JP2016176898A - Electronic component conveyance device and electronic component inspection device - Google Patents

Electronic component conveyance device and electronic component inspection device Download PDF

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Publication number
JP2016176898A
JP2016176898A JP2015059167A JP2015059167A JP2016176898A JP 2016176898 A JP2016176898 A JP 2016176898A JP 2015059167 A JP2015059167 A JP 2015059167A JP 2015059167 A JP2015059167 A JP 2015059167A JP 2016176898 A JP2016176898 A JP 2016176898A
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oxygen concentration
unit
electronic component
inspection
level
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JP2015059167A
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JP6575094B2 (en
Inventor
清水 博之
Hiroyuki Shimizu
博之 清水
山崎 孝
Takashi Yamazaki
孝 山崎
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セイコーエプソン株式会社
Seiko Epson Corp
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Priority claimed from TW107114741A external-priority patent/TWI657252B/en
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Abstract

PROBLEM TO BE SOLVED: To provide an electronic component conveying device and an electronic component inspection device capable of easily and quickly discriminating and monitoring the oxygen concentration in the device.
An electronic component transport apparatus includes an oxygen concentration display unit that displays an oxygen concentration, and the oxygen concentration display unit can display in accordance with the magnitude of the oxygen concentration. Moreover, it is preferable that the oxygen concentration display unit can perform a stepwise display according to the magnitude of the oxygen concentration. The electronic component inspection apparatus has an oxygen concentration display unit that displays the oxygen concentration and an inspection unit that inspects the electronic component, and the oxygen concentration display unit can display according to the magnitude of the oxygen concentration. It is characterized by that.
[Selection] Figure 4

Description

  The present invention relates to an electronic component conveying device and an electronic component inspection device.

  2. Description of the Related Art Conventionally, an electronic component inspection apparatus that inspects electrical characteristics of an electronic component such as an IC device has been known. This electronic component inspection apparatus generally includes an inspection unit that inspects an IC device and an electronic component transfer device that transfers the IC device to the inspection unit.

  Also, the inspection using the electronic component inspection apparatus may be performed while heating or cooling the IC device to a predetermined temperature. When heating an IC device, the IC device is heated by heating an arrangement member on which the IC device is arranged. On the other hand, when cooling an IC device, the IC device is cooled by cooling an arrangement member on which the IC device is arranged. When the IC device is cooled, the humidity of the atmosphere around the arrangement member (humidity in the apparatus) is reduced so that condensation or icing (icing) does not occur in the IC device. In order to reduce the humidity, nitrogen gas is generally supplied into the apparatus. When nitrogen gas is used, the oxygen concentration in the room decreases. Therefore, an oxygen concentration meter is provided in the room to ensure the safety of the operator.

  As an example of such an electronic component inspection apparatus, for example, Patent Document 1 discloses an IC handler including an inspection unit that inspects electrical characteristics of an IC device. Further, for example, Patent Document 2 discloses a substrate processing apparatus that adds value to a wafer.

  In such a conventional electronic component inspection device, for example, various device conditions such as oxygen concentration in the device can be confirmed on the operation screen.

JP 2009-97899 A JP 2010-27791 A

  However, in the conventional electronic component inspection apparatus, since the oxygen concentration is displayed as a numerical value, it is difficult for an operator to determine or monitor the oxygen concentration in the apparatus (electronic component inspection apparatus) at a glance, for example. It was.

  An object of the present invention is to provide an electronic component transport device and an electronic component inspection device that can easily and quickly determine and monitor the oxygen concentration in the device.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

[Application Example 1]
The electronic component transport device of the present invention has an oxygen concentration display unit that displays the oxygen concentration,
The oxygen concentration display unit can display according to the magnitude of the oxygen concentration.

  Thereby, the operator can confirm the magnitude | size of oxygen concentration by the display different from a numerical value. Therefore, the operator can easily and quickly determine or monitor the oxygen concentration in the apparatus at a glance.

[Application Example 2]
In the electronic component transport apparatus according to the present invention, it is preferable that the oxygen concentration display unit can perform stepwise display according to the range of the oxygen concentration.

  Thereby, the oxygen concentration in the apparatus can be determined and monitored more easily and more quickly.

[Application Example 3]
In the electronic component transport device of the present invention, it is preferable that the oxygen concentration display unit can change the color according to the range of the oxygen concentration.

  As a result, the oxygen concentration in the apparatus can be determined and monitored more easily and more quickly.

[Application Example 4]
In the electronic component transport device of the present invention, the oxygen concentration display unit displays the color in a wavelength range of 500 to 580 nm and the color in a wavelength range of 610 to 750 nm in order from the highest oxygen concentration. Preferably it can be done.

  As a result, the operator can more easily determine or monitor the oxygen concentration in the apparatus by checking the color displayed on the oxygen concentration display unit. For example, it is assumed that the oxygen concentration is not low when the wavelength range is 500 to 580 nm, and the oxygen concentration is low when the wavelength range is 610 to 750 nm. Thereby, the operator can perform the above-described determination more easily and more quickly.

[Application Example 5]
In the electronic component transport apparatus according to the present invention, the oxygen concentration display unit includes a color having a wavelength range of 500 to 580 nm, a color having a wavelength range of 580 to 610 nm, and a wavelength range in descending order of the oxygen concentration. It is preferable that the display can be divided into colors of 610 to 750 nm.

  As a result, the operator can more easily determine or monitor the oxygen concentration in the apparatus by checking the color displayed on the oxygen concentration display unit. For example, when the wavelength region is a color of 500 to 580 nm, the oxygen concentration is not low, and when the wavelength region is a color of 580 to 610 nm, the oxygen concentration is slightly lower. When the wavelength range is 610 to 750 nm, it is assumed that the oxygen concentration is low. Thereby, the operator can perform the above-described determination more easily and more quickly.

[Application Example 6]
In the electronic component conveying apparatus of the present invention, it is preferable that the oxygen concentration display unit has a level gauge.

  Thereby, since the operator can confirm the magnitude | size of oxygen concentration with a level gauge, he can discriminate | determine and monitor the oxygen concentration in an apparatus more easily.

[Application Example 7]
In the electronic component transport device of the present invention, the oxygen concentration display unit has a blinking display unit,
It is preferable that the blinking display portion changes in blinking speed according to the magnitude of the oxygen concentration.

  Thereby, since the operator can confirm the blinking speed on the blinking display unit, the operator can more easily determine or monitor the oxygen concentration in the apparatus.

[Application Example 8]
In the electronic component transport device of the present invention, an inspection unit arrangement area in which an inspection unit for inspecting electronic components can be arranged,
An electronic component supply region capable of arranging a transport unit that supplies the electronic component to the inspection unit arrangement region;
An electronic component collection area capable of arranging a transport unit for collecting the electronic component from the inspection unit arrangement area;
It is preferable that the oxygen concentration display unit can display the oxygen concentration in at least one of the inspection unit arrangement region, the electronic component supply region, and the electronic component recovery region.

