JP2016183959A - Heating test device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a heating test device having high performance.SOLUTION: A heating test device includes: a spacer (18) in which a space (S) is provided between a high temperature-side plate (14) and a housing (12) and which supports the high temperature-side plate (14) from the rear surface (14b) on the side opposite to a clamp surface (14a) of the high temperature-side plate (14); and a fastener (24) which is screwed with the spacer (18) so that the high temperature-side plate (14) is fixed to the spacer (18). The high temperature-side plate (14) has a through-hole (14c) communicating with the clamp surface (14a) and the rear surface (14b) and is fixed to the spacer (18) by the fastener (24) inserted into the through-hole (14c).SELECTED DRAWING: Figure 4

Description

  The present invention relates to a technique effective when applied to a heating test apparatus.

  Japanese Unexamined Patent Application Publication No. 2014-139558 (hereinafter referred to as “Patent Document 1”) describes a technique related to a heating test apparatus.

JP 2014-139558 A

  A heating test apparatus clamps a work (object to be tested) with a high-temperature side plate and a low-temperature side plate and gives a temperature difference to perform a heating test. For this reason, the heat test apparatus is required to have higher performance such as durability (reliability) with respect to temperature so that a test can be performed by applying an appropriate temperature to the workpiece.

  An object of the present invention is to provide a high-performance heating test apparatus. The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

  Of the inventions disclosed in the present application, the outline of typical ones will be briefly described as follows.

  A heating test apparatus according to one solution of the present invention includes a housing, a high temperature side plate and a low temperature side plate provided in the housing and having a clamping surface for clamping a workpiece, the high temperature side plate, and the housing. A spacer for supporting the high temperature side plate from the back surface opposite to the clamping surface of the high temperature side plate, and a fastener that is screwed to the spacer. Has a through hole communicating with the clamping surface of the high temperature side plate and the back surface of the high temperature side plate, and is fixed to the spacer by the fastener inserted into the through hole.

  Providing a heating test device with excellent durability (connection reliability) at high-temperature connection points by connecting with a fastener instead of directly fixing the high-temperature side plate heated by the heater to the spacer Can do.

  Moreover, in the heating test apparatus according to the one solution, the high temperature side plate has a counterbore of the through hole formed in a clamp surface of the high temperature side plate, the fastener has a flange, More preferably, the spacer is stored in the counterbore and the spacer and the fastener are screwed together. According to this, since the high temperature side plate is fixed to the spacer without protruding the fastener from the clamping surface of the high temperature side plate, the heating test apparatus with excellent versatility that can perform a heat test even for a thin workpiece. Can be provided.

  In the heating test apparatus according to the one solving means, it is more preferable that the high temperature side plate is made of pure copper, and the spacer and the fastener are made of stainless steel. By using stainless steel having higher plastic deformation strength than pure copper for the spacer and the fastener, it is possible to provide a heating test apparatus excellent in durability against a load (clamping force) when clamping a workpiece.

  Moreover, in the heating test apparatus according to the one solving means, it is more preferable that the surface of the high temperature side plate including the inside of the through hole is subjected to a plating treatment. According to this, it is possible to provide a heating test apparatus excellent in durability by preventing oxidation in the through hole.

  Further, in the heating test apparatus according to the one solution, the high temperature side plate includes a side surface through hole that communicates with a side surface that intersects and faces the clamp surface of the high temperature side plate, and includes the inside of the side surface through hole. More preferably, the surface of the high temperature side plate is plated. According to this, it is possible to provide a heating test apparatus excellent in durability by preventing oxidation in the side surface through hole.

  Moreover, in the heating test apparatus according to the one solving means, it is more preferable that the high temperature side plate is made of pure copper and the plating process is a nickel plating process. According to this, even when pure copper is used as the metal plate, it is possible to provide a heating test apparatus excellent in durability because oxidation is prevented by the nickel plating treatment.

  In the heating test apparatus according to the one solving means, a heat sink provided on the back surface opposite to the clamp surface of the low temperature side plate, a fan provided to face the heat sink, and blows air to the heat sink, A plurality of coil springs provided around the low temperature side plate so as to stand up in the thickness direction of the low temperature side plate, a first part sandwiched and attached between the heat sink and the fan, and bent from the first part And a mounting plate having a second part surrounding the heat sink and a third part bent from the second part and attached to the tip of the coil spring. According to this, since the low temperature side plate and the mounting plate are not directly fixed by, for example, a screw, the load resistance can be improved without receiving the pressing load at the connection location (the shear direction of the screw).

  Further, in the heating test apparatus according to the one solving means, it is more preferable to include a reinforcing component which is provided on the back surface of the high temperature side plate and has a higher plastic deformation strength than the high temperature side plate. According to this, it is possible to clamp the workpiece evenly, and it is possible to provide a heating test apparatus having excellent temperature characteristics by reducing heat transfer resistance. Moreover, it is more preferable that the reinforcing component is a columnar component fixed to the casing and is in contact with the center of the back surface of the high temperature side plate. According to this, while being able to prevent the thermal diffusion from a reinforcement component, the heating test apparatus which can prevent generation | occurrence | production of the curvature of a high temperature side plate can be provided. Alternatively, the heater includes a heater thermally connected to the high temperature side plate, the reinforcing component is a plate-shaped component sandwiched between the high temperature side plate and the spacer, and the heater is disposed inside the reinforcing component. More preferably, it is provided. According to this, a work can be clamped by applying a load more, and a heat test apparatus with reduced heat transfer resistance and excellent temperature characteristics can be provided.

  In the heating test apparatus according to the one solution, it is more preferable to include a ceramic heater thermally connected to the high temperature side plate and a cushion component provided in contact with the ceramic heater. According to this, the heating temperature is improved by using a ceramic heater with a high power density, and a heating test apparatus with excellent temperature characteristics is provided by relaxing deformation due to a difference in thermal expansion coefficient between the high temperature side plate and the ceramic heater. be able to.

  In the heating test apparatus according to the one solution, it is more preferable to include a low-temperature heater that is thermally connected to the low-temperature side plate and is adjusted to a temperature higher than room temperature and lower than that of the high-temperature side plate. According to this, it is possible to provide a heating test apparatus that maintains temperature (low temperature) more stably and has excellent temperature characteristics.

