JP2016134531A - Nozzle inspection device, nozzle inspection method and component conveyance device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To widely inspect abnormality of a buffing state of an adsorption nozzle with a simple structure.SOLUTION: A nozzle inspection device has a shaft-like nozzle main body that adsorbs a component by a tip part thereof, a holder member that holds the tip part of the nozzle main body to freely enter and retreat in a shaft direction, and an energizing member which can protrude the tip part of the nozzle main body in the shaft direction from the holder member to a protrusion limit by energizing the nozzle main body, which inspects an adsorption nozzle in which the tip part of the nozzle main body contacts a component to adsorb the component by movement of the holder member in the shaft direction. The device further comprises: a detection part that detects physical amounts which vary accompanying the movement of the holder member in the shaft direction in association with the movement of the holder member; and a determination part which determines an entering and retreating state of the nozzle main body relative to the holder member accompanying the movement of the holder member on the basis of the physical amounts detected by the detection part.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a nozzle inspection technique for inspecting a suction nozzle having a so-called buffing function and a component conveying apparatus to which the nozzle inspection technique is applied.

  In surface mounters and component testing machines, as described in Patent Document 1, for example, a component conveying device that conveys components using a suction nozzle having a buffing function is provided. In the suction nozzle, a shaft-like nozzle body that sucks a component at the tip is held so as to be freely retractable in the axial direction with respect to the holder member. Further, a biasing member such as a spring is provided in the holder member, biasing the tip end portion of the nozzle body so as to protrude in the axial direction from the holder member, and providing a buffing function to the suction nozzle. For this reason, variations in the axial direction due to various factors such as variations in positioning in the axial direction, variations in the outer shape of the component itself, warpage of the printed circuit board, and floating of the tape reel in the component supply unit are absorbed. As a result, it is possible to effectively suppress physical stress from being applied to the electronic component and the printed circuit board on which the electronic component is mounted.

  The most concerned problem in the suction nozzle is the deterioration of the buffing function. For example, when the holder member is moved downward toward the component, the tip of the nozzle body moves toward the component with the tip protruding from the holder member, the tip of the nozzle body contacts the component, and the holder member is further moved downward. Then, the nozzle body is immersed in the holder member with respect to the holder member. However, when the buffing function is lowered, the immersion may not be performed smoothly, and a force larger than the normal force (the urging force by the urging member) may be applied to the component. Moreover, even if the holder member is returned in the direction away from the part (the direction opposite to the protruding side of the nozzle body), a situation may occur in which the nozzle body does not return to the original protruding state. In this case, when the holder member is moved downward to bring the tip of the nozzle body into contact with the component, it cannot absorb the axial variation due to various factors, and a force larger than the normal force is applied to the component. In some cases, the suction is not applied or the tip of the nozzle body does not come into contact with the component, resulting in a suction failure. That is, in these cases, there is a possibility that parts cannot be accurately conveyed.

  Therefore, in the apparatus described in Patent Document 1, a camera for detecting the position of the tip of the nozzle member with respect to the holder member is provided. Then, it is determined whether or not the buffing state of the suction nozzle is normal based on the image of the nozzle tip imaged by the camera, and if it is not within the normal range, it is determined that the buffing state is abnormal.

JP 2006-114534 A

  As described above, in the apparatus described in Patent Document 1, it is necessary to provide imaging means such as a camera in order to capture an image of the tip of the nozzle body. In addition, it is necessary to determine the buffing state of the suction nozzle by applying various image processes to the image. For this reason, there are restrictions on the apparatus configuration for providing a camera, and the addition of a camera, an image processing circuit, and the like is one of the main factors that cause an increase in apparatus cost.

  In addition to the serious problem that the nozzle body does not return to the original protruding state as described above, the suction nozzle abnormality is a load that is applied to the components due to the deterioration of the smoothness of the nozzle body. There are also mild ones that gradually increase. In other words, in addition to a case where a serious abnormality occurs suddenly, a minor abnormality may occur during repeated parts conveyance, and a serious abnormality may eventually occur. It was impossible to inspect such a mild abnormality with the apparatus described in Patent Document 1.

  The present invention has been made in view of the above-described problems, and is capable of inspecting abnormalities in the buffing state of the suction nozzle over a wide range with a simple configuration and transporting the components satisfactorily using the nozzle inspection technology. An object of the present invention is to provide a component conveying device capable of performing the above.

  According to a first aspect of the present invention, there is provided a shaft-like nozzle body that adsorbs a component at the tip portion, a holder member that holds the tip portion of the nozzle body so as to be freely retractable in the axial direction, and a nozzle body that biases the nozzle body. The suction nozzle has a biasing member that can project the tip of the nozzle from the holder member to the projection limit in the axial direction, and the tip of the nozzle body abuts against the component by the movement of the holder member in the axial direction. A detection unit that detects a physical quantity that changes as the holder member moves in the axial direction in association with the movement of the holder member, and a physical quantity detected by the detection unit, And a determination unit that determines a state in which the nozzle main body is withdrawn relative to the holder member accompanying the movement.

  A second aspect of the present invention is a shaft-shaped nozzle body that attracts components at the tip, a holder member that holds the nozzle body so as to be freely retractable in the axial direction, and a tip of the nozzle body that is pivoted from the holder member. A nozzle inspection method for inspecting the suction nozzle, wherein the tip of the nozzle body comes into contact with and sucks the part by the movement of the holder member in the axial direction. The step of moving the holder member in the axial direction, the step of detecting a physical quantity that changes with the movement of the holder member during the movement of the holder member, and the holder member accompanying the movement of the holder member from the detected physical quantity And a step of determining the exit / retreat state of the nozzle body with respect to.

  Further, according to a third aspect of the present invention, there is provided a shaft-like nozzle body that attracts components at the tip portion, a holder member that holds the tip portion of the nozzle body so as to be freely retractable in the axial direction, and biasing the nozzle body. An urging member that allows the tip of the nozzle body to protrude from the holder member in the axial direction to the limit of protrusion, and the tip of the nozzle body abuts on and adsorbs to the component by the movement of the holder member in the axial direction; A component transport device that transports a component by moving the head unit while providing a suction nozzle in the head unit and sucking the component at the tip of the nozzle main body, and includes the nozzle inspection device.

  As described above, according to the present invention, the physical quantity that changes with the movement of the holder member in the axial direction is detected in association with the movement of the holder member, and the withdrawal / retraction state of the nozzle body, that is, the suction nozzle is detected from the physical quantity. A buffing state is determined. Accordingly, it is possible to inspect a buffing state abnormality of the suction nozzle over a wide range with a simple configuration.

It is a top view which shows an example of the surface mounting machine equipped with 1st Embodiment of the nozzle test | inspection apparatus concerning this invention. It is a front view of the surface mounter shown in FIG. It is a figure which shows the structure of a suction nozzle. It is a block diagram which shows the electric constitution of the surface mounter of FIG. It is a figure which shows an example of the raising / lowering operation | movement of a suction nozzle when a suction nozzle is in a normal state, and the change of the load applied to a load cell. It is a figure which shows an example of the raising / lowering operation | movement of a suction nozzle when a suction nozzle is a mild abnormal state, and the change of the load applied to a load cell. It is a figure which shows an example of the raising / lowering operation | movement of a suction nozzle when a suction nozzle is in a severe abnormal state, and the change of the load applied to a load cell. It is a flowchart which shows 1st Embodiment of the nozzle test | inspection method concerning this invention. It is a figure which shows other examples of the raising / lowering operation | movement of a suction nozzle when a suction nozzle is in a severe abnormal state, and the change of the load applied to a load cell. It is a figure which shows an example of the raising / lowering operation | movement of a suction nozzle, and the change of nozzle tip pressure. It is a schematic diagram for demonstrating the test | inspection principle of 2nd Embodiment of the nozzle test | inspection method concerning this invention. It is a flowchart which shows 2nd Embodiment of the nozzle test | inspection method concerning this invention. It is a flowchart which shows the components adsorption | suction process in the surface mounter equipped with 3rd Embodiment of the nozzle test | inspection apparatus concerning this invention. It is a figure which shows the structure of the motor drive part which drives a Z-axis motor.

<First Embodiment>
FIG. 1 is a plan view showing an example of a surface mounter equipped with a first embodiment of a nozzle inspection apparatus according to the present invention. FIG. 2 is a front view of the surface mounter shown in FIG. As shown in FIGS. 1 and 2, the surface mounter 100 supplies a base 1, a board transport mechanism 2 that is disposed on the base 1 and transports a board 110 in the X direction, and supplies parts 2. There are two component supply units 4a and 4b, and a head unit 5 that conveys components from the component supply units 4a and 4b and mounts them on the substrate 110.