  Thereby, it is possible to more easily determine or monitor the desired oxygen concentration in the room.

[Application Example 9]
An electronic component inspection apparatus according to the present invention includes an oxygen concentration display unit that displays an oxygen concentration,
An inspection unit for inspecting electronic components,
The oxygen concentration display unit can display according to the magnitude of the oxygen concentration.

  Thereby, the operator can confirm the magnitude | size of oxygen concentration by the display different from a numerical value. Therefore, the operator can easily and quickly determine or monitor the oxygen concentration in the apparatus at a glance.

It is a schematic perspective view which shows the electronic component inspection apparatus which concerns on 1st Embodiment of this invention. It is a schematic plan view of the inspection apparatus (electronic component inspection apparatus) shown in FIG. It is a block diagram which shows a part of test | inspection apparatus shown in FIG. It is a figure which shows the window displayed on the monitor shown in FIG. It is a figure which shows the status display part shown in FIG. It is a figure which shows the display of the oxygen concentration display part which the state display part shown in FIG. 4 has. It is a figure which shows the display of the humidity display part which the status display part shown in FIG. 4 has. It is a figure which shows the state display part which the electronic component inspection apparatus which concerns on 2nd Embodiment of this invention has. It is a figure which shows the level gauge part with which the status display part which the electronic component inspection apparatus which concerns on 3rd Embodiment of this invention has is provided. It is a figure which shows the display of the level gauge shown in FIG.

  DESCRIPTION OF EMBODIMENTS Hereinafter, an electronic component conveying device and an electronic component inspection device of the present invention will be described in detail based on embodiments shown in the accompanying drawings.

<First Embodiment>
FIG. 1 is a schematic perspective view showing an electronic component inspection apparatus according to the first embodiment of the present invention. FIG. 2 is a schematic plan view of the inspection apparatus (electronic component inspection apparatus) shown in FIG. FIG. 3 is a block diagram showing a part of the inspection apparatus shown in FIG. FIG. 4 is a diagram showing a window displayed on the monitor shown in FIG. FIG. 5 is a diagram showing the status display unit shown in FIG. FIG. 6 is a diagram showing a display on the oxygen display unit included in the state display unit shown in FIG. FIG. 7 is a diagram showing the display of the humidity display unit included in the status display unit shown in FIG.

  In the following, for convenience of explanation, as shown in FIG. 1, three axes orthogonal to each other are referred to as an X axis, a Y axis, and a Z axis. Further, the XY plane including the X axis and the Y axis is horizontal, and the Z axis is vertical. A direction parallel to the X axis is also referred to as “X direction”, a direction parallel to the Y axis is also referred to as “Y direction”, and a direction parallel to the Z axis is also referred to as “Z direction”. The direction of the arrow of each axis of the X axis, the Y axis, and the Z axis is referred to as a plus side, and the direction opposite to the arrow is referred to as a minus side. Further, the upstream side in the conveying direction of the electronic component is also simply referred to as “upstream side”, and the downstream side is also simply referred to as “downstream side”. In addition, the term “horizontal” in the specification of the present application is not limited to complete horizontal, and includes a state slightly inclined (for example, less than about 5 °) with respect to the horizontal as long as transportation of electronic components is not hindered.

  An inspection apparatus (electronic component inspection apparatus) 1 shown in FIG. 1 includes, for example, an IC device such as a BGA (Ball grid array) package and an LGA (Land grid array) package, an LCD (Liquid Crystal Display), and a CIS (CMOS Image Sensor). It is an apparatus for inspecting and testing (hereinafter simply referred to as “inspection”) electrical characteristics of electronic components such as the above. Hereinafter, for convenience of explanation, the case where an IC device is used as the electronic component to be inspected will be described as a representative, and this will be referred to as “IC device 90”.

  As shown in FIGS. 1 and 2, the inspection apparatus 1 includes an electronic component conveyance device 10 that conveys an IC device 90, an inspection unit 16, and a setting display unit 60 having a display unit 40 and an operation unit 50. Yes. In the present embodiment, the electronic component transport apparatus 10 is configured by a configuration excluding the inspection unit 16 and an inspection control unit 312 included in the control device 30 described later.

  As shown in FIGS. 1 and 2, the inspection apparatus 1 includes a tray supply area A1, a device supply area (electronic component supply area) A2, and an inspection area (inspection part arrangement area) in which an inspection unit 16 is provided. ) A3, device recovery area (electronic parts recovery area) A4, and tray removal area A5. In the inspection apparatus 1, the IC device 90 passes through each area in order from the tray supply area A1 to the tray removal area A5, and is inspected in the intermediate inspection area A3.

  Further, the inspection apparatus 1 is configured to be able to perform inspection under a normal temperature environment, a low temperature environment, and a high temperature environment.

Hereinafter, the inspection apparatus 1 will be described for each of the areas A1 to A5.
<Tray supply area A1>
The tray supply area A1 is an area to which a tray 200 in which a plurality of IC devices 90 in an uninspected state are arranged is supplied. In the tray supply area A1, a large number of trays 200 can be stacked.

<Device supply area A2>
The device supply area A2 is an area where a plurality of IC devices 90 on the tray 200 from the tray supply area A1 are supplied to the inspection area A3. Note that tray transport mechanisms (transport units) 11A and 11B that transport the tray 200 are provided so as to straddle the tray supply region A1 and the device supply region A2.

  In the device supply area A2, a temperature adjustment unit (soak plate) 12, a supply robot (device transfer head) 13, and a supply empty tray transfer mechanism 15 are provided.

  The temperature adjustment unit 12 is an apparatus that arranges the IC device 90, heats or cools the arranged IC device 90, and adjusts (controls) the IC device 90 to a temperature suitable for inspection. In the configuration shown in FIG. 2, two temperature adjusting units 12 are arranged and fixed in the Y direction. Then, the IC device 90 on the tray 200 carried in from the tray supply area A1 by the tray transport mechanism 11A is transported to and placed on one of the temperature adjustment units 12. Although not shown, the temperature adjustment unit 12 is provided with a temperature detection unit that detects the temperature of the IC device 90 in the temperature adjustment unit 12.

  The supply robot 13 shown in FIG. 2 is a transfer unit that transfers the IC device 90, and is supported so as to be movable in the X direction, the Y direction, and the Z direction within the device supply region A2. The supply robot 13 conveys the IC device 90 between the tray 200 loaded from the tray supply area A1 and the temperature adjustment unit 12, and the IC device 90 between the temperature adjustment unit 12 and a device supply unit 14 described later. It is responsible for the transport of. The supply robot 13 has a plurality of gripping units (not shown) that grip the IC device 90. Each gripping unit includes a suction nozzle, and can grip the IC device 90 by suction. The supply robot 13 is configured to be able to heat or cool the IC device 90.

  The supply empty tray transport mechanism 15 is a transport unit (transport mechanism) that transports the empty tray 200 from which all IC devices 90 have been removed in the X direction. After this transport, the empty tray 200 is returned from the device supply area A2 to the tray supply area A1 by the tray transport mechanism 11B.