  In the heating test apparatus according to the one solution, the low temperature side plate is supported from the back surface opposite to the clamping surface of the low temperature side plate, and the low temperature side plate is moved toward and away from the high temperature side plate. An electric stage that is provided, an electronic balance that is provided on the electric stage and measures a load for clamping the workpiece, and an operation unit that controls the position of the electric stage based on a measurement value from the electronic balance. Is more preferable. According to this, the heating test apparatus excellent in the reproducibility of the pressing load with respect to a workpiece | work can be provided.

  To briefly explain the effects obtained by typical inventions among the inventions disclosed in the present application, a high-performance heating test apparatus can be provided.

1 is a perspective view of a heating test apparatus according to Embodiment 1 of the present invention. It is a side view of the high temperature side of the heating test apparatus shown in FIG. It is a top view of the high temperature side of the heating test apparatus shown in FIG. It is sectional drawing of the high temperature side of the heating test apparatus shown in FIG. It is a side view of the high temperature side of the heating test apparatus as a comparative example. It is a top view of the high temperature side of the heating test apparatus as a comparative example. It is sectional drawing of the high temperature side of the heating test apparatus as a comparative example. It is a side view of the low temperature side of the heating test apparatus shown in FIG. It is explanatory drawing of 1 control of the heating test apparatus shown in FIG. It is explanatory drawing of the other control of the heating test apparatus shown in FIG. It is a side view of the high temperature side of the heating test apparatus which concerns on Embodiment 2 of this invention. It is a side view of the high temperature side of the heating test apparatus which concerns on Embodiment 2 of this invention. It is a side view of the high temperature side of the heating test apparatus as a comparative example. It is sectional drawing of the high temperature side of the heating test apparatus which concerns on Embodiment 3 of this invention. It is a top view of the high temperature side of the heating test apparatus shown in FIG. It is explanatory drawing of the high temperature side plate of the heating test apparatus shown in FIG. 14, (a) is a top view, (b) is a side view. It is a side view by the side of the low temperature of the heating test apparatus which concerns on Embodiment 4 of this invention. It is a side view of the heating test apparatus which concerns on Embodiment 5 of this invention. It is a side view of the high temperature side periphery of the heating test apparatus which concerns on Embodiment 6 of this invention.

  In the following embodiments of the present invention, the description will be divided into a plurality of sections when necessary. However, in principle, they are not irrelevant to each other, and one of them is related to some or all of the other modifications, details, etc. It is in. For this reason, in all drawings, parts having the same function are denoted by the same reference numerals, and repeated description thereof is omitted. In addition, the number of components (including the number, numerical value, quantity, range, etc.) is limited to that specific number unless otherwise specified or in principle limited to a specific number in principle. It may be more than a specific number or less. In addition, when referring to the shape of a component, etc., it shall include substantially the same or similar to the shape, etc., unless explicitly stated or in principle otherwise considered otherwise .

(Embodiment 1)
A heating test apparatus 10 according to Embodiment 1 of the present invention will be described with reference to FIGS. FIG. 1 is a perspective view of the heating test apparatus 10. 2 to 4 are a side view, a plan view, and a sectional view on the high temperature side of the heating test apparatus 10, respectively. 5 to 7 are a side view, a plan view, and a sectional view on the high temperature side of the heating test apparatus 10 as a comparative example, respectively. FIG. 8 is a side view of the heating test apparatus 10 on the low temperature side. 9 and 10 are explanatory diagrams of the control of the heating test apparatus 10. In addition, in FIG. 8, the mode of the workpiece | work W clamped by the high temperature side and the low temperature side is also shown collectively. As the work W, for example, a thermoelectric module that generates electric power with a temperature difference is cited.

  As shown in FIG. 1, the heating test apparatus 10 includes a housing 12 (main body portion), a high temperature side plate 14 and a low temperature side plate 16 provided in the housing 12, and the high temperature side plate in the housing 12. 14 and the low temperature side plate 16 clamp the work W (see FIG. 8) and give a temperature difference to perform a heating test. In order to clamp the workpiece W (see FIG. 8) during the heating test, the high temperature side plate 14 has a clamping surface 14a (contact surface with the workpiece W), and the low temperature side plate 16 has a clamping surface 16a (with the workpiece W). Contact surface). The heating test apparatus 10 supports a heater 28 thermally connected to the high temperature side plate 14 and the low temperature side plate 16, and a stage 32 (which moves the low temperature side plate 16 toward and away from the high temperature side plate 14). Clamping mechanism). Although FIG. 1 shows a case where two low temperature side plates 16 are provided for one high temperature side plate 14, this is a case where one low temperature side plate 16 is provided for one high temperature side plate 14. May be. When a plurality of low temperature side plates 16 are provided, for example, a plurality of workpieces W (the same type or different types) may be subjected to a heat test simultaneously by providing them as independent structures.

  For the high temperature side plate 14, for example, plate-like pure copper (oxygen-free copper) is used as a metal plate. By using pure copper having high thermal conductivity for the high temperature side plate 14, the temperature distribution can be made uniform. The high temperature side plate 14 can also be made of a metal material (for example, an alloy) that emphasizes heat resistance. Further, the high temperature side plate 14 is subjected to heat-resistant plating treatment to prevent oxidation, and a plating film is formed on the surface thereof. For example, a nickel plating process using a plating solution containing nickel as a main component is performed. As another anti-oxidation plating process, a hard chrome plating solution can be used, but since the difference in thermal expansion coefficient from that of pure copper becomes large, when pure copper is used for the high temperature side plate 14, a nickel plating process is performed. preferable. Since the low temperature side plate 16 is not required to be as heat resistant as the high temperature side plate 14, for example, an anodized aluminum alloy can be used, and a plate formed integrally with a heat sink 42 (cooling fin) described later. Is used.