  The substrate transport mechanism unit 2 has a pair of conveyors 2 a extending in the transport direction (X direction) of the substrate 110. The pair of conveyors 2a are configured to receive the substrate 110 from the X1 direction side and transport it to a predetermined mounting work position, and to carry out the worked substrate 110 to the X2 direction side after the mounting operation.

  The component supply units 4a and 4b are arranged apart from each other in the X direction on the front side (Y2 direction side) of the substrate transport mechanism unit 2. In these component supply units 4a and 4b, a plurality of component supply units are provided. In the present embodiment, a tape feeder 41 that houses chip components such as an IC, a transistor, and a capacitor is used as an example of a component supply unit, and a plurality of tape feeders 41 are connected to a substrate transport mechanism in each component supply unit 4a, 4b. Arranged in the X direction along the portion 2. In each of the component supply units 4a and 4b, each tape feeder 41 is configured to supply a chip component to a predetermined component supply position 41a in the vicinity of the substrate transport mechanism unit 2 while intermittently feeding the tape.

  The head unit 5 has a function of sucking components supplied from the component supply units 4a and 4b via a suction nozzle 20 described later, transporting them to a position above the substrate 110, and mounting them on the substrate 110. The head unit 5 is configured to be movable in the transport direction (X direction) and the front-rear direction (Y direction) of the substrate 110. Specifically, the head unit 5 is supported by a unit support member 6 extending in the X direction so as to be movable in the X direction. The head unit 5 is moved in the X direction when the ball screw shaft 7b is rotated by the X-axis motor 7a. The unit support member 6 is supported by a pair of elevated frames 1a so as to be movable in the Y direction via a pair of fixed rails 1b extending in the Y direction. The unit support member 6 is moved in the Y direction when the ball screw shaft 8b is rotated by the Y-axis motor 8a.

  The head unit 5 includes a plurality of mounting heads 51. A suction nozzle 20 for sucking components is attached to the tip of each mounting head 51. Each mounting head 51 can be individually moved up and down (moved in the Z direction) by a Z-axis motor 5a (FIG. 4), and a vertical axis passing through the center of the suction nozzle 20 by an R-axis motor 5b (FIG. 4). Are configured to be rotatable individually or in conjunction with each other in the R direction with the rotation center as a center. In the present embodiment, six mounting heads 51 are provided, and three of the mounting heads 51 are arranged in front and rear rows, and the suction nozzles 20 are also arranged in front and rear rows of three like the mounting head 51. ing. That is, the six suction nozzles 20 are arranged in a state of being shifted by three in the Y direction as shown in FIG. The three suction nozzles 20 in the front row are arranged along the X direction to form the front nozzle row 21, and the three suction nozzles 20 in the rear row are separated from the front suction nozzle 20 by a center distance. The rear nozzle row 22 is formed by being arranged along the X direction at a distance. Thus, in this embodiment, the two nozzle rows 21 and 22 are arranged in the Y direction while being shifted in the X direction, and the front and rear suction nozzles 20 are arranged in a staggered manner.

  FIG. 3 is a diagram showing the configuration of the suction nozzle. The suction nozzle 20 includes an axial nozzle body 201, a cylindrical holder member 202 that holds the nozzle body 201 in an axial direction (Z direction), and an axial direction of the nozzle body 201 relative to the holder member 202. And a spring member 203 that urges toward the front end side (Z2 direction). In addition, in the state where the suction nozzle 20 is mounted on the mounting head 51 (in FIG. 3, a cross-sectional display by hatching lines), the axial direction of the suction nozzle 20 and the vertical direction (Z direction) coincide with each other. The axial direction will be described as the vertical direction (Z direction).

  The nozzle body 201 is made of a metal material such as tool steel, and has a flange portion 201a at the center, and a rear end portion 201b extending in an axial shape in the Z1 direction from the flange portion 201a and an axial shape in the Z2 direction. It has a tip 201c. The holder member 202 is made of a metal material such as stainless steel. The nozzle body 201 is provided so as to be freely retractable in the axial direction (Z direction) with respect to the holder member 202 on the tip side (Z2 direction side) of the holder member 202. However, the surface on the Z2 direction side of both main surfaces of the flange portion 201a of the nozzle body 201 is in the axial direction with a stopper pin (not shown) provided in a direction orthogonal to the axial direction at the tip end portion of the holder member 202. As a result, the nozzle body 201 is held (prevented from coming off) in the holder member 202. On the other hand, the surface on the Z1 direction side of the flange portion 201a functions as a spring support portion with which the lower end portion of the spring member 203 attached to the rear end portion 201b of the nozzle body 201 abuts.

  The spring member 203 is a compression coil spring, and is inserted from the lower surface 202a of the holder member 202 in a state of being attached to the rear end portion 201b of the nozzle body 201 as described above, and the upper end portion of the spring member 203 is the central portion of the holder member 202. It is locked by a spring receiving portion 202d (see FIG. 5). For this reason, the spring member 203 urges the nozzle body 201 in the Z2 direction, and as shown in FIG. 3, the tip 201c of the nozzle body 201 protrudes from the lower surface 202a of the holder member 202 to the maximum in the Z2 direction by the protrusion limit Lmax. Let At this time, the spring force of the spring member 203 is such that the flange body 201a of the nozzle body 201 and the spring body 203 together with the nozzle body 201 are housed in the holder member 202 from below and are attached to the tip of the holder member 202. It is supported by the holder member 202 via a stop pin. In this specification, the state in which the tip 201c of the nozzle body 201 protrudes from the holder member 202 by the protrusion limit Lmax is referred to as a “completely protruded state”.

  Further, when the tip 201c of the nozzle body 201 comes into contact with a component or the like, the nozzle body 201 can be retracted toward the holder member 202 while compressing the spring member 203. By adopting such a configuration, the suction nozzle 20 has a buffering function that reduces a shock that occurs when it comes into contact with a component or the like, that is, a so-called buffing function.

  Inside the nozzle body 201, an air passage 201d is formed as shown in the right side view of FIG. The air passage 201d communicates from the suction port 201e provided at the tip of the tip portion 201c in the nozzle body 201 to the rear end of the rear end portion 201b. Then, negative pressure is supplied to the suction port 201e through the through hole 202c extending in the axial direction Z at the upper end 202b of the holder member 202 and the air passage 201d, so that the tip 201c of the nozzle body 201 is negatively applied. It is possible to suck parts by applying pressure. In addition, in order to control the negative pressure in the front-end | tip part 201c of the nozzle main body 201, although a illustration is abbreviate | omitted, the pressure detection part for detecting the said negative pressure is provided.

  Returning to FIG. 1 and FIG. 2, the description of the configuration of the surface mounter 100 will be continued. As shown in FIG. 1, the surface mounting machine 100 is provided with a component imaging unit 9 that captures an image of a component sucked by the head unit 5. The component imaging unit 9 has a function of recognizing a holding state of components taken out from the component supply units 4 a and 4 b by the head unit 5 and held by the suction nozzles 20. The component imaging unit 9 is provided on the base 1, and in the present embodiment, the component supply positions 41a arranged in a line in the X direction of the tape feeders 41 between the component supply units 4a and 4b in plan view. Are arranged at the same position in the Y direction. Then, the component imaging unit 9 images the component sucked by the suction nozzle 20 of the head unit 5 from below.

  Further, the board imaging unit 10 is fixed on the X2 direction side of the head unit 5, and the board 110 can be imaged from above at an arbitrary position by moving the head unit 5 in the X axis direction and the Y axis direction. It has become. Then, the board imaging unit 10 captures images of a plurality of fiducial marks attached to the board 110 on the mounting work position and recognizes the board position and board direction.

  Furthermore, in this embodiment, the load cell 25 is fixedly disposed on the base 1. As shown in FIG. 2, the load cell 25 is provided at a position lower than the head unit 5 in the vertical direction (axial direction) Z, and the nozzle body when the tip 201c of the nozzle body 201 contacts the upper surface thereof. It functions as a load detection unit that detects a load received from 201. When viewed from the suction nozzle 20 side, the load is also a load applied to the tip portion 201c by the tip portion 201c of the nozzle body 201 coming into contact with the load cell 25. The load cell 25 is used when the suction nozzle 20 is inspected. The tip 201c of the nozzle main body 201 becomes a contacted member with which the nozzle main body 201 comes into contact, and a reaction force having the same magnitude as the load received from the nozzle main body 201 is applied to the nozzle main body 201.

FIG. 4 is a block diagram showing an electrical configuration of the surface mounter of FIG. The surface mounter 100 includes a controller 120 that inspects the suction nozzle 20 and controls each part of the apparatus using board data to efficiently mount components. The controller 120 includes a CPU (= Central Processing Unit) and a RAM (= Random Access).
An arithmetic processing unit 121 configured by a computer having a memory), a storage unit 122 such as a hard disk drive, a motor control unit 123, and an image processing unit 124 are provided.

