JP2016140938A5 - - Google Patents
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- Publication number
- JP2016140938A5 JP2016140938A5 JP2015017694A JP2015017694A JP2016140938A5 JP 2016140938 A5 JP2016140938 A5 JP 2016140938A5 JP 2015017694 A JP2015017694 A JP 2015017694A JP 2015017694 A JP2015017694 A JP 2015017694A JP 2016140938 A5 JP2016140938 A5 JP 2016140938A5
- Authority
- JP
- Japan
- Prior art keywords
- polishing pad
- resin
- abrasive
- pad according
- containing solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims 12
- 229920005989 resin Polymers 0.000 claims 10
- 239000011347 resin Substances 0.000 claims 10
- 239000000463 material Substances 0.000 claims 6
- 239000004745 nonwoven fabric Substances 0.000 claims 6
- 238000005296 abrasive Methods 0.000 claims 5
- 239000006061 abrasive grain Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 3
- 239000000835 fiber Substances 0.000 claims 2
- -1 polyethylene terephthalate Polymers 0.000 claims 2
- 229920000139 polyethylene terephthalate Polymers 0.000 claims 2
- 239000005020 polyethylene terephthalate Substances 0.000 claims 2
- 229920003002 synthetic resin Polymers 0.000 claims 2
- 239000000057 synthetic resin Substances 0.000 claims 2
- 239000003822 epoxy resin Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229920001568 phenolic resin Polymers 0.000 claims 1
- 239000005011 phenolic resin Substances 0.000 claims 1
- 229920000647 polyepoxide Polymers 0.000 claims 1
- 229920000728 polyester Polymers 0.000 claims 1
- 229920005749 polyurethane resin Polymers 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015017694A JP6465676B2 (ja) | 2015-01-30 | 2015-01-30 | 研磨パッド及び研磨パッドの製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015017694A JP6465676B2 (ja) | 2015-01-30 | 2015-01-30 | 研磨パッド及び研磨パッドの製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2016140938A JP2016140938A (ja) | 2016-08-08 |
JP2016140938A5 true JP2016140938A5 (zh) | 2018-02-01 |
JP6465676B2 JP6465676B2 (ja) | 2019-02-06 |
Family
ID=56569459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015017694A Active JP6465676B2 (ja) | 2015-01-30 | 2015-01-30 | 研磨パッド及び研磨パッドの製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6465676B2 (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7129850B2 (ja) * | 2018-08-22 | 2022-09-02 | アルテミラ製缶株式会社 | 内壁清掃装置 |
CN114523429A (zh) * | 2022-02-22 | 2022-05-24 | 阳江市伟艺抛磨材料有限公司 | 一种用于石材抛光的无纺布磨块及其制作方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06254772A (ja) * | 1993-03-04 | 1994-09-13 | Dainippon Printing Co Ltd | 湿式研磨テープ及びそれを用いた湿式研磨方法 |
JPH08294873A (ja) * | 1995-04-27 | 1996-11-12 | Fuji Photo Film Co Ltd | 研磨体 |
JP2902637B1 (ja) * | 1998-06-15 | 1999-06-07 | 日本ミクロコーティング株式会社 | 研磨シート及びその製造方法 |
JP2002158197A (ja) * | 2000-11-20 | 2002-05-31 | Toray Ind Inc | 研磨用パッドおよびそれを用いた研磨装置ならびに研磨方法 |
JP2002172563A (ja) * | 2000-11-24 | 2002-06-18 | Three M Innovative Properties Co | 研磨テープ |
JP2002233962A (ja) * | 2001-02-07 | 2002-08-20 | Dainippon Printing Co Ltd | 研磨体 |
JP4606733B2 (ja) * | 2003-12-22 | 2011-01-05 | 東洋ゴム工業株式会社 | 研磨パッドおよび半導体ウエハの研磨方法 |
JP2008194761A (ja) * | 2007-02-08 | 2008-08-28 | Roki Techno Co Ltd | 研磨シート及びその製造方法 |
JP5688590B2 (ja) * | 2010-11-12 | 2015-03-25 | 学校法人立命館 | 研磨パッド用表面処理剤及び研磨パッド用スプレー |
JP5972032B2 (ja) * | 2012-05-01 | 2016-08-17 | 新技術開発株式会社 | 高効率精密加工用研磨工具及びその製法 |
DE102013203116A1 (de) * | 2013-02-26 | 2014-08-28 | Robert Bosch Gmbh | Schleifmittelvorrichtung |
-
2015
- 2015-01-30 JP JP2015017694A patent/JP6465676B2/ja active Active
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