  2 to 4, the heating test apparatus 10 includes a spacer 18 that supports the high temperature side plate 14 from the back surface 14 b opposite to the clamp surface 14 a of the high temperature side plate 14. And a housing 12 (a housing-side component 20 constituting the housing 12) is provided with a space S (using a heat insulating material or simply an air gap) (see FIG. 4). By providing the space S, it is possible to prevent the heat of the high temperature side plate 14 from diffusing to the housing 12 side. The spacers 18 are, for example, columnar stainless steel, and one spacer 18 is provided at each of the four corners of the high-temperature side plate 14 having a rectangular shape in plan view. By using a columnar (support) for the spacer 18, it is possible to prevent the heat of the high temperature side plate 14 from diffusing to the housing 12 side. Further, when pure copper is used for the high temperature side plate 14, a heat test excellent in durability against a load (clamping force) when clamping the workpiece W by using stainless steel having higher plastic deformation strength than pure copper for the spacer 18. An apparatus 10 can be provided.

  The heating test apparatus 10 includes fasteners 22 and 24 (see FIG. 4) that are screwed to the spacer 18. The fasteners 22 and 24 are formed with male screws 22a and 24a, and the spacer 18 is also formed with female screws 18a and 18b (tap holes) to which the fasteners 22 and 24 are screwed. In the heating test apparatus 10, the spacer 18 is directly screwed and fixed to the housing 12 (housing side component 20) by the fastener 22, and the high temperature side plate 14 is indirectly screwed and fixed to the spacer 18 by the fastener 24. ing. The high temperature side plate 14 to be screwed has a through hole 14c (shown by a broken line in FIG. 2) communicating with the clamp surface 14a and the back surface 14b, and is provided with a stepped fastener 24 inserted into the through hole 14c. It is fixed to the spacer 18. The surface of the high temperature side plate 14 including the through hole 14c is subjected to the above-described plating treatment. According to this, it is possible to provide the heating test apparatus 10 that is excellent in durability by preventing oxidation in the through hole 14c. Further, when pure copper is used for the high temperature side plate 14, stainless steel having higher plastic deformation strength than pure copper is used for the spacer 18 and the fastener 24, so that the durability against the load (clamping force) when clamping the workpiece W is excellent. The heating test apparatus 10 can be provided.

  Further, the high temperature side plate 14 has a counterbore 14d (concave portion) of a through hole 14c formed in the clamp surface 14a, and the stepped fastener 24 has a flange 24b (screw head) for the shaft portion. The flange 18b is housed in the counterbore 14d, and the spacer 18 and the fastener 24 are screwed together. According to this, since the high temperature side plate 14 is fixed to the spacer 18 without projecting the fastener 24 from the clamp surface 14a of the high temperature side plate 14, the versatility that allows a heating test even for a thin workpiece W. It is possible to provide a heating test apparatus 10 excellent in the above. Of course, the counterbore 14d is not essential because it is possible to prevent stress from being applied to the high temperature side plate 14 by using the fastener 24 (stepped screw) having the flange 24b. That is, the length of the stepped portion of the fastener 24 (excluding the male screw 24a) is set to be equal to or greater than the thickness of the high temperature side plate 14 so that no stress is applied to the high temperature side plate 14.

  By the way, as shown in FIGS. 5-7, the case where the high temperature side plate 14 is directly screwed with respect to the spacer 26 which has the internal thread 26a (tap hole) and the external thread 26b is also considered. Specifically, the female screw 26 a corresponds to the male screw 22 a of the fastener 22, and the spacer 26 is directly screwed and fixed to the housing 12 (housing side component 20). The male screw 26b of the spacer 26 corresponds to the female screw 14e (tap hole) formed in the high temperature side plate 14, and the high temperature side plate 14 is directly screwed to the spacer 26 and fixed. In such a case, it is conceivable that the connection reliability between the high-temperature side plate 14 and the spacer 26 that is high in temperature is lowered. In this regard, as described with reference to FIGS. 2 to 4, the high-temperature side plate 14 is not directly fixed to the spacer 18, but is connected using the fastener 24, so that the durability of the connection portion due to the high temperature is increased. The heating test apparatus 10 excellent in (connection reliability) can be provided.

  Moreover, in the high temperature side plate 14 shown in FIGS. 5-7, it has a shape (bag path shape) in which a plating film is hard to attach in the internal thread 14e (tap hole). For this reason, it is difficult for the plating solution to enter the top of the female screw 14e, the top of the valley, the bottom of the tapped hole, or the deep portion of the tap hole, and the plating film is not formed to a desired thickness, resulting in a portion where the plating is weak. There is a fear. In the heating test apparatus 10 that applies a high temperature to the workpiece W, high-temperature oxidation (corrosion) starts from the plate surface where the plating is weak, and gradually proceeds. In addition to local deformation of the high temperature side plate 14, there may be a symptom that a portion oxidized at high temperature becomes brittle and peels off or the strength is insufficient. In this case, the function and performance as the high temperature side plate 14 that efficiently transfers heat to the workpiece W are not satisfied. Such a high temperature side plate 14 will need replacement | exchange as lifetime. In this respect, the through-hole 14c (through hole) with a smooth inner wall surface is formed so that the fastener 24 can be inserted without forming the female screw 14e on the high-temperature side plate 14, so that plating is formed in the through-hole 14c. Generation of weak parts can be prevented.

  As shown in FIG. 1, the heating test apparatus 10 includes a heater 28 that is thermally connected to the high temperature side plate 14, a thermocouple 30 (temperature sensor) that measures the temperature of the high temperature side plate 14, and a low temperature side. And a thermocouple 31 for measuring the temperature of the plate 16. The heater 28 is provided (incorporated) inside the high temperature side plate 14 and directly heats the high temperature side plate 14. That is, the high temperature side plate 14 becomes a hot plate. For example, a cartridge heater is used as the heater 28. Further, the thermocouple 30 extending from the front side of the high temperature side plate 14 to the inside has a contact portion provided in the center of the high temperature side plate 14. On the other hand, the low-temperature side plate 16 does not have a built-in heater like the heater 28 that heats the high-temperature side plate 14, and the heat from the high-temperature side plate 14 at a high temperature (for example, about 600 ° C.) is passed through the workpiece W. It is configured to maintain a low temperature (for example, about 100 ° C.) by being cooled by a cooling mechanism. Further, the thermocouple 31 extending from the back surface of the low temperature side plate 16 to the inside has a contact portion provided in the center of the low temperature side plate 16.