  The arithmetic processing unit 121 appropriately reads an automatic mounting program and a nozzle inspection program stored in advance in the storage unit 122, develops them in a RAM (not shown), and performs automatic mounting processing and nozzle inspection processing. Among these, the nozzle inspection process is executed at predetermined timings such as when the operation of the surface mounter 100 reaches a certain time before starting the operation of the day, when the substrate 110 is replaced, and so on. In the nozzle inspection process, when the nozzle body 201 of the suction nozzle 20 comes into contact with the load cell 25, the nozzle body 201 is retracted from the holder member 202 based on the load value detected by the load cell 25, that is, the suction nozzle 20 is buffed. The state is determined by the arithmetic processing unit 121, and it is inspected whether or not an abnormality has occurred in the buffing state of the suction nozzle 20. By the nozzle inspection, it is possible to accurately grasp the deterioration of the buffing function in the suction nozzle 20. Thus, the arithmetic processing unit 121 functions as the “determination unit” of the present invention.

  Further, the automatic mounting process controls each part of the apparatus according to the board data, picks up the parts supplied from the part supply parts 4a and 4b, images the parts, mounts the parts on the board 110, and heads for these parts In this process, a unit sequence consisting of a plurality of movements of the unit 5 is repeated. Thus, a plurality of components are all mounted on the substrate 110.

  An X-axis motor 7a, a Y-axis motor 8a, a Z-axis motor 5a, and an R-axis motor 5b are electrically connected to the motor control unit 123, and drive control of each motor is performed. Each of the motors 7a, 8a, 5a, 5b is provided with an encoder (not shown) that outputs a pulse signal corresponding to the rotation state of the motor. The pulse signal output from each encoder is configured to be captured by the controller 120, and the arithmetic processing unit 121 that receives these signals acquires information on the rotation amount of each of the shaft motors 7a, 8a, 5a, and 5b. Each axis motor 7a, 8a, 5a, 5b is controlled with the motor control part 123. FIG.

  The component imaging unit 9 and the board imaging unit 10 are electrically connected to the image processing unit 124, and imaging signals output from these units 9 and 10 are taken into the image processing unit 124, respectively. Then, in the image processing unit 124, the analysis of the component image and the analysis of the board image are performed based on the captured imaging signal.

  Note that reference numeral 130 in FIG. 4 indicates various types of information related to nozzle inspection by the arithmetic processing unit 121, and displays / operations for the user to input various types of data, commands, and other information to the controller 120. Is a unit.

  In the surface mounter 100 configured as described above, parts are transported by the head unit 5 using the buffing function, but dust in the air or cream solder on the substrate 110 is sucked in or continuously. The buffing function may deteriorate due to wear or the like due to use. In this case, there is a possibility that the parts cannot be accurately conveyed as described above. Therefore, in the present embodiment, the nozzle inspection device configured by the load cell 25 and the controller 120 is used to inspect a decrease in the buffing function in each suction nozzle 20 (nozzle inspection processing). Here, before detailing the nozzle inspection process, when the buffing function is functioning normally (normal state: FIG. 5), when the buffing function is functioning but the function is deteriorated (mild abnormal condition) : FIG. 6) and the case where the buffing function stops working (severe abnormal state: FIG. 7) will be described respectively.

  FIG. 5 is a diagram illustrating an example of the lifting and lowering operation of the suction nozzle and the change in the load applied to the load cell when the suction nozzle is in a normal state. The horizontal axis of FIG. In addition, the left vertical axis in the figure indicates the load value detected by the load cell 25. Furthermore, the right vertical axis indicates the height position of the suction nozzle 20 in the axial direction Z, and in this specification, the height in the axial direction Z of the lower surface 202a of the holder member 202 attached to the tip of the mounting head 51. The position is used as the height position of the suction nozzle 20. These points are the same in FIGS. 6 and 7 described later.

  In order to reproduce on the load cell 25 the buffing operation executed at the time of the component suction operation in which the components supplied from the component supply units 4a and 4b are sucked by the suction nozzle 20, the suction nozzle as shown by the one-dot chain line in FIG. 20 is moved in the axial direction Z. Further, the output (load value) of the load cell 25 accompanying the movement is detected and plotted in the graph of FIG. 5 (this is the same in the abnormal state (FIGS. 6 and 7) described later). ). The result obtained thereby is the thick solid line in FIG. First, the mounting head 51 mounted with the suction nozzles 20 to be inspected among the plurality of mounting heads 51 is positioned above the load cell 25, and then the mounting head 51 is lowered by the Z-axis motor 5a. The suction nozzle 20 attached to 51 also descends together. Here, since the suction nozzle 20 is in a normal state, the tip 201c of the nozzle body 201 is lowered toward the load cell 25 in a state of protruding from the lower surface 202a of the holder member 202 by the protrusion limit Lmax in the Z2 direction, that is, in a fully protruded state. To do. At the timing T1, the tip 201c of the nozzle body 201 comes into contact with the upper surface (load detection surface) of the load cell 25. Accordingly, the buffing function is not exhibited until the timing T1 is reached, and the load value detected by the load cell 25 remains zero. In the present specification, the height position of the suction nozzle 20 is specified by the position of the lower surface 202a of the holder member 202 in the axial direction Z, and the height position of the suction nozzle 20 at the timing T1 is expressed as “buffing zero height”. This is referred to as “H0”.

  By further driving of the Z-axis motor 5a, the suction nozzle 20 is lowered from the buffing zero height H0 in the Z2 direction, that is, the holder member 202 is lowered in the Z2 direction, and the tip 201c of the nozzle body 201 is loaded via the spring member 203. Press against the top of 25. For this reason, the load value detected by the load cell 25 increases as the holder member 202 descends. However, the increase in load value is relatively gradual due to the buffing function of the suction nozzle 20. That is, as the holder member 202 descends in the Z2 direction, the spring member 203 contracts and the load acting on the load cell 25 is reduced. When the suction nozzle 20 is normal, the friction between the nozzle body 201, the holder member 202 and the spring member 203 is negligible, so that the load acting on the load cell 25 is substantially equal to that of the spring member 203. Only the urging force generated by the contraction. The reaction force acting on the nozzle body 201 from the load cell 25 antagonizes the urging force generated by the contraction of the spring member 203. Therefore, as indicated by the thick solid line in FIG. 5, the load value detected by the load cell 25 as the suction nozzle 20 descends increases proportionally with a slope corresponding to the spring constant and the descending speed of the suction nozzle 20. .

  By driving the Z-axis motor 5a, the suction nozzle 20 is lowered by a predetermined distance ΔH from the buffing zero height H0 (timing T2). Thus, the load value when the suction nozzle 20 is positioned at the descending height HL is a value WN determined by the spring constant and the distance ΔH. The distance ΔH is set to the same distance as the buffing amount when performing component suction or component mounting. As shown in FIG. 5, this distance ΔH is from the buffing zero height H0 when the spring member 203 reaches a compression limit where it cannot be compressed any more (corresponding to when the holder member 202 is lowered to the lower limit height Hlim). It is set to a value smaller than the limit distance ΔHlim, which is the descending distance.

  After the timing T2, the Z-axis motor 5a is reversely rotated to raise the suction nozzle 20 from the lowered height HL in the Z1 direction. Then, until the suction nozzle 20 returns to the buffing zero height H0, that is, from the timing T2 to the timing T3, the spring member 203 expands and the suction nozzle 20 rises as shown by a thick solid line in FIG. Along with this, the load value detected by the load cell 25 decreases proportionally with a slope corresponding to the spring constant and the rising speed of the suction nozzle 20, and becomes zero after the timing T3.

  Therefore, as is apparent from FIG. 5, when the suction nozzle 20 is in a normal state, the load value applied to the component is a load value (biasing force from the spring member 203) WN at the maximum, and the spring member 203 The load value WN can be adjusted by appropriately setting the spring constant and the distance ΔH (= H0−HL).

  FIG. 6 is a diagram illustrating an example of the lifting and lowering operation of the suction nozzle and a change in the load applied to the load cell when the suction nozzle is in a slight abnormal state. In addition, the broken line in the same figure (FIG. 7 and FIG. 9 demonstrated later) has shown the load change in a normal state.

  The mounting head 51 is positioned above the load cell 25, and then the suction nozzle 20 is lowered together with the mounting head 51 by the Z-axis motor 5a. Here, since the buffing state of the suction nozzle 20 is abnormal but mild, the suction nozzle 20 descends toward the load cell 25 in a fully projecting state, and the tip 201c of the nozzle body 201 moves to the upper surface (load detection surface) of the load cell 25 at timing T1. ). Until this timing T1 is reached, the load value detected by the load cell 25 remains zero as in the normal state.

