JP2016123945A - Nozzle cleaning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently clean smudge or the like of a nozzle having a sliding part.SOLUTION: An operator inputs a nozzle cleaning device 10 in an ultrasonic cleaning tank 70 with a cleaning liquid therein, and turns on a switch of the ultrasonic cleaning tank 70 to provide ultrasonic vibration to the cleaning liquid, and also turns on a switch of a drive motor 52 of the nozzle cleaning device 10 to vertically move a pressing member 60. When the pressing member 60 moves downward, a cartridge 30 and an upper cover 40, which hold a nozzle support body 86, move downward with respect to the nozzle main body 82 against elastic force of a spring 24. When the pressing member 60 moves upward, the cartridge 30 and the upper cover 40, which hold the nozzle support body 86, are biased upward by the elastic force of the spring 24, and thus move upward with respect to the nozzle main body 82.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a nozzle cleaning device.

  The component mounter sucks the electronic component supplied from the component supply device to the tip of the nozzle, moves the nozzle onto the mounting substrate in that state, releases the suction at a predetermined position on the mounting substrate, and then removes the component from the tip of the nozzle. Release. If such nozzles are contaminated or clogged, it may cause a component adsorption failure. Therefore, it is preferable to clean the nozzle as needed or periodically. For example, Patent Document 1 discloses an apparatus in which a plurality of nozzles removed from a component mounting machine are stored in a nozzle holder, and the nozzle holder is cleaned by ultrasonic cleaning or the like.

JP 2012-5948 A

  However, in the apparatus described above, although the nozzle is ultrasonically cleaned in a state where the nozzle holder containing a plurality of nozzles is immersed in the cleaning liquid, the nozzles having sliding portions may not be sufficiently cleaned. . A nozzle having a sliding portion normally includes a nozzle body having a tip portion that adsorbs a component, and a nozzle support that supports the nozzle body so as to be slidable along a predetermined direction. In such a nozzle, dirt and clogging are likely to accumulate at the sliding portion between the nozzle body and the nozzle support. Absent.

  The present invention has been made to solve such a problem, and has as its main object to efficiently remove dirt and the like on nozzles having sliding portions.

The nozzle cleaning device of the present invention is
A nozzle holding means for holding a nozzle supported by a nozzle support so that a nozzle body having a tip portion for adsorbing a component is slidable in a predetermined direction;
In a state where a cleaning fluid exists between the nozzle body and the nozzle support of the nozzle held by the nozzle holding means, the nozzle body and the nozzle support are relatively moved in the predetermined direction. Nozzle sliding means for sliding on,
It is equipped with.

  In this nozzle cleaning device, the nozzle body and the nozzle support are slid relative to each other in the state where the cleaning fluid is present between the nozzle body and the nozzle support. Therefore, dirt and clogging of the sliding portion can be efficiently removed as compared with the case of cleaning with the cleaning fluid without sliding the nozzle body and the nozzle support.

  In the nozzle cleaning apparatus of the present invention, the cleaning fluid may be one or more selected from the group consisting of an organic cleaning liquid, an aqueous cleaning liquid, a cleaning pressurized gas, and a cleaning mist. By using an organic cleaning liquid, it is possible to efficiently clean the fat-soluble dirt and clogging accumulated at the sliding portion of the nozzle. If an aqueous cleaning liquid is used, water-soluble dirt and clogging accumulated at the sliding portion of the nozzle can be efficiently cleaned. If the cleaning pressurized gas is used, dirt and clogging accumulated in the sliding portion of the nozzle can be blown away. If the cleaning mist is used, dirt and clogging accumulated in the sliding portion of the nozzle can be removed with a small amount of liquid. In particular, the cleaning fluid is preferably an organic cleaning liquid or an aqueous cleaning liquid to which ultrasonic vibration is applied. In this way, dirt and the like at the sliding portion of the nozzle can be more efficiently cleaned.

