JP2016085178A - Physical quantity detection vibration element, physical quantity sensor, electronic equipment and mobile body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a physical quantity detection vibration element, a physical quantity sensor, electronic equipment and a mobile body, in which reduction in detection accuracy can be decreased by decreasing noise mixing in a detection signal terminal.SOLUTION: A vibration element 6 includes a detection signal electrode 671a provided on a detection vibration arm 621, a detection signal terminal provided on a support part 651 and electrically connected to the detection signal electrode 671a, and a detection ground terminal 672a provided on the support part 651. The detection ground terminal 672b is disposed between a first connection part 651a that is a connecting part of the support part 651 to a beam 661, and a second connecting part 651b that is a connecting part to a beam 662, and is disposed to extend to the outside of the first connecting part 651a. The detection signal terminal is disposed between the detection ground terminal 672b and an end of the support part 651.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a physical quantity detection vibration element, a physical quantity sensor, an electronic device, and a moving body.

  For example, as a vibration device for detecting angular velocity, a base portion located in the center portion, a pair of detection arms extending from the base portion to both sides in the y-axis direction, a pair of connecting arms extending from the base portion to both sides in the x-axis direction, A pair of drive arms extending from the tip of one connecting arm to both sides in the y-axis direction, a pair of drive arms extending from the tip of the other connecting arm to both sides in the y-axis direction, and the y-axis via the base 2. Description of the Related Art A vibration element having a pair of support portions opposed to each other in a direction, a pair of beam portions connecting one support portion and a base portion, and a pair of beam portions connecting the other support portion and a base portion is known (For example, refer to Patent Document 1).

  In such a vibration element, the detection signal terminal, the detection ground terminal, and the drive signal terminal are disposed on one support portion, and the detection signal terminal, the detection ground terminal, and the drive ground terminal are disposed on the other terminal. Moreover, each said terminal provided in the support part is arrange | equalized with the mutually substantially the same magnitude | size. In addition, a detection ground electrode that can function as a shield layer that can reduce the mixing of noise into the detection signal terminal and the drive signal terminal is located between the connection portion of the support portion and the pair of beam portions. Therefore, since the detection ground terminal cannot be formed sufficiently wide, the function as the shield layer cannot be sufficiently exhibited.

JP 2010-256332 A

  An object of the present invention is to provide a physical quantity detection vibration element, a physical quantity sensor, an electronic device, and a moving body that can reduce a decrease in detection accuracy by reducing the mixing of noise into a detection signal terminal.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

[Application Example 1]
The physical quantity detection vibration element of this application example includes a vibration body having a detection vibration unit;
A support portion that supports the vibrating body and includes a first end portion and a second end portion;
A beam portion connecting the vibrating body and a portion between the first end portion and the second end portion of the support portion;
A detection signal electrode provided in the detection vibration unit;
A detection signal terminal provided on one main surface of the support portion and electrically connected to the detection signal electrode;
A constant potential terminal provided on the one main surface of the support portion and electrically connected to a constant potential;
The constant potential terminal is arranged such that a part thereof is positioned closer to the first end side than a connection portion with the beam portion of the support portion,
The detection signal terminal is arranged closer to the first end portion than the constant potential terminal of the support portion.
As a result, it is possible to reduce the mixing of noise into the detection signal terminal, and it is possible to obtain a vibration element that can reduce a decrease in detection accuracy.

[Application Example 2]
In the physical quantity detection vibrating element of this application example, it has a detection ground electrode provided in the detection vibration unit,
It is preferable that the detection ground electrode and the constant potential terminal are electrically connected.
Thus, the constant potential terminal can be electrically connected to the constant potential with a simple configuration.

[Application Example 3]
In the physical quantity detection vibrating element according to this application example, it is preferable that the constant potential terminal is further disposed between the detection signal terminal of the support portion and the first end portion.
Thereby, mixing of noise into the detection signal terminal can be more effectively reduced.

[Application Example 4]
In the physical quantity detection vibrating element according to this application example, it is preferable that the constant potential terminal is further disposed in a portion overlapping the detection signal terminal on the other main surface of the support portion.
Thereby, mixing of noise into the detection signal terminal can be more effectively reduced.

[Application Example 5]
In the physical quantity detection vibration element of this application example, the pair of beam portions are provided
The constant potential terminal is disposed between a first connection portion that is a connection portion with the one beam portion of the support portion and a second connection portion that is a connection portion with the other beam portion, and It is preferable that the first connecting portion is disposed so as to extend to the first end portion side.
Thereby, a vibrating body can be stably connected with a support part.

[Application Example 6]
In the physical quantity detection vibrating element according to this application example, it is preferable that the constant potential terminal is further arranged to extend to the second end side with respect to the second connection portion.
Thereby, a constant potential terminal can be arrange | positioned more widely.

[Application Example 7]
In the physical quantity detection vibrating element of this application example, the vibrating body includes a driving vibration unit,
A drive signal electrode provided in the drive vibration unit;
A drive signal terminal provided between the constant potential terminal and the second end of the one main surface of the support portion and electrically connected to the drive signal electrode; preferable.
Thereby, mixing of noise from the drive signal terminal to the detection signal terminal can be reduced.

[Application Example 8]
In the physical quantity detection vibrating element according to this application example, it is preferable that the constant potential terminal is further disposed between the drive signal terminal and the second end portion of the support portion.
Thereby, mixing of noise from the drive signal terminal to the detection signal terminal can be more effectively reduced.

[Application Example 9]
In the physical quantity detection vibrating element of this application example, it is preferable that the constant potential terminal is further disposed in a portion overlapping the drive signal terminal on the other main surface of the support portion.
Thereby, mixing of noise from the drive signal terminal to the detection signal terminal can be more effectively reduced.

[Application Example 10]
The physical quantity sensor according to this application example includes the physical quantity detection vibration element according to the application example described above.
Thereby, it becomes a reliable physical quantity sensor.

[Application Example 11]
An electronic apparatus according to this application example includes the physical quantity detection vibration element according to the application example.
Thereby, it becomes an electronic device with high reliability.

[Application Example 12]
The moving body of this application example includes the physical quantity detection vibration element of the above application example.
Thereby, it becomes a mobile body with high reliability.