  However, since the buffing function is slightly degraded due to inhalation of dust in the air, cream solder on the substrate 110, or wear due to continuous use, etc., the spring member 203 contracts as the holder member 202 descends. For example, as shown by a thick solid line in FIG. 6, the load value detected by the load cell 25 increases stepwise. Moreover, friction among the nozzle body 201, the holder member 202, and the spring member 203 is increased to a level that cannot be ignored. That is, the force required to lower the holder member 202 becomes a load that overcomes the frictional force in addition to the urging force generated by contracting the spring member 203, and this is detected by the load cell 25 as a load detector. From the load cell 25, a reaction force that is the same magnitude as the load, that is, the force required to lower the holder member 202 and reverse in direction acts on the nozzle body 201. As a result, the load acting on the load cell 25 due to the influence of the friction is higher than that in the normal state, and becomes the maximum load value WL (> WN) at the timing T2.

  Further, after the timing T2, the Z-axis motor 5a is reversely rotated to raise the suction nozzle 20 from the lowered height HL in the Z1 direction. Then, since the buffing state is slightly abnormal, when the suction nozzle 20 returns to the buffing zero height H0, the spring member 203 returns to the fully protruding state by the biasing force of the spring member 203, but the spring member accompanying the rise of the holder member 202 The extension 203 is not smoothly performed. Therefore, for example, as indicated by a thick solid line in FIG. 6, the load value detected by the load cell 25 decreases in a stepped manner.

  Therefore, as apparent from FIG. 6, when the suction nozzle 20 is in a slight abnormal state, the load value applied to the component becomes the load value WL, and a load higher than the normal state is applied to the component. Moreover, since slight load fluctuations are observed during the raising and lowering of the suction nozzle 20, it is desirable to perform maintenance on the suction nozzle 20 at an early stage.

  The load value detected by the load cell 25 between the timing T1 and the timing T2 (that is, the suction nozzle descending height position H1 is between the buffing zero height H0 and the descending height HL) causes the spring member 203 to contract. In the case of exceeding the urging force generated by the operation (indicated by a dashed line connecting the point of the load cell load value 0 and the timing T1 and the point of the load cell load value WN and the timing T2 in FIG. 6), the timing T2 Therefore, even if the load cell load value WN is not exceeded, it can be said that it is an abnormal state. Furthermore, even when the holder member 202 is raised with respect to the above suction nozzle 20 and the load cell load value becomes 0 at the point of timing T3 at which the buffing zero height H0 is set, it can be said that the load nozzle load value is 0. It is desirable to carry out maintenance for

  FIG. 7 is a diagram illustrating an example of the lifting and lowering operation of the suction nozzle and a change in the load applied to the load cell when the suction nozzle is in a severely abnormal state. The mounting head 51 is positioned above the load cell 25, and then the suction nozzle 20 is lowered together with the mounting head 51 by the Z-axis motor 5a. Here, although the suction nozzle 20 is in a severely abnormal state, as in the case of a mildly abnormal state, the suction nozzle 20 descends toward the load cell 25 in a fully protruding state, and the tip 201c of the nozzle body 201 is moved to the load cell 25 at timing T1. In contact with the upper surface (load detection surface). Until this timing T1 is reached, the load value detected by the load cell 25 remains zero as in the normal state.

  However, the buffing function is further reduced as compared with the case where the buffing function is light, and the friction between the nozzle body 201, the holder member 202 and the spring member 203 is very large. Therefore, the spring member 203 is forcibly compressed by the lowering of the holder member 202, and the compressed state is maintained by the friction. As a result, for example, as shown by a thick solid line in FIG. 7, the load value detected by the load cell 25 rapidly increases, and the maximum load value WS (> WL>) at timing T2 when the suction nozzle 20 reaches the descending height HL. WN). Moreover, since the frictional force is large as described above, at the timing T2, the tip portion 201c of the nozzle body 201 is stored in a state where the protrusion length from the holder member 202 is shorter than the protrusion limit Lmax in the fully protruded state by the distance ΔH. The nozzle body 201 is fixed to the holder member 202 as it is (hereinafter referred to as “incompletely protruding state”).

  Therefore, even after the timing T2, even if the Z-axis motor 5a is rotated in the reverse direction, the suction nozzle 20 is raised from the descending height HL in the Z1 direction while the nozzle body 201 is fixed to the holder member 202. Therefore, for example, as indicated by a thick solid line in FIG. 7, the load value detected by the load cell 25 is rapidly zeroed only by the minute time ΔT1 from the timing T2.

  Therefore, as apparent from FIG. 7, when the suction nozzle 20 is in a severely abnormal state, the load value applied to the component becomes the load value WS, and a very high load is applied to the component. In addition, since the nozzle body 201 does not return to the fully projecting state after the component is picked up by the suction nozzle 20, the height position of the component is deviated from the design data. As a result, it becomes difficult to perform component mounting satisfactorily. From these facts, when a severe abnormal state is detected, it is desirable to replace the nozzle early without performing the component mounting work by the suction nozzle 20.

  As described above, the deterioration of the buffing function of the suction nozzle 20 can be inspected by detecting the load by the load cell 25, and the buffing defect of the suction nozzle 20 can be inspected before performing the component mounting operation based on the inspection result. it can. As a result, it is possible to improve the efficiency of component mounting work. Therefore, in the present embodiment, the nozzle inspection program stored in the storage unit 122 in advance is read at a timing such as before the start of operation of the day, and the controller 120 controls each part of the apparatus according to the nozzle inspection program, thereby performing the nozzle inspection. Process. Hereinafter, the first embodiment of the nozzle inspection method according to the present invention will be described in detail with reference to FIG.

  FIG. 8 is a flowchart showing the first embodiment of the nozzle inspection method according to the present invention. The head unit 5 is moved so that the mounting head 51 mounted with the suction nozzle (hereinafter referred to as “inspection target nozzle”) 20 that is subjected to nozzle inspection is positioned above the load cell 25 (step S101). Subsequently, the mounting head 51 is started to descend by the Z-axis motor 5a, and thereby the inspection target nozzle is also started to descend (step S102). When the inspection target nozzle 20 reaches the lowering height HL (determined as “YES” in step S103), the mounting head 51 is stopped from being lowered by the Z-axis motor 5a, and the nozzle of the inspection target nozzle 20 is stopped. The load applied to the load cell 25 by the tip 201c of the main body 201, that is, the load value (load cell load value) W1 acting on the component is detected by the load cell 25 (step S104).

  In the next step S105, the Z-axis motor 5a rotates reversely and the mounting head 51 starts to rise, and thereby the inspection target nozzle 20 also starts to rise. Thereafter, the inspection target nozzle 20 returns to the original height position, but the load cell load value W2 detected by the load cell 25 is detected when a certain time (for example, ΔT1 in FIG. 7) has elapsed from the start of the rise. Then, a load change amount ΔW (= W1−W2) is calculated (step S106). Based on the load cell load value W1 and the load change amount ΔW, the arithmetic processing unit 121 of the controller 120 determines whether the inspection target nozzle 20 is in a normal state, a mild abnormal state, or a severe abnormal state. (Steps S107 to S111). That is, the arithmetic processing unit 121 determines whether or not the load cell load value W1 at the timing T2 (see FIGS. 5 to 7) is larger than the maximum load value WN in the normal state (step S107). Here, if “NO” (for example, in the case of FIG. 5), it is determined that the inspection target nozzle 20 is in a normal state, and that effect is displayed on the display unit (not shown) of the display / operation unit 130. The worker is notified (step S108).

  On the other hand, if “YES” is determined in the step S107, the arithmetic processing unit 121 further determines whether or not the load change amount ΔW is larger than the threshold value (step S109). Here, if “NO” (for example, in the case of FIG. 6), the buffing state of the inspection target nozzle 20 is abnormal, but it is determined to be mild, and the inspection target nozzle 20 is in a mild abnormal state. A message to the effect that the maintenance of the inspection target nozzle 20 is recommended is displayed on the display unit of the display / operation unit 130 to notify the operator (step S110). Conversely, if “YES” is determined in step S109 (for example, in the case of FIG. 7), the buffing state of the inspection target nozzle 20 is determined to be a serious abnormality, and the inspection target nozzle 20 is a severe abnormality state. The display unit of the display / operation unit 130 notifies the operator that the component mounting using the inspection target nozzle 20 is prohibited and the replacement of the inspection target nozzle 20 is recommended (step S111).

  When the inspection of the inspection target nozzles 20 is completed in this way, while the inspection of the suction nozzles 20 for all the mounting heads 51 is not completed (while it is determined “NO” in step S112), the uninspected suction nozzles The above-described series of steps (steps S101 to S111) are repeatedly executed with 20 as the inspection target nozzle.

  As described above, according to the present embodiment, the load cell 25 that detects the load received from the tip 201c of the nozzle body 201 is provided, and the buffing state of the suction nozzle 20 is accurately determined only from the load cell load value detected by the load cell 25. The suction nozzle 20 is inspected. For this reason, the abnormal state of the suction nozzle can be inspected with a simpler configuration than the apparatus described in Patent Document 1. In addition, in the present embodiment, it is possible to inspect even a slight abnormal state that is difficult to detect with the apparatus described in Patent Document 1, and it is possible to inspect a suction nozzle abnormality over a wide range.

  In the first embodiment, the suction nozzle 20 is inspected on the assumption that the inspection target nozzle 20 descending toward the load cell 25 is in a completely protruding state, but the inspection target nozzle 20 is in an incompletely protruding state. In this case, for example, a load change as shown in FIG. 9 is shown.

  FIG. 9 is a diagram illustrating another example of the raising / lowering operation of the suction nozzle and a change in the load applied to the load cell when the suction nozzle is in a severely abnormal state. The mounting head 51 is positioned above the load cell 25, and then the suction nozzle 20 is lowered together with the mounting head 51 by the Z-axis motor 5a. Here, the suction nozzle 20 descends toward the load cell 25 in an incompletely protruding state, and at the timing T1, the tip 201c of the nozzle body 201 does not contact the upper surface (load detection surface) of the load cell 25, and the subsequent timing T4. To contact the upper surface of the load cell 25. Until the time T4 is reached, the load value detected by the load cell 25 also remains zero. Thereafter, the same behavior as in FIG. 7 is exhibited. Therefore, the timing at which the load value detected by the load cell 25 begins to rise is detected, and this coincides with the timing T1 (timing at which the suction nozzle 20 descends and contacts the load cell 25 in the fully projecting state) or is delayed. An abnormality of the suction nozzle 20 may be detected by determining whether or not. Such a detection operation may be executed alone to perform nozzle inspection, or may be combined with the first embodiment.

Second Embodiment
By the way, in the said embodiment, the load cell load value which changes with the movement of the holder member 202 is detected by the load cell 25 in association with the movement of the holder member 202 as the “physical quantity” of the present invention, and based on this, the inspection of the suction nozzle 20 is performed. As described below, the pressure at the tip 201c of the nozzle body 201 (hereinafter referred to as “nozzle tip pressure”) is detected as the “physical quantity” of the present invention, and nozzle inspection is performed based on the pressure value. You may go. Hereinafter, the case where the nozzle inspection apparatus according to the second embodiment of the present invention is applied to the surface mounter 100 will be described with reference to FIGS. 10 to 12. The surface mounter is basically the same as the surface mounter 100 described above except that the load cell 25 is not provided. However, in the second embodiment, a pressure detector (in FIGS. 10 and 11) is used. 26) functions as the “detecting portion” of the present invention, and a base for detecting the pressure related to the protruding length of the tip portion 201c of the nozzle body 201 from the holder member 202 using the pressure detecting portion. The upper surface of a part of 1 is smooth, hard and level without any unevenness, and is a contacted member with which the tip 201c of the nozzle body 201 contacts when the suction nozzle 20 is inspected. Function as an auxiliary part (reference numeral 27 in FIGS. 10 and 11). Here also, the inspection principle of the nozzle inspection process will be described with reference to FIGS. 10 and 11 before detailed description of the nozzle inspection process in the second embodiment.

  FIG. 10 is a diagram illustrating an example of the raising / lowering operation of the suction nozzle and the change in the nozzle tip pressure. The horizontal axis of FIG. In addition, the left vertical axis in the figure indicates the value of the nozzle tip pressure detected by the pressure detection unit. Further, the right vertical axis represents the height position of the suction nozzle 20 in the axial direction Z.

  In order to reproduce on the auxiliary part 27 the buffing operation executed at the time of the component suction operation for sucking the components supplied from the component supply units 4a and 4b by the suction nozzle 20, the suction is performed as shown by the one-dot chain line in FIG. The nozzle 20 is moved in the axial direction Z. Further, the output (nozzle tip pressure) of the pressure detector 26 accompanying the movement was detected and plotted on the graph in the column (a) of FIG. The result obtained thereby is a thick solid line in FIG. First, when the mounting head 51 is positioned above the auxiliary part 27 for pressure detection, and then the mounting head 51 is lowered by the Z-axis motor 5a, the suction nozzle 20 attached to the mounting head 51 is also lowered together. . Here, when the suction nozzle 20 is in a fully projecting state as shown in the column (b) of FIG. 10, the suction nozzle 20 is buffing as shown by the broken line in the column (a) of FIG. When approaching the zero height H0, the nozzle tip pressure begins to change due to the gap between the tip 201c of the nozzle body 201 and the auxiliary part 27 becoming smaller, and when reaching the buffing zero height H0, it is necessary for component suction. Negative pressure value (hereinafter referred to as “adsorption level”) (timing T5). Further, while the suction nozzle 20 is further lowered in the Z2 direction from the buffing zero height H0 by further driving of the Z-axis motor 5a, the nozzle tip pressure further decreases below the suction level, and a larger negative pressure is applied to the auxiliary portion 27. Act on.

  On the other hand, as shown in the column (c) of FIG. 10, when the suction nozzle 20 is in an incompletely protruding state, as shown by the solid line in the column (a) of FIG. The nozzle tip pressure reaches the suction level at a timing T6 later than the timing T5. As described above, the timing at which the nozzle tip pressure reaches the suction level is delayed by the time ΔT2 depending on whether the suction nozzle 20 is in a completely protruding state or an incompletely protruding state. Further, the height of the suction nozzle 20 when the nozzle tip pressure reaches the suction level also differs depending on whether the suction nozzle 20 is in a completely protruding state or an incompletely protruding state.

  Therefore, as is apparent from FIG. 10, the nozzle tip pressure is detected while lowering the suction nozzle 20, and the axial direction Z of the suction nozzle 20 at the timing when the detected value reaches the suction level or when the detection level reaches the suction level. It is possible to inspect the suction nozzle 20 based on at least one of them.

  The above-described inspection is performed until the suction nozzle 20 is moved to the lowering height HL, but it is also possible to inspect the suction nozzle 20 before returning from the lowering height HL. The inspection principle will be described with reference to FIG.

  FIG. 11 is a schematic diagram for explaining the inspection principle of the second embodiment of the nozzle inspection method according to the present invention. In FIG. 11, (a) column shows the case where the buffing state of the suction nozzle 20 is normal. FIG. 9B shows a case where the buffing state of the suction nozzle 20 is abnormal. When the buffing state is normal, the suction nozzle 20 is lowered to the buffing zero height H0, and when the buffing state is abnormal, the suction nozzle 20 is lowered to the lowering height HL. The tip portion 201c of 201 comes into contact with the auxiliary portion 27, and the nozzle tip pressure reaches the adsorption level. Thereby, the nozzle body 201 is firmly attached to the auxiliary portion 27.

  Next, when the suction nozzle 20 is raised from the lowered height HL, if the buffing state of the suction nozzle 20 is normal, the nozzle body 201 is moved to the auxiliary portion 27 as shown in the column (a) of FIG. Only the holder member 202 rises in the Z1 direction while the spring member 203 is extended without being held in close contact and changing the height position in the axial direction Z. On the other hand, when the buffing function of the suction nozzle 20 is abnormal, the nozzle body 201 is fixed to the holder member 202 as shown in the column (b) of the figure, and the fixing force is the nozzle tip pressure (negative pressure). Therefore, the nozzle body 201 is peeled off from the auxiliary portion 27 and rises integrally with the holder member 202.

  Therefore, after the suction nozzle 20 is lowered to the lowering height HL, the nozzle tip pressure during the movement is detected while being raised to the buffing zero height H0, and the suction nozzle 20 is inspected based on the detection result. Is possible.

  FIG. 12 is a flowchart showing a second embodiment of the nozzle inspection method according to the present invention. Also in the second embodiment, similarly to the first embodiment, the nozzle inspection program stored in the storage unit 122 in advance is read at a timing such as before the start of operation of the day, and the controller 120 performs the operation according to the nozzle inspection program. A nozzle inspection process is performed by controlling each part of the apparatus. First, the head unit 5 is moved so that the mounting head 51 equipped with the inspection target nozzle 20 is positioned above the auxiliary portion 27 (step S201). Subsequently, a negative pressure is supplied from a negative pressure supply source (not shown) to the inspection target nozzle 20 via the pipe 28 (see FIG. 10), and suction by the tip portion 201c of the nozzle body 201 is started (step). At the same time, the detection of the nozzle tip pressure by the pressure detection unit 26 is started. Then, the mounting head 51 is lowered by the Z-axis motor 5a, and the inspection target nozzle 20 is positioned at the buffing zero height H0 (step S203).