  The high-temperature side plate 14 in which the heater 28 and the thermocouple 30 are provided is provided on the side surface 14f (the front surface in FIG. 1) and the side surface 14g (the back surface in FIG. 1) that intersect and face the clamp surface 14a. Side surface through-holes 14h and 14i (see FIGS. 2 and 3) are provided. Then, a heater 28 (cartridge heater) is inserted into the side through hole 14h, and a thermocouple 30 is inserted into the side through hole 14i. Since the side through hole 14h into which the heater 28 is inserted has a large diameter, it can be drilled and penetrated at once. However, since the side through hole 14i into which the thermocouple 30 is inserted has a small diameter, the side through holes 14h can be penetrated from the side surfaces 14f and 14g. Perforated and penetrated.

  Here, the above-described plating treatment is applied to the surface of the high temperature side plate 14 including the insides of the side through holes 14h and 14i. According to this, it is possible to provide the heating test apparatus 10 having excellent durability by preventing the oxidation in the side through holes 14h and 14i. By ensuring the durability of the side through holes 14h and 14i, the performance of the heater 28 and the thermocouple 30 provided in each can also be ensured.

  By the way, if the contact part of the thermocouple 30 is provided in the center of the inside of the high temperature side plate 14, the high temperature side plate 14 is not penetrated through the opposing side surfaces 14f and 14g as shown in FIGS. It is also conceivable to form a blind hole 14j that opens only on one side surface 14f. For example, when the high-temperature side plate 14 is pure copper, which is difficult to cut, deep hole machining is difficult (because it is sticky, and it is difficult for the drilling facet to be ejected). However, the blind hole 14j has a bag path shape in which the plating solution is not easily applied (the plating film is not easily attached). For this reason, it is difficult for the plating solution to enter the deep part of the blind hole 14j, the plating film is not formed to a desired thickness, and a weakly plated part occurs like the above-described female screw 14e (tap hole). There is a risk that. In this regard, by forming the side surface through hole 14i without forming the blind hole 14j in the high temperature side plate 14, it is possible to prevent the occurrence of a weakly plated portion in the side surface through hole 14i.

  In addition, the side surface through-hole 14i formed through the perforations from the side surfaces 14f and 14g only needs to penetrate through the plating solution. For this reason, it is not necessary to have such a high accuracy that the drilling holes are concentric with each other (the position accuracy of the drill tip is not required). In this embodiment, drilling is performed on the side surface 14f on the side where the thermocouple 30 is inserted. The diameter of the side surface 14g is slightly larger than the diameter of the hole.

  As shown in FIGS. 1 and 8, the heating test apparatus 10 supports the low temperature side plate 16 from the back surface 16 b opposite to the clamp surface 16 a of the low temperature side plate 16, and the low temperature side plate 16 has a low temperature. A stage 32 for moving the side plate 16 in and out is provided. The stage 32 is arranged in the vertical direction A (first direction) in order to clamp or release the workpiece W placed on the clamping surface 16a of the low temperature side plate 16 with respect to the high temperature side plate 14. The jack structure part which moves 16 is provided. Further, the stage 32 adjusts the clamping position (contact position) of the workpiece W with respect to the high temperature side plate 14 according to the number and type of the workpiece W, so that the horizontal plane direction B (second direction intersecting the first direction). Is provided with a shift structure for moving the low temperature side plate 16. The jack structure portion is a manual jack (panda graph jack) that has a handle 34 and moves up and down by manually turning the handle 34, and can raise and lower the low temperature side plate 16. The shift structure portion has a mounting plate 36 to which the jack structure portion is fixed and a thumb screw 38 for fixing the mounting plate 36 to the housing 12, and the jack structure portion is mounted by removing the thumb screw 38. By shifting the plate 36, the low temperature side plate 16 can be shifted.

  Further, as shown in FIG. 8, the heating test apparatus 10 includes a heat sink 42 (cooling fin) provided on the back surface 16 b of the low-temperature side plate 16, and a fan 44 provided to face the heat sink 42 and blows air to the heat sink 42. With air cooling specifications. In the present embodiment, the heat sink 42 and the low temperature side plate 16 are integrally formed. The low temperature side plate 16 is configured to cool the air generated by the rotation of the fan 44 by blowing the air to the heat sink 42. As described above, the low temperature side plate 16 uses an air cooling type cooling mechanism that cools the heat from the high temperature side plate 14 via the work W with air. For example, the high temperature side (for example, about 600 ° C.) The fan 44 is adjusted so that the temperature is lower than that of the plate 14 (for example, about 100 ° C.).

  In addition, as shown in FIG. 8, the heating test apparatus 10 is provided with a plurality of standing up in the thickness direction (vertical direction A) of the low temperature side plate 16 on the stage 32 (stage side component 40) around the low temperature side plate 16. The coil spring 46 is provided. Inside the coil spring 46, a support column is provided to support the coil spring 46 so as to stand in the vertical direction A. Further, the heating test apparatus 10 includes a first part 48a that is sandwiched and attached between the heat sink 42 and the fan 44, a second part 48b that is bent from the first part 48a and surrounds the heat sink 42, and a second part 48b. A mounting plate 48 having a third portion 48 c that is bent from the top and attached to the tip of the coil spring 46. According to this, since the low-temperature side plate 16 and the mounting plate are not directly fixed by screws, for example, the load resistance can be improved without receiving the pressing load at the connection location (shear direction of the screw). Further, since the low temperature side plate 16 is supported by the coil spring 46 via the mounting plate 48, the pressing load (load) on the workpiece W can be received by the coil spring 46, and the workpiece W can be prevented from hitting one piece. Thus, it is possible to provide the heating test apparatus 10 having excellent reliability.

  Further, as shown in FIG. 1, the heating test apparatus 10 includes a gauge 50 provided between the low temperature side plates 16 and 16 adjacent to each other in the horizontal plane direction B, and a gauge provided to each of the adjacent low temperature side plates 16 and 16. Needles 52 and 52 are provided. The gauge 50 is formed in a strip shape, and scales are provided along the longitudinal direction on both sides of the short side, and is provided so as to extend in the vertical direction A. The gauge needle 52 only needs to be provided on the low temperature side plate 16 so as to move together with the low temperature side plate 16 that moves in the vertical direction A by expansion and contraction of the coil spring 46. As the gauge needle 52, for example, a notch formed in the fourth surface 48 d that is bent from the third portion 48 c of the attachment plate 48 and is hooked on the gauge 50 can be used. According to such gauge 50 and gauge needle 52, the amount of bending of the coil spring 46 at the time of clamping can be visually confirmed, and the amount of bending of the coil spring 46 and its spring constant are indirectly pressed against the workpiece W. The load (clamping force) can be measured.