It is a top view which shows the physical quantity detection vibration element which concerns on suitable embodiment of this invention. It is a top view which shows the electrode which the physical quantity detection vibration element shown in FIG. 1 has. It is a top view (transmission figure) which shows the electrode which the physical quantity detection vibration element shown in FIG. 1 has. It is a perspective view which shows an example of a physical quantity sensor provided with the physical quantity detection vibration element of this invention. It is sectional drawing of the physical quantity sensor shown in FIG. It is a top view of the physical quantity sensor shown in FIG. It is a top view which shows the physical quantity detection vibration element which the physical quantity sensor shown in FIG. 4 has. It is a top view which shows the physical quantity detection vibration element which the physical quantity sensor shown in FIG. 4 has. It is sectional drawing which shows the stress relaxation layer which the physical quantity sensor shown in FIG. 4 has. It is a perspective view which shows the structure of the mobile type (or notebook type) personal computer to which the electronic device provided with the physical quantity detection vibration element of the present invention is applied. It is a perspective view which shows the structure of the mobile telephone (PHS is also included) to which the electronic device provided with the physical quantity detection vibration element of this invention is applied. It is a perspective view which shows the structure of the digital still camera to which the electronic device provided with the physical quantity detection vibration element of this invention is applied. It is a perspective view which shows the structure of the motor vehicle which applied the mobile body provided with the physical quantity detection vibration element of this invention.

  Hereinafter, a physical quantity detection vibrating element, an electronic apparatus, and a moving body of the present invention will be described in detail based on embodiments shown in the accompanying drawings.

1. First, a preferred embodiment of the physical quantity detection vibrating element of the present invention will be described.

  FIG. 1 is a plan view showing a physical quantity detection vibrating element according to a preferred embodiment of the present invention. FIG. 2 is a plan view showing electrodes included in the physical quantity detection vibrating element shown in FIG. FIG. 3 is a plan view (transmission diagram) showing electrodes of the physical quantity detection vibrating element shown in FIG. In FIG. 1, for convenience of explanation, illustration of electrodes is omitted. In the following, as shown in FIG. 1, the crystal axis of the crystal is the x axis (electric axis), the y axis (mechanical axis), and the Z axis (optical axis), and the direction along the x axis is “x axis direction” ", The direction along the y-axis is also referred to as" y-axis direction ", and the direction along the z-axis is also referred to as" z-axis direction ".

  A vibrating element (physical quantity detection vibrating element) 6 shown in FIG. 1 is a gyro element that can detect angular velocity. As shown in FIG. 1, the vibrating element 6 includes a vibrating piece 60 made of quartz and an electrode disposed on the vibrating piece 60. However, the material of the resonator element 60 is not limited to quartz, and for example, piezoelectric materials other than quartz such as lithium tantalate and lithium niobate can also be used.

  The resonator element 60 has a plate shape having a spread in the xy plane defined by the x-axis and the y-axis, which are crystal axes of quartz, and having a thickness in the z-axis direction. However, for example, the z-axis may be slightly shifted with respect to the thickness direction. That is, the crystal cut angle is not limited to this as long as the object can be achieved.

  The vibrating piece 60 includes a base 61, detection vibration arms 621 and 622 as a pair of detection vibration parts extending from the base 61 to both sides in the y-axis direction, and a pair of extending from the base 61 to both sides in the x-axis direction. The connection arms 631 and 632, the drive vibration arms 641 and 642 as a pair of drive vibration parts extending from the distal end portion of the connection arm 631 to both sides in the y-axis direction, and the both ends extending from the distal end portion of the connection arm 632 in the y-axis direction. Drive vibration arms 643 and 644 as a pair of drive vibration parts to be output; a pair of support parts 651 and 652 that support the base part 61; a pair of beam parts 661 and 662 that connect the support part 651 and the base part 61; A pair of beam portions 663 and 664 that connect the support portion 652 and the base portion 61 are provided. The base 61, the detection vibrating arms 621 and 622, the connecting arms 631 and 632, and the driving vibrating arms 641 to 644 constitute a vibrating body 600.

  The support portion 651 is provided so as to extend in the x-axis direction, and the detection vibration arm 621 and the drive vibration arm are provided between the central portion and the end portion (first end portion) 651 ′ on the + x-axis side. 641 is connected to the beam portion 661 passing between the detection vibration arm 621 and the drive vibration arm 643 between the central portion and the end portion (second end portion) 651 ″ on the −x axis side. Similarly, the support portion 652 extends in the x-axis direction and is connected between the center portion and the + x-axis side end portion (first end portion) 652 ′. , The detection vibration arm 622 is connected to the beam portion 663 passing between the detection vibration arm 622 and the drive vibration arm 642, and between the center portion and the end portion (second end portion) 652 ″ on the −x axis side. And a beam portion 664 that passes between the driving vibration arm 644 and the driving vibration arm 644. As described above, by connecting the two beam portions to the support portions 651 and 652, the vibrating body 600 can be supported more stably. Hereinafter, for convenience of explanation, the connection portion of the support portion 651 with the beam portion 661 is referred to as “connection portion 651a”, and the connection portion with the beam portion 662 is referred to as “connection portion 651b”. Further, the connection portion of the support portion 652 with the beam portion 663 is also referred to as “connection portion 652a”, and the connection portion with the beam portion 664 is also referred to as “connection portion 652b”.

  Such a vibration element 6 is fixed to an object (for example, IC3 described later) at the support portions 651 and 652.

  Further, grooves extending along the y-axis direction are formed on both main surfaces (upper surface and lower surface) of the detection vibrating arms 621 and 622, and the detection vibrating arms 621 and 622 have a substantially H-shaped cross-sectional shape. have. Further, a wide hammer head (weight portion) is provided at the tip of the detection vibration arms 621 and 622 and the drive vibration arms 641, 642, 643 and 644. However, the grooves may be omitted from the detection vibration arms 621 and 622, and the hammer head may be omitted from the detection vibration arms 621 and 622 and the drive vibration arms 641, 642, 643, and 644. Moreover, it is good also as a substantially H-shaped cross-sectional shape by forming a groove | channel in both main surfaces of the drive vibration arms 641, 642, 643, 644.

