JP2016089240A - 気相成長装置、貯留容器および気相成長方法 - Google Patents
気相成長装置、貯留容器および気相成長方法 Download PDFInfo
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- H—ELECTRICITY
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- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/301—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C23C16/303—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
- C23C16/4482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material by bubbling of carrier gas through liquid source material
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- C—CHEMISTRY; METALLURGY
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- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
- C30B29/406—Gallium nitride
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
- H01L21/02579—P-type
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- Condensed Matter Physics & Semiconductors (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
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- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Chemical Vapour Deposition (AREA)
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Abstract
Description
キャリアガス供給路18、有機金属含有ガス輸送路20、希釈ガス輸送路26に、接続部54a、接続部54b、接続部54cで接続される。第1の配管15a、第2の配管15b、第3の配管15cが接続された後、真空引き路61、62、63により、開閉バルブ56aと第1の開閉バルブ16aとの間、開閉バルブ56bと第2の開閉バルブ16bとの間、開閉バルブ56cと第3の開閉バルブ16cとの間の真空引きおよびパージが行われる。その後、第1の開閉バルブ16a、第2の開閉バルブ16b、第3の開閉バルブ16cを開ける。
Tb>Ta ・・・(式1)
P_MO=f_MO/(f_MO+f_carrier+f_add)×P_source<P_sat_MO(Ta) ・・・(式2)
f_MO=P_sat_MO(Tb)/(P_source -P_sat_MO(Tb))×f_carrier ・・・(式3)
12 貯留容器
13 容器部
15a 第1の配管
15b 第2の配管
15c 第3の配管
16a 第1の開閉バルブ
16b 第2の開閉バルブ
16c 第3の開閉バルブ
18 キャリアガス供給路
20 有機金属含有ガス輸送路
26 希釈ガス輸送路
50 恒温槽
52 液体
53 液面
Claims (5)
- 反応室と、
有機金属を貯留する貯留容器と、
内部に室温より高温の液体を貯留し、前記貯留容器を前記液体の中に浸漬して保持する恒温槽と、
前記貯留容器に接続され、前記貯留容器にキャリアガスを供給するキャリアガス供給路と、
前記貯留容器および前記反応室に接続され、前記キャリアガスによるバブリングまたは昇華により生成される前記有機金属を含む有機金属含有ガスを、前記反応室に輸送する有機金属含有ガス輸送路と、
前記恒温槽内の前記液体の液面より下方で、前記有機金属含有ガス輸送路に接続され、前記有機金属含有ガスを希釈する希釈ガスを輸送する希釈ガス輸送路と、
を備えることを特徴とする気相成長装置。 - 前記希釈ガス輸送路は前記液体内で前記有機金属含有ガス輸送路に接続されることを特徴とする請求項1記載の気相成長装置。
- 有機金属を貯留可能な容器部と、
前記容器部の内外を連通させ、前記容器部の外側に第1の開閉バルブを有する第1の配管と、
前記容器部の内外を連通させ、前記容器部の外側に第2の開閉バルブを有する第2の配管と、
前記容器部の外側に第3の開閉バルブを有し、前記第2の配管に接続される第3の配管と、
を備えることを特徴とする貯留容器。 - 前記第3の配管は、前記容器部の外側の前記第2の開閉バルブと前記容器部との間に接続されることを特徴とする請求項3記載の貯留容器。
- 反応室に基板を搬入し、
室温より高温の所定温度の液体の中に浸漬された貯留容器に貯留された有機金属に対し、キャリアガスによるバブリングまたは昇華を行うことにより有機金属含有ガスを生成し、
前記液体の液面より下方で前記有機金属含有ガスを希釈ガスで希釈し、
希釈された前記有機金属含有ガスを前記反応室に供給し、前記基板表面に半導体膜を成膜することを特徴とする気相成長方法。
Priority Applications (3)
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JP2014227547A JP6442234B2 (ja) | 2014-11-07 | 2014-11-07 | 気相成長装置、貯留容器および気相成長方法 |
US14/930,975 US10109483B2 (en) | 2014-11-07 | 2015-11-03 | Vapor phase growth apparatus, storage container, and vapor phase growth method |
DE102015221830.9A DE102015221830B4 (de) | 2014-11-07 | 2015-11-06 | Dampfphasenwachstumsvorrichtung, Vorratsbehälter und Dampfphasenwachstumsverfahren |
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JP2014227547A JP6442234B2 (ja) | 2014-11-07 | 2014-11-07 | 気相成長装置、貯留容器および気相成長方法 |
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JP2016089240A true JP2016089240A (ja) | 2016-05-23 |