  Further, as shown in FIG. 1, the heating test apparatus 10 includes a door 58 provided on the front face thereof so as to be openable and closable with respect to the housing 12 by a handle 54 and having an observation window 56. By opening the door 58, the workpiece W can be taken in and out. Further, while the door 58 is closed and the heating test is being performed, the workpiece W can be observed from the observation window 56. The heating test apparatus 10 is also provided with a plurality of adjustment legs 60 that support the casing 12 and a pair of handles 62 that are provided on the upper surface (top plate) of the casing 12 and can be used when carrying the heating test apparatus 10. And.

  In addition, the heating test apparatus 10 includes forced cooling fans 64 provided on both side surfaces of the housing 12 so that air can be blown to the position (surrounding region) of the clamp surface 14a of the high-temperature side plate 14, and is configured to be air-cooled. ing. For example, when the workpiece W is clamped by the high temperature side plate 14 and the low temperature side plate 16 and the heating test is performed, the forced cooling fan 64 is driven when a normal stop is performed or an abnormality occurs. In particular, the high temperature side plate 14 and the workpiece W can be forcibly cooled.

  In addition, the heating test apparatus 10 includes an operation unit 66 provided outside the housing 12. The operation unit 66 is electrically connected to each electrical component in the housing 12 and monitors and controls their state. The operation unit 66 includes a power switch 68, a touch panel 70, an operation start button 72, and a forced cooling button 74. For example, the test conditions can be set by the touch panel 70 in a state where the heating test apparatus 10 is supplied with power from an external power source by switching the power switch 68. Then, as shown in FIG. 9, the heating test can be started by the operation start button 72, and the test can be stopped while the forced cooling fan 64 is driven by the forced cooling button 74 (internal alarm). Further, in order to improve the safety of the heating test apparatus 10, an external signal input terminal is provided in the operation unit 66, for example, an abnormal signal from an external device (which may be an optional device) such as a UPS (Uninterruptible Power Supply) or a chiller. The forced cooling operation may be started at the time of input. For example, the forced cooling operation can be performed by the UPS abnormality signal from the UPS, the abnormality signal from the chiller, and the circulating water flow rate and temperature measuring instrument values monitored.

  The operation unit 66 includes a PLC (Programmable Logic Controller) inside, and controls the temperature of the high temperature side plate 14 (measured value of the thermocouple 30) so as to be a high temperature side set temperature (for example, 600 ° C.) on the touch panel 70. While monitoring (also displayed on the touch panel 70), the temperature of the plurality of heaters 28 is controlled by PID (Proportional Integral Derivative). Further, the operation unit 66 includes a fan control board with analog signal input therein, and as shown in FIG. 10, the fan 66 is based on the analog output from the PLC so that the rotation speed of the fan 44 on the touch panel 70 is set. The rotation speed of the fan 44 is PWM (Pulse Width Modulation) controlled by the control board. At this time, since the operation unit 66 monitors the temperature of the low temperature side plate 16 (measured value of the thermocouple 31) (also displayed on the touch panel 70), the low temperature side set temperature (for example, 100 ° C.) on the touch panel 70 is displayed. ), Temperature control by automatic rotation speed adjustment may be performed. By using the fan control board, it is possible to improve the reproducibility of the rotational speed of the fan 44 during repeated tests.

  In addition, the heating test apparatus 10 (PLC) and PC (Personal Computer) can also be connected via communication software (communication driver) of standard communication specifications such as an OPC server. Thereby, for example, the heating test apparatus 10 and various external measuring instruments are connected to expand the range of control software and measuring instrument selection and perform automatic measurement by PC control, or a plurality of heating test apparatuses 10 can be collectively collected by a PC. Can be managed. Various external measuring instruments include an electronic load device for measuring the output of the thermoelectric module, a current voltage source, or a low resistance meter (battery high tester) for measuring internal resistance. By using the OPC server, a user can be provided with a degree of freedom in developing a control program for controlling the heating test apparatus 10 on a PC, and can be used for various measurement applications only by developing control software. At this time, by restricting the program in the OPC server and the heating test apparatus 10, malfunction can be prevented and safety can be ensured.

(Embodiment 2)
In Embodiment 2 of the present invention, a heating test apparatus 10 capable of applying a high load in order to reduce the heat transfer resistance of the high temperature side plate 14 will be described with reference to FIGS. 11 and 12 are side views on the high temperature side of the heating test apparatus 10 according to the present embodiment, which are different from each other. FIG. 13 is a side view on the high temperature side of the heating test apparatus 10 as a comparative example. In addition, in FIGS. 11-13, the load direction applied to the high temperature side plate 14 is shown by the arrow.

  Similar to the first embodiment (see FIG. 1), the heating test apparatus 10 according to the present embodiment includes a housing 12 and a high temperature side plate 14 and a low temperature side plate 16 provided in the housing 12. In the body 12, the high temperature side plate 14 and the low temperature side plate 16 clamp the work W (see FIG. 8) and give a temperature difference to perform a heating test. In addition, as shown in FIG. 11, the heating test apparatus 10 provides a space S between the high temperature side plate 14 and the housing 12 (the housing side component 20), so that the high temperature side plate 14 extends from the back surface 14 b of the high temperature side plate 14. 14 and a reinforcing part 76 (for example, stainless steel) that is provided on the back surface 14b of the high temperature side plate 14 and has a higher plastic deformation strength than the high temperature side plate 14 (for example, pure copper). By using the reinforcing component 76, it is possible to clamp the workpiece W evenly with a high load, and to provide the heating test apparatus 10 having excellent temperature characteristics by reducing heat transfer resistance.

