JP2016170146A - Electronic component conveying device and electronic component inspecting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electronic component conveying device capable of suppressing inflow of outside air as much as possible when a worker performs operation for the inside of the device, and an electronic component inspecting device.SOLUTION: An electronic component conveying device comprises: an openable and closable first opening and closing part; a first rotation support part rotatably supporting the first opening and closing part; a second opening and closing part openably and closably provided in the first opening and closing part; a second rotation support part rotatably supporting the second opening and closing part; and a monitor 300 as a notification unit for indicating an open and closed state of each of the first opening and closing part and the second opening and closing part.SELECTED DRAWING: Figure 9

Description

  The present invention relates to an electronic component conveying device and an electronic component inspection device.

  2. Description of the Related Art Conventionally, an electronic component inspection apparatus that inspects the electrical characteristics of an electronic component such as an IC device is known. This electronic component inspection apparatus includes an electronic component for transporting an IC device to a holding unit of an inspection unit. A transport device is incorporated. When inspecting the IC device, the IC device is disposed in the holding unit, and a plurality of probe pins provided in the holding unit are brought into contact with the terminals of the IC device.

  Such an IC device inspection may be performed by cooling the IC device to a predetermined temperature. In that case, it is necessary to cover and seal the inside of the inspection area for inspecting the IC device with a cover.

JP 2000-35458 A

  However, in Patent Document 1, the IC device in the sealed inspection area may be opened more than necessary when, for example, releasing jamming. In this case, outside air containing moisture may be opened. There was a problem that the possibility of dew condensation occurring in an IC device or the like increases due to a large amount of inflow.

  An object of the present invention is to provide an electronic component transport device and an electronic component inspection device that can suppress the inflow of outside air as much as possible when performing operations on the inside of the device.

Such an object is achieved by the present invention described below.
[Application Example 1]
The electronic component transport device of the present invention includes a first opening / closing part that can be opened and closed,
A second opening / closing part provided in the first opening / closing part so as to be openable and closable;
And a notifying unit for notifying at least one of the first opening / closing part and the second opening / closing part.

  Thereby, when performing the operation | work with respect to the inside of an apparatus, inflow of external air can be suppressed as much as possible.

[Application Example 2]
In the electronic component transport device according to the aspect of the invention, it is preferable that the notification unit can output light emission, alarm sound, sound, or a combination of at least two of light emission, alarm sound, and sound.

  Thereby, when working on the inside of the apparatus, it is possible to prompt the operator to close the first opening / closing part and the second opening / closing part in the open state as soon as possible. Thereby, the time of an open state can be shortened and, therefore, inflow of the external air to the inside of an apparatus can be suppressed as much as possible.

[Application Example 3]
In the electronic component transport device of the present invention, it is preferable that the notification unit is a display screen that displays the open / close state.

  Thereby, when working on the inside of the apparatus, the operator is visually prompted to close the first opening / closing part and the second opening / closing part that are open as soon as possible. it can. Thereby, the time of an open state can be shortened and, therefore, inflow of the external air to the inside of an apparatus can be suppressed as much as possible.

[Application Example 4]
In the electronic component transport device according to the aspect of the invention, the display screen displays a first notification unit that notifies the opening / closing state of the first opening / closing unit and a second notification unit that notifies the opening / closing state of the second opening / closing unit. Preferably it is possible.

  Thereby, it is possible to grasp whether the first opening / closing part is in the open / closed state or the second opening / closing part is in the open / closed state.

[Application Example 5]
In the electronic component transport device according to the aspect of the invention, it is preferable that the first notification unit and the second notification unit are different from each other in at least one of color, shape, size, and blinking state.

  As a result, it is possible to easily grasp whether it is in the open / closed state of the first opening / closing part or the open / closed state of the second opening / closing part.

[Application Example 6]
In the electronic component transport device according to the aspect of the invention, it is preferable that the notification unit includes a first notification unit that notifies an opening / closing state of the first opening / closing unit and a second notification unit that notifies an opening / closing state of the second opening / closing unit. .

  Thereby, the setting of the notification of the open / closed state according to the user who uses the apparatus can be performed, and thus the operability for the user is improved.

[Application Example 7]
In the electronic component transport device of the present invention, after the notification by the notification unit, when the elapsed time exceeds a predetermined time, the first opening / closing unit and the second opening / closing unit that are in the open state Preferably, at least one of them can be instructed to be closed.
Thereby, the inflow of outside air to the inside of the apparatus can be further suppressed as much as possible.

[Application Example 8]
In the electronic component transport device of the present invention, at least one of the first opening / closing portion and the second opening / closing portion that are in an open state when a predetermined humidity or temperature is exceeded after the notification by the notification portion. It is preferable to be able to instruct one of them to be in the closed state.
Thereby, the inflow of outside air to the inside of the apparatus can be further suppressed as much as possible.

[Application Example 9]
In the electronic component transport device of the present invention, a movable unit provided in a region where the electronic component is transported and movable,
A sensor capable of sensing opening and closing of the first opening and closing part and the second opening and closing part,
When the sensor detects an open state of the first opening / closing part and the second opening / closing part, the moving part is preferably stopped.
Thereby, the safety of the worker who performs work can be secured.

[Application Example 10]
In the electronic component transport device of the present invention, a movable unit provided in a region where the electronic component is transported and movable,
A lock part for maintaining the closed state of the first opening and closing part and the second opening and closing part,
When the movement of the moving unit stops after the notification by the notification unit, it is preferable to release the maintenance of the closed state by the lock unit.

  Thereby, for example, the operation of the switch for opening the first opening / closing part or the second opening / closing part can be omitted, and the first opening / closing part or the second opening / closing part can be opened.

[Application Example 11]
The electronic component inspection apparatus of the present invention includes a first opening / closing part that can be opened and closed,
A second opening / closing part provided in the first opening / closing part so as to be openable and closable;
A notifying unit for notifying an opening / closing state of at least one of the first opening / closing unit and the second opening / closing unit;
And an inspection unit for inspecting the electronic component.