  Here, examples of the organic cleaning liquid include ethanol, isopropyl alcohol, and acetone. Examples of the aqueous cleaning liquid include water and a solution in which a detergent is dissolved in water. Examples of the pressurized pressurized gas include, in addition to pressurized air, inert gas such as pressurized nitrogen. Examples of the cleaning mist include an organic cleaning liquid mist and an aqueous cleaning liquid mist.

  In the nozzle cleaning apparatus of the present invention, the nozzle holding means includes a nozzle main body holder that holds the nozzle main body, and a nozzle support body holder that holds the nozzle support, and the nozzle sliding means includes the nozzle sliding means, The nozzle support holder may be reciprocated in the predetermined direction with the position of the nozzle body holder fixed. By reciprocating the nozzle support holder in a predetermined direction with the position of the nozzle main body holder fixed, the nozzle support can be slid in a predetermined direction with respect to the nozzle body. In such a nozzle cleaning device, the nozzle support holder is supported by an elastic body, and the nozzle sliding means is arranged on the nozzle support holder in a state where the position of the nozzle body holder is fixed. An external force against the elastic force is applied to move the nozzle support holder along the forward path in the predetermined direction. After the external force is released, the nozzle support holder is moved in the predetermined direction by the elastic force of the elastic body. It is good also as what moves along a return path. In this case, the nozzle support can be slid with respect to the nozzle body with a relatively simple configuration.

  In the nozzle cleaning apparatus of the present invention, the nozzle holding means includes a nozzle main body holder that holds the nozzle main body, and a nozzle support body holder that holds the nozzle support, and the nozzle sliding means includes the nozzle sliding means, The nozzle body holder may be reciprocated in the predetermined direction with the position of the nozzle support holder fixed. By reciprocating the nozzle body holder in a predetermined direction with the position of the nozzle support holder fixed, the nozzle body can be moved in a predetermined direction with respect to the nozzle support. In such a nozzle cleaning device, the nozzle body holder is supported by an elastic body, and the nozzle sliding means is elastically elastic to the nozzle body holder in a state where the position of the nozzle support body holder is fixed. An external force against the force is applied to move the nozzle body holder along the forward path in the predetermined direction, and after releasing the external force, the nozzle body holder is moved to the return path in the predetermined direction by the elastic force of the elastic body. It is good also as what moves along. In this way, the nozzle body can be slid with respect to the nozzle support with a relatively simple configuration.

1 is a perspective view of a nozzle cleaning device 10. FIG. The perspective view of the baseplate 22 and the cartridge 30. FIG. FIG. 4 is a perspective view showing a state where a nozzle 80 is set on the cartridge 30. The perspective view which shows the state which set the comb-shaped upper cover 40 to the cartridge 30. FIG. The perspective view of the nozzle holding module 20. FIG. It is a longitudinal cross-sectional view of the periphery of the nozzle 80 in the nozzle washing | cleaning apparatus 10, (a) shows the state in which the upper cover 40 is not pressed, (b) shows the state in which the upper cover 40 was pressed. It is a longitudinal cross-sectional view of the periphery of the nozzle 80 in another nozzle washing | cleaning apparatus, (a) is the state in which the top plate 46 is not pressed, (b) shows the state in which the top plate 46 was pressed. FIG. FIG.

  Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view of the nozzle cleaning device 10.

