 104 and the roller 105 does not move.

Therefore, the roller 105 is formed so that the contact point with the substrate 104 is difficult to move.
In the present embodiment, as shown in FIG. 3, the roller 105 includes a small-diameter portion 105A and a large-diameter portion 105C having an end surface 105B that stands up at a right angle from the small-diameter portion 105A. Then, by narrowing the distance between the pair of rollers 105, the two sides of the substrate 104 come into contact with the corners of the small-diameter portion 105A and the end surface 105B, and the location of the substrate 104 located between the two sides is in relation to the two sides. Thus, the curved state of the substrate 104 displaced upward is formed. When the end surface 105B has an angle close to a right angle with respect to the outer peripheral surface of the small diameter portion 105A, the end surface of the substrate 104 is fixed to the corner portion between the outer peripheral surface of the small diameter portion 105A and the end surface 105B. It is preferable for physically suppressing the slip. An acute angle between the outer peripheral surface of the small-diameter portion 105A and the end surface 105B is more preferable for physically suppressing upward slipping of the two sides of the substrate 104.

  The shape of the roller 105 is such that its cross-sectional shape has an angle close to a right angle, and in the case of suppressing slippage due to its own weight by physical support, the contact between the roller 105 and the substrate 104, that is, the material of the roller 105 It is preferable to use a material having a small dynamic friction coefficient and slippery in the direction of its own weight, such as U-PE. This is because even if the contact between the roller 105 and the substrate 104 is displaced upward, the contact is easily returned to the original position due to slippage due to its own weight.

The distance between the remaining pair of rollers 105 excluding the plurality of pairs of rollers 105 positioned at the upstream end in the transport direction is such that the two sides of the substrate 104 are in contact with the corner between the small diameter portion 105A and the end surface 105B. The portion of the substrate 104 located in the middle is arranged in such a dimension that a curved state of the substrate 104 is formed by being displaced upward with respect to the two sides. That is, the supplied substrate 104 is curved by a plurality of pairs of rollers 105 positioned at the upstream end in the transport direction, and the remaining pair of rollers 105 excluding the plurality of pairs of rollers 105 positioned at the upstream end. The substrate 104 is configured to be maintained in a curved state. In this embodiment, one of the two surfaces located at both ends in the thickness direction of the substrate 104 is directed upward, and the substrate 104 positioned between the two sides in a state where the substrate 104 is curved. Is displaced upward with respect to the two sides. Depending on the type of processing of the substrate 104, for example, the substrate 104 is transported in the vertical direction, and in a state where the substrate 104 is curved, the position of the substrate 104 located between the two sides is relative to the two sides. It will be displaced in the horizontal direction. That is, the conveyance direction of the substrate 104 is not limited to the horizontal direction or the vertical direction.
The roller rotation mechanism rotates a plurality of pairs of rollers 105 in a direction in which the substrate 104 is transported in the transport direction.
Specifically, the rollers 105 are respectively attached to the shafts 1051 divided in the direction orthogonal to the transport direction, and a plurality of the shafts 1051 are arranged on the frame in the transport direction, and the rollers 105 are installed. A shaft 1053 extending perpendicular to the conveying direction with respect to the shaft 1051 is provided, and a magnet gear is arranged on the shaft 1051 on which the roller 105 is installed and the shaft 1053 extending perpendicular to the conveying direction. , 1053 magnet gears are close to each other. Regarding the pressing of the roller 105 by the roller moving mechanism 102, the entire mechanism including the shaft 1051 on which the roller 105 is installed, the shaft 1053 extending perpendicular to the conveying direction, and the frame is moved toward the center of the substrate by a low speed motor. By slowly operating, the roller 105 pushes the substrate 104 toward the center of the substrate. Regarding the rotation of the roller 105 by the roller rotation mechanism, the shaft 1053 extending orthogonal to the conveying direction is rotationally driven by a motor, and the drive is transmitted to the shaft 1051 where the roller 105 is installed via the magnet gear. All the rollers 105 of the transport device rotate in synchronization with the direction of transporting the substrate 104 to transport the substrate.
Therefore, in this embodiment, the roller 105 has a role of pushing the substrate 104 toward the center of the substrate and a role of transporting the substrate 104.

  The pushing speed of the roller 105 when the roller moving mechanism 102 pushes the substrate 104 is not particularly limited, but it is preferable to operate at a low speed. This is because stress on the substrate 104 is reduced. Although the speed largely depends on the material characteristics of the substrate 104 and the material characteristics and shape of the roller moving mechanism 102, it is basically preferable to suppress the speed to 5 mm / sec or less.

  The amount by which the substrate 104 is bent into a convex shape on the upper surface by pressing the side surface of the substrate using the roller moving mechanism 102 is preferably as small as possible. This is because, when the amount of bending is large, the contact force between the substrate 104 and the roller 104 at the contact point between the roller 105 and the substrate 104 increases the action of moving the contact point between the substrate 104 and the roller 105 in the direction opposite to the self-weight direction. Because. The amount of bending is related to the size, material, and thickness of the substrate 103, and is not particularly limited in the present invention. Basically, the uppermost portion of the substrate is perpendicular to the end of the substrate. The direction is preferably greater than 0 mm and less than 100 mm.