  Thereby, when performing the operation | work with respect to the inside of an apparatus, inflow of external air can be suppressed as much as possible.

FIG. 1 is a schematic perspective view of an electronic component inspection apparatus according to an embodiment of the present invention as viewed from the front side. FIG. 2 is a schematic plan view of the electronic component inspection apparatus shown in FIG. FIG. 3 is a diagram illustrating a first opening / closing portion in an open state and a second opening / closing portion in a closed state included in the electronic component inspection apparatus illustrated in FIG. 2. FIG. 4 is a diagram illustrating a first opening / closing portion in a closed state and a second opening / closing portion in an open state included in the electronic component inspection apparatus illustrated in FIG. 2. FIG. 5 is a diagram showing a second opening / closing unit and its surroundings included in the electronic component inspection apparatus shown in FIG. 2. FIG. 6 is a cross-sectional view showing the second opening / closing part in the open / closed state included in the electronic component inspection apparatus shown in FIG. 2. FIG. 7 is an image showing an open / close state of the first opening / closing part and the second opening / closing part displayed on a monitor provided in the electronic component inspection apparatus shown in FIG. 1. FIG. 8 is an image showing an open / closed state of the first opening / closing part and the second opening / closing part displayed on a monitor provided in the electronic component inspection apparatus shown in FIG. 1. FIG. 9 is an image showing an open / closed state of the first opening / closing part and the second opening / closing part displayed on a monitor provided in the electronic component inspection apparatus shown in FIG. 1. FIG. 10 is a flowchart showing a control program in the electronic component inspection apparatus shown in FIG.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an electronic component conveying device and an electronic component inspection device according to the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.

FIG. 1 is a schematic perspective view of an electronic component inspection apparatus according to an embodiment of the present invention as viewed from the front side.
FIG. 2 is a schematic plan view of the electronic component inspection apparatus shown in FIG. FIG. 3 is a diagram illustrating a first opening / closing portion in an open state and a second opening / closing portion in a closed state included in the electronic component inspection apparatus illustrated in FIG. 2. FIG. 4 is a diagram illustrating a first opening / closing portion in a closed state and a second opening / closing portion in an open state included in the electronic component inspection apparatus illustrated in FIG. 2. FIG. 5 is a diagram showing a second opening / closing unit and its surroundings included in the electronic component inspection apparatus shown in FIG. 2. FIG. 6 is a cross-sectional view showing the second opening / closing part in the open / closed state included in the electronic component inspection apparatus shown in FIG. 2. 7 to 9 are images showing the opening / closing states of the first opening / closing part and the second opening / closing part, respectively, displayed on the monitor provided in the electronic component inspection apparatus shown in FIG. FIG. 10 is a flowchart showing a control program in the electronic component inspection apparatus shown in FIG. In the following, for convenience of explanation, as shown in FIG. 1, three axes orthogonal to each other are referred to as an X axis, a Y axis, and a Z axis. Further, the XY plane including the X axis and the Y axis is horizontal, and the Z axis is vertical. A direction parallel to the X axis is also referred to as “X direction”, a direction parallel to the Y axis is also referred to as “Y direction”, and a direction parallel to the Z axis is also referred to as “Z direction”. Further, the upstream side in the conveying direction of the electronic component is also simply referred to as “upstream side”, and the downstream side is also simply referred to as “downstream side”. In addition, “horizontal” as used in the specification of the present application is not limited to complete horizontal, and includes a state where the electronic component is slightly inclined (for example, less than about 5 °) as long as transportation of electronic components is not hindered.

  An inspection apparatus (electronic component inspection apparatus) 1 shown in FIGS. 1 and 2 includes, for example, an IC device such as a BGA (Ball grid array) package or an LGA (Land grid array) package, an LCD (Liquid Crystal Display), a CIS (CMOS This is a device for inspecting and testing (hereinafter simply referred to as “inspection”) electrical characteristics of electronic components such as an image sensor. Hereinafter, for convenience of explanation, the case where an IC device is used as the electronic component to be inspected will be described as a representative, and this will be referred to as “IC device 90”.

  As shown in FIG. 2, the inspection apparatus 1 includes a tray supply area A1, a device supply area (hereinafter simply referred to as “supply area”) A2, an inspection area A3, and a device collection area (hereinafter simply referred to as “collection area”). Say) A4 and tray removal area A5. Then, the IC device 90 passes through the respective areas in order from the tray supply area A1 to the tray removal area A5, and the inspection is performed in the intermediate inspection area A3. As described above, the inspection apparatus 1 includes the electronic component conveyance apparatus that conveys the IC device 90 in each region, the inspection unit 16 that performs inspection in the inspection region A3, and the control unit 80. In addition, the inspection apparatus 1 includes a monitor 300 and a signal lamp 400.

  In the inspection apparatus 1, from the tray supply area A1 to the tray removal area A5, the area from the device supply area A2 to which the IC device 90 is transported to the collection area A4 can also be referred to as a “transport area (transport area)”.

  In the inspection apparatus 1, the direction in which the tray supply area A1 and the tray removal area A5 are arranged (the lower side in FIG. 2) is the front side, and the opposite side, that is, the direction in which the inspection area A3 is arranged (FIG. 2 is used as the back side.

  The tray supply area A1 is a material supply unit to which a tray (arrangement member) 200 in which a plurality of untested IC devices 90 are arranged is supplied. In the tray supply area A1, a large number of trays 200 can be stacked.

  The supply area A2 is an area where a plurality of IC devices 90 arranged on the tray 200 from the tray supply area A1 are supplied to the inspection area A3. Note that tray transport mechanisms 11A and 11B that transport the tray 200 one by one are provided so as to straddle the tray supply area A1 and the supply area A2.

  In the supply area A2, a temperature adjusting unit (soak plate) 12, a device transport head 13, and a tray transport mechanism (first transport device) 15 are provided.