  First, prior to the description of the nozzle cleaning device 10, an example of a nozzle to be cleaned by the nozzle cleaning device 10 will be described with reference to FIGS. 8 is a perspective view of the nozzle 80, and FIG. 9 is a longitudinal sectional view thereof. The nozzle 80 is mounted on a suction head of a component mounting machine disclosed in, for example, Japanese Patent Application Laid-Open No. 2014-167955. As described in the publication, the nozzle 80 adsorbs a component supplied from a component supply device (for example, a reel) using a negative pressure and carries it to a predetermined position on the substrate, where the negative pressure is applied. The parts are released and mounted. Such a nozzle 80 includes a nozzle main body 82 and a nozzle support 86 (indicated by hatching in FIG. 6) that supports the nozzle main body 82 so as to be slidable in the vertical direction, and the air passage 84 penetrates in the longitudinal direction. doing. The nozzle body 82 is formed by inserting and fixing a tip member 82a to a cylindrical sleeve 82b. The tip member 82a has a vent hole penetrating in the vertical direction. The ventilation hole constitutes a part of the ventilation path 84. The sleeve 82b has a pair of long holes 82c. The pair of long holes 82c are formed long along the ventilation path 84, and are provided at positions that are two-fold symmetrical about the center line of the sleeve 82b. The nozzle support 86 includes a cylinder 86a, a flange 86b, and a pin 86c. The cylinder 86a slidably holds the sleeve 82b of the nozzle body 82. The flange 86b is used when stocking by hooking the edge of a hole of a nozzle stocker of a component mounting machine (not shown). The pin 86c penetrates the cylinder 86a so as to cross the ventilation path 84, and is fixed to the cylinder 86a in that state. The pin 86c passes through a pair of long holes 82c provided in the sleeve 82b. Further, both ends of the pin 86c protrude to the outside of the cylinder 86a, and are used when mounted on a suction head of a component mounting machine (not shown). When the nozzle body 82 slides inside the cylinder 86a, the nozzle body 82 slides while being guided by a pair of elongated holes 82c through which the pins 86c are inserted.

  Next, the nozzle cleaning device 10 will be described. As illustrated in FIG. 1, the nozzle cleaning device 10 includes a frame 12, a nozzle holding module 20, and a pressing device 50. For convenience of explanation, front / rear / left / right / up / down may be used. These directions are as shown in FIG.

  The frame 12 includes a horizontal pedestal 14 and a support piece 18. The horizontal pedestal 14 is a rectangular flat plate having legs at the four corners of the back surface, and the nozzle holding module 20 is placed on the upper surface. The horizontal pedestal 14 has guide rails 16 on both left and right sides. The guide rail 16 plays a role of guiding when the nozzle holding module 20 is slid on the horizontal pedestal 14. The support piece 18 is erected in the vertical direction at the rear end of the horizontal pedestal 14. The support piece 18 supports the pressing device 50.

  The nozzle holding module 20 includes a bottom plate 22, a cartridge 30, an upper lid 40, and a top plate 46. The bottom plate 22 is a rectangular flat plate, and includes a spring 24 and a shaft 26 that passes through the center of the spring 24 in the vertical direction at four corners. Although the spring 24 is shown as a cylinder in the drawing, it is actually coiled. The cartridge 30 is a rectangular plate and holds a plurality of nozzles 80. The cartridge 30 is placed on the upper end of the spring 24 in a state where the shaft 26 is inserted into through holes provided at four corners. Therefore, the cartridge 30 is elastically supported by the spring 24. The upper lid 40 is a comb-like member as will be described later, and presses the nozzle 80 held by the cartridge 30 from above. The top plate 46 is a rectangular flat plate, and is in contact with the upper end of the nozzle 80 in a state where the shaft 26 is inserted into through holes provided at four corners. The top plate 46 has a circular round hole 48 at substantially the center. The round hole 48 is designed to have a size that allows the cylindrical pressing member 60 to pass in the vertical direction.

  Here, the assembly procedure of the nozzle holding module 20 will be described with reference to FIGS. First, as shown in FIG. 2, the operator inserts the through holes 32 provided at the four corners of the cartridge 30 into the shafts 26 provided at the four corners of the bottom plate 22, and places the cartridge 30 on the upper ends of the four springs 24. The cartridge 30 has many nozzle holding holes 34 into which the tip of the nozzle 80 can be inserted. The nozzle holding hole 34 has a step 34a on the periphery. Since the vicinity of the center of the cartridge 30 hits a place pressed by the pressing member 60, the nozzle holding hole 34 is not formed. A plurality of pressing members 36 for pressing the comb teeth 42 of the upper lid 40 from above are provided on the left side of the cartridge 30. The umbrella-shaped head of each pressing member 36 is positioned so as to be spaced apart from the upper surface of the cartridge 30 by a predetermined distance (a distance slightly larger than the thickness of the upper lid 40). Further, a ball plunger 38 (see FIG. 4) that is biased so as to protrude from the lower surface of the cartridge 30 to the upper surface is provided near the center of the left side of the cartridge 30.

