JP2016176867A5 - - Google Patents

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Publication number
JP2016176867A5
JP2016176867A5 JP2015058634A JP2015058634A JP2016176867A5 JP 2016176867 A5 JP2016176867 A5 JP 2016176867A5 JP 2015058634 A JP2015058634 A JP 2015058634A JP 2015058634 A JP2015058634 A JP 2015058634A JP 2016176867 A5 JP2016176867 A5 JP 2016176867A5
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JP
Japan
Prior art keywords
valve
space
sub
gas
scavenging
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Pending
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JP2015058634A
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English (en)
Japanese (ja)
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JP2016176867A (ja
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Priority to JP2015058634A priority Critical patent/JP2016176867A/ja
Priority claimed from JP2015058634A external-priority patent/JP2016176867A/ja
Publication of JP2016176867A publication Critical patent/JP2016176867A/ja
Publication of JP2016176867A5 publication Critical patent/JP2016176867A5/ja
Pending legal-status Critical Current

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JP2015058634A 2015-03-20 2015-03-20 リーク検査装置リーク検査方法 Pending JP2016176867A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015058634A JP2016176867A (ja) 2015-03-20 2015-03-20 リーク検査装置リーク検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015058634A JP2016176867A (ja) 2015-03-20 2015-03-20 リーク検査装置リーク検査方法

Publications (2)

Publication Number Publication Date
JP2016176867A JP2016176867A (ja) 2016-10-06
JP2016176867A5 true JP2016176867A5 (ko) 2018-01-25

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ID=57069297

Family Applications (1)

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JP2015058634A Pending JP2016176867A (ja) 2015-03-20 2015-03-20 リーク検査装置リーク検査方法

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JP (1) JP2016176867A (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108088628A (zh) * 2017-12-29 2018-05-29 广州市上腾电子科技有限公司 一种气密性检测装置及其检测方法
CN113915605A (zh) * 2021-11-17 2022-01-11 包头钢铁（集团）有限责任公司 一种干熄焦副省煤器在线检修的方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4939474A (ko) * 1972-08-15 1974-04-12
JPS5629137A (en) * 1979-08-20 1981-03-23 Mitsutoyo Mfg Co Ltd Leakage measuring unit and leakage measuring method
JP3454406B2 (ja) * 1997-07-16 2003-10-06 株式会社コスモ計器 洩れ及び流量検査装置
DE19906941A1 (de) * 1999-02-19 2000-08-24 Leybold Vakuum Gmbh Testleck

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