  By the way, when the reinforcing component 76 is not provided and the load exceeds a certain amount, the high temperature side plate 14 (pure copper) warps in the longitudinal direction so as to be convex toward the housing 12 (housing side component 20), and the center. The inventors have found that the deformation of the portion becomes large. Therefore, the reinforcing component 76 is a columnar component fixed to the casing 12 (the casing-side component 20) by the fastener 22, and is in contact with the center portion of the back surface 14b. Around the columnar reinforcing parts 76 (stainless steel), columnar spacers 18 (stainless steel) provided at the four corners of the high-temperature side plate 14 (pure copper) having a rectangular shape in plan view are provided. By making the reinforcing part 76 columnar made of the same material (stainless steel) with the same length as the spacer 18 (the length in the space S), the spacer 18 and the reinforcing part 76 are similarly expanded by the heat of the high temperature side plate 14. Generation | occurrence | production of the curvature (plastic deformation) of the high temperature side plate 14 can be prevented. Further, by using the columnar reinforcing component 76, heat diffusion from the reinforcing component 76 can be prevented. It should be noted that the thickness, position, and number of reinforcing parts 76 depend on the position and size of the load to be set, taking into consideration the upper limit of temperature rise due to heat escaping from the reinforcing parts 76 and the decrease in temperature raising / lowering speed. Must be set.

  As a different form, the heating test apparatus 10 may include a plate-shaped reinforcing component 78 instead of the columnar reinforcing component 76 as shown in FIG. The reinforcing component 78 is a plate-shaped component (for example, stainless steel) sandwiched between the high temperature side plate 14 and the spacer 18. The heater 28 is provided inside the reinforcing component 78 (through hole 78h). According to this, the workpiece | work W can be clamped by applying a load more, and the heat test apparatus 10 which reduced heat transfer resistance and was excellent in the temperature characteristic can be provided. Further, in addition to the thermocouple 30 provided in the high temperature side plate 14 (through hole 14 i), another thermocouple is provided in the reinforcing component 78 (through hole 78 i) and used for temperature adjustment of the high temperature side plate 14. You can also.

  By the way, as shown in FIG. 13, it is also conceivable to simply provide a plate-like reinforcing component 80 (for example, stainless steel) sandwiched between the high temperature side plate 14 and the spacer 18. However, even if pure copper is used for the high temperature side plate 14 and stainless steel is used for the reinforcing component 80, and the reinforcing component 80 having higher plastic deformation strength than the high temperature side plate 14 is provided, the stainless steel has a thermal conductivity as compared with pure copper. Since it is low and has a large thermal expansion coefficient, it may cause warping (deformation) of the high temperature side plate 14. This is because the reinforcing component 80 is heated only on one side from the high-temperature plate 14 side, and warpage occurs to form a concave shape on the housing 12 (housing-side component 20) side. In this regard, as described with reference to FIG. 12, by providing the heater 28 inside the plate-shaped reinforcing component 78 made of stainless steel, the warping of the reinforcing component 78 is prevented and the workpiece W is equally high. It is possible to provide a heating test apparatus 10 that can be clamped with a load and has excellent temperature characteristics by reducing heat transfer resistance.

  As the reinforcing parts 76 and 78, Inconel Hastelloy can be used in addition to stainless steel.

(Embodiment 3)
In Embodiment 3 of the present invention, a heating test apparatus 10 capable of improving the temperature raising / lowering speed of the high temperature side plate 14 will be described with reference to FIGS. 14 to 16. 14 and 15 are a cross-sectional view and a plan view, respectively, on the high temperature side of the heating test apparatus 10 according to this embodiment. Moreover, FIG. 16 is explanatory drawing of the high temperature side plate 14, (a) is a top view, (b) is a side view.

  Although the heating test apparatus 10 includes a cartridge heater as the heater 28 in the first embodiment, in this embodiment, a ceramic heater 82 (for example, an aluminum nitride heater) having a heater electrode 82a and a thermocouple 82b for monitoring the heater temperature is used. It has. For this reason, the high temperature side plate 14 is formed with a recess 14k in which the ceramic heater 82 that is recessed from the back surface 14b is accommodated, and a through hole 14l for drawing out the thermocouple 82b. Pure copper can be used for the high-temperature side plate 14 as described in the first embodiment, but the plastic deformation strength is higher than that of pure copper, and the high-temperature heat-resistant material is austenitic stainless steel or has a relatively high thermal conductivity among stainless steels. It is conceivable to use a ferritic stainless steel having a large thermal expansion coefficient. The thermocouple 82b also directly measures the temperature of the ceramic heater 82, and monitors the overheating in combination with the temperature measurement by the thermocouple 30 of the high temperature side plate 14.

  In addition, the heating test apparatus 10 according to the present embodiment includes a cushion component 84 provided in contact with the ceramic heater 82 and a pressing plate 86 having a relief 86a that avoids interference with the heater electrode 82a and holding the ceramic heater 82. The ceramic heater 82 housed in the recess 14k is pressed by a pressing plate 86 through a cushion component 84. The cushion component 84 is a heat-resistant ceramic paper (ceramic wool formed into a sheet shape). Note that rock wool or the like may be used as the cushion component 84.

  According to this, the temperature increase / decrease temperature rate is improved by using the ceramic heater 82 having a higher power density than the cartridge heater, and the deformation due to the difference in thermal expansion coefficient between the high temperature side plate 14 and the ceramic heater 82 is alleviated and the temperature characteristic is excellent. The heating test apparatus 10 can be provided. Moreover, since the volume of the high temperature side plate 14 can be made smaller than when the cartridge heater (heater 28) is used, the temperature lowering rate can be improved.

(Embodiment 4)
In the fourth embodiment of the present invention, a heating test apparatus 10 capable of stably maintaining the temperature on the low temperature side will be described with reference to FIG. FIG. 17 is a side view on the low temperature side of the heating test apparatus 10 according to the present embodiment.

  In the first embodiment, the heating test apparatus 10 uses a plate integrated with the heat sink 42 as the low temperature side plate 16, and the temperature adjustment mechanism (cooling mechanism) of the low temperature side plate 16 that receives the heat of the high temperature plate 14 heated by the heater 28. ) Is adjusted only by the rotational speed of the fan 44. In this regard, in this embodiment, the low-temperature side plate 16A is thermally connected to a plate 88 different from the heat sink 42 and the low-temperature side plate 16A, and is adjusted to a temperature higher than room temperature and lower than the heater 28. A low temperature heater 90 and a thermocouple 92 for measuring the temperature of the low temperature side plate 16A are provided, and the low temperature side temperature is stably maintained.