  Subsequently, as shown in FIG. 3, the operator inserts the tip of the nozzle 80 into the nozzle holding hole 34 (see FIG. 2) of the cartridge 30. At this time, the flange 86 b of the nozzle 80 fits into the step 34 a of the nozzle holding hole 34.

  Subsequently, as shown in FIG. 4, the operator slides the upper lid 40 having a shape in which the plurality of comb teeth 42 are connected at one end (right end) from right to left. In addition, the upper lid 40 represented by a one-dot chain line indicates a state during the slide. At this time, the comb teeth 42 extending in the left-right direction cover a part of the upper surface of the flange 86 b of the nozzle support 86. In the upper lid 40, as shown by a solid line, the ball plunger 38 is fitted into a recess (not shown) provided on the lower surface of the upper lid 40 with the left end of the comb teeth 42 sliding down below the head of the pressing member 36. It is fixed by. The upper lid 40 has a pressing member 41 at the center of the right side. The umbrella-shaped head of the pressing member 41 is positioned so as to be spaced apart from the lower surface of the upper lid 40 by a predetermined distance (a distance slightly larger than the thickness of the cartridge 30). In a state where the left end of the comb teeth 42 of the upper lid 40 is slid down below the head of the pressing member 36, the right end of the cartridge 30 is sandwiched and fixed between the head of the pressing member 41 and the lower surface of the upper lid 40. .

  Subsequently, as shown in FIG. 5, the operator inserts the shafts 26 provided at the four corners of the bottom plate 22 into the through holes 49 provided at the four corners of the top plate 46. At this time, the lower surface of the top plate 46 is in contact with the upper end of the sleeve 82b of the nozzle body 82 without contacting the upper lid 40 (see FIG. 6). The top plate 46 has a sufficient weight. Therefore, the nozzle body 82 is sandwiched and fixed between the bottom plate 22 and the top plate 46 by the weight of the top plate 46 (see FIG. 6A). Since the round hole 48 is formed in the vicinity of the center of the top plate 46, the pressing member 60 passes through the round hole 48 and passes through the central portion of the upper lid 40 (circular portion indicated by a two-dot chain line in FIG. 4). Can be pressed. The nozzle holding module 20 is completed as described above.

  As shown in FIG. 1, the pressing device 50 includes a drive motor 52, a power transmission mechanism 54, an eccentric cam 56, a slider 57, a pressing member 60, and a lever 62. The drive motor 52 is a motor that is disposed above the support piece 18 and rotates along an axis in the vertical direction. The power transmission mechanism 54 is a mechanism that uses a bevel gear, and transmits the power of the drive motor 52 to the eccentric cam 56. The eccentric cam 56 is a disk member, and is provided at a position where the rotation axis deviates from the center. The slider 57 has a cam holding groove 58 having a vertical width substantially the same as the diameter of the eccentric cam 56. An eccentric cam 56 is fitted in the cam holding groove 58, and the upper surface 58 a and the lower surface 58 b of the cam holding groove 58 are always in contact with the cam surface 56 a of the eccentric cam 56. The slider 57 can move in the vertical direction along the slider guide 59. When the eccentric cam 56 rotates, the eccentric cam 56 moves the slider 57 up and down while rolling on the upper surface 58a and the lower surface 58b of the cam holding groove 58. The pressing member 60 is a cylindrical member, and is fixed to the lower surface of the slider 57. Therefore, the pressing member 60 moves up and down as the slider 57 moves up and down, and presses or releases the upper cover 40 of the nozzle holding module 20. The lever 62 is for the operator to manually rotate the eccentric cam 56.

