JP2016127469A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2016127469A5 JP2016127469A5 JP2015000680A JP2015000680A JP2016127469A5 JP 2016127469 A5 JP2016127469 A5 JP 2016127469A5 JP 2015000680 A JP2015000680 A JP 2015000680A JP 2015000680 A JP2015000680 A JP 2015000680A JP 2016127469 A5 JP2016127469 A5 JP 2016127469A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- vibration
- joint
- center
- plan
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000605 extraction Methods 0.000 claims 10
- 230000005284 excitation Effects 0.000 claims 8
- 229960001716 benzalkonium Drugs 0.000 claims 4
- CYDRXTMLKJDRQH-UHFFFAOYSA-N benzododecinium Chemical compound CCCCCCCCCCCC[N+](C)(C)CC1=CC=CC=C1 CYDRXTMLKJDRQH-UHFFFAOYSA-N 0.000 claims 4
- 229910052751 metal Inorganic materials 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015000680A JP6676875B2 (ja) | 2015-01-06 | 2015-01-06 | 振動デバイス、電子機器、および移動体 |
| US14/988,158 US9712109B2 (en) | 2015-01-06 | 2016-01-05 | Resonation device, oscillator, electronic apparatus, and moving object |
| US15/618,592 US9912292B2 (en) | 2015-01-06 | 2017-06-09 | Resonation device, oscillator, electronic apparatus, and moving object |
| US15/874,384 US10187010B2 (en) | 2015-01-06 | 2018-01-18 | Resonation device, oscillator, electronic apparatus, and moving object |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015000680A JP6676875B2 (ja) | 2015-01-06 | 2015-01-06 | 振動デバイス、電子機器、および移動体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016127469A JP2016127469A (ja) | 2016-07-11 |
| JP2016127469A5 true JP2016127469A5 (enrdf_load_stackoverflow) | 2018-01-25 |
| JP6676875B2 JP6676875B2 (ja) | 2020-04-08 |
Family
ID=56359857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015000680A Active JP6676875B2 (ja) | 2015-01-06 | 2015-01-06 | 振動デバイス、電子機器、および移動体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6676875B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6798121B2 (ja) | 2016-03-18 | 2020-12-09 | セイコーエプソン株式会社 | 発振器、電子機器および移動体 |
| JP6958533B2 (ja) * | 2018-11-28 | 2021-11-02 | 横河電機株式会社 | 振動式センサ装置 |
| US12009801B2 (en) | 2020-11-27 | 2024-06-11 | Seiko Epson Corporation | Resonator device |
| JP7639516B2 (ja) | 2021-04-16 | 2025-03-05 | セイコーエプソン株式会社 | 振動デバイス |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09326667A (ja) * | 1996-06-05 | 1997-12-16 | Toyo Commun Equip Co Ltd | 圧電振動子素片 |
| JP2000278080A (ja) * | 1999-03-24 | 2000-10-06 | Toyo Commun Equip Co Ltd | 圧電デバイス |
| JP2005159717A (ja) * | 2003-11-26 | 2005-06-16 | Toyo Commun Equip Co Ltd | 圧電振動子とその製造方法 |
| JP4158700B2 (ja) * | 2003-12-26 | 2008-10-01 | 株式会社大真空 | 圧電振動片および圧電振動デバイス |
| JP2013055400A (ja) * | 2011-09-01 | 2013-03-21 | Seiko Instruments Inc | 圧電振動デバイス及び発振器 |
| JP5938931B2 (ja) * | 2012-02-13 | 2016-06-22 | セイコーエプソン株式会社 | 振動片、振動子、発振器および電子機器 |
| JP5982898B2 (ja) * | 2012-03-14 | 2016-08-31 | セイコーエプソン株式会社 | 振動素子、振動子、電子デバイス、発振器、及び電子機器 |
| JP5991464B2 (ja) * | 2012-03-19 | 2016-09-14 | セイコーエプソン株式会社 | 振動片およびその製造方法、振動素子、振動子、電子デバイス、並びに電子機器 |
| JP5800043B2 (ja) * | 2014-02-05 | 2015-10-28 | セイコーエプソン株式会社 | 振動片および振動子 |
-
2015
- 2015-01-06 JP JP2015000680A patent/JP6676875B2/ja active Active