  In the next step S204, it is determined whether or not the nozzle tip pressure detected by the pressure detector 26 has reached the suction level. Here, steps S205 and S206 are executed while it is determined that the suction level has not been reached. In this step S205, it is determined whether or not the inspection target nozzle 20 has been lowered to the lowering height HL. Here, when “NO” and “YES” are determined in steps S204 and S205, respectively, the tip 201c of the nozzle body 201 assists even when the inspection target nozzle 20 reaches the descending height HL. This means that the portion 27c is not reached and the tip 201c is substantially immersed in the holder member 202. In this embodiment, since the component suction cannot be performed by such an inspection target nozzle 20, it is determined that the inspection target nozzle 20 is in a severely abnormal state, and component mounting using the inspection target nozzle 20 is prohibited. In addition, a message indicating that the inspection target nozzle 20 is recommended to be replaced is displayed on the display unit of the display / operation unit 130 to notify the operator (step S207). On the other hand, while it is determined “NO” in both steps S204 and S205, that is, the mounting head 51 is lowered by a minute amount in the Z2 direction (step S206), and the process returns to step S204.

  If it is determined in step S204 that the nozzle tip pressure has reached the suction level, the height position of the inspection target nozzle 20 at that time, that is, the suction start height H2 is acquired (step S208), and the buffing zero height H0 is obtained. Is determined (step S209). Here, the fact that they do not match means, for example, that the inspection target nozzle 20 has been lowered in an incompletely protruding state as shown in the column (c) of FIG. The inspection of the nozzle 20 is completed. On the other hand, when “YES” is determined in step S209, for example, as shown in the column (b) of FIG. 10, it means that the inspection target nozzle 20 has been lowered in the fully projecting state, and therefore the process further proceeds to step S210. Proceed with inspection.

  In this step S210, as shown in FIG. 11, after the mounting head 51 is forcibly lowered to lower the inspection target nozzle 20 to the lowered height HL, the mounting head 51 is immediately forcibly raised to inspect. The nozzle 20 is returned to the buffing zero height H0. Then, it is determined whether or not the nozzle tip pressure detected by the pressure detection unit 26 changes (step S211). When a change in the nozzle tip pressure is recognized (in the case of “YES” in step S211), for example, as shown in the column (b) of FIG. 11, the nozzle body 201 is fixed to the holder member 202 and the nozzle 20 to be inspected. It is determined that the buffing function is impaired, and the process proceeds to step S207 to complete the inspection of the inspection target nozzle 20. On the other hand, when the change of the nozzle tip pressure is not recognized (in the case of “NO” in step S211), for example, as shown in the column (a) of FIG. 11, the buffing function of the nozzle 20 to be inspected works effectively. It is determined that the inspection target nozzle 20 is in a normal state, and a message to that effect is displayed on the display unit (not shown) of the display / operation unit 130 to notify the operator (step S212).

  When the inspection of the inspection target nozzles 20 attached to the mounting heads 51 is completed in this way, the inspection of the suction nozzles 20 for all the mounting heads 51 is not completed (while “NO” is determined in step S213). Repeats the above-described series of steps (steps S201 to S212) using the uninspected suction nozzle 20 as an inspection target nozzle.

  As described above, according to the second embodiment, the pressure detection unit 26 detects the nozzle tip pressure as the “physical quantity” of the present invention, and accurately grasps the buffing state of the suction nozzle 20 from only the nozzle tip pressure. The suction nozzle 20 is inspected. In addition, the pressure detection unit 26 is a component that the surface mounter 100 is originally equipped with. Therefore, the abnormality of the suction nozzle can be inspected with an apparatus described in Patent Document 1 and with a simpler configuration than that of the first embodiment.

  Further, in the second embodiment, the deterioration of the buffing function of the suction nozzle 20 can be inspected by detecting the nozzle tip pressure using the pressure detection unit 26 and the auxiliary part 27, and the component mounting operation is performed based on the inspection result. The buffing failure of the suction nozzle 20 can be inspected before. As a result, it is possible to improve the efficiency of component mounting work.

  Further, in the second embodiment, the abnormality of the suction nozzle 20 before the suction nozzle 20 reaches the lowering height HL and the abnormality of the suction nozzle 20 when the suction nozzle 20 lowered to the lowering height HL rises. Can be inspected. Of course, as in the first embodiment, it is possible to inspect only the abnormality of the suction nozzle 20 when the suction nozzle 20 lowered to the lowering height HL is raised. On the contrary, it is possible to inspect only the abnormality of the suction nozzle 20 before the suction nozzle 20 reaches the descending height HL.

  In the second embodiment, the lowering of the buffing function is determined based on the nozzle height of the suction nozzle 20 when the nozzle tip pressure reaches the suction level. The determination may be performed based on time information. For example, the elapsed time from when the suction nozzle 20 is positioned at the buffing zero height H0 in step S203 until it is determined “YES” in step S204 can be used as the time information. Still further, in the second embodiment, a part of the base 1 is a contacted member with which the tip 201c of the nozzle body 201 abuts when the suction nozzle 20 is inspected, and the auxiliary part 27 for pressure detection. However, the load cell 25 in the first embodiment may be used.

<Third Embodiment>
In many cases, the buffing function is lowered while a minor abnormality first occurs while the component mounting operation is repeated, and the frequency of the abnormality gradually increases. Therefore, even if an abnormality is detected, the component mounting operation is not immediately stopped, but the component mounting operation by the suction nozzle 20 may be stopped when the frequency of occurrence of the abnormality becomes equal to or higher than a certain level (third embodiment). Form).

  FIG. 13 is a flowchart showing component suction processing in a surface mounter equipped with the third embodiment of the nozzle inspection apparatus according to the present invention. The surface mounter equipped with the nozzle inspection apparatus according to the third embodiment is basically the same as the surface mounter equipped with the nozzle inspection apparatus according to the second embodiment.

  The surface mounter 100 reads an automatic mounting program stored in the storage unit 122 in advance, and the controller 120 controls each part of the apparatus according to the automatic mounting program, so that a component suction process, a component transport process, a component mounting process, etc. The component mounting operation consisting of is repeated. In the arithmetic processing unit 121 of the controller 120, for each mounting head 51, an abnormal count k indicating the number of times that an abnormality of the suction nozzle 20 mounted on the mounting head 51 is detected and the component mounting operation by suctioning with the suction nozzle 20. A component suction count m indicating the number of times of contribution to is set. The component suction process shown in FIG. 13 is executed for each mounting head 51. The following description will focus on the component suction process performed for one mounting head 51.

  In this component suction processing, when a new suction nozzle 20 or a maintenance suction nozzle 20 is mounted on the mounting head 51, the abnormal count k and the component suction count m are reset to zero (step S301). Then, unless the abnormality occurrence frequency exceeds a preset threshold value, component suction and nozzle inspection are performed in parallel according to the automatic mounting program (steps S302 to S312). That is, the head unit 5 is moved so that the mounting head 51 is positioned above the component supplied from the component supply units 4a and 4b (step S302). Subsequently, a negative pressure is supplied from a negative pressure supply source (not shown) to the suction nozzle 20 and suction by the tip 201c of the nozzle body 201 is started (step S303), and the nozzle tip by the pressure detector 26 is started. Pressure detection is started. Then, the mounting head 51 is lowered by the Z-axis motor 5a, and the suction nozzle 20 moves toward the component (step S304). Eventually, the tip 201c of the nozzle body 201 comes into contact with the upper surface of the component and sucks the component (step S305). At this timing, the component suction count m is incremented by “1”.

  In parallel with the component suction, the nozzle tip pressure detected by the pressure detector 26 is monitored, and the height position H2 of the suction nozzle 20 at the time when the suction level is reached is acquired (step S306). The negative pressure opening of the tip 201c of the nozzle body 201 is closed on the upper surface of the component, and the nozzle tip pressure detected by the pressure detector 26 reaches the suction level. However, the height position H2 of the suction nozzle 20 at this point is higher than the buffing zero height H0 when the component is lifted and sucked by negative pressure, and the component is sucked without being lifted by negative pressure. Even in this case, there may be a position below the buffing zero height H0 due to a response delay of the pressure detector 26. Abnormality at the time of component suction is determined by the height position H2 of the suction nozzle 20 at which the nozzle tip pressure reaches the suction level. When the inspection target nozzle 20 is not in a completely protruding state, the height position H2 of the suction nozzle 20 at which the nozzle tip pressure reaches the suction level is a position below the buffing zero height H0. This height position H2 is not lifted up at the tip 201c of the nozzle body 201 when the nozzle body 201 is in an incompletely projecting state and the projecting amount is an allowable incomplete projecting state that is an allowable projecting amount close to the fully projecting state. If it is below the height position H3 that contacts the component in the state, it is determined that there is an abnormality (step S307).

  If it is determined “NO” in step S307, it means that the suction nozzle 20 has been lowered in a fully protruding state or an allowable incomplete protruding state, for example, as shown in the column (b) of FIG. The suction nozzle 20 is lowered to a descending height H4 (above the height position where the spring receiving portion 202d may be damaged by bottoming and below the position H3), and using the buffing function of the suction nozzle 20 After the component is reliably sucked and held (step S308), the mounting head 51 is raised to a predetermined height position by the Z-axis motor 5a while the component is sucked and held by the suction nozzle 20, and the mounting head 51 is moved to the component mounting position. The head unit 5 is moved by the X-axis motor 7a and the Y-axis motor 8a so as to be positioned above (step S309). In this way, the suction of one part is completed, and the next part is prepared for suction.