  Next, a method for using the nozzle cleaning device 10 will be described. First, the operator completes the nozzle holding module 20 by setting a plurality of used nozzles 80 to be cleaned in the cartridge 30 according to the procedure shown in FIGS. Next, the operator operates the lever 62 so that the pressing member 60 comes to the highest position. This is to prevent the pressing member 60 from hitting the nozzle holding module 20 when the nozzle holding module 20 is placed on the horizontal base 14. Next, the nozzle holding module 20 is inserted rearward along the guide rail 16 from the front of the horizontal base 14 of the frame 12 (see the black arrow in FIG. 1), and the nozzle holding module 20 hits the rear wall of the frame 12. Slide until At this time, the bottom plate 22 of the nozzle holding module 20 enters a horizontal groove 12 a (see FIG. 1) provided on the lower front surface of the frame 12. At the same time, a ball plunger (not shown) urged upward from the upper surface of the horizontal pedestal 14 is fitted into a recess (not shown) provided on the lower surface of the bottom plate 22 that has entered the horizontal groove 12a. In this way, the bottom plate 22 is fixed by the horizontal groove 12a and the ball plunger. At this time, the nozzle holding module 20 may be fixed to the frame 12 by a fixture (not shown) attached to the frame 12 (for example, a rubber tube or a hook). Next, the nozzle cleaning device 10 is put into an ultrasonic cleaning tank 70 (see FIG. 1) containing a cleaning liquid. At this time, at least the top plate 46 of the nozzle holding module 20 is immersed in the cleaning liquid. Here, an organic cleaning liquid is used as the cleaning liquid. Examples of the organic cleaning liquid include ethanol, isopropyl alcohol, and acetone. In this state, the operator switches on the ultrasonic cleaning tank 70 so that ultrasonic vibration is applied to the cleaning liquid. At the same time, the drive motor 52 of the nozzle cleaning device 10 is turned on and the drive motor 52 is rotated to move the pressing member 60 up and down.

  6A and 6B are longitudinal sectional views of the periphery of the nozzle 80 in the nozzle cleaning device 10, in which FIG. 6A shows a state where the upper lid 40 is not pressed, and FIG. 6B shows a state where the upper lid 40 is pressed. When the pressing member 60 moves downward, the cartridge 30 and the upper lid 40 that sandwich the nozzle support 86 move downward relative to the nozzle body 82 against the elastic force of the spring 24. That is, the state moves from the state of FIG. 6A to the state of FIG. 6B (outward path). Further, when the pressing member 60 moves upward, the cartridge 30 and the upper lid 40 that sandwich the nozzle support 86 are biased upward by the elastic force of the spring 24, and thus move upward with respect to the nozzle body 82. That is, it moves from the state of FIG. 6B to the state of FIG. By repeating the operation of pressing the cartridge 30 and the upper lid 40 downward and releasing the pressing, the states of FIG. 6A and FIG. 6B are alternately repeated. Accordingly, the nozzle support 86 slides in the vertical direction with respect to the nozzle body 82. Thus, the nozzle 80 is cleaned by sliding the nozzle support 86 with respect to the nozzle body 82 in a state where the cleaning liquid is present between the nozzle body 82 and the nozzle support 86. Then, after a predetermined cleaning time has elapsed, the operator turns off the ultrasonic cleaning tank 70 and the drive motor 52, pulls up the nozzle cleaning device 10 from the ultrasonic cleaning tank 70, and moves the nozzle along the guide rail 16. Pull the holding module 20 forward. Finally, the nozzle holding module 20 is disassembled and the nozzle 80 is taken out from the cartridge 30. A part or all of the worker's work may be automated.

  Here, the correspondence between the components of the present embodiment and the components of the present invention will be clarified. The nozzle holding module 20 of the present embodiment corresponds to the nozzle holding means of the present invention, and the pressing device 50 corresponds to the nozzle sliding means. Further, the cartridge 30 and the upper lid 40 correspond to a nozzle support holder, and the bottom plate 22 and the top plate 46 correspond to a nozzle body support.

  According to the nozzle cleaning device 10 of the present embodiment described in detail above, the nozzle body 82 and the nozzle support 86 are relatively moved in a state where the cleaning fluid is present between the nozzle body 82 and the nozzle support 86. Therefore, the dirt and clogging of the sliding portion of the nozzle 80 can be efficiently removed as compared with the case of cleaning with the cleaning fluid without sliding them.

