JP2016156092A5 - - Google Patents

Download PDF

Info

Publication number
JP2016156092A5
JP2016156092A5 JP2016031711A JP2016031711A JP2016156092A5 JP 2016156092 A5 JP2016156092 A5 JP 2016156092A5 JP 2016031711 A JP2016031711 A JP 2016031711A JP 2016031711 A JP2016031711 A JP 2016031711A JP 2016156092 A5 JP2016156092 A5 JP 2016156092A5
Authority
JP
Japan
Prior art keywords
fluid
gis
outlet opening
channel
flux
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016031711A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016156092A (ja
JP6151395B2 (ja
Filing date
Publication date
Priority claimed from EP15156537.1A external-priority patent/EP3062329B1/en
Application filed filed Critical
Publication of JP2016156092A publication Critical patent/JP2016156092A/ja
Publication of JP2016156092A5 publication Critical patent/JP2016156092A5/ja
Application granted granted Critical
Publication of JP6151395B2 publication Critical patent/JP6151395B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2016031711A 2015-02-25 2016-02-23 マルチノズルを有するガス注入システム、並びに、それを備えた粒子光学機器及びその使用方法 Active JP6151395B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP15156537.1 2015-02-25
EP15156537.1A EP3062329B1 (en) 2015-02-25 2015-02-25 Multi-source GIS for particle-optical apparatus

Publications (3)

Publication Number Publication Date
JP2016156092A JP2016156092A (ja) 2016-09-01
JP2016156092A5 true JP2016156092A5 (enExample) 2017-02-02
JP6151395B2 JP6151395B2 (ja) 2017-06-21

Family

ID=52574075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016031711A Active JP6151395B2 (ja) 2015-02-25 2016-02-23 マルチノズルを有するガス注入システム、並びに、それを備えた粒子光学機器及びその使用方法

Country Status (4)

Country Link
US (1) US20160244871A1 (enExample)
EP (1) EP3062329B1 (enExample)
JP (1) JP6151395B2 (enExample)
CN (1) CN105908150B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9962516B2 (en) 2010-09-09 2018-05-08 University Of Florida Research Foundation, Incorporated Context-sensitive flow interrupter and drainage outflow optimization system
EP3082148A1 (en) 2015-04-15 2016-10-19 FEI Company Method of manipulating a sample in an evacuated chamber of a charged particle apparatus

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0262039A (ja) * 1988-08-29 1990-03-01 Hitachi Ltd 多層素子の微細加工方法およびその装置
JP2645867B2 (ja) * 1988-09-08 1997-08-25 東海カーボン株式会社 ダイヤモンド膜の析出方法
JP2759568B2 (ja) * 1991-09-18 1998-05-28 アルプス電気株式会社 光学機能素子の製造方法
US5613509A (en) * 1991-12-24 1997-03-25 Maxwell Laboratories, Inc. Method and apparatus for removing contaminants and coatings from a substrate using pulsed radiant energy and liquid carbon dioxide
JP2974879B2 (ja) * 1993-04-07 1999-11-10 アルプス電気株式会社 プラズマｃｖｄによる合成方法
JPH07252662A (ja) * 1994-03-16 1995-10-03 Hitachi Ltd 高純度複合材およびその製法
JP3707129B2 (ja) * 1996-06-19 2005-10-19 株式会社日立製作所 投影型荷電粒子ビーム装置およびその方法
US6113983A (en) * 1997-04-03 2000-09-05 The United States Of America As Represented By The Secretary Of Commerce Method of forming metallic and ceramic thin film structures using metal halides and alkali metals
CN103170447B (zh) * 2005-08-30 2015-02-18 先进科技材料公司 使用替代的氟化含硼前驱体的硼离子注入和用于注入的大氢化硼的形成
EP2199434A1 (en) * 2008-12-19 2010-06-23 FEI Company Method for forming microscopic structures on a substrate
US8617668B2 (en) * 2009-09-23 2013-12-31 Fei Company Method of using nitrogen based compounds to reduce contamination in beam-induced thin film deposition
CN201823642U (zh) * 2010-08-17 2011-05-11 华东理工大学 一种包含导向保护气流的激光熔覆同轴送粉喷嘴

Similar Documents

Publication Publication Date Title
WO2015145122A3 (en) Method for coating a filter substrate
CL2008002109A1 (es) Metodo para suministrar uno o mas quimicos en una corriente de proceso de un proceso de fabricacion de papel, que comprende aparatos con un primer y segundo conducto con una o mas entradas y salidas, camara de mezcla, adaptador y dispensando dicha mezcla en la corriente del proceso en al menos una o mas ubicaciones.
WO2010053878A3 (en) Laminar flow in a precursor source canister
PH12017550146A1 (en) Method and apparatus for removing nitrogen oxides from gas streams
MY182457A (en) Inner surface features for co-current contactors
WO2016020692A3 (en) Apparatus and method for water treatment by an advanced oxidation process
WO2012015600A3 (en) Fluid gasification/degasification apparatuses, systems, and processes
AU2017268310A8 (en) Spray chambers and methods of using them
JP2015084455A5 (ja) 流体ハンドリング構造
JP2018526214A5 (enExample)
WO2016190143A8 (en) Liquid discharge apparatus, imprint apparatus, and method of manufacturing a component
MX2019011316A (es) Aparato y metodo para el tratamiento de un sustrato con una multiplicidad de particulas solidas.
WO2009092784A3 (en) Apparatus and method for distributing a plurality of fluid flows through a plurality of chambers, particularly for carrying out adsorption processes.
WO2019067319A3 (en) Microfluidic technique for detection of multi-contact miscibility
JP2016156092A5 (enExample)
SA517382112B1 (ar) طريقة للخلط في عملية لتحويل الهيدروكربون
WO2015013596A3 (en) Method and device for manufacturing polymer particles containing a therapeutic material
JP2017513570A5 (enExample)
AR071919A1 (es) Aparato para el tratamiento de fluidos
JP2019167628A5 (enExample)
JP2009530563A5 (enExample)
BR112013006937A2 (pt) dispositivo incluindo um bocal compacto de pulverização para limpeza de um pano de filtro em um filtro de disco
MX2016010061A (es) Esterilizacion de tapas.
JP2016516569A5 (enExample)
ZA202304756B (en) Fluid treatment apparatus