  On the other hand, if “YES” is determined in step S307, it means that the suction nozzle 20 has been lowered in an unacceptably incompletely protruding state as shown in the column (a) of FIG. 10, for example. 20 is determined to be in an abnormal state, and the abnormal count k is incremented by “1” (step S310). Then, an abnormality occurrence frequency is calculated based on the abnormality count k and the component suction count m (step S311), and further compared with a threshold value (step S312). Here, when the abnormality occurrence frequency is equal to or less than the threshold value (“NO” in step S312), it is estimated that the abnormality is in the initial stage and the abnormality that has occurred is also mild. Therefore, in the present embodiment, the process proceeds to step S308, and in the same manner as when no abnormality is detected (“YES” in step S307), the first component suction is completed and prepared for the next component suction.

  Note that if step S302 to step S307 are sequentially performed in a state where there is no component at the component supply position 41a of the tape feeder 41, YES is obtained in step S307. However, since this is not an abnormality of the suction nozzle 20, when it is determined that the part is not picked up by the part imaging for recognizing the part suction position to the suction nozzle performed in the middle of steps S308 to S309. Then, an operation is performed to return the component suction count value m added by 1 in step S310 and the abnormal count value k added by 1 in step S310 to the original values. And it moves to step S302, without implementing step S309.

  If it is determined in step S312 that the abnormality occurrence frequency exceeds the threshold value, that is, if abnormality occurs frequently, it is estimated that a serious abnormality has occurred in the suction nozzle 20. The component suction by the suction nozzle 20 is stopped (the component sucked by the suction nozzle 20 is discarded), and the display / operation unit 130 indicates that replacement of the suction nozzle 20 is recommended. The information is displayed and notified to the worker (step S313). In addition, you may comprise so that the said component may be adsorb | sucked with the other adsorption nozzle 20 instead of the said adsorption nozzle 20. FIG.

In the actual component mounting process, the mounting head 51 is moved above the component mounting position (step S309) after the components are attracted to all the mounting heads 51 of the head unit 5. 5 after mounting the components of all the suction nozzles 20, the next mounting turn (component suction in all suction nozzles 20 = component suction processing, movement of the head unit 5 above the substrate = component transport processing, all Steps S302 to S312 are the head unit 5 as the sequential mounting of the suction components in the suction nozzle 20 = the component mounting process and the subsequent movement of the head unit 5 to the component supply units 4a and 4b = the head unit return movement process). Each of the mounting heads 51 is sequentially performed. When the mounting of all the mounting target components on all the mounting turns on the board 110 is completed, the board 110 is unloaded, the next board 110 is loaded, and each step after step S302 is performed for each mounting turn. This is sequentially performed on the head 51. If the number of substrates 110 to be mounted is reached, the operation of the surface mounter 100 ends after the substrate 110 is unloaded. On the other hand, when the surface mounter 100 is stopped in step S313 (end), if the nozzle replacement is performed and the re-operation switch is pressed, the process returns to step S301, and the component suction processing in steps S302 to S312 by the suction nozzle 20 that has been replaced. Is resumed.

  As described above, according to the third embodiment, similarly to the second embodiment, the pressure detection unit 26 sucks the component at the tip portion 201c of the nozzle body 201 (that is, the tip portion 201c contacts the component). Before and after, the nozzle tip pressure is detected as the “physical quantity” of the present invention, and the suction nozzle 20 is inspected by accurately grasping the buffing state of the suction nozzle 20 only from the nozzle tip pressure, so the configuration is simple. Abnormality of the suction nozzle can be inspected. Moreover, the suction nozzle 20 can be inspected while performing the component mounting operation, and the operation efficiency of the surface mounter 100 can be increased. Of course, when the suction nozzle 20 is in a severely abnormal state, component suction by the suction nozzle 20 can be reliably avoided. The component serves as a contacted member with which the tip 201c of the nozzle body 201 contacts when the suction nozzle 20 is inspected.

<Fourth embodiment>
By the way, in order to drive-control the Z-axis motor 5a, the motor control part 123 has the motor drive part 1230 shown, for example in FIG. The motor driving unit 1230 has a function of driving the Z-axis motor 5 a based on the position command signal given from the arithmetic processing unit 121. In the motor drive unit 1230, the position control unit 1231 outputs a speed command signal based on the difference between the position command signal and the position detection signal output from the encoder 5e attached to the Z-axis motor 5a. The speed control unit 1232 outputs a current command signal based on the difference between the driving speed of the Z-axis motor 5a calculated by differentiating the position detection signal with the differentiator 1233 and the speed command signal. This current command signal is output to the current control unit 1234. The current control unit 1234 outputs a drive command signal to the Z-axis motor 5a via the current sensor 1235 based on the current command signal.

  More specifically, the current sensor 1235 detects the drive command signal output from the current control unit 1234 and feeds back a current detection signal indicating the current value of the drive command signal to the input side of the current control unit 1234. Then, the current control unit 1234 outputs a drive command signal based on the difference between the current detection signal and the current command signal. Upon receiving the drive command signal, the Z-axis motor 5a outputs a torque corresponding to the drive command signal. Accordingly, when the suction nozzle 20 is moved in the Z direction by driving the Z-axis motor 5a and the tip 201c of the nozzle body 201 is brought into contact with the part or auxiliary part 27, the load received by the part or auxiliary part 27 from the nozzle body 201 Can be detected based on a signal related to the current applied to the Z-axis motor 5a (hereinafter referred to as "current related signal"). That is, the motor drive unit 1230 functions as the “load detection unit” of the present invention. Then, the component or auxiliary portion 27 becomes a contacted member with which the tip 201c of the nozzle body 201 contacts when the suction nozzle 20 is inspected, and a reaction force having the same magnitude as the load received from the nozzle body 201 is applied. To act on.

  Therefore, as shown in FIG. 14, the current command signal is given as the current-related signal from the motor drive unit 1230 to the arithmetic processing unit 121, and the arithmetic processing unit 121 is based on the current command signal (corresponding to “load value”). You may comprise so that the fall of 20 buffing functions may be test | inspected. For example, the suction nozzle 20 is lowered to the auxiliary portion 27 instead of the load cell 25, and a load value corresponding to the “load cell load values W1, W2” and “load change amount ΔW” in the first embodiment is calculated based on the current command signal. Based on these, an abnormal state of the suction nozzle 20 may be detected. Of course, as the current related signal, a current detection signal or the like may be used in addition to the current command signal.

  In the fourth embodiment, the deterioration of the buffing function of the suction nozzle 20 is inspected by lowering the suction nozzle 20 to the auxiliary portion 27. However, as in the third embodiment, the suction nozzle 20 is lowered to the component. It may be inspected.

<Others>
As described above, in any of the first to fourth embodiments, the arithmetic processing unit 121 of the controller 120 functions as the “determination unit” of the present invention. In the first embodiment, the load cell 25 corresponds to an example of the “load detection unit” and the “detection unit” of the present invention, and the “nozzle inspection device” of the present invention is configured by combining this with the controller 120. Yes. In the second embodiment and the third embodiment, the pressure detection unit 26 corresponds to an example of the “detection unit” of the present invention, and the “nozzle inspection device” of the present invention is configured by combining this with the controller 120. ing. Furthermore, in the fourth embodiment, the motor drive unit 1230 corresponds to an example of the “load detection unit” of the present invention, and the “nozzle inspection device” of the present invention is configured by combining this with the controller 120.

  In the first to fourth embodiments, the spring member 203 corresponds to an example of the “biasing member” of the present invention. In these embodiments, the Z2 direction side corresponds to an example of the “nozzle body protruding side” of the present invention, and the parts are transported by the combination of the head unit 5 and the controller 120. It corresponds to an example. In the first embodiment and the fourth embodiment, the buffing zero height H0 and the descending height H1 correspond to examples of the “first position” and the “second position” of the present invention, respectively. In the third embodiment, the descending height H2 and the descending height H3 correspond to examples of the “third position” and the “fourth position” of the present invention, respectively. Further, the Z2 direction side corresponds to the “projection side of the nozzle body” of the present invention. In the first embodiment, the load cell 25, the auxiliary part 27 in the second embodiment, the part in the third embodiment, and the part and the auxiliary part 27 in the fourth embodiment are respectively This corresponds to an example of a “contact member”. Furthermore, the combination of the head unit 5 and the controller 120 functions as a “component conveying device” of the present invention that conveys components.