Next, the electrodes disposed on the vibrating piece 60 will be described.
As shown in FIGS. 2 and 3, the electrodes are a detection signal electrode 671a and a detection signal terminal 671b, a detection ground electrode 672a and a detection ground terminal (constant potential terminal) 672b, a drive signal electrode 673a and a drive signal terminal 673b. Drive ground electrode 674a and drive ground terminal 674b.

-Drive signal electrode and drive signal terminal-
The drive signal electrode 673a is disposed on the upper and lower surfaces (portions excluding the hammer head) of the drive vibration arms 641 and 642 and on both side surfaces of the drive vibration arms 643 and 644. Such a drive signal electrode 673a is an electrode for exciting the drive vibration of the drive vibration arms 641 to 644.

  The drive signal terminal 673b is disposed on the lower surface of the support portion 652. The drive signal terminal 673b is disposed on the −x axis side of the second connecting portion 652b of the support portion 652, that is, between the second connecting portion 652b and the end portion 652 ″, and for driving vibration. The terminal 673b is electrically connected to the drive signal electrode 673a disposed on the drive vibrating arms 641 to 644 via the drive signal wiring disposed on the beam portion 664.

-Drive ground electrode and drive ground terminal-
The drive ground electrode 674a is disposed on the upper and lower surfaces (portions excluding the hammer head) of the drive vibration arms 643 and 644 and on both side surfaces of the drive vibration arms 641 and 642. Such a drive ground electrode 674a has a potential that is a constant potential (for example, a reference potential such as ground) with respect to the drive signal electrode 673a.

  The drive ground terminal 674b is disposed on the lower surface of the support portion 651. The drive ground terminal 674b is disposed on the −x axis side of the second connection portion 651b of the support portion 651, that is, between the second connection portion 651b and the end portion 651 ″. The terminal 674b is electrically connected to the drive ground electrode 674a disposed on the drive vibrating arms 641 to 644 via the drive ground wiring disposed on the beam portion 662.

  By arranging the drive signal electrode 673a and the drive signal terminal 673b and the drive ground electrode 674a and the drive ground terminal 674b in this way, a drive signal (voltage) is applied between the drive signal terminal 673b and the drive ground terminal 674b. Thus, an electric field can be generated between the drive signal electrode 673a and the drive ground electrode 674a disposed on the drive vibration arms 641 to 644, and the drive vibration arms 641 to 644 can be driven to vibrate.

-Detection signal electrode and detection signal terminal-
The detection signal electrode 671a is disposed on the upper and lower surfaces (inner surfaces of the grooves) of the detection vibrating arms 621 and 622. Such a detection signal electrode 671a is an electrode for detecting charges generated by the detection vibration when the detection vibration of the detection vibration arms 621 and 622 is excited.

  One detection signal terminal 671b is disposed on each of the support portions 651 and 652. The detection signal terminal 671b disposed on the support portion 651 is disposed on the lower surface (one surface) of the support portion 651. The detection signal terminal 671b is disposed on the + x axis side of the first connection portion 651a of the support portion 651, that is, between the first connection portion 651a and the end portion 651 '. Further, the detection signal terminal 671b is electrically connected to the detection signal electrode 671a disposed on the detection vibrating arm 621 via a detection signal wiring formed on the beam portion 661. On the other hand, the detection signal terminal 671b disposed in the support portion 652 is disposed on the lower surface of the support portion 652. The detection signal terminal 671b is arranged on the + x axis side of the first connection portion 652a of the support portion 652, that is, between the first connection portion 652a and the end portion 652 '. The detection signal terminal 671b is electrically connected to a detection signal electrode 671a disposed on the detection vibrating arm 622 via a detection signal wiring disposed on the beam portion 663.

-Detection ground electrode and detection ground terminal-
The detection ground electrode 672a is disposed on both side surfaces of the detection vibrating arms 621 and 622. Such a detection ground electrode 672a has a potential that becomes a constant potential (for example, a reference potential such as ground) with respect to the detection signal electrode 671a.

  The detection ground terminal 672b is disposed on the support portions 651 and 652, respectively. The detection ground terminal 672b disposed on the support portion 651 includes a first portion 672b1 located at the center of the lower surface of the support portion 651, and a second portion 672b2 located on the end portion 651 ′ side of the lower surface of the support portion 651. The third portion 672b3 located on the end 651 ″ side of the lower surface of the support portion 651, and the fourth portion 672b4 located on the upper surface of the support portion 651. The detection ground terminal 672b is a beam. The detection ground electrode 672 a disposed on the detection vibrating arm 621 is electrically connected via the detection ground wiring disposed on the portions 661 and 662.

  The first portion 672b1 is disposed between the first connection portion 651a and the second connection portion 651b of the support portion 651, and the end on the + x axis side is the end portion than the first connection portion 651a. It is located on the 651 ′ side, and the end on the −x axis side is located on the end 651 ″ side with respect to the second connection portion 651b. That is, the first portion 672b1 is the first connection portion 651a of the support portion 651. The first portion 672b1 has a width (length in the x-axis direction) that extends from the + x-axis side to the −x-axis side of the second connection portion 651b. It is larger than the width and the width of the drive ground terminal 674b.

  The second portion 762b2 is provided at the end of the support portion 651 on the + x axis side. The detection signal terminal 671b is located between the first portion 762b1 and the second portion 762b2. On the other hand, the third portion 762b3 is provided at the end of the support portion 651 on the −x axis side. The drive ground terminal 674b is located between the first portion 762b1 and the third portion 762b3. Further, the fourth portion 672b4 is disposed so as to extend over substantially the entire area (substantially the entire width) of the upper surface of the support portion 651, and the first, second, and third portions 672b1, 672b2, 672b3 via the side surfaces of the support portion 651. Are connected to each other. The fourth portion 672b4 is disposed so as to overlap the detection signal terminal 671b and the drive ground terminal 674b in a plan view viewed from the z-axis direction.

  According to such a detection ground terminal 672b, since the first portion 672b1 is arranged to extend to the end portion 651 ′ side than the first connection portion 651a, the first portion 672b1 is wide and the detection signal terminal 671b. It can arrange | position in the vicinity. Since the detection ground terminal 672b functions as a shield layer that reduces the mixing of noise into the detection signal terminal 671b, the arrangement of the first portion 672b1 in this way reduces the mixing of noise into the detection signal terminal 671b. be able to. In particular, in the present embodiment, the detection ground terminal 672b has the second portion 672b2, and the detection vibration terminal 671b is sandwiched between the first portion 672b1 and the second portion 672b2, so that the above-described shielding effect is further improved. To do. In addition, in this embodiment, since the detection ground terminal 672b has the fourth portion 672b4, the above-described shielding effect is further improved.

