JP2016207409A5 - - Google Patents

Download PDF

Info

Publication number
JP2016207409A5
JP2016207409A5 JP2015086682A JP2015086682A JP2016207409A5 JP 2016207409 A5 JP2016207409 A5 JP 2016207409A5 JP 2015086682 A JP2015086682 A JP 2015086682A JP 2015086682 A JP2015086682 A JP 2015086682A JP 2016207409 A5 JP2016207409 A5 JP 2016207409A5
Authority
JP
Japan
Prior art keywords
gas
pipe
processing chamber
mass flow
flow controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015086682A
Other languages
English (en)
Japanese (ja)
Other versions
JP6541406B2 (ja
JP2016207409A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2015086682A priority Critical patent/JP6541406B2/ja
Priority claimed from JP2015086682A external-priority patent/JP6541406B2/ja
Publication of JP2016207409A publication Critical patent/JP2016207409A/ja
Publication of JP2016207409A5 publication Critical patent/JP2016207409A5/ja
Application granted granted Critical
Publication of JP6541406B2 publication Critical patent/JP6541406B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2015086682A 2015-04-21 2015-04-21 プラズマ処理装置 Active JP6541406B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015086682A JP6541406B2 (ja) 2015-04-21 2015-04-21 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015086682A JP6541406B2 (ja) 2015-04-21 2015-04-21 プラズマ処理装置

Publications (3)

Publication Number Publication Date
JP2016207409A JP2016207409A (ja) 2016-12-08
JP2016207409A5 true JP2016207409A5 (https=) 2018-02-01
JP6541406B2 JP6541406B2 (ja) 2019-07-10

Family

ID=57490144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015086682A Active JP6541406B2 (ja) 2015-04-21 2015-04-21 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JP6541406B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7296854B2 (ja) * 2019-11-07 2023-06-23 東京エレクトロン株式会社 ガス供給方法及び基板処理装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070066038A1 (en) * 2004-04-30 2007-03-22 Lam Research Corporation Fast gas switching plasma processing apparatus
JP4782585B2 (ja) * 2006-02-28 2011-09-28 株式会社日立ハイテクノロジーズ プラズマエッチング装置及び方法
JP5235293B2 (ja) * 2006-10-02 2013-07-10 東京エレクトロン株式会社 処理ガス供給機構および処理ガス供給方法ならびにガス処理装置
JP5442413B2 (ja) * 2009-12-03 2014-03-12 ルネサスエレクトロニクス株式会社 半導体製造装置および流量制御装置
JP6027490B2 (ja) * 2013-05-13 2016-11-16 東京エレクトロン株式会社 ガスを供給する方法、及びプラズマ処理装置

Similar Documents

Publication Publication Date Title
PH12017502062A1 (en) Cleaning appliance
TW201611909A (en) Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium
MX2017000382A (es) Sistemas de gas y metodos de soldeo.
JP2016008693A5 (https=)
MX347904B (es) Metodo y sistema de control neumatico para un elemento de una fuente de vibracion.
BR112015004383A2 (pt) soldador que tem controle de realimentação
JP2017085088A5 (https=)
MX2013009495A (es) Aparato de recompresion de vapor aceleraod de gradiente controlado y metodo.
MY190850A (en) Liquid material discharge device
NZ741696A (en) Improved espresso coffee machine and method for dispensing an espresso coffee
JP2015138913A5 (https=)
MX355982B (es) Método y sistema para el control de pre-encendido.
WO2014181166A3 (en) Control apparatus for fuel injection valve and method thereof
SG10201808148QA (en) Method of manufacturing semiconductor device, substrate processing apparatus and program
JP2014005151A5 (https=)
WO2016073454A3 (en) Compressed gad filling method and system
WO2007095699A3 (fr) Méthode et dispositif pour déterminer une fuite de gaz
JP2016072260A5 (https=)
EP3912708A3 (en) Systems and methods for dissolving a gas into a liquid
WO2015162599A8 (es) Equipo para la extracción de agua del medio ambiente
JP2019515140A5 (https=)
MY204611A (en) Method and apparatus for inflow control with vortex generation
JP2016207409A5 (https=)
RU2017111260A (ru) Управление температурой на основе вихревой трубки для устройств управления технологическим процессом
JP6281630B2 (ja) 加圧タンク、粉体の輸送管への送込み装置およびその送込み方法