  The temperature adjustment unit 12 is a mounting unit on which a plurality of IC devices 90 are mounted, and can heat or cool the plurality of IC devices 90. Thereby, the IC device 90 can be adjusted to a temperature suitable for inspection. In the configuration shown in FIG. 2, two temperature adjusting units 12 are arranged and fixed in the Y direction. Then, the IC device 90 on the tray 200 carried (conveyed) from the tray supply region A1 by the tray transport mechanism 11A is transported to and placed on any temperature adjustment unit 12.

  The device transport head 13 is supported so as to be movable in the supply area A2. As a result, the device transport head 13 transports the IC device 90 between the tray 200 loaded from the tray supply area A1 and the temperature adjustment unit 12, and between the temperature adjustment unit 12 and a device supply unit 14 described later. It is possible to carry the IC device 90.

  The tray transport mechanism 15 is a mechanism that transports an empty tray 200 in a state where all IC devices 90 have been removed in the X direction within the supply area A2. After this conveyance, the empty tray 200 is returned from the supply area A2 to the tray supply area A1 by the tray conveyance mechanism 11B.

  The inspection area A3 is an area where the IC device 90 is inspected. In the inspection area A3, a device supply unit (supply shuttle) 14, an inspection unit 16, a device transport head 17, and a device recovery unit (recovery shuttle) 18 are provided.

  The device supply unit 14 is a mounting unit on which the temperature-adjusted IC device 90 is mounted, and can transport the IC device 90 to the vicinity of the inspection unit 16. The device supply unit 14 is supported so as to be movable along the X direction between the supply region A2 and the inspection region A3. In the configuration shown in FIG. 2, two device supply units 14 are arranged in the Y direction, and the IC device 90 on the temperature adjustment unit 12 is transported to and placed on one of the device supply units 14. The

  The inspection unit 16 is a unit that inspects and tests the electrical characteristics of the IC device 90. The inspection unit 16 is provided with a plurality of probe pins that are electrically connected to the terminals of the IC device 90 while holding the IC device 90. Then, the terminal of the IC device 90 and the probe pin are electrically connected (contacted), and the IC device 90 is inspected via the probe pin. The inspection of the IC device 90 is performed based on a program stored in an inspection control unit provided in a tester connected to the inspection unit 16. In the inspection unit 16, similarly to the temperature adjustment unit 12, the IC device 90 can be heated or cooled to adjust the IC device 90 to a temperature suitable for the inspection.

  The device transport head 17 is supported so as to be movable in the inspection area A3. Thereby, the device transport head 17 can transport and place the IC device 90 on the device supply unit 14 carried in from the supply area A2 onto the inspection unit 16.

  The device collection unit 18 is a placement unit on which the IC device 90 that has been inspected by the inspection unit 16 is placed, and can transport the IC device 90 to the collection region A4. The device collection unit 18 is supported so as to be movable along the X direction between the inspection area A3 and the collection area A4. In the configuration shown in FIG. 2, two device collection units 18 are arranged in the Y direction, similarly to the device supply unit 14, and the IC device 90 on the inspection unit 16 is one of the device collection units 18. Are transported to and placed. This transport is performed by the device transport head 17.

  The collection area A4 is an area in which a plurality of IC devices 90 that have been inspected are collected. In the collection area A4, a collection tray 19, a device conveyance head 20, and a tray conveyance mechanism (second conveyance device) 21 are provided. An empty tray 200 is also prepared in the collection area A4.

  The collection tray 19 is a placement unit on which the IC device 90 is placed, and is fixed in the collection area A4. In the configuration shown in FIG. 2, three collection trays 19 are arranged along the X direction. The empty trays 200 are also placement units on which the IC devices 90 are placed, and three empty trays 200 are arranged along the X direction. Then, the IC device 90 on the device recovery unit 18 that has moved to the recovery area A4 is transported and placed in one of the recovery tray 19 and the empty tray 200. As a result, the IC device 90 is collected and classified for each inspection result.

  The device transport head 20 is supported so as to be movable in the collection area A4. Accordingly, the device transport head 20 can transport the IC device 90 from the device recovery unit 18 to the recovery tray 19 or the empty tray 200.

  The tray transport mechanism 21 is a mechanism for transporting an empty tray 200 carried from the tray removal area A5 in the X direction within the collection area A4. Then, after this conveyance, the empty tray 200 is arranged at a position where the IC device 90 is collected, that is, it can be one of the three empty trays 200. Thus, in the inspection apparatus 1, the tray transport mechanism 21 is provided in the collection area A4, and the tray transport mechanism 15 is provided in the supply area A2. Thereby, for example, the throughput (the number of IC devices 90 to be transported per unit time) can be improved as compared to transporting an empty tray 200 in the X direction with a single transport mechanism.

  The configurations of the tray transport mechanisms 15 and 21 are not particularly limited. For example, the tray transport mechanisms 15 and 21 include a suction member that sucks the tray 200 and a support mechanism such as a ball screw that supports the suction member so as to be movable in the X direction. Is mentioned.

  The tray removal area A5 is a material removal unit from which the tray 200 in which a plurality of inspected IC devices 90 are arranged is collected and removed. In the tray removal area A5, a large number of trays 200 can be stacked.

  In addition, tray transport mechanisms 22A and 22B that transport the tray 200 one by one are provided so as to straddle the collection area A4 and the tray removal area A5. The tray transport mechanism 22A is a mechanism for transporting the tray 200 on which the inspected IC device 90 is placed from the collection area A4 to the tray removal area A5. The tray transport mechanism 22B is a mechanism that transports an empty tray 200 for collecting the IC device 90 from the tray removal area A5 to the collection area A4.

  The control unit 80 has, for example, a drive control unit. The drive control unit includes, for example, tray transport mechanisms 11A and 11B, a temperature adjustment unit 12, a device transport head 13, a device supply unit 14, a tray transport mechanism 15, an inspection unit 16, and a device transport head 17. The drive of each moving part of the device collection | recovery part 18, the device conveyance head 20, the tray conveyance mechanism 21, and tray conveyance mechanism 22A, 22B is controlled.

  The test control unit of the tester inspects the electrical characteristics of the IC device 90 arranged in the test unit 16 based on a program stored in a memory (not shown), for example.