<Inspection area A3>
The inspection area A3 is an area where the IC device 90 is inspected. In the inspection area A3, a device supply unit 14, an inspection unit 16, a measurement robot (device transport head) 17, and a device collection unit 18 are provided.

  The device supply unit 14 is a transport unit that transports the temperature-adjusted (temperature controlled) IC device 90 to the vicinity of the inspection unit 16. The device supply unit 14 is supported so as to be movable in the X direction between the device supply region A2 and the inspection region A3. In the configuration shown in FIG. 2, two device supply units 14 are arranged in the Y direction, and the IC device 90 on the temperature adjustment unit 12 is transported to and placed on one of the device supply units 14. The This conveyance is performed by the supply robot 13. The device supply unit 14 is configured to be able to heat or cool the IC device 90. Although not shown, the device supply unit 14 is provided with a temperature detection unit that detects the temperature of the IC device 90 in the device supply unit 14.

  The inspection unit 16 is a unit that inspects and tests the electrical characteristics of the IC device 90, and is a holding unit that holds the IC device 90 when the IC device 90 is inspected. The inspection unit 16 is provided with a plurality of probe pins that are electrically connected to the terminals of the IC device 90 while holding the IC device 90. Then, the terminal of the IC device 90 and the probe pin are electrically connected (contacted), and the IC device 90 is inspected via the probe pin. Moreover, the test | inspection part 16 is comprised so that the IC device 90 can be heated or cooled. Although not shown, the inspection unit 16 is provided with a temperature detection unit that detects the temperature of the IC device 90 in the inspection unit 16.

  The measurement robot 17 is a transport unit that transports the IC device 90, and is supported so as to be movable in the inspection region A3. The measurement robot 17 can transport and place the IC device 90 on the device supply unit 14 carried in from the device supply region A2 onto the inspection unit 16. When inspecting the IC device 90, the measurement robot 17 presses the IC device 90 toward the inspection unit 16, thereby bringing the IC device 90 into contact with the inspection unit 16. Thereby, as described above, the terminals of the IC device 90 and the probe pins of the inspection unit 16 are electrically connected. The measurement robot 17 has a plurality of gripping units (not shown) that grip the IC device 90. Each gripping unit includes a suction nozzle, and can grip the IC device 90 by suction. The measurement robot 17 is configured to be able to heat or cool the IC device 90. Although not shown, the measurement robot 17 is provided with a temperature detection unit that detects the temperature of the IC device 90 in the measurement robot 17.

  The device collection unit 18 is a conveyance unit that conveys the IC device 90 that has been inspected by the inspection unit 16 to the device collection region A4. The device collection unit 18 is supported so as to be movable along the X direction between the inspection area A3 and the device collection area A4. In the configuration shown in FIG. 2, two device collection units 18 are arranged in the Y direction, similarly to the device supply unit 14, and the IC device 90 on the inspection unit 16 is one of the device collection units 18. Are transported to and placed. This conveyance is performed by the measurement robot 17. Although not shown, the device recovery unit 18 may be provided with a temperature detection unit that detects the temperature of the IC device 90 in the device recovery unit 18.

<Device collection area A4>
The device collection area A4 is an area in which the IC device 90 that has been inspected is collected. In this device recovery area A4, a recovery tray 19, a recovery robot (device transfer head) 20, and a recovery empty tray transfer mechanism (tray transfer mechanism) 21 are provided. In addition, three empty trays 200 are also prepared in the device collection area A4.

  The collection tray 19 is a placement unit on which the IC device 90 is placed, and is fixed in the device collection area A4. In the configuration shown in FIG. 2, three collection trays 19 are arranged side by side in the X direction. The empty tray 200 is also a placement unit on which the IC device 90 is placed, and three empty trays 200 are arranged side by side in the X direction. Then, the IC device 90 on the device recovery unit 18 that has moved to the device recovery area A4 is transported and placed in one of the recovery tray 19 and the empty tray 200. As a result, the IC device 90 is collected and classified for each inspection result.

  The collection robot 20 is a conveyance unit that conveys the IC device 90, and is supported so as to be movable in the X direction, the Y direction, and the Z direction within the device collection area A4. The collection robot 20 can transport the IC device 90 from the device collection unit 18 to the collection tray 19 or the empty tray 200. The collection robot 20 has a plurality of gripping units (not shown) that grip the IC device 90. Each gripping unit includes a suction nozzle, and can grip the IC device 90 by suction.

  The collection empty tray transport mechanism 21 is a transport unit (transport mechanism) that transports the empty tray 200 carried in from the tray removal area A5 in the X direction. Then, after this conveyance, the empty tray 200 is arranged at a position where the IC device 90 is collected, that is, it can be one of the three empty trays 200.

<Tray removal area A5>
The tray removal area A5 is an area where the tray 200 in which a plurality of inspected IC devices 90 are arranged is collected and removed. In the tray removal area A5, a large number of trays 200 can be stacked. In addition, tray transport mechanisms (transport sections) 22A and 22B that transport the tray 200 one by one are provided so as to straddle the device collection area A4 and the tray removal area A5. The tray transport mechanism 22A transports the tray 200 on which the inspected IC device 90 is placed from the device collection area A4 to the tray removal area A5. The tray transport mechanism 22B transports an empty tray 200 for collecting the IC device 90 from the tray removal area A5 to the device collection area A4.

  Each of the regions A1 to A5 as described above is partitioned from each other by a wall portion or a shutter (not shown). The device supply area A2 is a first chamber (Input) R1 defined by walls and shutters, and the inspection area A3 is a second chamber (Index) defined by walls and shutters. ) R2 and the device collection area A4 is a third chamber (Output) R3 defined by walls, shutters, and the like. The first chamber (chamber) R1, the second chamber (chamber) R2, and the third chamber (chamber) R3 are each configured to ensure airtightness and heat insulation. Thereby, each of the first chamber R1, the second chamber R2, and the third chamber R3 can maintain humidity and temperature as much as possible.

  Further, as shown in FIG. 2, the first chamber R1 includes a temperature sensor (thermometer) 241 for detecting the temperature in the first chamber R1, and a humidity for detecting the humidity (relative humidity) in the first chamber R1. A sensor (hygrometer) 251 and an oxygen concentration sensor (oxygen meter) 261 for detecting the oxygen concentration in the first chamber R1 are provided. The second chamber R2 includes a temperature sensor (thermometer) 242 that detects the temperature in the second chamber R2, and a humidity sensor (hygrometer) 252 that detects the humidity (relative humidity) in the second chamber R2. Is provided. The third chamber R3 is provided with an oxygen concentration sensor (oxygen concentration meter) 263 that detects the oxygen concentration in the third chamber R3.