JP6442234B2 JP6442234B2 (ja) | 2018-12-19 |
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JP (1) | JP6442234B2 (ja) |
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EP3162914A1 (en) * | 2015-11-02 | 2017-05-03 | IMEC vzw | Apparatus and method for delivering a gaseous precursor to a reaction chamber |
CN108531885A (zh) * | 2018-05-31 | 2018-09-14 | 江苏南大光电材料股份有限公司 | 固体金属有机化合物串联式温差使用系统及其应用 |
DE102020001894A1 (de) | 2020-03-24 | 2021-09-30 | Azur Space Solar Power Gmbh | Metallorganische chemische Gasphasenepitaxie- oder Gasphasenabscheidungsvorrichtung |
DE102021117457A1 (de) | 2021-07-06 | 2023-01-12 | Aixtron Se | Verdampfungsquelle für einen CVD-Reaktor |
Citations (3)
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JPH04187231A (ja) * | 1990-11-20 | 1992-07-03 | Toshiba Corp | 原料供給装置 |
JPH09148257A (ja) * | 1995-11-29 | 1997-06-06 | Sumitomo Electric Ind Ltd | 原料供給装置 |
JP2006117961A (ja) * | 2004-10-19 | 2006-05-11 | Fujitsu Ltd | 原料供給装置 |
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US4911101A (en) * | 1988-07-20 | 1990-03-27 | General Electric Company | Metal organic molecular beam epitaxy (MOMBE) apparatus |
JPH04114728A (ja) | 1990-09-04 | 1992-04-15 | Matsushita Electric Ind Co Ltd | 液体ソース供給装置 |
US5381605A (en) | 1993-01-08 | 1995-01-17 | Photonics Research Incorporated | Method and apparatus for delivering gas |
JPH07312344A (ja) | 1994-05-17 | 1995-11-28 | Mitsubishi Electric Corp | 半導体製造装置 |
DE10007059A1 (de) * | 2000-02-16 | 2001-08-23 | Aixtron Ag | Verfahren und Vorrichtung zur Herstellung von beschichteten Substraten mittels Kondensationsbeschichtung |
JP2002289531A (ja) | 2001-03-23 | 2002-10-04 | Ricoh Co Ltd | 原料ガス供給装置および原料ガス供給方法および薄膜形成装置およびエピタキシャル成長装置 |
US7156380B2 (en) | 2003-09-29 | 2007-01-02 | Asm International, N.V. | Safe liquid source containers |
US20070254100A1 (en) | 2006-04-26 | 2007-11-01 | Applied Materials, Inc. | MOCVD reactor without metalorganic-source temperature control |
US7775508B2 (en) * | 2006-10-31 | 2010-08-17 | Applied Materials, Inc. | Ampoule for liquid draw and vapor draw with a continuous level sensor |
JP5652960B2 (ja) | 2011-08-01 | 2015-01-14 | 株式会社フジキン | 原料気化供給装置 |
JP6168286B2 (ja) | 2013-05-27 | 2017-07-26 | 荒川化学工業株式会社 | 結晶性熱可塑性樹脂組成物およびその製造方法 |
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- 2014-11-07 JP JP2014227547A patent/JP6442234B2/ja active Active
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- 2015-11-03 US US14/930,975 patent/US10109483B2/en active Active
- 2015-11-06 DE DE102015221830.9A patent/DE102015221830B4/de active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04187231A (ja) * | 1990-11-20 | 1992-07-03 | Toshiba Corp | 原料供給装置 |
JPH09148257A (ja) * | 1995-11-29 | 1997-06-06 | Sumitomo Electric Ind Ltd | 原料供給装置 |
JP2006117961A (ja) * | 2004-10-19 | 2006-05-11 | Fujitsu Ltd | 原料供給装置 |
Also Published As
Publication number | Publication date |
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JP6442234B2 (ja) | 2018-12-19 |
US10109483B2 (en) | 2018-10-23 |
US20160133457A1 (en) | 2016-05-12 |
DE102015221830B4 (de) | 2021-03-18 |
DE102015221830A1 (de) | 2016-05-12 |
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