  On the other hand, the detection ground terminal 672b disposed on the support portion 652 includes a first portion 672b1 located at the center of the lower surface of the support portion 652 and a second portion located on the end portion 652 ′ side of the lower surface of the support portion 652. 672b2, a third portion 672b3 positioned on the end 652 ″ side of the lower surface of the support portion 652, and a fourth portion 672b4 positioned on the upper surface of the support portion 652. The detection ground terminal 672b is also provided. The detection ground electrode 672a disposed on the detection vibrating arm 622 is electrically connected via the detection ground wiring disposed on the beam portions 663 and 664.

  The first portion 672b1 is disposed between the first connection portion 652a and the second connection portion 652b of the support portion 652, and the end on the + x-axis side is the end portion than the first connection portion 652a. It is located on the 652 ′ side, and the end on the −x axis side is located on the end 652 ″ side with respect to the second connection portion 652b. That is, the first portion 672b1 is the first connection portion 652a of the support portion 652. It extends from the + x axis side to the −x axis side of the second connection portion 652b, and the width (the length in the x axis direction) of the first portion 672b1 is the same as that of the detection signal terminal 671b. It is larger than the width and the width of the drive signal terminal 674b.

  The second portion 762b2 is provided at the end on the + x axis side of the support portion 652. The detection signal terminal 671b is located between the first portion 762b1 and the second portion 762b2. On the other hand, the third portion 762b3 is provided at the end of the support portion 652 on the −x axis side. The drive signal terminal 673b is located between the first portion 762b1 and the third portion 762b3. In addition, the fourth portion 672b4 is disposed so as to extend over substantially the entire area (substantially the entire width) of the upper surface of the support portion 652, and the first, second, and third portions 672b1, 672b2, 672b3 via the side surface of the support portion 652. Are connected to each other. Such a fourth portion 672b4 is disposed so as to overlap the detection signal terminal 671b and the drive signal terminal 673b in a plan view as viewed from the z-axis direction.

  According to such a detection ground terminal 672b, since the first portion 672b1 extends to the end portion 652 ′ side than the first connection portion 651a, the first portion 672b1 is wide and close to the detection signal terminal 671b. Can be arranged. The detection ground terminal 672b also functions as a shield layer that reduces the mixing of noise into the detection signal terminal 671b, whereby the mixing of noise into the detection signal terminal 671b can be reduced. In particular, since the first portion 672b1 extends to the end portion 652 "side than the second connection portion 651a, the first portion 672b1 can be widely arranged, and the detection signal terminal can be arranged from the drive signal terminal 673b or the drive signal wiring. It is possible to effectively reduce the mixing of noise into the 671b, and also reduce the mixing of noise into the drive signal terminal 673b.In particular, in the present embodiment, the detection ground terminal 672b has the second and second detection ground terminals 672b. 3 parts 672b2 and 672b3, the detection vibration terminal 671b is sandwiched between the first part 672b1 and the second part 672b2, and the drive vibration terminal 673b is sandwiched between the first part 672b1 and the third part 672b3. In addition, in the present embodiment, the detection ground terminal 672b has a fourth portion 672b4. Because it is further improved shielding effects described above.

  As described above, in the vibration element 6, it is possible to reduce the mixing of noise into the detection signal terminal 671 b and the drive signal terminal 673 b, and thus it is possible to reduce a decrease in the angular velocity detection accuracy of the vibration element 6.

  As described above, the detection vibration generated in the detection vibration arm 621 is arranged in the detection vibration arm 621 by arranging the detection signal electrode 671a and the detection signal terminal 671b and the detection ground electrode 672a and the detection ground terminal 672b. It appears as a charge between the detection signal electrode 671a and the detection ground electrode 672a, and can be taken out as a signal from between the detection signal terminal 671b and the detection ground terminal 672b arranged on the support portion 651. Further, the detection vibration generated in the detection vibration arm 622 appears as a charge between the detection signal electrode 671a and the detection ground electrode 672a disposed on the detection vibration arm 622, and the detection signal terminal 671b disposed on the support portion 652 and It can be taken out as a signal from between the detection ground terminal 672b.

  The configuration of the electrode as described above is not particularly limited as long as it has conductivity. For example, Ni (nickel), Au (metal) layer such as Cr (chromium), W (tungsten), etc. (Gold), Ag (silver), Cu (copper), etc. can be comprised by the metal film which laminated | stacked each film.

2. Physical Quantity Sensor FIG. 4 is a perspective view showing an example of a physical quantity sensor including the physical quantity detection vibration element of the present invention. FIG. 5 is a cross-sectional view of the physical quantity sensor shown in FIG. FIG. 6 is a plan view of the physical quantity sensor shown in FIG. FIG. 7 is a plan view showing a physical quantity detection vibration element included in the physical quantity sensor shown in FIG. FIG. 8 is a plan view showing a physical quantity detection vibration element included in the physical quantity sensor shown in FIG. FIG. 9 is a cross-sectional view showing a stress relaxation layer included in the physical quantity sensor shown in FIG.

  The physical quantity sensor 1 shown in FIG. 4 is a triaxial angular velocity sensor, and can independently detect an angular velocity ωx around the X axis, an angular velocity ωy around the Y axis, and an angular velocity ωz around the Z axis. Is. Such a physical quantity sensor 1 includes a package 2 in which a housing space S is formed, an IC (semiconductor device) 3 housed in the housing space S, and a 3 mounted on the IC 3 via a stress relaxation layer 7. Two vibration elements (physical quantity detection vibration elements) 4, 5, 6.

≪Package≫
As shown in FIG. 5, the package 2 is interposed between a box-shaped base 21 having a recess 211 opened on the upper surface, a plate-shaped lid 22 that closes the opening of the recess 211, and the base 21 and the lid 22. And a seam ring 23 for joining them. The IC 3 and the vibration elements 4, 5, 6 are accommodated in the accommodation space S formed by closing the opening of the recess 211 with the lid 22. The atmosphere of the accommodation space S is not particularly limited, but is, for example, a vacuum state (a reduced pressure state of 10 Pa or less). Thereby, viscous resistance is reduced and the vibration elements 4, 5, and 6 can be driven efficiently.

  The base 21 has a substantially square plan view shape. The recess 211 has a first recess 211a that opens to the top surface of the base 21 and a second recess 211b that opens to the center of the first recess 211a except for the edge of the bottom surface. In addition, a plurality of notches 212 extending from the upper surface to the lower surface are formed on each side surface of the base 21. Such a base 21 can be formed, for example, by sintering a laminate of a plurality of ceramic green sheets such as aluminum oxide, aluminum nitride, silicon carbide, mullite, glass / ceramic. .

  Wiring is arranged on such a base 21. The wiring is disposed on the bottom surface of the first recess 211a, and is disposed on the bottom surface of the base 21 and a plurality of internal terminals 241 that are electrically connected to the IC 3 via the bonding wires BW, and is electrically connected to the corresponding internal terminals 241. A plurality of external terminals 242 connected to each other. In addition, the wiring has an internal wiring 243 formed in the base 21 and a castellation electrode 244 formed in the notch 212, through which the internal terminals 241 and the corresponding external terminals 242 are electrically connected. Connected. Such wiring can be made of, for example, tungsten (W), molybdenum (Mo), manganese (Mg), or the like, and is exposed from the base 21 (for example, the internal terminal 241, the external terminal 242, the caster). The plating electrode 244) may be formed with a plated metal layer such as gold (Au) on the surface thereof.

  The lid 22 has a plate shape and is joined to the upper surface of the base 21 through a seam ring 23. The constituent material of the lid 22 is not particularly limited, but for example, an alloy such as Kovar is preferably used. Note that the lid 22 may be electrically connected to a ground wiring included in the wiring 24 via a seam ring 23, for example. Thereby, the lid 22 can function as a shield part that blocks noise from the outside of the package 2.

≪IC≫
IC3 is fixed to the bottom surface of the second recess 211b with silver paste or the like. Further, the IC 3 has a substantially rectangular shape in plan view. As shown in FIG. 6, the outer shape in plan view has a pair of outer edges (sides) 31 and 32 extending in the Y-axis direction and in the X-axis direction. And a pair of extending outer edges (sides) 33 and 34.

The IC 3 includes, for example, an interface unit 3 i that communicates with an external host device, a driving element 4 that drives the vibration element 4, detects an angular velocity ωy applied to the vibration element 4, and drives the vibration element 5. In addition, a drive / detection circuit 3x that detects the angular velocity ωx applied to the vibration element 5 and a drive / detection circuit 3z that drives the vibration element 6 and detects the angular velocity ωz applied to the vibration element 6 are included. . Further, a plurality of connection terminals 39 are arranged on the upper surface of the IC 3, and these connection terminals 39 and the internal terminals 241 are connected via bonding wires BW. Thus, the IC 3 can communicate with the host device via the external terminal 242. The communication method of IC3 is not particularly limited, and for example, SPI (registered trademark) (Serial Peripheral Interface) or I ² C (registered trademark) (Inter-Integrated Circuit) can be used. In particular, in the physical quantity sensor 1 of the present embodiment, the communication method can be selected between SPI and I ² C.

  Here, as shown in FIG. 6, the plurality of connection terminals 39 are divided into three regions set on the upper surface of the IC 3, a first terminal arrangement region SS1, a second terminal arrangement region SS2, and a third terminal arrangement region SS3. Are arranged. The first terminal arrangement region SS1 is arranged along the outer edge 33 and offset toward the outer edge 31 side, and the second terminal arrangement region SS2 is arranged along the outer edge 34 and offset toward the outer edge 31 side. The third terminal arrangement region SS3 is arranged along the outer edge 32 and closer to the outer edge 34 side.

  In the first terminal arrangement area SS1, for example, a digital signal terminal for a slave select signal SS for selecting a communication method, a digital signal terminal for a data input signal MOSI, a digital signal terminal for a clock signal SCLK, and a data output signal Digital signal terminals such as MISO digital signal terminals are arranged together. The second terminal arrangement area SS2 and the third terminal arrangement area SS3 include, for example, a ground terminal for the ground GND, a power supply signal terminal for the power supply VDDI of the interface unit 3i, and power supplies for the drive / detection circuits 3x, 3y, and 3z. Analog signal terminals such as a power supply signal terminal for VDD and a test signal terminal for test are arranged together.

  As described above, by arranging the digital signal terminal and the analog signal terminal in different regions, mixing of the digital signal into the analog signal terminal (wiring) can be reduced. Therefore, the physical quantity sensor 1 can reduce noise and perform more accurate driving. In particular, in the present embodiment, since the first terminal arrangement region SS1 is arranged as far as possible from the second and third terminal arrangement regions SS2, SS3, the above effects can be more effectively exhibited.

≪Vibration element≫
-Vibration element 4-
The vibration element 4 is a so-called “H type” vibration element, and can detect an angular velocity ωy around the X axis. As shown in FIG. 7, the vibrating element 4 includes a vibrating piece 40 made of crystal and an electrode (not shown) disposed on the vibrating piece 40. However, the material of the resonator element 40 is not limited to quartz, and for example, a piezoelectric material such as lithium tantalate or lithium niobate can also be used.

  The resonator element 40 has a plate shape having a spread in the xy plane defined by the x-axis and the y-axis, which are crystal axes of quartz, and having a thickness in the z-axis direction. The vibrating piece 40 includes a base 41, a pair of drive vibrating arms 421 and 422 extending side by side from the base 41 on the −y axis side, and a pair of detection vibrations extending side by side from the base 41 to the + y axis side. Arms 431 and 432, a pair of adjustment vibrating arms 441 and 442 that extend from the base portion 41 toward the + y-axis side and are located on both sides of the detection vibrating arms 431 and 432, a support portion 45 that supports the base portion 41, and a base portion 41 And a connecting portion 46 that connects the support portion 45 to each other.

  Such a vibration element 4 is fixed to the stress relaxation layer 7 in the support portion 45. Further, the vibration element 4 is fixed to the stress relaxation layer 7 using a conductive fixing member 8, and the vibration element 4 and the IC 3 are electrically connected via the fixing member 8 and the stress relaxation layer 7. Connected. The fixing member 8 is not particularly limited, and for example, a metal brazing material, a metal bump, a conductive adhesive, or the like can be used.