  In the inspection apparatus 1 as described above, in addition to the temperature adjustment unit 12 and the inspection unit 16, the device transport head 13, the device supply unit 14, and the device transport head 17 are also configured to be able to heat or cool the IC device 90. Thereby, the temperature of the IC device 90 is kept constant while being transported. In the following, the case where the IC device 90 is cooled and inspected in a low temperature environment within a range of, for example, −60 ° C. to −40 ° C. will be described.

  The operator can set or confirm the temperature condition or the like when the inspection apparatus 1 is operated via the monitor 300. The monitor 300 is disposed at the upper part on the front side of the inspection apparatus 1. As shown in FIGS. 1 and 2, a mouse base 600 is provided on the right side of the tray removal area A5 in the drawing to place a mouse used when operating the screen displayed on the monitor 300.

  Further, the signal lamp 400 can notify the operating state or the like of the inspection apparatus 1 by a combination of colors that emit light. The signal lamp 400 is disposed on the top cover 74. Note that the inspection device 1 has a built-in speaker 500, and the operation state of the inspection device 1 can also be notified by the speaker 500.

  As shown in FIG. 2, in the inspection apparatus 1, the tray supply area A1 and the supply area A2 are separated (partitioned) by the first partition wall 61, and the supply area A2 and the inspection area A3 are separated. It is divided by the second partition wall 62, the inspection area A3 and the collection area A4 are separated by the third partition wall 63, and the collection area A4 and the tray removal area A5 are separated by the fourth partition wall 64. ing. The supply area A2 and the collection area A4 are also separated by the fifth partition wall 65. These partition walls have a function of maintaining the airtightness of each region. Further, the outermost exterior of the inspection apparatus 1 is covered with a cover, and examples of the cover include a front cover 70, side covers 71 and 72, and a rear cover 73.

  The supply area A2 is a first chamber R1 defined by the first partition wall 61, the second partition wall 62, the fifth partition wall 65, the side cover 71, and the rear cover 73. A plurality of IC devices 90 in an uninspected state are carried into the first chamber R1 together with the tray 200.

  The inspection area A3 is a second chamber R2 defined by the second partition wall 62, the third partition wall 63, and the rear cover 73. In the second chamber R2, an inner partition 66 is disposed on the inner side of the rear cover 73.

  The collection area A4 is a third chamber R3 defined by the third partition wall 63, the fourth partition wall 64, the fifth partition wall 65, the side cover 72, and the rear cover 73. A plurality of IC devices 90 that have been inspected are carried into the third chamber R3 from the second chamber R2.

  As shown in FIG. 2, the side cover 71 is provided with a first door (left first door) 711 and a second door (left second door) 712. By opening the first door 711 and the second door 712, for example, maintenance in the first chamber R1, release of jam in the IC device 90, and the like (hereinafter collectively referred to as “operation”) can be performed. . The first door 711 and the second door 712 are so-called “folding doors” that open and close in opposite directions.

  Similarly, the side cover 72 is provided with a first door (right first door) 721 and a second door (right second door) 722. By opening the first door 721 and the second door 722, for example, work in the third chamber R3 can be performed. The first door 721 and the second door 722 are also so-called “folding doors” that open and close in opposite directions.

  The rear cover 73 is also provided with a first door (back side first door) 731, a second door (back side second door) 732, and a third door (back side third door) 733. By opening the first door 731, for example, work in the first chamber R <b> 1 can be performed. By opening the third door 733, for example, work in the third chamber R3 can be performed. Further, the inner partition 66 is provided with a fourth door 75. Then, by opening the second door 732 and the fourth door 75, for example, work in the second chamber R2 can be performed. The first door 731, the second door 732, and the fourth door 75 open and close in the same direction, and the third door 733 opens and closes in the opposite direction to these doors.

  And by closing each door, the airtightness and heat insulation in each room | chamber corresponding can be ensured.

  By the way, in the inspection apparatus 1, among these doors, the first door 711 and the second door 712 on the side cover 71 side, the first door 721 and the second door 722 on the side cover 72 side, and the first door on the rear cover 73 side. The door 731 and the third door 733 are each composed of a first opening / closing part 4 and a second opening / closing part 5 (see FIGS. 3 and 4), and are an assembly formed by assembling them. Hereinafter, the 1st door 711 in the side cover 71 side is demonstrated typically. Note that the second door 732 and the fourth door 75 have the same structure as the first opening / closing part 4 (the opening 44 is omitted).

  As shown in FIGS. 3 to 5, the first opening / closing part 4 is a door that can be opened and closed with respect to an opening 713 formed in the side cover 71. Thereby, the 1st opening-and-closing part 4 can cover the half (left part in a figure) of the opening part 713 in a closed state (refer FIG. 4), and can open the opening part 713 in an open state (refer FIG. (See FIG. 3).

  The first opening / closing part 4 is composed of a plate member having a substantially rectangular shape in plan view. Note that the size of the first opening / closing unit 4 depends on the size of the inspection apparatus 1, for example, the vertical length (the length in the Z direction) and the horizontal length (the length in the Y direction). In any case, it is preferably 400 mm or more and 600 mm or less, and more preferably 450 mm or more and 550 mm or less.

  The first opening / closing part 4 having a quadrangular shape has side edges 41a, 41b, 41c, 41d of which the side 41a extending in the vertical direction is the two first rotation support parts 42. 71 is connected. These two first rotation support portions 42 are spaced apart in the Z direction. Moreover, each 1st rotation support part 42 is comprised by the hinge which supports the 1st opening-and-closing part 4 so that rotation is possible. Thereby, the 1st opening-and-closing part 4 can be supported so that rotation is possible by making an axis | shaft parallel to a perpendicular direction, ie, Z direction, into a rotation axis, and the opening and closing can be performed smoothly.