  The present invention is not limited to the above-described embodiment, and various modifications can be made to the above-described one without departing from the spirit of the present invention. For example, in the first to fourth embodiments described above, the nozzle inspection device is applied to the component conveying device of the surface mounter 100, but the application target of the present invention is not limited to this, and buffing The present invention can be applied to any component conveying apparatus that conveys components using a suction nozzle having a function. For example, the present invention may be applied to a component transport apparatus installed in a component testing machine (not shown) that performs various tests by transporting a component supplied in a component supply unit to a test means. Furthermore, the present invention can be applied to a surface mounter 100 having a component conveying device and a component testing machine.

  Further, in the first to fourth embodiments described above, “Minor abnormal state” and “Severe abnormal state” are used as the types of abnormalities of the nozzle body 201 with respect to the holder member 202, that is, the buffing state abnormality. The type of exit / retreat abnormality is specified based on the change in load value when the suction nozzle 20 ascends from the descending height H1 (second position), but reaches the descending height H1 (second position). The type of buffing abnormality may be obtained based on the change of the load value before starting and the load value at the time point (timing T2) when reaching the descending height H1 (second position).

  In the first embodiment, the load change amount ΔW (= W1−W2) is calculated as the “change in load value” of the present invention, but the load change rate may be obtained instead of the load change amount. .

  The present invention relates to a nozzle inspection device and a nozzle inspection method for inspecting a suction nozzle having a so-called buffing function, a component conveying device equipped with the nozzle inspection device, a surface mounter equipped with a component conveying device, and the components described above. Applicable to testing machines.

DESCRIPTION OF SYMBOLS 1 ... Base 5 ... Head unit 20 ... Adsorption nozzle, inspection object nozzle 25 ... Load cell (load detection part, detection part)
26 ... Pressure detector (detector)
27. Auxiliary part (contacted member)
DESCRIPTION OF SYMBOLS 100 ... Surface mounter 110 ... Board | substrate 121 ... Operation processing part 201 ... Nozzle main body 202 ... Holder member 203 ... Spring member 1230 ... Motor drive part (load detection part)
201c: tip (of nozzle body) 5a: Z-axis motor HL: descending height Lmax: protrusion limit Z: axial direction

Claims (15)

A shaft-like nozzle body that adsorbs components at the tip portion, a holder member that holds the tip portion of the nozzle body so as to be freely retractable in the axial direction, and the tip portion of the nozzle body that urges the nozzle body A biasing member that can project from the holder member to the projection limit in the axial direction, and the tip of the nozzle main body abuts on the component and is sucked by the movement of the holder member in the axial direction. A nozzle inspection device for inspecting the suction nozzle,
A detection unit that detects a physical quantity that changes with the movement of the holder member in the axial direction in association with the movement of the holder member;
A nozzle inspection apparatus comprising: a determination unit that determines a state in which the nozzle body is withdrawn from the holder member as the holder member moves, based on the physical quantity detected by the detection unit. The nozzle inspection device according to claim 1,
A contacted member with which the tip of the nozzle body comes into contact with the movement of the holder member in the axial direction;
The detection unit receives a load received by the abutted member from the nozzle body when the tip of the nozzle body abuts on the abutted member due to the movement of the holder member in the axial direction. It is a load detection unit that detects as
The determination unit is a nozzle inspection apparatus that performs the determination based on a load value detected by the load detection unit. The nozzle inspection device according to claim 2,
A nozzle inspection device comprising a load cell in which the abutted member detects a load. The nozzle inspection device according to claim 2,
The holder member moves in the axial direction by driving by a motor,
The detection section is a nozzle inspection apparatus that is a load detection section that detects, as the physical quantity, a load that the contacted member receives from the nozzle body based on a signal related to a current applied to the motor. The nozzle inspection device according to any one of claims 2 to 4,
The position of the holder member in the axial direction when the tip end portion of the nozzle body contacts the contacted member in the fully protruding state protruding to the protrusion limit is defined as a first position, and the holder member is defined as the first position. When the position of the holder member in the axial direction when moved to the protruding side of the nozzle body rather than the position is the second position,
The determination unit is based on a load value detected by the load detection unit when the holder member is positioned between the first position, the second position, and the first position to the second position. And a nozzle inspection device for determining an abnormality in the state of withdrawal of the nozzle body with respect to the holder member. The nozzle inspection device according to claim 5,
The determination unit applies to the holder member when a load value detected by the load detection unit when the holder member is located at the second position is higher than an urging force applied from the urging member to the nozzle body. A nozzle inspection apparatus for determining that an abnormality in the withdrawal and withdrawal of the nozzle body has occurred. The nozzle inspection device according to claim 6,
The determination unit changes the load value while the holder member moves from the first position to the second position, and changes the load value while the holder member moves from the second position to the first position. A nozzle inspection device that determines the type of the withdrawal abnormality based on either one. The nozzle inspection device according to claim 5, 6 or 7,
The determination unit determines that an abnormality of the nozzle body with respect to the holder member has occurred when a load value detected by the load detection unit is zero when the holder member is located at the first position. Nozzle inspection device. The nozzle inspection device according to claim 1,
In the axial direction, it is fixedly arranged on the protruding side of the nozzle body, and when the tip end portion of the nozzle body comes into contact with the movement of the holder member in the axial direction, the contacted portion closes the tip portion of the nozzle body. Comprising a member,
The detection unit is a pressure detection unit that detects a pressure at the tip of the nozzle body as the physical quantity,
The determination unit is configured to detect the pressure value detected by the pressure detection unit while the holder member is moving toward the contacted member at a timing when the pressure level required for holding the component is reached or at the timing. The nozzle test | inspection apparatus which determines the abnormality of the withdrawing / withdrawing state of the nozzle main body with respect to the holder member based on the position of the holder member in the axial direction. The nozzle inspection device according to claim 9,
The position of the holder member in the axial direction when the pressure value detected by the pressure detection unit reaches the suction level in the fully protruding state protruding to the protrusion limit is defined as a third position, and the holder member is defined as the third position. When the position of the holder member in the axial direction when moved to the protruding side of the nozzle body rather than the position is the fourth position,
The determination unit is configured to detect the pressure even when the position of the holder member in the axial direction at the timing is closer to the fourth position than the third position, or when the holder member moves to the fourth position. A nozzle inspection apparatus that determines that an abnormality of the nozzle body with respect to the holder member has occurred when the pressure value detected by the detection unit does not reach the suction level. The nozzle inspection device according to claim 10,
The holder member returns from the third position to the third position via the fourth position;
The determination unit is configured to determine whether the nozzle body is retracted from the holder member based on a change in the pressure value detected by the pressure detection unit while the holder member returns from the fourth position to the third position. A nozzle inspection device that determines abnormalities. The nozzle inspection device according to claim 1,
The detection unit is a pressure detection unit that detects a pressure at the tip of the nozzle body as the physical quantity,
The determination unit has a timing at which a pressure value detected by the pressure detection unit reaches a suction level required for holding the component while the holder member is moving toward the component, or the axial direction at the timing. The nozzle test | inspection apparatus which determines the abnormality of the withdrawal state of the said nozzle main body with respect to the said holder member based on the position of the said holder member in. The nozzle inspection device according to claim 12,
The position of the holder member in the axial direction when the pressure value detected by the pressure detection unit reaches the suction level in the fully protruding state protruding to the protrusion limit is defined as a third position, and the holder member is defined as the third position. When the position of the holder member in the axial direction when moved to the protruding side of the nozzle body rather than the position is the fourth position,
The determination unit is configured to detect the pressure even when the position of the holder member in the axial direction at the timing is closer to the fourth position than the third position, or when the holder member moves to the fourth position. A nozzle inspection apparatus that determines that an abnormality of the nozzle body with respect to the holder member has occurred when the pressure value detected by the detection unit does not reach the suction level. A shaft-like nozzle body that sucks components at the tip, a holder member that holds the nozzle body so as to be freely retractable in the axial direction, and the tip of the nozzle body that protrudes from the holder member in the axial direction A nozzle inspection method for inspecting the suction nozzle, wherein the tip end portion of the nozzle body abuts against the component and is sucked by the movement of the holder member in the axial direction. And
Moving the holder member in the axial direction;
Detecting a physical quantity that varies with movement of the holder member during movement of the holder member;
A step of determining, based on the detected physical quantity, a state in which the nozzle body is withdrawn relative to the holder member as the holder member moves. A shaft-like nozzle body that adsorbs components at the tip portion, a holder member that holds the tip portion of the nozzle body so as to be freely retractable in the axial direction, and the tip portion of the nozzle body that urges the nozzle body A biasing member that can project from the holder member to the projection limit in the axial direction, and the tip of the nozzle main body abuts on the component and is sucked by the movement of the holder member in the axial direction. A component conveying device that conveys the component by moving the head unit while adsorbing a component at the tip of the nozzle body by providing a suction nozzle in the head unit,
A component conveying apparatus comprising the nozzle inspection apparatus according to claim 1.

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