  The low temperature side plate 16A (plate 88) is composed of, for example, plate-like pure copper (oxygen-free copper) that has been subjected to nickel plating, as with the high temperature side plate 14. The low temperature heater 90 is provided (built in) the low temperature side plate 16A and directly heats the low temperature side plate 16A. That is, the low temperature side plate 16A is a hot plate. As the low temperature heater 90, for example, a cartridge heater is used. The thermocouple 92 extending from the back surface of the low temperature side plate 16A to the inside has a contact portion provided at the center of the low temperature side plate 16A.

  By using such a low temperature side plate 16A, it is possible to provide a heating test apparatus 10 that is more stable and maintains a temperature (low temperature) and has excellent temperature characteristics. By the way, as a temperature control mechanism of the low temperature side plate 16, a water cooling specification combining a water cooling unit and a chiller can be considered as one having higher cooling performance than the air cooling specification described in the first embodiment. However, the water cooling specification is expensive and it is necessary to secure a place. In this regard, by adding a low temperature side plate 16A (hot plate) whose temperature is controlled by the low temperature heater 90 to the air cooling specification described in the first embodiment, the temperature can be controlled at a lower cost and in a smaller space than the water cooling specification. A mechanism can be realized. Moreover, according to this temperature control mechanism, temperature control at 100 ° C. or higher, which is difficult in the water cooling specification, can be performed.

(Embodiment 5)
In the fifth embodiment of the present invention, a heating test apparatus 10 capable of automatically controlling a pressing load (clamping force) will be described with reference to FIG. FIG. 18 is a side view (front view) of the heating test apparatus 10 according to the present embodiment. In the present embodiment, the low temperature side plate 16 has one configuration, but may have two configurations as in the first embodiment, and the pressing load is automatically controlled, so the gauge 50 may not be provided. .

  In the first embodiment, the heating test apparatus 10 applies a pressing load (clamping force) to the workpiece W using a manual jack as the stage 32. In this regard, in the present embodiment, the electric stage 32A, an electronic balance 94 that is provided on the electric stage 32A and measures the load for clamping the workpiece W, and the position of the electric stage 32A is based on the measurement value from the electronic balance 94. And an operation unit 66 for controlling, and automatic position control is performed by load feedback. In addition, the operation unit 66 includes a display unit 96 (digital indicator) that displays a load display from the electronic balance 94, zero setting, and the like, and an up button 98 and a down button 100 that raise and lower the electric stage 32A.

  The electric stage 32A is driven by, for example, a servo motor or a stepping motor, and “position” is controlled instead of “load”. Therefore, in the present embodiment, in combination with the electronic balance 94 (for example, a load cell), feedback is made to the position control of the electric stage 32A based on the pressing load measured by the electronic balance 94. By the way, at the moment when the workpiece W placed on the low temperature side plate 16 is pressed against the high temperature plate 14, the pressing load increases abruptly, and there is a possibility that the position control is not in time for the load measurement. As a countermeasure, a coil spring 46 provided to act between the low temperature side plate 16 and the electric stage 32A is used to moderate the increase of the pressing load from the position rise of the electric stage 32A and allow for feedback control ( Play). By using such an electric stage 32A and an electronic balance 94, it is possible to provide the heating test apparatus 10 that can automatically control the pressing load (clamping force).

(Embodiment 6)
In the sixth embodiment of the present invention, a heating test apparatus 10 having high durability and easy maintenance will be described with reference to FIG. FIG. 19 is a side view of the periphery of the high temperature side of the heating test apparatus 10 according to the present embodiment.

  As shown in FIG. 19, the heating test apparatus 10 includes a high temperature side plate 14, a low temperature side plate 16, and a thermocouple 30 (temperature sensor) provided inside the high temperature side plate 14 (side surface through hole 14 i). Prepare. The high temperature side plate 14 has a clamp surface 14a (work contact surface) for clamping the work W. The low temperature side plate 16 has a clamp surface 16a (work contact surface) for clamping the work W.

  In the present embodiment, the high temperature side plate 14 is stacked on the workpiece W placed on the clamp surface 16 a of the low temperature side plate 16 without fixing the high temperature side plate 14 to the housing 12 (housing side component 20). The workpiece W is clamped in the state. That is, the high temperature side plate 14 is provided on the clamp surface 16 a of the low temperature side plate 16 via the workpiece W. This is different from the configuration in which the high temperature side plate 14 shown in FIG.

  For this reason, the high temperature side plate 14 is pinched | interposed with the workpiece | work W (In FIG. 19, a load direction is shown with the upward arrow). At this time, since the thermocouple 30 is provided on the high temperature side plate 14, the temperature applied to the workpiece W (temperature of the clamp surface 14a) can be accurately measured.

  The heating test apparatus 10 includes a plate-shaped reinforcing component 78 (plate-shaped component) that is provided in contact with the high-temperature side plate 14 and has higher plastic deformation strength than the high-temperature side plate 14. For example, pure copper having a high thermal conductivity is used for the high temperature side plate 14, so that the temperature characteristics with respect to the workpiece W are excellent. Further, for example, stainless steel having high plastic deformation strength is used for the reinforcing component 78, so that durability against the clamp is high.

  The high temperature side plate 14 is the same as or slightly larger than the workpiece W with respect to the clamp surface 14a (same level). According to this, since the plate size of the high temperature side plate 14 (for example, pure copper) becomes small, the maintenance replacement cost can be reduced. In accordance with this, by replacing the wiring of the thermocouple 30 (temperature sensor) as a connector, the replacement work is facilitated.

  In addition, the heating test apparatus 10 includes a heater 28 that is thermally connected to the high temperature side plate 14. A through hole 78 h is formed in the reinforcing component 78, and the heater 28 is provided in the through hole 78 h, that is, inside the reinforcing component 78. The heater 28 can heat the high temperature side plate 14. A through hole 78 i is formed in the reinforcing component 78, and a thermocouple 29 (temperature sensor) is provided in the through hole 78 i, that is, in the reinforcing component 78. The thermocouple 29 can be used together with the thermocouple 30 to adjust the temperature of the high temperature side plate 14.