  Although not shown, the inspection apparatus 1 has a dry air supply mechanism. The dry air supply mechanism is configured to be able to supply gas such as air with low humidity and nitrogen (hereinafter also referred to as dry air) to the first chamber R1, the second chamber R2, and the third chamber R3. Therefore, condensation and icing (icing) of the IC device 90 can be prevented by supplying dry air as necessary.

  Next, the control device 30 and the setting display unit 60 including the display unit 40 and the operation unit 50 will be described.

<Control device 30>
As illustrated in FIG. 3, the control device 30 has a function of controlling each unit of the inspection device 1, and includes a control unit 31 including a drive control unit 311 and an inspection control unit 312, and a storage unit 32. .

  The drive control unit 311 includes each unit (tray transport mechanisms 11A and 11B, temperature adjusting unit 12, supply robot 13, supply empty tray transport mechanism 15, device supply unit 14, inspection unit 16, measurement robot 17, device recovery unit 18, recovery The driving of the robot 20, the recovery empty tray transport mechanism 21, and the tray transport mechanisms 22A and 22B) are controlled. The inspection control unit 312 can inspect the IC device 90 arranged in the inspection unit 16 based on, for example, a program (software) stored in the storage unit 32.

The control unit 31 also has a function of displaying the driving of each unit, inspection results, and the like on the display unit 40, a function of performing processing in accordance with an input from the operation unit 50, and the like.
The storage unit 32 stores programs, data, and the like for the control unit 31 to perform various processes.

  The temperature sensors 241 and 242, the humidity sensors 251 and 252, and the oxygen concentration sensors 261 and 263 described above are connected to the control device 30.

<Setting display section 60>
As described above, the setting display unit 60 includes the display unit 40 and the operation unit 50.

  The display unit 40 includes a monitor 41 that displays driving of each unit, inspection results, and the like. The monitor 41 can be constituted by a display panel such as a liquid crystal display panel or an organic EL, for example. The operator can set or confirm various processes, conditions, and the like of the inspection apparatus 1 via the monitor 41. As shown in FIG. 1, the display unit 40 is disposed above the inspection apparatus 1 in the drawing.

The operation unit 50 is an input device such as a mouse 51, and outputs an operation signal corresponding to the operation by the operator to the control unit 31. Therefore, the operator can use the mouse 51 to instruct the control unit 31 for various processes. As shown in FIG. 1, the mouse 51 (operation unit 50) is arranged at a position near the display unit 40 on the right side of the inspection apparatus 1 in the drawing. In the present embodiment, the mouse 51 is used as the operation unit 50. However, the operation unit 50 is not limited to this, and may be an input device such as a keyboard, a trackball, or a touch panel.
The configuration of the inspection apparatus 1 has been briefly described above.

  As described above, the inspection apparatus 1 is configured such that the temperature adjustment unit 12, the supply robot 13, the device supply unit 14, the inspection unit 16, and the measurement robot 17 can be heated and cooled. For this reason, when the temperature adjustment unit 12, the supply robot 13, the device supply unit 14, the inspection unit 16, and the measurement robot 17 are heated, the temperature adjustment unit 12, the supply robot 13, the device supply unit 14, The temperature of the first chamber R1 and the second chamber R2 in which the inspection unit 16 and the measurement robot 17 are arranged rises. Thereby, the IC device 90 can be inspected in a high temperature environment. When the inspection is performed in a high temperature environment, the temperature adjustment unit 12, the supply robot 13, the device supply unit 14, the inspection unit 16, and the measurement robot 17 are controlled to be heated to about 30 to 130 ° C., for example.

  Further, when the temperature adjustment unit 12, the supply robot 13, the device supply unit 14, the inspection unit 16, and the measurement robot 17 are cooled, the temperatures of the first chamber R1 and the second chamber R2 are also lowered according to the cooling. As a result, the IC device 90 can be inspected in a low temperature environment. When the inspection is performed in a low temperature environment, the temperature adjustment unit 12, the supply robot 13, the device supply unit 14, the inspection unit 16, and the measurement robot 17 are controlled to be cooled to, for example, about −60 to 25 ° C.

  Further, by controlling the temperature adjustment unit 12, the supply robot 13, the device supply unit 14, the inspection unit 16, and the measurement robot 17 to room temperature, the IC device 90 can be inspected in a room temperature environment. In addition, the IC device 90 can be inspected in a normal temperature environment by not heating or cooling the temperature adjustment unit 12, the supply robot 13, the device supply unit 14, the inspection unit 16, and the measurement robot 17. When the inspection is performed in a room temperature environment, the temperature adjustment unit 12, the supply robot 13, the device supply unit 14, the inspection unit 16, and the measurement robot 17 are controlled to about 25 to 35 ° C., for example.

  In this way, by controlling (adjusting) the temperatures of the temperature adjustment unit 12, the supply robot 13, the device supply unit 14, the inspection unit 16, and the measurement robot 17, the IC under normal temperature environment, low temperature environment, and high temperature environment. Device 90 can be inspected. In this control, the temperature and humidity of the IC device 90 are controlled by supplying dry air to the first chamber R1, the second chamber R2, and the third chamber R3 as necessary. In this control, the temperature of the IC device 90 is detected by a temperature detection unit (not shown) provided in each of the temperature adjustment unit 12, the device supply unit 14, the inspection unit 16, and the device collection unit 18, and the control unit By 31, feedback control is performed according to the detected temperature. Thereby, the temperature of the IC device 90 is maintained near the set temperature while being conveyed.

  In addition, the inspection apparatus 1 of the present embodiment is configured so that the oxygen concentration, humidity, and temperature in the inspection apparatus 1 can be confirmed by the monitor 41. Hereinafter, this point will be described.

  When the inspection apparatus 1 is activated, the control unit 31 displays a window (screen) WD as shown in FIG. 4 on the monitor 41. On the lower left side in the window WD, a state display unit 7 that indicates the oxygen concentration, humidity, and temperature in the inspection apparatus 1 is provided.

  As shown in FIG. 5, in the present embodiment, the state display unit 7 is configured by a table 70 having four columns and four rows. The table 70 is a field 71 displaying the oxygen concentration of each chamber R1 to R3, a field 72 displaying the humidity of each chamber R1 to R3, and a field displaying the temperature of each chamber R1 to R3. 73.

  The field 71 includes, in order from the top row, a cell 712 that can display the oxygen concentration in the second chamber R2 numerically, a cell 711 that can display the oxygen concentration in the first chamber R1 numerically, And a cell 713 capable of displaying the oxygen concentration in the third chamber R3 numerically.

  The oxygen concentration displayed in the cell 711 is a value detected by the oxygen concentration sensor 261 provided in the first chamber R1. The oxygen concentration displayed in the cell 713 is a value detected by the oxygen concentration sensor 263 provided in the third chamber R3. In the present embodiment, as described above, no oxygen concentration sensor is provided in the second chamber R2. For this reason, the cell 712 displays “-” indicating that the oxygen concentration sensor is not provided in the second chamber R2.