  Further, since the organic cleaning liquid is used as the cleaning fluid, the fat-soluble dirt and clogging accumulated at the sliding portion of the nozzle 80 can be efficiently cleaned. In particular, since an organic cleaning liquid to which ultrasonic vibration is applied is used, dirt on the sliding portion of the nozzle 80 can be more efficiently cleaned.

  Further, by moving the cartridge 30 and the upper cover 40 holding the nozzle support 86 in the vertical direction with the position of the nozzle body 82 fixed, the nozzle support 86 is slid in a predetermined direction with respect to the nozzle body 82. Can be moved. Particularly, since the nozzle support 86 is slid in a predetermined direction with respect to the nozzle body 82 using the elastic force of the spring 24, the nozzle support 86 is slid with respect to the nozzle body 82 with a relatively simple configuration. be able to.

  It should be noted that the present invention is not limited to the above-described embodiment, and it goes without saying that the present invention can be implemented in various modes as long as it belongs to the technical scope of the present invention.

  For example, in the above-described embodiment, the nozzle support 86 is slid in the vertical direction with respect to the nozzle body 82, but conversely, the nozzle main body 82 may be slid in the vertical direction with respect to the nozzle support 86. Good. Specifically, as shown in FIG. 7A, the bottom plate 22 is placed on the spring 13 on the horizontal pedestal 14. Accordingly, the bottom plate 22, the nozzle body 82 and the top plate 46 are elastically supported by the spring 13. The cartridge 30 and the upper lid 40 that hold the nozzle support 86 are fixed to the frame 12 (see FIG. 1) independently of the bottom plate 22 and the top plate 46. Then, the pressing member 60 presses the top plate 46 instead of the upper lid 40 downward or releases the pressing. In the state where the pressure is released, the bottom plate 22 is urged upward by the elastic force of the spring 13 as shown in FIG. Therefore, the nozzle main body 82 is positioned above the nozzle support 86. On the other hand, when the top plate 46 is pressed downward in this state, the bottom plate 22, the nozzle body 82, and the top plate 46 move downward against the elastic force of the spring 13, as shown in FIG. . Therefore, the nozzle body 82 is positioned below the nozzle support 86. By repeating the operation of pressing the top plate 46 downward and releasing the pressing, the states of FIGS. 7A and 7B are repeated alternately. Therefore, the nozzle main body 82 slides in the vertical direction with respect to the nozzle support 86. Even if it does in this way, the effect similar to embodiment mentioned above is acquired.

  In the embodiment described above, the vicinity of the center of the cartridge 30 and the upper lid 40 is pressed by the pressing member 60, but instead, the four corners of the outer periphery may be pressed by the pressing member. If it carries out like this, the cartridge 30 and the upper cover 40 can be pressed in the stable state straight down. Also, the nozzle 80 can be held near the center of the cartridge 30 and the upper lid 40. On the other hand, since four pressing members are required, the apparatus configuration becomes complicated.

  In the above-described embodiment, the organic cleaning liquid is used as the cleaning fluid, but the present invention is not particularly limited to this. For example, as the cleaning fluid, in addition to the organic cleaning liquid, an aqueous cleaning liquid, a cleaning gas, a cleaning mist, or the like may be used, or a combination of these may be used. If an aqueous cleaning liquid is used, water-soluble dirt and clogging accumulated at the sliding portion of the nozzle 80 can be efficiently cleaned. In this case, cleaning can be performed more efficiently if ultrasonic vibration is applied. If the cleaning gas is used, dirt and clogging accumulated in the sliding portion of the nozzle can be blown away. If the cleaning mist is used, dirt and clogging accumulated in the sliding portion of the nozzle can be removed with a small amount of liquid.

  In the embodiment described above, the nozzle 80 that does not have a spring is illustrated as an object to be cleaned, but a nozzle having a spring may be the object to be cleaned. For example, a spring may be provided between the tip member 82a and the flange 86b of the nozzle 80 shown in FIG. 6 so that the tip member 82a is given an elastic force in a direction always away from the flange 86b.