  As shown in FIG. 5, a cylinder 740 as a first lock mechanism (lock portion) that maintains the closed state of the first opening / closing portion 4 is near the upper portion of the opening 713 of the side cover 71 (for example, 0 mm or more and 50 mm or less). ) Is fixed. The cylinder 740 is such that the cylinder rod 740a can freely appear and disappear. And when the cylinder rod 740a protrudes below, it can engage with the lock member 43 provided in the 1st opening-and-closing part 4 (refer FIG. 5). Thereby, the closed state of the 1st opening / closing part 4 is maintained, and it can prevent that an operator (operator) opens the 1st opening / closing part 4 accidentally during conveyance of the IC device 90, for example.

  In the present embodiment, the cylinder 740 can maintain not only the closed state of the first opening / closing part 4 of the first door 711 but also the closed state of the first opening / closing part 4 of the second door 712. . That is, in the cylinder 740, the cylinder rod 740a is collectively engaged with the lock member 43 of the first opening / closing part 4 of the first door 711 and the lock member 43 of the first opening / closing part 4 of the second door 712. Therefore, the closed state of these first opening / closing parts 4 can be maintained collectively.

  Similarly, on the side cover 72 side, the cylinder 745 can collectively maintain the closed state of the first door 721 and the second door 722. On the rear cover 73 side, the cylinder 741 can maintain the closed state of the first door 731, the cylinder 742 can maintain the closed state of the second door 732, and the cylinder 744 can close the third door 733. The state can be maintained, and the cylinder 743 can maintain the closed state of the fourth door 75. And the operation | movement of each cylinder 740-745 is performed independently using a predetermined switch.

  As described above, the door constituted by the first opening / closing part 4 and the second opening / closing part 5 includes the first door 711 and the second door 712 on the side cover 71 side, and the first door 721 on the side cover 72 side. And the second door 722 and the first door 731 and the third door 733 on the rear cover 73 side. Therefore, the number of the first opening / closing portions 4 installed is the same number (plurality) as these doors. Thereby, if the 1st opening-and-closing part 4 as close as possible is opened with respect to the part which wants to work in the said conveyance area | region, the work can be performed easily.

  Further, as shown in FIG. 5, a magnet sensor 761 and a magnet 762 are provided as a detection unit 76 that detects opening and closing of the first opening / closing unit 4. The magnet sensor 761 is disposed and fixed near the upper portion (for example, 0 mm or more and 50 mm or less) of the opening 713 of the side cover 71, and is electrically connected to the control unit 80. The magnet 762 is fixed to the first opening / closing part 4 and is disposed in a position close to, that is, facing, the magnet sensor 761 when the first opening / closing part 4 is in a closed state. When the open state of the first opening / closing unit 4 is detected by the detection unit 76 when performing the work in the first chamber R1, the moving unit such as the device transport head 13 in the first chamber R1 stops. . Thereby, the safety of the operator who works can be ensured.

  As shown in FIGS. 3 to 5, the first opening / closing part 4 is provided with a second opening / closing part 5. The second opening / closing part 5 is a door that can be opened and closed with respect to the opening 44 formed in the first opening / closing part 4. Thereby, the 2nd opening-and-closing part 5 can cover the opening part 44 in a closed state (refer FIG. 3), and can open the opening part 44 in an open state (refer FIG. 4). The second opening / closing part 5 is configured by a plate member having a substantially rectangular shape in plan view, and the area thereof is smaller than the area of the first opening / closing part 4. A stopper is provided around the opening 44 of the first opening / closing part 4 to prevent the second opening / closing part 5 from being inclined toward the device supply area A2 when the second opening / closing part 5 is closed. A plate piece 45 is provided (see FIG. 6). Note that a packing (seal material) may be provided on the plate piece 45. Thereby, the airtightness between the 2nd opening-closing part 5 and the board piece 45 of a closed state can be hold | maintained suitably.

  By providing the second opening / closing part 5 as described above, the first opening / closing part 4 is opened when performing work on the temperature adjustment part 12 (inside the inspection apparatus 1) in the device supply region A2, for example. Instead, the operation can be performed with the second opening / closing part 5 in the open state. Since the open state of the second opening / closing part 5 is smaller than the open state of the first opening / closing part 4, it is possible to suppress the outside air from flowing into the device supply region A2 as much as possible during the operation with respect to the temperature adjustment part 12. . As a result, a low temperature environment in the device supply area A2 is maintained, so that it is possible to prevent condensation and frost from forming on the IC device 90 and the like, and an inspection after the second opening / closing part 5 is closed again. The operation of the device 1 can be performed quickly.

  Note that the size of the second opening / closing portion 5 depends on the size of the first opening / closing portion 4, but for example, the vertical length (the length in the Z direction) is preferably 150 mm or more and 200 mm or less. 180 mm or more and 200 mm or less, the lateral length (the length in the Y direction) is preferably 150 mm or more and 400 mm or less, and more preferably 200 mm or more and 360 mm or less. With such a size, for example, a general adult's arm or a tray 200 having a general size can be easily moved in and out via the opened second opening / closing part 5. Further, it is possible to prevent the operator's head from entering through the opened second opening / closing part 5.

  The second opening / closing part 5 having a quadrangular shape has a side 51b extending in the horizontal direction among the four sides (edges) 51a, 51b, 51c, 51d. It is connected to the opening / closing part 4. These two second rotation support parts 52 are spaced apart in the Y direction. Moreover, each 2nd rotation support part 52 is comprised by the hinge which supports the 2nd opening-and-closing part 5 so that rotation is possible. Thereby, the 2nd opening-and-closing part 5 can be supported so that rotation in the horizontal direction, ie, an axis | shaft parallel to a Y direction, is possible, and it can open / close smoothly.

  As shown in FIG. 6, the hinge constituting the second rotation support portion 52 has a torsion spring 521 incorporated therein. The torsion spring 521 functions as a biasing portion that biases the second opening / closing portion 5. Thereby, the 2nd opening-and-closing part 5 can be closed also by the urging | biasing force by the torsion spring 521 besides closing with dead weight. Thereby, forgetting to close the 2nd opening-and-closing part 5 after work can be prevented.

