JP2016133927A5 - - Google Patents

Description

In order to achieve the above object, a temperature control device according to one aspect of the present invention is a temperature control device that controls the temperature of a first space and a second space, and is a first device that controls the temperature of the first space. A control unit; a second control unit that controls the temperature of the second space; a first container that is disposed in the first space and has an internal pressure that changes according to the temperature of the first space; A second container that is disposed in the space and whose internal pressure changes according to the temperature of the second space, and is connected to the inside of the first container and the inside of the second container to detect the pressure difference between them. The pressure difference detected by the detection unit such that a temperature difference between the first space and the second space becomes a target temperature difference. The temperature of the second space is controlled based on the above.

Claims (14)

A temperature control device for controlling the temperature of the first space and the second space,
A first controller for controlling the temperature of the first space;
A second control unit for controlling the temperature of the second space;
A first container disposed in the first space and having an internal pressure that varies in accordance with the temperature of the first space, and an internal pressure that is disposed in the second space and varies in accordance with the temperature of the second space. A detection unit having a second container to be connected, and a sensor connected to the inside of the first container and the inside of the second container to detect a pressure difference between them,
Including
The second control unit controls the temperature of the second space based on the pressure difference detected by the detection unit so that a temperature difference between the first space and the second space becomes a target temperature difference. A temperature control device characterized by that. The second control unit uses a conversion value obtained by converting the pressure difference detected by the detection unit into a temperature difference between the first space and the second space, and uses the converted value of the second space. The temperature control apparatus according to claim 1, wherein the temperature is controlled. A temperature sensor for measuring the temperature of the second space;
The second control unit controls the temperature of the second space based a deviation between the target temperature and output the second space of the previous SL temperature sensor to a value obtained by correcting by the converted value, The temperature control device according to claim 2 . The first container and the second container are configured such that the pressure difference becomes zero when the temperature difference between the first space and the second space is zero. The temperature control apparatus according to any one of 1 to 3 . Temperature control device according to any one of claims 1 to 4 wherein the first container and the second container has the same volume with each other, it is characterized. Temperature control device according to any one of claims 1 to 5, wherein said each of the first container and the second container, small amounts of liquid from the inside of the volume is filled, it. The sensor of the detection unit includes a first chamber communicating with the inside of the first container via a first pipe, a second chamber communicating with the inside of the second container via a second pipe, and the first The temperature control according to any one of claims 1 to 6 , further comprising a diaphragm partitioning the chamber and the second chamber, and detecting the pressure difference by measuring distortion of the diaphragm. apparatus. The temperature control device according to claim 7 , wherein the first pipe and the second pipe are covered with a heat insulating material. The said 1st piping and the said 2nd piping are filled with the liquid whose boiling point is higher than the liquid enclosed with each of the said 1st container and the said 2nd container, The Claim 7 or 8 characterized by the above-mentioned. The temperature control device described. While the temperature of the first space and the second space is controlled to be equal to each other, the detection unit communicates the inside of the first container and the inside of the second container with the pressure. temperature control device according to any one of claims 7 to 9 including a bypass pipe for correcting errors caused in the detection result of the difference, it is characterized. The temperature control device according to any one of claims 1 to 9 , wherein the first space and the second space communicate with each other. The first control unit controls the temperature of the first space by adjusting the temperature of the fluid supplied to the first space based on the output of the first temperature sensor disposed in the first space,
The second control unit controls the temperature of the second space by adjusting the temperature of the fluid supplied to the second space based on the output of the second temperature sensor disposed in the second space. The temperature control apparatus according to any one of claims 1 to 11 , wherein A lithographic apparatus for forming a pattern on a substrate,
A unit for forming a pattern on the substrate;
The temperature control device according to any one of claims 1 to 12 ,
Including
The lithographic apparatus, wherein the temperature control device controls temperatures of a first space and a second space communicating with a space in which the unit is disposed. Forming a pattern on a substrate using the lithographic apparatus according to claim 13 ;
Processing the substrate on which the pattern is formed in the step;
A method for producing an article comprising: