JP2016197781A5 - - Google Patents
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- JP2016197781A5 JP2016197781A5 JP2015076036A JP2015076036A JP2016197781A5 JP 2016197781 A5 JP2016197781 A5 JP 2016197781A5 JP 2015076036 A JP2015076036 A JP 2015076036A JP 2015076036 A JP2015076036 A JP 2015076036A JP 2016197781 A5 JP2016197781 A5 JP 2016197781A5
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- JP
- Japan
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000010453 quartz Substances 0.000 claims 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 4
- 238000001039 wet etching Methods 0.000 claims 3
- 239000013078 crystal Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015076036A JP6578709B2 (ja) | 2015-04-02 | 2015-04-02 | 振動素子、振動子、発振器、電子機器および移動体 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015076036A JP6578709B2 (ja) | 2015-04-02 | 2015-04-02 | 振動素子、振動子、発振器、電子機器および移動体 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2016197781A JP2016197781A (ja) | 2016-11-24 |
JP2016197781A5 true JP2016197781A5 (enrdf_load_stackoverflow) | 2018-05-10 |
JP6578709B2 JP6578709B2 (ja) | 2019-09-25 |
Family
ID=57358567
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015076036A Expired - Fee Related JP6578709B2 (ja) | 2015-04-02 | 2015-04-02 | 振動素子、振動子、発振器、電子機器および移動体 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6578709B2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7238438B2 (ja) * | 2019-01-31 | 2023-03-14 | セイコーエプソン株式会社 | 振動デバイス、振動モジュールおよび振動デバイスの製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4241483B2 (ja) * | 2004-04-14 | 2009-03-18 | 株式会社大真空 | 水晶フィルタ |
JP2013093797A (ja) * | 2011-10-27 | 2013-05-16 | Daishinku Corp | 水晶振動デバイス |
JP6051885B2 (ja) * | 2013-01-18 | 2016-12-27 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
JP6179131B2 (ja) * | 2013-03-05 | 2017-08-16 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
JP6435606B2 (ja) * | 2013-03-29 | 2018-12-12 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
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2015
- 2015-04-02 JP JP2015076036A patent/JP6578709B2/ja not_active Expired - Fee Related