  As shown in FIGS. 4 and 6, in the present embodiment, the second opening / closing part 5 opens toward the outside of the inspection apparatus 1. Thereby, for example, when the second opening / closing part 5 in an open state is regulated to be perpendicular to the first opening / closing part 4, a tool used for work is temporarily placed on the second opening / closing part 5. Can be placed.

  As shown in FIG. 5, the second opening / closing unit 5 is disposed near the temperature adjustment unit 12 in the device supply region A <b> 2 and vertically above the temperature adjustment unit 12. Is preferred. Here, “near” means that the distance from the temperature adjustment unit 12 to the second opening / closing unit 5 is the length from the shoulder of a general adult to the fingertip (the extent that the fingertip reaches when inserted to the shoulder). That is, the length is preferably 700 mm or less, more preferably about the length from the elbow to the fingertip (the extent that the fingertip reaches when inserted up to the elbow), that is, 500 mm or less. Thereby, if the 2nd opening-and-closing part 5 is made into an open state, it can be in the state which has the temperature adjustment part 12 in the position lower than the operator's eyes of the operator who works, Therefore, work with respect to the temperature adjustment part 12 is performed immediately be able to. And by this quick work, the time which the 2nd opening-and-closing part 5 is an open state can be shortened as much as possible, Therefore It can suppress that external air flows in into device supply area | region A2.

  A cylinder 746 as a second locking mechanism (locking part) that maintains the closed state of the second opening / closing part 5 is disposed and fixed in the vicinity of the opening 44 of the first opening / closing part 4 (for example, 0 mm or more and 50 mm or less). ing. The cylinder 746 is such that a cylinder rod 746a can freely appear and disappear. And when the cylinder rod 746a protrudes, it can engage with the lock member 53 provided in the 2nd opening-and-closing part 5 (refer FIG. 5). Thereby, the closed state of the 2nd opening-and-closing part 5 is maintained, and it can prevent that an operator opens the 2nd opening-and-closing part 5 accidentally during conveyance of IC device 90, for example. The operation of the cylinder 746 is performed using a predetermined switch.

  In addition, a magnet sensor 771 and a magnet 772 are provided as detection units 77 that detect the opening / closing of the second opening / closing unit 5, that is, can be sensed. The magnet sensor 771 is disposed and fixed near the lower portion of the opening 44 of the first opening / closing part 4 (for example, 0 mm or more and 50 mm or less), and is electrically connected to the control unit 80. The magnet 772 is fixed to the second opening / closing part 5, and is disposed in a position close to, that is, facing the magnet sensor 771 when the second opening / closing part 5 is in the closed state. When the opening state of the second opening / closing unit 5 is detected by the detection unit 77 when performing the work in the first chamber R1, the detection unit 76 detects the opening state of the first opening / closing unit 4. Similarly to the case, the moving unit such as the device transfer head 13 in the first chamber R1 stops. Thereby, the safety of the operator who works can be ensured.

  As described above, the inspection apparatus 1 includes the monitor 300, the signal lamp 400, and the speaker 500. These are electrically connected to the control unit 80, and the detection results of the opening / closing of the first opening / closing unit 4 in each detection unit 76 and the detection results of the opening / closing of the second opening / closing unit 5 in each detection unit 77. Accordingly, it also functions as a notification unit that notifies the open / closed states of all the first open / close units 4 and the second open / close units 5.

  The monitor 300 has a liquid crystal display screen 301 and can notify the open / closed state by light emission, that is, a combination of three primary colors of light (color development).

  The signal lamp 400 is configured to emit light of, for example, three colors (red, green, and yellow) independently, and the open / close state can be notified by a combination of these colors.

  The speaker 500 can notify the open / closed state by emitting an alarm sound or other sound.

  Then, by any notification, it is visually confirmed that the first opening / closing part 4 and the second opening / closing part 5 that are in the open state are closed as soon as possible when the inspection apparatus 1 is being operated. The operator can be prompted by hearing. Thereby, the time of an open state can be shortened, therefore, the inflow of the external air to the inspection apparatus 1 (the said conveyance area | region) can be suppressed as much as possible.

  In the inspection apparatus 1, at least two of the notification on the monitor 300, the notification on the signal lamp 400, and the notification on the speaker 500 can be appropriately combined and output. Thereby, the operator can easily notice the notification.

  In the inspection apparatus 1, the notification on the monitor 300, the notification on the signal lamp 400, and the notification on the speaker 500 are made according to the open / closed state of the first opening / closing unit 4 and the open / closed state of the second opening / closing unit 5. Can be used properly. For example, the monitor 300 can be used as the first notification unit that notifies the opened / closed state of the first opening / closing unit 4, and the signal lamp 400 can be used as the second notification unit that notifies the opened / closed state of the second opening / closing unit 5. As described above, in the inspection apparatus 1, any one of the monitor 300, the signal lamp 400, and the speaker 500 is selected and used as the first notification unit, and the monitor 300, the signal lamp 400, and the speaker are used as the second notification unit. The remaining ones of the 500 other than the selected one can be selected and used. Thereby, the setting of the notification according to the user who uses the inspection apparatus 1 can be performed, and thus the operability for the user is improved.

Below, the case where the monitor 300 is used as an alerting | reporting part is demonstrated as an example.
As shown in FIGS. 7 to 9, the display screen 301 displays a main form MF and a subform SF located on the right side in the figure of the main form MF.

  The main form MF includes, for example, buttons for selecting various menus.

  The subform SF is a schematic view of the inspection apparatus 1. And in this subform SF, the 1st alerting | reporting part 10A which alert | reports the opening-and-closing state (this embodiment "open state") of each 1st opening-and-closing part, and the opening-and-closing state (this implementation) of each 2nd opening-and-closing part 5 In the embodiment, a second notification unit 10B that notifies “open state”) is included.

  In addition, when the 1st opening / closing part 4 is a closed state, the display of 1st alerting | reporting part 10A is suppressed, and when the 2nd opening / closing part 5 is a closed state, the display of 2nd alerting | reporting part 10B is suppressed. Is done.