  The field 72 includes, in order from the top row, a cell 722 capable of displaying the humidity in the second chamber R2 numerically, a cell 721 capable of displaying the humidity in the first chamber R1 numerically, and a third And a cell 723 capable of displaying the humidity in the room R3 numerically.

  The humidity displayed in the cell 722 is a value detected by the humidity sensor 252 provided in the second chamber R2. The humidity displayed in the cell 721 is a value detected by the humidity sensor 251 provided in the first chamber R1. In the present embodiment, as described above, no humidity sensor is provided in the third chamber R3. Therefore, in the cell 723, “−” indicating that a humidity sensor is not provided in the third chamber R3 is displayed.

  The field 73 includes, in order from the top row, a cell 732 that can display the temperature in the second chamber R2 numerically, a cell 731 that can display the temperature in the first chamber R1 numerically, and a third And a cell 733 capable of displaying the temperature in the chamber R3 numerically.

  The temperature displayed in the cell 732 is a value detected by the temperature sensor 242 provided in the second chamber R2. The temperature displayed in the cell 731 is a value detected by the temperature sensor 241 provided in the first chamber R1. In the present embodiment, as described above, no temperature sensor is provided in the third chamber R3. Therefore, in the cell 733, “-” indicating that the temperature sensor is not provided in the third chamber R3 is displayed.

  The field 71 included in the state display unit 7 having such a configuration has a function as an oxygen concentration display unit that performs different display in stages depending on the magnitude of the oxygen concentration. Specifically, the cells 711 to 713 included in the field 71 can display four different levels depending on the oxygen concentration. Since the cells 711 to 713 can display the same, the display of the cell 711 will be described below as a representative.

  As shown in FIG. 6, the cell 711 can display differently by dividing it into four levels (four stages) of a first level O1, a second level O2, a third level O3, and a fourth level O4. In the present embodiment, the level is divided into four levels, but the number of levels is not limited to four.

  At the first level O1, as shown in FIG. 6A, the background color of the cell 711 is displayed in a color within a wavelength range of 500 to 580 nm, that is, green. The first level O1 displayed in this way is a state where the oxygen concentration measured by the oxygen concentration sensor 261 exceeds 16%. This first level O1 is not a state where the oxygen concentration in the first chamber R1 is low, but can be said to be an oxygen concentration that can ensure safety.

  At the second level O2, as shown in FIG. 6B, the background color of the cell 711 is displayed in a color having a wavelength range of 580 to 610 nm, that is, yellow. The second level O2 displayed in this way is a state where the oxygen concentration measured by the oxygen concentration sensor 261 is 6% or more and 16% or less. The second level O2 is a state in which the oxygen concentration in the first chamber R1 is slightly low, and can be said to be an oxygen concentration that may result in a low oxygen concentration.

  At the third level O3, as shown in FIG. 6C, the background color of the cell 711 is displayed in a color having a wavelength range of 610 to 750 nm, that is, red. The third level O3 displayed in this way is a state where the oxygen concentration measured by the oxygen concentration sensor 261 is less than 6%. This third level O3 is highly likely to be in a state where the oxygen concentration in the first chamber R1 is low, and can be said to be an oxygen concentration that needs attention.

  At the fourth level O4, as shown in FIG. 6D, the background color of the cell 711 is displayed in red, and “ERROR” is displayed in the cell 711 instead of a numerical value. The fourth level O4 displayed in this way is a state in which an abnormality has occurred regarding the oxygen concentration measurement in the first chamber R1 (a state in which an error has occurred). Examples of the state in which an abnormality has occurred with respect to the oxygen concentration measurement include a state in which the connection between the control device 30 and the oxygen concentration sensor 261 is defective and the oxygen concentration cannot be read well.

  As described above, the cells 711 are displayed in different background colors in stages depending on the magnitude of the oxygen concentration, so that the operator can see at a glance whether the oxygen concentration in the first chamber R1 is low. The determination can be made more easily and more quickly.

  In particular, since the background color of the cell 711 is displayed as green, yellow, and red in order from the highest oxygen concentration as described above, the oxygen concentration in the first chamber R1 is low, or Whether or not the oxygen concentration is slightly lower can be determined more easily and more quickly.

  In addition, at the fourth level O4, the background color of the cell 711 is displayed in red and “ERROR” is displayed in the cell 711, so that the oxygen concentration in the first chamber R1 is low. Separately, it can be determined particularly easily and particularly quickly that an abnormality has occurred in the oxygen concentration measurement.

  The background color of the cell 711 may be any color as long as the operator can visually grasp each level. However, as described above, it is preferable to display green, yellow, and red because the operator can easily grasp whether or not the oxygen concentration in the first chamber R1 is low.

  Similar to the display of the cell 711 as described above, the cells 712 and 713 can also display differently in stages according to the oxygen concentration. For this reason, the worker can more easily determine whether or not the oxygen concentration is low in each of the chambers R1 to R3. Thus, the worker can more easily determine or monitor the oxygen concentration in each of the chambers R1 to R3.

  In addition, the field 72 included in the state display unit 7 has a function as a humidity display unit that performs different display in stages according to the magnitude of humidity. Specifically, the cells 721 to 723 included in the field 72 can display four different levels according to the humidity level. Since the cells 721 to 723 can display the same, the display of the cell 722 will be described below as a representative.

  As shown in FIG. 7, the cell 722 can be divided into four levels (four stages) of the first level H1, the second level H2, the third level H3, and the fourth level H4 to display differently. In the present embodiment, the level is divided into four levels, but the number of levels is not limited to four.

  Here, in this specification, the critical point of humidity at which condensation does not occur in the IC device 90 is referred to as critical humidity (%). That is, when the measured humidity (%) exceeds the limit humidity (%), condensation occurs in the IC device 90. Further, the occurrence of condensation is related to humidity and temperature, and the limit humidity (%) varies depending on the temperature. The control device 30 stores the limit humidity (%) corresponding to the predetermined temperature, and the control device 30 can obtain the limit humidity (%) corresponding to the predetermined temperature.

  At the first level H1, as shown in FIG. 7A, the background color of the cell 722 is displayed in white. The first level H <b> 1 displayed in this way is a state in which the humidity (%) measured by the humidity sensor 252 is less than 3 (%) lower than the limit humidity (%) at the temperature measured by the temperature sensor 242. It is. That is, the first level H1 is a state of measured humidity (%) <limit humidity (%) − 3 (%). It can be said that the first level H1 is a state in which condensation does not easily occur in the IC device 90 in the transport unit or the placement unit.

  At the second level H2, as shown in FIG. 7B, the background color of the cell 722 is displayed in a color having a wavelength range of 580 to 610 nm, that is, yellow. The second level H2 displayed in this way is equal to or higher than the value at which the humidity (%) measured by the humidity sensor 252 is 3 (%) lower than the limit humidity (%) at the temperature measured by the temperature sensor 242. In addition, the humidity is below the limit humidity (%). That is, the limit humidity (%)-3 (%) ≦ the measured humidity (%) ≦ the limit humidity (%). The second level H2 is a state close to a state where condensation occurs in the IC device 90 in each part, and can be said to be a humidity at which condensation may occur in the IC device 90.

