JP2016176867A5

JP2016176867A5 -

Info

Publication number: JP2016176867A5
Application number: JP2015058634A
Authority: JP
Filing date: 2015-03-20
Publication date: 2018-01-25

Description

［５］前記サブ開閉弁として、第１サブ開閉弁と第２サブ開閉弁を備え、
前記メイン開閉弁は、前記第１サブ開閉弁と前記第２サブ開閉弁の間の前記接続管路に設けられ、
これらの開閉弁を開くときは、前記第１サブ開閉弁と第２サブ開閉弁を開いてから前記メイン開閉弁を開き、閉じるときは、前記メイン開閉弁を閉じてから前記第１サブ開閉弁と前記第２サブ開閉弁を閉じる
ことを特徴とする［４］に記載のリーク検査装置。
[5] The sub-open / close valve includes a first sub-open / close valve and a second sub-open / close valve,
The main on-off valve is provided in the connection pipe line between the first sub on-off valve and the second sub on-off valve,
When opening these on-off valves, the first sub on-off valve and the second sub on-off valve are opened and then the main on-off valve is opened. When closing, the main on-off valve is closed and then the first sub on-off valve is opened. The leak inspection apparatus according to [4], wherein the second sub on-off valve is closed.

Claims

Leak to determine whether or not there is a leak in the inspection object by measuring the pressure in the space after sealing the space with a pressure gauge after introducing gas under pressure into a predetermined space including the inspection object In inspection equipment,
A leak inspection apparatus characterized in that a stagnant gas discharge unit that discharges gas stagnating at a place where the pipes constituting the space are dead ends is provided.

The staying gas discharge part is
A scavenging port provided in the vicinity of the detection port of the pipeline leading to the detection port of the pressure gauge;
Opening and closing the scavenging port, and an on-off valve that is opened when scavenging;
The leak inspection apparatus according to claim 1, wherein:

The pressure gauge is a differential pressure gauge that includes a first detection port and a second detection port, and detects a pressure difference applied to these.
The space is a first space on the first detection port side and a second space on the second detection port side of the differential pressure gauge,
The inspection object is included in the first space,
Sealing the first space and the second space individually,
As the scavenging port, a first scavenging port provided in the vicinity of the first detection port in a first pipeline that is a part of the first space and reaches the first detection port, and the second space. The leak inspection according to claim 2, further comprising a second scavenging port provided in the vicinity of the second detection port in the second pipe line that is a part of the second pipe and reaches the second detection port. apparatus.

A connection pipe line that connects the first scavenging port and the second scavenging port;
The on-off valve includes a sub on-off valve that switches the connection pipe line between an open state and a closed state, and a main on-off valve that switches whether the connection pipe line communicates with the outside,
4. When opening these on-off valves, the main on-off valve is opened after opening the sub on-off valve, and when closing, the sub on-off valve is closed after closing the main on-off valve. The leak inspection apparatus described in 1.

As the sub on-off valve, a first sub on-off valve and a second sub on-off valve are provided,
The main on-off valve is provided in the connection pipe line between the first sub on-off valve and the second sub on-off valve,
When opening these on-off valves, the first sub on-off valve and the second sub on-off valve are opened and then the main on-off valve is opened. When closing, the main on-off valve is closed and then the first sub on-off valve is opened. The leak inspection apparatus according to claim 4, wherein the second sub on-off valve is closed.

The leak inspection apparatus according to any one of claims 3 to 5, wherein a through-type container is provided in the middle of the second pipeline.

The staying gas discharge part is provided at a branch point in the middle of a pipe line toward the exhaust valve, where the branched branch pipe stops at the time of the pressure introduction, and the gas coming from upstream is branched. A retention prevention mechanism for generating a gas flow that flows into the pipe and entrains the gas remaining in the branch pipe and exits to the pipe on the exhaust valve side,
The leak inspection apparatus according to any one of claims 1 to 6, wherein when the space is pressurized or scavenged, pressurization or scavenging is performed while allowing gas to escape from the exhaust valve.

Leak to determine whether or not there is a leak in the inspection object by measuring the pressure in the space after sealing the space with a pressure gauge after introducing gas under pressure into a predetermined space including the inspection object An inspection method,
A leak inspection method comprising: providing a stagnant gas discharge portion at a place where a pipe constituting the space becomes a dead end, and discharging the gas staying at the dead end.

The staying gas discharge unit has a scavenging port provided in the vicinity of the detection port of a pipe line leading to a detection port of the pressure gauge, and an opening / closing valve for opening and closing the scavenging port,
The leak inspection method according to claim 8, wherein the on-off valve is opened when scavenging the space.

The staying gas discharge part is provided at a branch point in the middle of a pipe line toward the exhaust valve, where the branched branch pipe stops at the time of the pressure introduction, and the gas coming from upstream is branched. A retention prevention mechanism for generating a gas flow that flows into the pipe and entrains the gas remaining in the branch pipe and exits to the pipe on the exhaust valve side,
10. The leak inspection method according to claim 8, wherein when the space is pressurized or scavenged, pressurization or scavenging is performed while allowing gas to escape from the exhaust valve.