  In the present embodiment, the first notification unit 10A and the second notification unit 10B have different shapes and sizes, the first notification unit 10A has a circular shape, and the second notification unit 10B is more than the first notification unit 10A. Even a small square. Due to such a difference, it is possible to easily grasp whether it is the open / closed state of the first opening / closing part 4 or the open / closed state of the second opening / closing part 5 that has been notified.

  Note that the difference between the first notification unit 10A and the second notification unit 10B is not limited to the difference in shape and size. For example, the difference only in shape, the difference only in size, the color, the blinking state ( The difference may include a blinking cycle, a duty ratio, and the like. Moreover, you may combine suitably from these conditions.

  As described above, the door constituted by the first opening / closing part 4 and the second opening / closing part 5 includes the first door 711 and the second door 712 on the side cover 71 side, and the first door 721 on the side cover 72 side. And the second door 722 and the first door 731 and the third door 733 on the rear cover 73 side.

For example, when all of the first opening / closing sections 4 in these doors are in the open state, as shown in FIG. 7, the first notification section 10 _</ b _{> A 711} uses the first opening / closing section 4 of the first door 711. An open state is notified, the 1st alerting | reporting part 10A ₇₁₂ alert | _reports the open state of the 1st opening / closing part 4 of the 2nd door 712, and the 1st alerting | reporting part 10A ₇₂₁ opens the 1st opening / closing part 4 of the 1st door 721. The first notification unit 10A ₇₂₂ notifies the open state of the first opening / closing unit 4 of the second door 722, and the first notification unit 10A ₇₃₁ notifies the open state of the first opening / closing unit 4 of the first door 731. Then, the first notification unit 10A ₇₃₃ notifies the open state of the first opening / closing unit 4 of the third door 733.

Further, the second closing part 5 of each of these doors when all in the open state, as shown in FIG. 8, the second notification unit 10B ₇₁₁ of the second closing part 5 of the first door 711 An open state is notified, the 2nd alerting | reporting part 10B ₇₁₂ alert | _reports the open state of the 2nd opening / closing part 5 of the 2nd door 712, and the 2nd alerting | reporting part 10B ₇₂₁ opens the 2nd opening / closing part 5 of the 1st door 721. The second notification unit 10B ₇₂₂ notifies the open state of the second opening / closing unit 5 of the second door 722, and the second notification unit 10B ₇₃₁ notifies the open state of the second opening / closing unit 5 of the first door 731. Then, the second notification unit 10B ₇₃₃ notifies the open state of the second opening / closing unit 5 of the third door 733.

Further, for example, the second opening / closing part 5 of the first door 721 is opened, the second opening / closing part 5 of the second door 722 is opened, the second opening / closing part 5 of the first door 731 is opened, When the first opening / closing part 4 of the three door 733 is in the open state, as shown in FIG. 9, the second notifying part 10B ₇₂₁ notifies the open state of the second opening / closing part 5 of the first door 721. The second notification unit 10B ₇₂₂ notifies the open state of the second opening / closing unit 5 of the second door 722, the second notification unit 10B ₇₃₁ notifies the open state of the second opening / closing unit 5 of the first door 731, and A notification unit 10A _{733 reports} the open state of the first opening / closing unit 4 of the third door 733.

  With such a configuration, if the display screen 301 is confirmed, it is possible to quickly grasp which open / closed portion of which door is open.

  In the inspection apparatus 1, when both the first opening / closing part 4 and the second opening / closing part 5 are in the open state with one door, the opening state of the first opening / closing part 4 is preferentially notified. It is configured as follows.

  Further, the inspection device 1 uses the first lock mechanism or the second lock mechanism when the movement of the moving unit such as the device transport head 13 stops after the notification by the first notification unit 10A or the second notification unit 10B. You may be comprised so that the maintenance of a closed state may be cancelled | released. Thereby, the operation of the predetermined switch can be omitted, and the first opening / closing part 4 or the second opening / closing part 5 can be opened, and the operability is excellent.

  Next, for example, when one opening / closing part of the first opening / closing part 4 and the second opening / closing part 5 is in an open state, a program for instructing to close the opening / closing part in the open state. This will be described based on the flowchart shown in FIG. Here, the case where the 2nd opening-and-closing part 5 is an open state is mentioned as an example.

When the detection unit 77 detects that the second opening / closing unit 5 is in the open state (step S101), the second notification unit 10B notifies the open state of the second opening / closing unit 5 (step S102) and the control. The timer built in the unit 80 is activated (step S103). In the meantime, the humidity (or the temperature detected by the temperature sensor (not shown)) α detected by the humidity sensor (not shown) in the region where the second opening / closing part 5 is installed is determined in advance. It determines whether exceeds the threshold value alpha ₀ (step S104). Here, the threshold value α ₀ is a humidity at which the low temperature environment in the region can easily cause condensation.

If it is determined in step S104, when it is determined that the humidity alpha exceeds the threshold value alpha ₀ emits instructs the second closing part 5 in the open state to the closed state (step S105). This instruction means that the low temperature environment in the region is in a state where condensation is likely to occur, and can prompt the operator to close the second opening / closing part 5. The instruction is issued using at least one of the monitor 300, the signal lamp 400, and the speaker 500.

  After execution of step S105, the detection unit 77 detects whether or not the second opening / closing unit 5 is closed (step S106).

Further, as a result of the determination in step S104, when it is determined that the humidity alpha does not exceed the threshold value alpha ₀ is whether or not the time is up, i.e., determined by the control unit 80 whether or not a predetermined time has elapsed (Step S107). If it is determined in step S107 that the time is up, the process proceeds to step S105, and thereafter, the lower steps are sequentially executed. Even if the predetermined time elapses, it can be said that the low-temperature environment in the region is in a state where condensation is likely to occur.

  If it is determined in step S107 that the time has not yet been reached, the process proceeds to step S106.

  As mentioned above, although the electronic component conveyance apparatus and electronic component inspection apparatus of this invention were demonstrated about embodiment of illustration, this invention is not limited to this, Each part which comprises an electronic component conveyance apparatus and an electronic component inspection apparatus Can be replaced with any structure capable of performing the same function. Moreover, arbitrary components may be added.

