JP2016197781A5 - - Google Patents

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Publication number
JP2016197781A5
JP2016197781A5 JP2015076036A JP2015076036A JP2016197781A5 JP 2016197781 A5 JP2016197781 A5 JP 2016197781A5 JP 2015076036 A JP2015076036 A JP 2015076036A JP 2015076036 A JP2015076036 A JP 2015076036A JP 2016197781 A5 JP2016197781 A5 JP 2016197781A5
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Japan
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JP2015076036A
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English (en)
Japanese (ja)
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JP6578709B2 (ja
JP2016197781A (ja
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Publication of JP2016197781A5 publication Critical patent/JP2016197781A5/ja
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JP2015076036A 2015-04-02 2015-04-02 振動素子、振動子、発振器、電子機器および移動体 Expired - Fee Related JP6578709B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015076036A JP6578709B2 (ja) 2015-04-02 2015-04-02 振動素子、振動子、発振器、電子機器および移動体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015076036A JP6578709B2 (ja) 2015-04-02 2015-04-02 振動素子、振動子、発振器、電子機器および移動体

Publications (3)

Publication Number Publication Date
JP2016197781A JP2016197781A (ja) 2016-11-24
JP2016197781A5 true JP2016197781A5 (enrdf_load_stackoverflow) 2018-05-10
JP6578709B2 JP6578709B2 (ja) 2019-09-25

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ID=57358567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015076036A Expired - Fee Related JP6578709B2 (ja) 2015-04-02 2015-04-02 振動素子、振動子、発振器、電子機器および移動体

Country Status (1)

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JP (1) JP6578709B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7238438B2 (ja) * 2019-01-31 2023-03-14 セイコーエプソン株式会社 振動デバイス、振動モジュールおよび振動デバイスの製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4241483B2 (ja) * 2004-04-14 2009-03-18 株式会社大真空 水晶フィルタ
JP2013093797A (ja) * 2011-10-27 2013-05-16 Daishinku Corp 水晶振動デバイス
JP6051885B2 (ja) * 2013-01-18 2016-12-27 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6179131B2 (ja) * 2013-03-05 2017-08-16 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6435606B2 (ja) * 2013-03-29 2018-12-12 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体

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