JPS60122845U - Pressure/differential pressure transmitter with temperature compensation mechanism - Google Patents
Pressure/differential pressure transmitter with temperature compensation mechanismInfo
- Publication number
- JPS60122845U JPS60122845U JP966384U JP966384U JPS60122845U JP S60122845 U JPS60122845 U JP S60122845U JP 966384 U JP966384 U JP 966384U JP 966384 U JP966384 U JP 966384U JP S60122845 U JPS60122845 U JP S60122845U
- Authority
- JP
- Japan
- Prior art keywords
- temperature compensation
- pressure
- compensation mechanism
- fixed
- disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、従来装置の断面図、第２図は、第１図に示す
従来装置における温度補償ダイアフラム部分の拡大断面
図、第３図は、従来装置の応答特性を示す波形図で、図
ａは入力波形図、図すは出力波形図、第４図は、本考案
実施例装置の要部断面図、第５図は、第４図に示す本考
案実施例装置における溝部の具体例を示す、ディスク９
，１０部分の平面図、第６図は、本考案実施例装置にお
ける溝部の他の具体例を示す、ディスク９，１０部分の
平面図である。
１・・・本体、３，４・・・貫通孔、５，６・・・開口
部、７．８・・□・受圧ダイアフラム、９．１０・・・
ディスク、１１．１２・・・貫通孔、１３．１４・・・
温度補償ダイアフラム、１５・・・移動電極、１９．２
０・・・固定電極、２３ａ〜２３ｅ・・・溝部。FIG. 1 is a sectional view of a conventional device, FIG. 2 is an enlarged sectional view of the temperature compensation diaphragm portion of the conventional device shown in FIG. 1, and FIG. 3 is a waveform diagram showing the response characteristics of the conventional device. a is an input waveform diagram, the figure is an output waveform diagram, FIG. 4 is a sectional view of the main part of the device according to the embodiment of the present invention, and FIG. 5 is a specific example of the groove portion in the device according to the present invention shown in FIG. Show, disk 9
, 10. FIG. 6 is a plan view of the disks 9 and 10, showing another example of the groove in the apparatus according to the embodiment of the present invention. 1... Main body, 3, 4... Through hole, 5, 6... Opening, 7.8... □ Pressure receiving diaphragm, 9.10...
Disc, 11.12... Through hole, 13.14...
Temperature compensation diaphragm, 15... moving electrode, 19.2
0...Fixed electrode, 23a-23e...Groove portion.
Claims (1)
る貫通孔が設けられた開口部と、この開口部周縁に外周
部が固定された受圧ダイアフラムと、この受圧ダイアフ
ラムの内周縁に外周部が固定され、表面に貫通孔が設け
られたディスクと、このディスクの外側より、このディ
スクの外周縁に周縁が固定さ杆た、波形のない温度補償
ダイアフラムと、前記本体内部室に設けられた圧力検出
要素と、前記本体内部空間及び前記温度補償ダイアフラ
ム部分に充填された非圧縮性流体とを備え、 た温度
補償機構付圧力・差圧伝送器において、前記温度補償ダ
イアフラムに面する前記ディスク表面に、前記貫通孔部
分と連絡する溝部を設けたこ、 とを特徴とする温度
補償機構付圧力・差圧伝送器。An opening provided on one or both sides of the main body with a through hole communicating with the internal chamber of the main body, a pressure receiving diaphragm having an outer circumference fixed to the periphery of this opening, and an outer periphery fixed to the inner periphery of this pressure receiving diaphragm. a disk having a fixed portion and a through hole provided on its surface; a non-corrugated temperature compensation diaphragm having a circumferential edge fixed to the outer circumferential edge of the disk from the outside of the disk; A pressure/differential pressure transmitter with a temperature compensation mechanism, comprising: a pressure detection element; and an incompressible fluid filled in the internal space of the main body and the temperature compensation diaphragm portion; A pressure/differential pressure transmitter with a temperature compensation mechanism, characterized in that a groove portion communicating with the through hole portion is provided on the surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP966384U JPS60122845U (en) | 1984-01-26 | 1984-01-26 | Pressure/differential pressure transmitter with temperature compensation mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP966384U JPS60122845U (en) | 1984-01-26 | 1984-01-26 | Pressure/differential pressure transmitter with temperature compensation mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60122845U true JPS60122845U (en) | 1985-08-19 |
Family
ID=30490098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP966384U Pending JPS60122845U (en) | 1984-01-26 | 1984-01-26 | Pressure/differential pressure transmitter with temperature compensation mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60122845U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170103890A (en) * | 2015-01-16 | 2017-09-13 | 캐논 가부시끼가이샤 | Temperature control apparatus, lithographic apparatus and article manufacturing method |
-
1984
- 1984-01-26 JP JP966384U patent/JPS60122845U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170103890A (en) * | 2015-01-16 | 2017-09-13 | 캐논 가부시끼가이샤 | Temperature control apparatus, lithographic apparatus and article manufacturing method |
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