  At the third level H3, as shown in FIG. 7C, the background color of the cell 722 is displayed in a color having a wavelength range of 610 to 750 nm, that is, red. The third level H3 displayed in this way is a state in which the humidity (%) measured by the humidity sensor 252 exceeds the limit humidity (%) at the temperature measured by the temperature sensor 242. That is, the limit humidity (%) <the measured humidity (%). This third level H3 can be said to be humidity at which condensation occurs in the IC device 90 in each part.

  At the fourth level H4, as shown in FIG. 7D, the background color of the cell 722 is displayed in red, and “ERROR” is displayed in the cell 722 instead of a numerical value. The fourth level H4 displayed in this way is a state in which an abnormality has occurred regarding the humidity measurement in the second chamber R2 (a state in which an error has occurred). Examples of the state in which an abnormality has occurred with respect to humidity measurement include a state in which the connection between the control device 30 and the humidity sensor 252 is defective and the humidity cannot be read well.

  In this way, the cell 722 is displayed with a background color that varies stepwise depending on the magnitude of humidity, so that the operator can determine whether the second chamber R2 is in a state of causing condensation in the IC device 90. It is easier and faster to determine at a glance.

  In particular, as described above, the background color of the cell 722 is displayed as white, yellow, and red in order from the lowest humidity, so that the operator causes the second room R2 to condense on the IC device 90. It is possible to more easily and more quickly determine whether it is a state or a state close to a state that causes condensation on the IC device 90.

  The background color of the cell 722 may be any color as long as the operator can visually grasp each level. However, as described above, it is preferable to display white, yellow, and red because it is easy for an operator to grasp whether or not dew condensation is caused on the IC device 90.

  Further, at the fourth level H4, the background color of the cell 722 is displayed in red and “ERROR” is displayed in the cell 722. Therefore, in the second chamber R2, the IC device 90 is dewed. Apart from being, it can be determined particularly easily and particularly quickly that an abnormality has occurred with respect to humidity measurement.

Similar to the display of the cell 722 as described above, the cells 721 and 723 can also display differently in stages according to the magnitude of humidity. For this reason, the worker can more easily determine whether or not condensation occurs in each of the chambers R1 to R3.
The inspection apparatus 1 according to the present embodiment has been described above.

  In the above description, it has been configured to be able to perform different displays in stages depending on the magnitude of the oxygen concentration in each of the chambers R1 to R3. However, at least one oxygen concentration in the chambers R1 to R3 is used. It is only necessary to be configured so that can be displayed step by step. Similarly, in the present embodiment, it is configured to be able to perform different display in stages according to the humidity level of each of the rooms R1 to R3. However, at least one humidity in the rooms R1 to R3 is set. What is necessary is just to be comprised so that it can display in steps.

  In the above description, the background color of the cell 711 is displayed in a stepwise different color depending on the magnitude of the oxygen concentration, but the operator determines the cell 711 according to the magnitude of the oxygen concentration. Any display is possible as long as it can be displayed. For example, the color of the character in the cell 711 may be displayed in different colors step by step. For example, the background of the cell 711 may be displayed in a different pattern. In addition to displaying the oxygen concentration numerically, different messages may be displayed step by step. For example, “safety” is displayed at the first level O1, “danger” is displayed at the second level O2, “caution” is displayed at the third level O3, and “abnormal” is displayed at the fourth level O4. May be. The same applies to the cells 712 and 713. The same applies to the cells 721 to 723.

  Further, at the third level O3 or the fourth level O3, the control unit 31 may perform feedback control according to the detected oxygen concentration. For example, in the case of the third level O3 or the fourth level O4, an alarm for notifying the operator of the third level O3 or the fourth level O3 is notified, or driving of each part of the inspection apparatus 1 is notified. You may do it.

  Similarly, at the third level H3 and the fourth level H3, the control unit 31 may perform feedback control according to the detected humidity. For example, in the case of the third level H3 or the fourth level H4, an alarm for notifying the operator of the third level H3 or the fourth level H3 is notified or the operation of each part of the inspection apparatus 1 is stopped. Alternatively, the dry air supply device may be moved immediately.

  In addition, the cells 731 to 733 included in the field 73 may have a function as a temperature display unit that can perform different display in stages depending on the displayed temperature.

Second Embodiment
FIG. 8 is a diagram showing a state display unit 7 included in the electronic component inspection apparatus according to the second embodiment of the present invention.

  Hereinafter, the second embodiment will be described with reference to this drawing. However, the difference from the above-described embodiment will be mainly described, and the description of the same matters will be omitted.

  The present embodiment is the same as the above-described embodiment except that the configuration of the table constituting the status display unit is different.

  In the present embodiment, the cells 71 711 to 713 in the field 71 and the cells 721 to 723 in the field 72 included in the table 70 shown in FIG. 8 blink in accordance with the magnitude of oxygen concentration and the magnitude of humidity, respectively. It has a function as a part.

  First, the cells 711 to 713 will be described. Since these cells have the same configuration, the cell 711 will be described below as a representative.

  As shown in FIG. 8, the numerical value displayed in the cell 711 is configured to blink stepwise according to the magnitude of the oxygen concentration. The blinking speed of each numerical value is configured to change stepwise.

  As shown in FIG. 8A, at the first level O1, the numerical value indicating the oxygen concentration displayed in the cell 711 does not blink. On the other hand, as shown in FIG. 8B, the numerical value indicating the oxygen concentration displayed in the cell 711 blinks at the second level O2. Further, as shown in FIG. 8C, at the third level O3, the numerical value indicating the oxygen concentration displayed in the cell 711 blinks at a speed faster than the blinking speed at the second level O2. Further, as shown in FIG. 8D, in the fourth level O4, “ERROR” displayed in the cell 711 blinks at a speed equivalent to the blinking speed in the third level O3.

  As described above, the numerical value in the cell 711 is displayed at different flashing speeds in stages depending on the oxygen concentration, so that the operator can display the oxygen concentration in a state where the oxygen concentration is low. It can be determined easily and more quickly at a glance. In particular, the flashing speed of the numerical value is faster at the third level O3 than at the second level O2. That is, the blinking speed increases as the oxygen concentration decreases. For this reason, it is possible to more easily and more quickly determine whether the oxygen concentration in the second chamber R2 is low or whether the oxygen concentration is slightly low.

  Next, the cells 721 to 723 will be described. Since these cells have the same configuration, the cell 722 will be described below as a representative.

  As shown in FIG. 8, the numerical value displayed in the cell 722 is configured to blink stepwise according to the humidity level. The blinking speed of each numerical value is configured to change stepwise.

  As shown in FIG. 8A, at the first level H1, the numerical value indicating the humidity displayed in the cell 722 does not blink. On the other hand, as shown in FIG. 8B, at the second level H2, the numerical value indicating the humidity displayed in the cell 722 blinks. As shown in FIG. 8C, at the third level H3, the numerical value indicating the humidity displayed in the cell 722 blinks at a speed faster than the blinking speed at the second level H2. Further, as shown in FIG. 8D, at the fourth level H4, “ERROR” displayed in the cell 722 blinks at a speed equivalent to the blinking speed at the third level H3.

  As described above, the numerical value in the cell 722 is displayed at different blinking speeds stepwise depending on the humidity level, so that the operator can cause condensation on the IC device 90 due to the displayed humidity level. It can be determined easily and more quickly at a glance whether it is in a state to be performed. In particular, the blinking speed of the numerical value is faster at the third level H3 than at the second level H2. That is, the higher the humidity, the faster the blinking speed. For this reason, it is possible to more easily and more quickly determine whether the second chamber R2 is in a state of causing condensation on the IC device 90 or a state close to a state of causing condensation on the IC device 90. .

  Also according to the second embodiment, the same effects as those of the first embodiment described above can be obtained.

  In the above description, the numerical value blinks, but the blinking portion may be any location. For example, the cell 711 itself may be configured to blink. Further, for example, each background color of the cell 711 may be displayed in a stepwise different color as in the first embodiment described above, and the displayed background color may blink. The same applies to the cells 712, 713, 721, and 723.

  In the above description, the blinking speed increases as the level increases. However, the blinking speed at each level is not limited to this. For example, the third level O3 and the fourth level O4 may be displayed at different blinking speeds. Also, the numerical values may be blinked at the first level O1 and the first level H1.

<Third Embodiment>
FIG. 9 is a diagram illustrating a level gauge unit included in a state display unit included in the electronic component inspection apparatus according to the third embodiment of the present invention. FIG. 10 is a diagram showing a display of the level gauge shown in FIG.

  Hereinafter, the third embodiment will be described with reference to these drawings. However, the difference from the above-described embodiment will be mainly described, and description of similar matters will be omitted.

  The present embodiment is the same as the above-described embodiment except that the configuration of the status display unit is different.

  In the present embodiment, as shown in FIG. 9, the state display unit 7 is a level gauge unit 74 displaying the oxygen concentration of each chamber R1 to R3, and the level displaying the humidity of each chamber R1 to R3. It is comprised with the gauge part 75 and the level gauge part 76 which displays the temperature of each chamber R1-R3.

  The level gauge unit 74 includes a rod-shaped level gauge 742 displaying the oxygen concentration in the second chamber R2, a rod-shaped level gauge 741 displaying the oxygen concentration in the first chamber R1, and a third chamber R3. And a bar-shaped level gauge 743 displaying the oxygen concentration therein. Each of the level gauges 741 to 743 includes a scale S74 that is an index of the magnitude of oxygen concentration, a bar B74 that is displaced according to the magnitude of oxygen concentration, and a message display portion M74 that can display various messages. Have. In such level gauges 741 to 743, the bar B74 is displaced in the vertical direction in the drawing according to the magnitude of the oxygen concentration, and the upper end of the bar B74 is positioned on the scale S74 according to the magnitude of the oxygen concentration. In the present embodiment as well, as in the first embodiment, since no oxygen concentration sensor is provided in the second chamber R2, the bar B74 is not displayed on the level gauge 742 in FIG.

  The level gauge unit 75 includes a rod-shaped level gauge 752 displaying the humidity in the second chamber R2, a rod-shaped level gauge 751 displaying the humidity in the first chamber R1, and the third chamber R3. And a bar-shaped level gauge 753 displaying humidity. Each of the level gauges 751 to 753 includes a scale S75 serving as an index of the magnitude of humidity, a bar B75 that is displaced according to the magnitude of humidity, and a message display unit M75 that can display various messages. ing. In such level gauges 751 to 753, the bar B75 is displaced in the vertical direction in the drawing according to the humidity level, and the upper end of the bar B75 is positioned on the scale S75 according to the humidity level. In the present embodiment as well, as in the first embodiment, no humidity sensor is provided in the third chamber R3, and therefore the bar B75 is not displayed on the level gauge 753 in FIG.

  The level gauge unit 76 includes a rod-shaped level gauge 762 that displays the temperature in the second chamber R2, a rod-shaped level gauge 761 that displays the temperature in the first chamber R1, and the third chamber R3. And a bar-shaped level gauge 763 displaying the temperature. Each of the level gauges 761 to 763 has a scale S76 that is an index of the temperature magnitude, a bar B76 that is displaced according to the temperature magnitude, and a message display portion M76 that can display various messages. ing. In such level gauges 761 to 763, the bar B76 is displaced in the vertical direction in the drawing in accordance with the magnitude of the temperature, and the upper end of the bar B76 is positioned on the scale S76 corresponding to the magnitude of the temperature. In the present embodiment, as in the first embodiment, no temperature sensor is provided in the third chamber R3. Therefore, in FIG. 9, the bar B76 is not displayed on the level gauge 763.

  Each of the level gauges 741 to 743 included in the state display unit 7 having such a configuration has a function as an oxygen concentration display unit that performs different display in stages according to the magnitude of the oxygen concentration. Since the level gauges 741 to 743 can perform the same display, the display of the level gauge 741 will be described below as a representative.

  As shown in FIG. 10, the level gauge 741 is divided into four levels (four stages) of a first level O1, a second level O2, a third level O3, and a fourth level O4 according to the magnitude of the oxygen concentration. Display is made.

  As shown in FIG. 10A, at the first level O1, the bar B74 is displayed in green. As shown in FIG. 10B, the bar B74 is displayed in yellow at the second level O2. As shown in FIG. 10C, at the third level O3, the bar B74 is displayed in red. As shown in FIG. 10D, at the fourth level O4, the bar B74 is not displayed, and “EEROR” is displayed on the message display unit M74.

  In this way, the bar B74 of the level gauge 741 is displayed in a stepwise different color depending on the magnitude of the oxygen concentration, so that the operator is in a state where the oxygen concentration in the first chamber R is low. Can be discriminated more easily and more quickly at a glance.

  Further, the level gauges 751 to 753 included in the state display unit 7 each have a function as a humidity display unit that performs different display in stages according to the magnitude of humidity. Since the level gauges 751 to 753 can display the same, the display of the level gauge 752 will be described below as a representative.

  As shown in FIG. 10, the level gauge 752 is divided into four levels (four steps), ie, a first level H1, a second level H2, a third level H3, and a fourth level H4, according to the humidity level. Is made.

  As shown in FIG. 10E, at the first level H1, the bar B75 is displayed in white. As shown in FIG. 10F, the bar B75 is displayed in yellow at the second level H2. As shown in FIG. 10G, at the third level H3, the bar B75 is displayed in red. As shown in FIG. 10H, at the fourth level H4, the bar B75 is not displayed, and “EEROR” is displayed on the message display unit M75.