  In the above-described embodiment, the nozzle 80 of one size is illustrated, but the size is not particularly limited. When the same size cartridge is used, a small number of nozzles are held if a large size nozzle is cleaned, and a large number of nozzles can be held if a small size nozzle is cleaned.

  The cartridge 30 of the above-described embodiment may also be used as a nozzle stocker of a component mounter (not shown).

  In the embodiment described above, the pressing member 60 may be elastically supported by the slider 57 via a spring. At this time, the spring is designed so as to contract when the pressing force by the pressing member 60 exceeds a predetermined force. By doing so, it is possible to avoid the possibility that the pressing force by the pressing member 60 is too strong and the nozzle 80 is damaged.

10 nozzle cleaning device, 12 frame, 12a horizontal groove, 13 spring, 14 horizontal base, 16 guide rail, 18 support piece, 20 nozzle holding module, 22 bottom plate, 24 spring, 26 shaft, 30 cartridge, 32 through hole, 34 nozzle Holding hole, 34a Step, 36 Holding member, 38 Ball plunger, 40 Upper lid, 41 Holding member, 42 Comb teeth, 44 Through hole, 46 Top plate, 48 Round hole, 49 Through hole, 50 Pressing device, 52 Drive motor, 54 Power transmission mechanism, 56 Eccentric cam, 56a Cam surface, 57 Slider, 58 Cam holding groove, 58a Upper surface, 58b Lower surface, 59 Slider guide, 60 Press member, 62 Lever, 70 Ultrasonic cleaning tank, 80 nozzle, 82 Nozzle body, 82a Tip member, 82b Sleeve, 82c Slotted hole 84 air passage, 86 nozzle carrier, 86a cylinder, 86b flange, 86c pin.

Claims (7)

A nozzle holding means for holding a nozzle supported by a nozzle support so that a nozzle body having a tip portion for adsorbing a component is slidable in a predetermined direction;
In a state where a cleaning fluid exists between the nozzle body and the nozzle support of the nozzle held by the nozzle holding means, the nozzle body and the nozzle support are relatively moved in the predetermined direction. Nozzle sliding means for sliding on,
Nozzle cleaning device with The cleaning fluid is one selected from the group consisting of organic cleaning liquid, aqueous cleaning liquid, cleaning pressurized gas, and cleaning mist.
The nozzle cleaning device according to claim 1. The cleaning fluid is an organic cleaning liquid or an aqueous cleaning liquid to which ultrasonic vibration is applied.
The nozzle cleaning device according to claim 1 or 2. The nozzle holding means includes a nozzle body holder for holding the nozzle body, and a nozzle support holder for holding the nozzle support.
The nozzle sliding means reciprocates the nozzle support holder in the predetermined direction with the position of the nozzle body holder fixed.
The nozzle cleaning apparatus of any one of Claims 1-3. The nozzle support holder is supported by an elastic body,
The nozzle sliding means applies an external force against the elastic force of the elastic body to the nozzle support holder in a state in which the position of the nozzle body holder is fixed, thereby causing the nozzle support holder to move in the predetermined direction. Moving along the forward path, and after releasing the external force, the nozzle support holder is moved along the return path in the predetermined direction by the elastic force of the elastic body,
The nozzle cleaning device according to claim 4. The nozzle holding means includes a nozzle body holder for holding the nozzle body, and a nozzle support holder for holding the nozzle support.
The nozzle sliding means reciprocates the nozzle body holder in the predetermined direction with the position of the nozzle support holder fixed.
The nozzle cleaning apparatus of any one of Claims 1-3. The nozzle body holder is supported by an elastic body,
The nozzle sliding means applies an external force against the elastic force of the elastic body to the nozzle body holder in a state in which the position of the nozzle support body holder is fixed to move the nozzle body holder in the predetermined direction. And moving the nozzle body holder along the return path in the predetermined direction by the elastic force of the elastic body after releasing the external force,
The nozzle cleaning device according to claim 6.

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