  The support portion 45 has a substantially “U” shape and is disposed so as to surround the pair of drive vibrating arms 421 and 422. The connecting portion 46 includes a beam portion 461 that connects an end portion on the −x axis side of the base portion 41 and an end portion on the −x axis side of the support portion 45, and an end portion and a support portion on the + x axis side of the base portion 41. 45 has a beam portion 462 that connects the + x-axis side end portions of 45 and a beam portion 463 that connects the end portions on both sides of the base portion 41 in the x-axis direction and the center portion of the support portion 45. In particular, in the present embodiment, the beam portions 461 and 462 have a shape extending from the base portion 41 in the + y axis direction and turned back in the −y axis direction, and the beam portion 463 meanders in the middle thereof. It has a shape having a curved portion 463a that is curved. Thereby, the connection part 46 can be made soft enough and generation | occurrence | production of an unnecessary vibration (especially vibration of a y-axis translation mode) can be reduced.

The drive vibrating arms 421 and 422 are provided with drive electrodes (not shown). By applying an oscillation drive signal (alternating voltage) from the IC 3 (drive / detection circuit 3y) to the drive electrodes, the drive mode indicated by the arrow A is changed. Excited. Then, the driving vibration arms 421 and 422 when they are vibrated at a drive mode, when an angular velocity ω around the detection axis J ₄ is applied, the detection mode indicated by the arrow B is excited. The detection vibration arms 431 and 432 are provided with detection electrodes (not shown), and detection signals (charges) generated by the vibrations of the detection vibration arms 431 and 432 are extracted from the detection electrodes. Based on the extracted detection signal, the IC 3 (drive / detection circuit 3y) detects the angular velocity ω.

-Vibration element 5-
The vibration element 5 is a so-called “H-type” vibration element and can detect an angular velocity ωx around the X axis. Since such a vibration element 5 has the same configuration as that of the vibration element 4 described above, description thereof is omitted.

-Vibration element 6
The vibration element 6 can detect the angular velocity ωz around the Z axis. Such a vibration element 6 has the same configuration as that of the above-described embodiment.

  The vibration element 6 is fixed to the stress relaxation layer 7 at the support portions 651 and 652. Further, the vibration element 6 is fixed to the stress relaxation layer 7 by using a fixing member 8 having conductivity. The vibration element 6 (each terminal 671b to 671b) is interposed via the fixing member 8 and the stress relaxation layer 7. 674b) and the IC3 are electrically connected.

By applying a drive signal from the IC 3 (drive / detection circuit 3z) to the drive signal electrode 673a, a drive mode as shown by an arrow C is excited as shown in FIG. Then, the driving vibration arms 641 to 644 is when is vibrating in the drive mode, when an angular velocity ω around the detection axis J ₆ is applied, the detection mode as shown by the arrow D is excited. Then, detection signals (charges) generated by the vibrations of the detection vibrating arms 621 and 622 are extracted from the detection signal electrode 671a. Based on the extracted detection signal, the IC 3 (drive / detection circuit 3z) detects the angular velocity ω.

  The configuration of the vibration elements 4, 5 and 6 has been described above. Next, the arrangement of the vibration elements 4, 5, and 6 on the IC 3 will be described.

First, the arrangement of the vibration element 4 will be described. Vibrating element 4, as shown in FIG. 6, the detection axis J ₄ are arranged to coincide with the Y-axis. Thereby, the angular velocity ωy can be detected by the vibration element 4. Further, the vibration element 4 is disposed at a position offset toward the outer edge 32 side and the outer edge 34 side of the upper surface of the IC 3. The third terminal arrangement region SS3 is located on the + X axis side of the vibration element 4 (between the vibration element 4 and the outer edge 32), and the −X axis side of the vibration element 4 (between the vibration element 4 and the outer edge 31). ) Is the second terminal arrangement region SS2. The vibration element 4 is arranged such that the adjustment vibrating arms 441 and 442 protrude from the outer edge 34 of the IC 3 to the + Y side in a plan view. That is, the vibration element 4 is disposed so that the adjustment vibrating arms 441 and 442 do not overlap with the IC 3 in plan view.

Next, the arrangement of the vibration element 5 will be described. Vibrating element 5, as shown in FIG. 6, the detection axis J ₅ are arranged to coincide with the X axis. Thereby, the angular velocity ωx can be detected by the vibration element 5. Further, the vibration element 5 is disposed at a position offset toward the outer edge 32 side and the outer edge 33 side of the upper surface of the IC 3. Therefore, the vibration element 5 is located on the −Y axis side (between the vibration element 4 and the outer edge 33) with respect to the vibration element 4. The first terminal arrangement region SS <b> 1 is located on the −X axis side of the vibration element 5 (between the vibration element 5 and the outer edge 31). The vibrating element 5 is arranged such that the adjustment vibrating arms 541 and 542 protrude from the outer edge 32 of the IC 3 to the + X side in a plan view.

Next, the arrangement of the vibration element 6 will be described. Vibrating element 6, as shown in FIG. 6, the detection axis J ₆ is arranged to coincide with the Z-axis. Thereby, the angular velocity ωz can be detected by the vibration element 6. The vibration element 6 is disposed at a position offset toward the outer edge 31 on the upper surface of the IC 3. Therefore, the vibration element 6 is located on the −X axis side (between the vibration elements 4, 5 and the outer edge 31) with respect to the vibration elements 4, 5. The first terminal arrangement region SS1 is located on the −Y axis side (between the vibration element 6 and the outer edge 33) of the vibration element 6, and the first terminal arrangement region SS1 is located on the + Y axis side (between the vibration element 6 and the outer edge 34). A two-terminal arrangement region SS2 is located.

  Here, as described in the above-described embodiment, the detection ground terminal 672b is widely arranged on the support portions 651 and 652 of the vibration element 6, and the detection ground terminal 672b is used as the detection signal terminal 671b or the drive signal terminal. It functions as a shield layer that reduces the mixing of noise into 673b. Therefore, mixing of digital signals from the digital terminals (wiring) arranged in the first terminal arrangement area SS1 to the detection signal terminals 671b and the drive signal terminals 673b, and analog terminals (wiring) arranged in the second terminal arrangement area SS2 are performed. From the analog signal to the detection signal terminal 671b and the drive signal terminal 673b.