  As described above, the bar B75 of the level gauge 752 is displayed in different colors in stages according to the humidity level, so that the operator can cause condensation on the IC device 90 due to the displayed humidity level. It can be determined easily and more quickly at a glance whether it is in a state to be performed.

  According to the third embodiment, the same effect as that of the first embodiment described above can be obtained.

  In the above description, the level gauge 741 has a rod shape, but the shape of the level gauge 741 is not limited to this, and may be, for example, an arch shape. Further, the level gauge 741 has the bar B74, but may be configured to have a pointer (not shown) indicating the scale S74 instead of the bar B74, for example. The same applies to the level gauges 742, 743, 751 to 753, and 761 to 763.

  As mentioned above, although the electronic component conveyance apparatus and electronic component inspection apparatus of this invention were demonstrated based on preferred embodiment of illustration, this invention is not limited to this, The structure of each part has the same function. Any configuration can be substituted. Moreover, other arbitrary components may be added. For example, the status display unit may be configured to include the table described in the first embodiment and the level gauge described in the third embodiment.

  In the above-described embodiment, the setting display unit includes the operation unit and the display unit. However, for example, a configuration in which the display unit and the operation unit are integrated may be used. As a configuration in which the display unit and the operation unit are integrated, for example, a configuration in which a monitor included in the display unit is a touch panel can be given.

  In the embodiment described above, the oxygen concentration sensor is not provided in the second chamber, but an oxygen concentration sensor may be provided in the second chamber. In the above description, the humidity sensor and the temperature sensor are not provided in the third chamber, but the humidity sensor and the temperature sensor may be provided in the third chamber.

  In addition, the arrangement and arrangement of each field and each cell in the above-described embodiment are not limited to those illustrated. For example, in the above-described embodiment, from the left side of the drawing, the field displaying the oxygen concentration, the field displaying the humidity, and the field displaying the temperature are arranged in this order. The arrangement of is not limited to this. For example, from the left side of the figure, a field displaying temperature, a field displaying humidity, and a field displaying oxygen concentration may be arranged in this order. Further, for example, these fields are arranged side by side in the horizontal direction in the figure, but may be arranged side by side in the vertical direction in the figure.

  Further, the arrangement and arrangement of the level gauge portions and the level gauges in the above-described embodiment are not limited to those illustrated. For example, in the embodiment described above, from the left side in the figure, the level gauge part displaying the oxygen concentration, the level gauge part displaying the humidity, and the level gauge part displaying the temperature are arranged in this order. However, the arrangement of the level gauge portions is not limited to this. For example, from the left side of the figure, a level gauge part displaying temperature, a level gauge part displaying humidity, and a level gauge part displaying oxygen concentration may be arranged in this order. These level gauge portions are arranged side by side in the left-right direction in the figure, but may be arranged side by side in the up-down direction in the figure.

DESCRIPTION OF SYMBOLS 1 ... Inspection apparatus 10 ... Electronic component conveyance apparatus 90 ... IC device 200 ... Tray 11A ... Tray conveyance mechanism 11B ... Tray conveyance mechanism 12 ... Temperature adjustment part 13 ... Supply robot 14 ... Device supply part 15 ... Supply empty tray transport mechanism 16 ... Inspection unit 17 ... Measurement robot 18 ... Device recovery unit 19 ... Recovery tray 20 ... Recovery robot 21 ... Recovery empty tray transport mechanism 22A ... Tray transport mechanism 22B ... Tray transport mechanism 241,242 ... Temperature sensor 251,252 ... Humidity sensor 261,263 ... Oxygen concentration sensor 30 ... Control device 31 ... Control unit 32 ... Storage unit 311 ... Drive control unit 312 ... Inspection control unit 40 Display unit 41 Monitor 50 Operation unit 51 Mouse 60 Setting display unit 7 Status display unit 70 Table 71 ... Field 711 ... Cell 712 ... Cell 713 ... Cell 72 ... Field 721 ... Cell 722 ... Cell 723 ... Cell 73 ... Field 731 ... Cell 732 ... Cell 733 ... Cell 74 ... Level gauge section 741 Level gauge 742 Level gauge 743 Level gauge 75 Level gauge section 751 Level gauge 752 Level gauge 753 Level gauge 76 Level gauge section 761 Level Gauge 762 ... Level gauge 763 ... Level gauge B74 ... Bar B75 ... Bar B76 ... Bar M74 ... Message display part M75 ... Message display part M76 ... Message display part S74 ... Scale S75 ... Scale S76 Scale WD Window H1 First level H2 Second level H3 ‥‥ third level H4 ‥‥ fourth level O1 ‥‥ first level O2 ‥‥ second level O3 ‥‥ third level O4 ‥‥ fourth level A1 ‥‥ tray supply region (region)
A2 ... Device supply area (area)
A3 ... Inspection area (area)
A4 ... Device collection area (area)
A5 Tray removal area (area)
R1 ... 1st room R2 ... 2nd room R3 ... 3rd room

Claims (9)

  1. Having an oxygen concentration display for displaying the oxygen concentration;
    The oxygen concentration display unit can display according to the magnitude of the oxygen concentration.
  2.   The electronic component transport apparatus according to claim 1, wherein the oxygen concentration display unit is capable of displaying in stages according to a range of the oxygen concentration.
  3.   The electronic component transport apparatus according to claim 1, wherein the oxygen concentration display unit is capable of changing a color according to a range of the magnitude of the oxygen concentration.
  4.   The said oxygen concentration display part can be divided and displayed into the color whose wavelength range is 500-580 nm, and the color whose wavelength range is 610-750 nm in an order from the one where the said oxygen concentration is large. The electronic component conveying apparatus according to any one of the above.
  5.   The oxygen concentration display unit is divided into a color having a wavelength range of 500 to 580 nm, a color having a wavelength range of 580 to 610 nm, and a color having a wavelength range of 610 to 750 nm in order from the highest oxygen concentration. The electronic component carrying device according to claim 1, wherein the electronic component carrying device can be displayed.
  6.   The electronic component transport apparatus according to claim 1, wherein the oxygen concentration display unit includes a level gauge.
  7. The oxygen concentration display part has a blinking display part,
    7. The electronic component carrying device according to claim 1, wherein the blinking display portion changes in blinking speed according to the magnitude of the oxygen concentration.
  8. An inspection part arrangement area in which an inspection part for inspecting electronic components can be arranged; and
    An electronic component supply region capable of arranging a transport unit that supplies the electronic component to the inspection unit arrangement region;
    An electronic component collection area capable of arranging a transport unit for collecting the electronic component from the inspection unit arrangement area;
    The oxygen concentration display unit can display the oxygen concentration in at least one of the inspection unit arrangement region, the electronic component supply region, and the electronic component recovery region. The electronic component conveying apparatus according to item 1.
  9. An oxygen concentration display for displaying the oxygen concentration;
    An inspection unit for inspecting electronic components,
    The electronic component inspection apparatus, wherein the oxygen concentration display unit is capable of displaying according to the magnitude of the oxygen concentration.
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