  Further, the heating test apparatus 10 includes a spacer 26 that provides a space S between the high temperature side plate 14 and the housing side component 20 of the housing 12. The spacer 26 is fixed to the housing-side component 20 by the fastener 22 and is directly fixed to the reinforcing component 78 by screwing. For this reason, a space S is provided between the high temperature side plate 14 and the housing side component 20 via the reinforcing component 78. By providing the space S, it is possible to prevent the heat of the high temperature side plate 14 from diffusing to the housing 12 side.

10 Heating test apparatus; 12 Housing; 14 High temperature side plate;
14a Clamp surface; 14b Back surface; 14c Through-hole;
14d counterbore; 14e female thread; 14f, 14g side surface;
14h, 14i side through hole; 14j blind hole;
14k recess; 14l through hole;
16, 16A low temperature side plate; 18 spacer;
18a, 18b female thread; 20 housing side part; 22 fastener;
22a male thread; 24 fastener; 24a male thread;
24b 鍔; 26 spacer; 26a female thread;
26b male screw; 28 heater; 29, 30, 31 thermocouple;
32 stages; 32A motorized stage; 34 handles;
36 Mounting plate; 38 Thumb screw; 40 Stage side part;
42 heat sink; 44 fan; 46 coil spring;
48 mounting plate; 48a first part; 48b second part;
48c part 3; 48d part 4; 50 gauge;
52 gauge needle; 54 handle; 56 viewing window;
58 door; 60 adjustment leg; 62 handle;
64 Forced cooling fan; 66 Operation part; 68 Power switch;
70 touch panel; 72 operation start button; 74 forced cooling button;
76 reinforcing parts; 78 reinforcing parts; 78h, 78i through-holes;
80 Reinforcing parts; 82 Ceramic heater; 82a Heater electrode;
82b Thermocouple; 84 Cushion parts; 86 Holding plate;
86a escape; 88 plate; 90 low temperature heater;
92 Thermocouple; 94 Electronic scale; 96 Display;
98 Up button; 100 Down button; S Space;
W Work.

Claims (17)

A housing,
A high-temperature side plate and a low-temperature side plate provided in the housing and having a clamping surface for clamping a workpiece;
A space is provided between the high temperature side plate and the housing, and a spacer that supports the high temperature side plate from the back surface opposite to the clamping surface of the high temperature side plate,
A fastener screwed to the spacer;
With
The high temperature side plate has a through hole that communicates with a clamping surface of the high temperature side plate and a back surface of the high temperature side plate, and is fixed to the spacer by the fastener inserted into the through hole. Heating test equipment. The heating test apparatus according to claim 1, wherein
The high temperature side plate has a counterbore of the through-hole formed in a clamping surface of the high temperature side plate,
The fastener has a ridge;
The heating test apparatus according to claim 1, wherein the spacer is stored in the counterbore and the spacer and the fastener are screwed together. The heating test apparatus according to claim 1 or 2,
The high temperature side plate is made of pure copper,
The heating test apparatus, wherein the spacer and the fastener are made of stainless steel. In the heating test apparatus according to any one of claims 1 to 3,
The heating test apparatus, wherein the surface of the high temperature side plate including the inside of the through hole is plated. In the heating test apparatus according to any one of claims 1 to 4,
The high temperature side plate has a side through hole that leads to a side surface that intersects and faces the clamping surface of the high temperature side plate,
The heating test apparatus, wherein the surface of the high temperature side plate including the inside of the side through hole is plated. The heating test apparatus according to claim 4 or 5,
The high temperature side plate is made of pure copper,
The heating test apparatus, wherein the plating process is a nickel plating process. In the heating test apparatus according to any one of claims 1 to 6,
A heat sink provided on the back surface opposite to the clamping surface of the low temperature side plate;
A fan that is provided facing the heat sink and blows air to the heat sink;
A plurality of coil springs provided around the low temperature side plate to stand in the thickness direction of the low temperature side plate;
A first part sandwiched between the heat sink and the fan; a second part bent from the first part to surround the heat sink; and bent from the second part to the tip of the coil spring A mounting plate having a third part to be mounted;
A heating test apparatus comprising: In the heating test apparatus according to any one of claims 1 to 7,
A heating test apparatus comprising a reinforcing component provided on a back surface of the high temperature side plate and having a higher plastic deformation strength than the high temperature side plate. The heating test apparatus according to claim 8, wherein
The heating test apparatus, wherein the reinforcing component is a columnar component fixed to the casing and is in contact with the center of the back surface of the high temperature side plate. The heating test apparatus according to claim 8, wherein
Comprising a heater thermally connected to the high temperature side plate;
The reinforcing component is a plate-shaped component sandwiched between the high temperature side plate and the spacer;
The heating test apparatus, wherein the heater is provided inside the reinforcing component. In the heating test apparatus according to any one of claims 1 to 7,
A ceramic heater thermally connected to the high temperature side plate;
Cushion parts provided in contact with the ceramic heater;
A heating test apparatus comprising: In the heating test apparatus according to any one of claims 1 to 11,
A heating test apparatus comprising a low-temperature heater that is thermally connected to the low-temperature side plate and that is higher than room temperature and adjusted to a lower temperature than the high-temperature side plate. In the heating test apparatus according to any one of claims 1 to 12,
An electric stage that supports the low temperature side plate from the back side opposite to the clamping surface of the low temperature side plate and moves the low temperature side plate to and away from the high temperature side plate;
An electronic balance provided on the electric stage for measuring a load for clamping the workpiece;
An operation unit that controls the position of the electric stage based on the measurement value from the electronic balance;
A heating test apparatus comprising: A housing,
A high-temperature side plate and a low-temperature side plate provided in the housing and having a clamping surface for clamping a workpiece;
A spacer providing a space between the high temperature side plate and the housing;
Reinforced parts that are provided in contact with the high temperature side plate and have higher plastic deformation strength than the high temperature side plate;
A heating test apparatus comprising: The heating test apparatus according to claim 14, wherein
The heating test apparatus, wherein the reinforcing component is a columnar component fixed to the casing. The heating test apparatus according to claim 14, wherein
Comprising a heater thermally connected to the high temperature side plate;
The reinforcing component is a plate-shaped component;
The heating test apparatus, wherein the heater is provided inside the reinforcing component. The heating test apparatus according to claim 16, wherein
A temperature sensor provided inside the high temperature side plate;
The heating test apparatus, wherein the high temperature side plate is provided on the clamp surface of the low temperature side plate via the workpiece.

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