Further, the vibration element 6 is arranged closer to the second terminal arrangement area SS2 than the first terminal arrangement area SS1. In other words, the vibration element 6 is disposed such that the separation distance D _SS2 from the second terminal arrangement region SS2 is shorter than the separation distance D _SS1 from the first terminal arrangement region SS1. Thereby, the vibration element 6 can be separated as much as possible from the first terminal arrangement region SS1, and mixing of digital signals into the vibration element 6 is reduced. For this reason, it is possible to reduce the mixing of noise into the drive signal and the detection signal, and the physical quantity sensor 1 can be driven more accurately.

  In addition, the vibration element 6 is disposed so that the arrangement direction of the support portions 651 and 652 coincides with the Y-axis direction. The vibration element 6 is arranged in this manner because the length in the direction in which the support portions 651 and 652 are arranged is longer than the length in the direction perpendicular to the direction (the extending direction of the connecting arms 631 and 632). The space on the upper surface of the IC 3 can be used effectively. Therefore, for example, the distance between the outer edges 31 and 33 can be shortened, and the IC 3 can be downsized.

  As described above, the vibration elements 4 and 5 are arranged in the Y-axis direction in the region on the outer edge 32 side of the upper surface of the IC 3, and the vibration element 6 is disposed in the region on the outer edge 31 side of the upper surface of the IC 3, These three vibrating elements 4, 5, 6 can be arranged in a relatively small space. Therefore, the size of the IC 3 can be reduced, and accordingly, the physical quantity sensor 1 can be reduced.

  The physical quantity sensor according to the present embodiment includes the three vibration elements 4, 5, and 6. However, the number of vibration elements is not particularly limited as long as the vibration element 6 is included. 4, 5 may be omitted, or another vibration element or acceleration detection element may be added.

≪Stress relaxation layer≫
As shown in FIGS. 4 and 6, the stress relaxation layer 7 is provided on the upper surface of the IC 3. The stress relaxation layer 7 is provided between the IC 3 and the vibration element 4. The stress relaxation layer 7 is provided between the IC 3 and the vibration element 5 and the first stress relaxation layer 71 having the vibration element 4 attached to the upper surface. A second stress relaxation layer 72 to which the vibration element 5 is attached, and a third stress relaxation layer 73 provided between the IC 3 and the vibration element 6 and having the vibration element 6 attached to the upper surface. .

  By providing the first, second, and third stress relaxation layers 71, 72, and 73, the impact received by the package is reduced, and the impact is hardly transmitted to the vibration elements 4, 5, and 6. In addition, the stress generated due to the difference in thermal expansion between the IC 3 and the vibration elements 4, 5, 6 is relieved, and the vibration elements 4, 5, 6 are difficult to deform (bend). Therefore, by providing the first, second, and third stress relaxation layers 71, 72, and 73, the mechanical strength of the physical quantity sensor 1 can be increased, and the angular velocities ωx, ωy, and ωz can be detected more accurately. Can do.

  Since the first, second, and third stress relaxation layers 71, 72, and 73 have the same configuration as each other, the first stress relaxation layer 71 will be described below as a representative. The description of the stress relaxation layers 72 and 73 is omitted.

  For example, as shown in FIG. 9, the first stress relaxation layer 71 is formed on the insulating film 711 stacked on the upper surface of the IC 3 (on the passivation film 38), the insulating film 711, and is electrically connected to the IC 3. A wiring layer 712, an insulating film 713 formed over the wiring layer 712 and the insulating film 711, and a wiring layer 714 formed over the insulating film 713 and electrically connected to the wiring layer 712. Yes. The vibration element 4 is fixed to the terminal 714 ′ provided on the wiring layer 714 through the fixing member 8. As a result, the IC 3 and the vibration element 4 are electrically connected via the wiring layers 712 and 714. Thus, the wiring layers 712 and 714 function as wiring (rearrangement wiring) for electrically connecting the IC 3 and the vibration element 4. Therefore, the terminal 37 for connecting to the vibration element 4 of the IC 3 can be freely arranged without considering the configuration of the vibration element 4 (particularly the position of the terminal).

  The insulating films 711 and 712 are each made of an elastic resin material. The resin material is not particularly limited, and polyimide, silicone-modified polyimide resin, epoxy resin, silicone-modified epoxy resin, acrylic resin, phenol resin, silicone resin, modified polyimide resin, benzocyclobutene, polybenzoxazole, and the like are used. Can do.

  In this embodiment, the stress relaxation layer 7 is divided into first, second, and third stress relaxation layers 71, 72, and 73. However, the first, second, and third stress relaxation layers 71 and 72 are divided. , 73 may be integrally formed. Further, the stress relaxation layer 7 may be omitted.

3. Electronic Device Next, an electronic device to which the vibration element 6 is applied will be described in detail with reference to FIGS.

  FIG. 10 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic device including the physical quantity detection vibration element of the present invention is applied.

  In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 1108. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably. Such a personal computer 1100 incorporates a physical quantity sensor 1 (vibration element 6) that functions as angular velocity detection means (gyro sensor). Therefore, the personal computer 1100 can exhibit higher performance and higher reliability.

  FIG. 11 is a perspective view illustrating a configuration of a mobile phone (including PHS) to which an electronic apparatus including the physical quantity detection vibration element of the present invention is applied.

  In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and a display unit 1208 is disposed between the operation buttons 1202 and the earpiece 1204. Such a cellular phone 1200 incorporates a physical quantity sensor 1 (vibration element 6) that functions as an angular velocity detection means. Therefore, the cellular phone 1200 can exhibit higher performance and higher reliability.

  FIG. 12 is a perspective view illustrating a configuration of a digital still camera to which an electronic device including the physical quantity detection vibration element of the present invention is applied. In this figure, connection with an external device is also simply shown.

  The digital still camera 1300 generates an imaging signal (image signal) by photoelectrically converting an optical image of a subject using an imaging element such as a CCD (Charge Coupled Device). A display unit 1310 is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to perform display based on an imaging signal from the CCD. The display unit 1310 displays a subject as an electronic image. Functions as a viewfinder. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302. When the photographer confirms the subject image displayed on the display unit 1310 and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308.