  Moreover, although the 1st opening / closing part is supported so that rotation is possible in the said embodiment, it is not limited to this, For example, you may support so that sliding in the horizontal direction is possible.

  Moreover, although the 2nd opening-and-closing part is supported so that rotation is possible in the said embodiment, it is not limited to this, For example, it may be supported so that sliding in a horizontal direction is possible.

  In addition, in the above-described embodiment, the notification unit reports the open / close state of each of the first open / close unit and the second open / close unit. However, the notification unit is not limited thereto, and for example, reports the open / closed state of the first open / close unit. It may be a thing, and the thing which alert | reports the open / closed state of a 2nd opening / closing part may be sufficient.

1 ... Inspection equipment (electronic parts inspection equipment)
11A, 11B ...... Tray transport mechanism 12 ... Temperature adjuster (soak plate)
13 …… Device transport head 14 …… Device supply unit (supply shuttle)
15. Tray transport mechanism (first transport device)
16 …… Inspection unit 17 …… Device transport head 18 …… Device recovery unit (recovery shuttle)
19 …… Tray for collection 20 …… Device transfer head 21 …… Tray transfer mechanism (second transfer device)
22A, 22B: Tray transport mechanism 4: First opening / closing part 41a, 41b, 41c, 41d ... Side (edge)
42 …… First rotation support portion 43 …… Lock member 44 …… Opening portion 45 …… Plate piece 5 …… Second opening / closing portion 51a, 51b, 51c, 51d …… Side (edge)
52 …… Second rotating support portion 521 …… Torsion spring 53 …… Lock member 61 …… First partition wall 62 …… Second partition wall 63 …… Third partition wall 64 …… Fourth partition wall 65 …… Fifth partition wall 66 …… Inner bulkhead 70 …… Front cover 71 …… Side cover 711 …… First door 712 …… Second door 713 …… Opening portion 72 …… Side cover 721 …… First door 722 …… Second door 73… ... rear cover 731 ... first door 732 ... second door 733 ... third door 74 ... top cover 740, 741, 742, 743, 744, 745, 746 ... cylinder 740a, 746a ... cylinder rod 75 ... ... 4th door 76 ... Detection part 761 ... Magnet sensor 762 ... Magnet 77 ... Detection part 771 ... Magnet sensor 772 ... Magnet 10A, 10A ₇₁₁ , 10A ₇₁₂ , 10A ₇₂₁ , 10A ₇₂₂ , 10A ₇₃₁ , 10A ₇₃₃ ... 1st notification unit 10B, 10B ₇₁₁ , 10B ₇₁₂ , 10B ₇₂₁ , 10B ₇₂₂ , 10B ₇₃₁ , 10B ₇₃₃ ... 2nd notification unit 80 ... Control unit 90 …… IC device 200 …… Tray (arrangement member)
300 …… Monitor 301 …… Display screen 400 …… Signal lamp 500 …… Speaker 600 …… Mouse stand A1 …… Tray supply area A2 …… Device supply area (supply area)
A3: Inspection area A4: Device collection area (collection area)
A5 …… Tray removal area MF …… Main foam R1 …… First chamber R2 …… Second chamber R3 …… Third chamber SF …… Subform S101 to S107 …… Step α …… Humidity (or temperature)
α ₀ …… Threshold

Claims (11)

A first opening / closing part capable of opening and closing;
A second opening / closing part provided in the first opening / closing part so as to be openable and closable;
An electronic component transport apparatus comprising: an informing unit for informing an opening / closing state of at least one of the first opening / closing unit and the second opening / closing unit.   2. The electronic component transport device according to claim 1, wherein the notification unit can output light emission, warning sound, voice, or a combination of at least two of the light emission, the warning sound, and the voice.   The electronic component transport apparatus according to claim 1, wherein the notification unit is a display screen that displays the open / close state.   The said display screen can display the 1st alerting | reporting part which alert | reports the opening / closing state of the said 1st opening / closing part, and the 2nd alerting | reporting part which alert | reports the opening / closing state of the said 2nd opening / closing part. Electronic component transfer device.   The electronic component transport apparatus according to claim 4, wherein the first notification unit and the second notification unit are different from each other in at least one of color, shape, size, and blinking state.   2. The electronic component conveying apparatus according to claim 1, wherein the notification unit includes a first notification unit that notifies an opening / closing state of the first opening / closing unit and a second notification unit that notifies an opening / closing state of the second opening / closing unit.   After the notification by the notification unit, when an elapsed time exceeds a predetermined time, at least one of the first opening / closing unit and the second opening / closing unit that are in an open state is in a closed state. The electronic component carrying device according to claim 1, wherein the electronic component carrying device can be instructed to do so.   After the notification by the notification unit, when a predetermined humidity or temperature is exceeded, at least one of the first opening / closing unit and the second opening / closing unit that are open is closed. The electronic component carrying device according to claim 1, wherein the electronic component carrying device can be instructed as described above. A movable unit provided in a region where the electronic component is conveyed and movable;
A sensor capable of sensing opening and closing of the first opening and closing part and the second opening and closing part,
The electronic component conveying apparatus according to any one of claims 1 to 8, wherein the moving unit stops when the sensor detects an open state of the first opening / closing unit and the second opening / closing unit. A movable unit provided in a region where the electronic component is conveyed and movable;
A lock part for maintaining the closed state of the first opening and closing part and the second opening and closing part,
The electronic component carrying device according to any one of claims 1 to 9, wherein when the movement of the moving unit is stopped after the notification by the notification unit, the maintenance of the closed state by the lock unit is released. A first opening / closing part capable of opening and closing;
A second opening / closing part provided in the first opening / closing part so as to be openable and closable;
A notifying unit for notifying an opening / closing state of at least one of the first opening / closing unit and the second opening / closing unit;
An electronic component inspection apparatus comprising: an inspection unit that inspects an electronic component.

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