  The pressing of the side surface of the substrate 104 by the roller 105 is not necessarily performed from the outside of the two opposite side surfaces of the substrate 104, but the roller moving mechanism 102 is used from the outside of at least one side surface of the substrate 104 toward the center of the substrate. The side surface of the substrate 104 may be pushed in. For example, in FIG. 2, it is only necessary that the substrate 104 can be pushed into only one of the two roller moving mechanisms 102 existing outside the two opposite side surfaces of the substrate. In that case, it is necessary to hold one end face of the substrate 104 on the roller 105 of the roller moving mechanism 102 which is fixed without being pushed in advance, and hold the other end face on the substrate setting portion 101. Then, the roller moving mechanism 102 that performs the pushing operation is operated toward the center of the substrate, and the substrate 104 can be pushed and curved.

  The gas injection mechanism 103 has a role of pushing upward by injecting gas from the lower surface of the substrate 104. The gas injection mechanism 103 is preferably jetted of air using a slit nozzle capable of jetting gas linearly. In that case, it is preferable that the side surface of the frame and the longitudinal direction of the slit nozzle be installed in parallel so that air is ejected toward the center of the substrate 104.

A contact sensor, an optical sensor, an ultrasonic sensor, or the like can be provided to manage the amount of bending of the convex shape on the upper surface of the substrate 104. In particular, the optical sensor can manage the amount of bending with high accuracy without contact. Further, the measured amount of bending may be fed back to the pushing amount of the roller moving mechanism 102 to control the amount of bending.
Note that although the case where the substrate is conveyed in a curved state by rotating the pair of rollers 105 has been described in this embodiment mode, various structures for conveying the substrate in a curved state are conceivable. For example, a pair of belts extending along the two sides of the substrate with the belt surfaces facing each other is provided, and protrusions standing perpendicular to the belt surfaces are extended in the belt extending direction on the pair of belt surfaces facing each other. Let it be. Then, a plurality of rotatable rollers whose axial centers are directed in the vertical direction are arranged on the back surface of the pair of belts positioned at the upstream end in the transport direction of the substrate 104 so as to be separated and approachable with respect to the back surface of the belt. Further, the distance between the pair of remaining belts excluding the pair of belts located at the upstream end is such that the two sides of the substrate 104 are in contact with the corners of the protrusion and the belt surface, and the substrate 104 is located between the two sides. Are set to dimensions that form a curved state of the substrate 104 displaced upward with respect to the two sides. According to such a configuration, similarly to the above-described embodiment, the pair of belts positioned at the upstream end in the transport direction of the substrate 104 by the movement of the plurality of rotatable rollers whose axis centers are directed in the vertical direction. The substrate can be conveyed in a state in which the substrate is curved by the remaining pair of belts except the pair of belts that are curved at the upstream end.
In the present embodiment, the case where the substrate is transported along the extending direction of the two opposite sides of the substrate has been described. However, the substrate is orthogonal to the extending direction of the two opposite sides of the substrate. You may make it convey along a direction. In this case, for example, a plurality of rectangular frame-shaped conveyance plates are attached to the chain, and a plurality of conveyance plates that are movable in the conveyance direction are provided. Then, a plurality of pairs of rollers 105 that abut the two sides of the substrate and bend the substrate in a state where the two opposite sides of the substrate are located at both ends of each conveyance plate along the conveyance direction are arranged. In this case, the configuration of the roller 105 itself may be the same as that of the above embodiment, and the substrate supplied to the transport plate is curved by a plurality of pairs of rollers 105. However, since the substrate is transported by the movement of the transport plate itself, a roller rotating mechanism for rotating the roller 105 is not necessary.

DESCRIPTION OF SYMBOLS 101 ... Board | substrate installation part 102 ... Roller moving mechanism 103 ... Gas injection mechanism 104 ... Board | substrate 105 ... Roller

Claims (6)

A method for transporting a substrate having two sides facing each other,
The substrate is bent by displacing the portion of the substrate located between the two sides in the thickness direction of the substrate with respect to the two sides, and the substrate is transported while maintaining the curved state. To
A method for transporting a substrate. Transporting the substrate along the extending direction of the two sides;
The substrate transport method according to claim 1, wherein: Transporting the substrate along a direction orthogonal to the extending direction of the two sides;
The substrate transport method according to claim 1, wherein: One of the two surfaces located at both ends in the thickness direction of the substrate is directed upward,
In a state where the substrate is curved, the location of the substrate located in the middle of the two sides is displaced upward with respect to the two sides.
The method for transporting a substrate according to any one of claims 1 to 3. A substrate transfer apparatus for transferring a substrate having two sides facing each other along the extending direction of the two sides,
A pair of rollers arranged coaxially opposite to each other in a direction orthogonal to the transport direction and disposed in pairs in the transport direction;
A roller moving mechanism for moving at least one of the pair of rollers located at the upstream end in the transport direction in a direction approaching and separating from the other roller;
A roller rotating mechanism for rotating the plurality of pairs of rollers in a direction in which the substrate is transported in the transport direction;
The roller includes a small-diameter portion and a large-diameter portion having an end surface rising from the small-diameter portion,
The interval between the remaining pair of rollers excluding the plurality of pairs of rollers positioned at the upstream end in the transport direction is such that the two sides come into contact with the corners of the small diameter portion and the end surface. The location of the substrate located in the middle is arranged with a dimension that forms a curved state of the substrate displaced upward with respect to the two sides,
A substrate transfer apparatus. A gas injection mechanism for injecting gas from below the substrate toward the substrate;
The substrate transfer apparatus according to claim 5.

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