JP2016112640A5 - - Google Patents
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- Publication number
- JP2016112640A5 JP2016112640A5 JP2014252898A JP2014252898A JP2016112640A5 JP 2016112640 A5 JP2016112640 A5 JP 2016112640A5 JP 2014252898 A JP2014252898 A JP 2014252898A JP 2014252898 A JP2014252898 A JP 2014252898A JP 2016112640 A5 JP2016112640 A5 JP 2016112640A5
- Authority
- JP
- Japan
- Prior art keywords
- polyol
- reacting
- carbon atoms
- polishing pad
- agent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000003077 polyols Chemical class 0.000 claims 18
- 229920005862 polyol Polymers 0.000 claims 10
- 239000003795 chemical substances by application Substances 0.000 claims 9
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 claims 6
- 125000004432 carbon atom Chemical group C* 0.000 claims 6
- 238000005498 polishing Methods 0.000 claims 6
- -1 polysiloxane Polymers 0.000 claims 6
- 150000001875 compounds Chemical class 0.000 claims 4
- 125000000217 alkyl group Chemical group 0.000 claims 3
- 125000002947 alkylene group Chemical group 0.000 claims 3
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 claims 3
- 239000000203 mixture Substances 0.000 claims 3
- 229920001228 polyisocyanate Polymers 0.000 claims 3
- 239000005056 polyisocyanate Substances 0.000 claims 3
- 229920001296 polysiloxane Polymers 0.000 claims 3
- 239000006260 foam Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004721 Polyphenylene oxide Substances 0.000 claims 1
- 238000005187 foaming Methods 0.000 claims 1
- 239000004088 foaming agent Substances 0.000 claims 1
- 229920000570 polyether Polymers 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 0 CCOC(*)(*)N(N*C)N*(C)C Chemical compound CCOC(*)(*)N(N*C)N*(C)C 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014252898A JP6504385B2 (ja) | 2014-12-15 | 2014-12-15 | 研磨パッド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014252898A JP6504385B2 (ja) | 2014-12-15 | 2014-12-15 | 研磨パッド |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016112640A JP2016112640A (ja) | 2016-06-23 |
| JP2016112640A5 true JP2016112640A5 (enrdf_load_stackoverflow) | 2017-12-28 |
| JP6504385B2 JP6504385B2 (ja) | 2019-04-24 |
Family
ID=56140577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014252898A Active JP6504385B2 (ja) | 2014-12-15 | 2014-12-15 | 研磨パッド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6504385B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6914144B2 (ja) * | 2017-08-18 | 2021-08-04 | 富士紡ホールディングス株式会社 | 研磨パッド |
| JP7135581B2 (ja) * | 2017-08-22 | 2022-09-13 | Dic株式会社 | 研磨パッド及びその製造方法 |
| JP7224818B2 (ja) | 2018-09-06 | 2023-02-20 | 日東電工株式会社 | 粘着シート |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006175571A (ja) * | 2004-12-24 | 2006-07-06 | Toray Ind Inc | 研磨布 |
| JP5797981B2 (ja) * | 2011-09-06 | 2015-10-21 | 東洋ゴム工業株式会社 | 研磨パッド |
| JP5875300B2 (ja) * | 2011-09-06 | 2016-03-02 | 東洋ゴム工業株式会社 | 研磨パッド及びその製造方法 |
| JP2013086217A (ja) * | 2011-10-19 | 2013-05-13 | Dic Corp | 研磨パッド用ウレタン樹脂組成物、ポリウレタン研磨パッド及びポリウレタン研磨パッドの製造方法 |
-
2014
- 2014-12-15 JP JP2014252898A patent/JP6504385B2/ja active Active
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