  In this digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.

  Such a digital still camera 1300 incorporates a physical quantity sensor 1 (vibration element 6) that functions as an angular velocity detection means. Therefore, the digital still camera 1300 can exhibit higher performance and higher reliability.

  In addition to the personal computer (mobile personal computer) shown in FIG. 10, the mobile phone shown in FIG. 11, and the digital still camera shown in FIG. Inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, televisions Telephone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (for example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices, instruments Type (e.g., vehicle, Sky machine, gauges of a ship), can be applied to a flight simulator or the like.

4). Next, a moving body provided with the physical quantity detection vibrating element of the present invention will be described in detail with reference to FIG.

  FIG. 13 is a perspective view showing a configuration of an automobile to which a moving body including the physical quantity detection vibration element of the present invention is applied.

  The automobile 1500 has a built-in physical quantity sensor 1 (vibration element 6) that functions as an angular velocity detection unit, and the physical quantity sensor 1 can detect the posture of the vehicle body 1501. The detection signal of the physical quantity sensor 1 is supplied to the vehicle body posture control device 1502, and the vehicle body posture control device 1502 detects the posture of the vehicle body 1501 based on the signal, and controls the stiffness of the suspension according to the detection result. The brakes of the individual wheels 1503 can be controlled. In addition, such posture control can be used by a biped robot or a radio control helicopter. As described above, the physical quantity sensor 1 is incorporated in realizing the posture control of various moving objects.

  As described above, the physical quantity detection vibrating element, the physical quantity sensor, the electronic device, and the moving body of the present invention have been described based on the illustrated embodiment, but the present invention is not limited to this, and the configuration of each part has the same function. Can be replaced with any structure having In addition, any other component may be added to the present invention. Further, the present invention may be a combination of any two or more configurations (features) of the above embodiments.

  Moreover, although the detection ground terminal 672b demonstrated the structure which has the 1st-4th part in embodiment mentioned above, you may abbreviate | omit the 2nd-4th part.

DESCRIPTION OF SYMBOLS 1 ... Physical quantity sensor 2 ... Package 21 ... Base 211 ... Recessed part 211a ... 1st recessed part 211b ... 2nd recessed part 212 ... Notch part 22 ... Lid 23 ... Seal ring 24 ... Wiring 241 ... ... Internal terminal 242 ... External terminal 243 ... Internal wiring 244 ... Castration electrode 3 ... IC
3i …… Interface portion 3x, 3y, 3z …… Drive / detection circuit 31, 32, 33, 34 …… Outer edge 37 …… Terminal 38 …… Passivation film 39 …… Connection terminal 4 …… Vibration element 40 …… Vibration piece 41... Base 421, 422... Drive vibration arm 431, 432... Detection vibration arm 441 and 442... Adjustment vibration arm 45. ... Bending part 5 ... Vibrating element 541, 542 ... Adjusting vibrating arm 6 ... Vibrating element 60 ... Vibrating piece 600 ... Vibrating body 61 ... Base part 621,622 ... Detecting vibrating arm 631,632 ... Link Arms 641, 642, 643, 644... Driving vibration arm 651, 652... Supporting part 651 ′, 651 ″, 652 ′, 652 ″ .. End part 651 a, 652 a. , 652b... Second connection portion 661, 662, 663, 664... Beam portion 671a .. detection signal electrode 671b .. detection signal terminal 672a .. detection ground electrode 672b. ... 2nd part 672b3 ... 3rd part 672b4 ... 4th part 673a ... Drive signal electrode 673b ... Drive signal terminal 674a ... Drive ground electrode 674b ... Drive ground terminal 7 ... Stress relaxation layer 71 ... First stress relaxation layer 711 ... Insulating film 712 ... Wiring layer 713 ... Insulating film 714 ... Wiring layer 714 '... Terminal 72 ... Second stress relaxation layer 73 ... Third stress relaxation layer 8 ... Fixed Member 1100 …… Personal computer 1102 …… Keyboard 1104 …… Main body 1106 …… Display unit 1108 …… Display unit 1200… Mobile phone 1202 …… Operation button 1204 …… Earpiece 1206 …… Speaker 1208 …… Display 1300 …… Digital still camera 1302 …… Case 1304 …… Light receiving unit 1306 …… Shutter button 1308 …… Memory 1310 …… Display unit 1312 …… Video signal output terminal 1314 …… Input / output terminal 1430 …… TV monitor 1440 …… Personal computer 1500 …… Automobile 1501 …… Body 1502 …… Body attitude control device 1503 …… Wheel BW …… Bonding wire D _SS1, D SS2 _...... distance _{J 4, J 5, J 6} ...... detection axis S ...... housing space SS1 ...... first terminal arrangement region SS2 ...... second terminal arrangement region SS3 ...... third terminal arrangement region ω , Ωx, ωy, ωz …… Angular velocity

Claims (12)

A vibrating body having a detection vibration unit;
A support portion that supports the vibrating body and includes a first end portion and a second end portion;
A beam portion connecting the vibrating body and a portion between the first end portion and the second end portion of the support portion;
A detection signal electrode provided in the detection vibration unit;
A detection signal terminal provided on one main surface of the support portion and electrically connected to the detection signal electrode;
A constant potential terminal provided on the one main surface of the support portion and electrically connected to a constant potential;
The constant potential terminal is arranged such that a part thereof is positioned closer to the first end side than a connection portion with the beam portion of the support portion,
The physical quantity detection resonator element, wherein the detection signal terminal is disposed closer to the first end portion than the constant potential terminal of the support portion. Having a detection ground electrode provided in the detection vibration section;
The physical quantity detection vibrating element according to claim 1, wherein the detection ground electrode and the constant potential terminal are electrically connected.   3. The physical quantity detection vibrating element according to claim 1, wherein the constant potential terminal is further disposed between the detection signal terminal of the support portion and the first end portion.   4. The physical quantity detection vibration element according to claim 1, wherein the constant potential terminal is further disposed in a portion overlapping the detection signal terminal on the other main surface of the support portion. 5. A pair of beam portions;
The constant potential terminal is disposed between a first connection portion that is a connection portion with the one beam portion of the support portion and a second connection portion that is a connection portion with the other beam portion, and The physical quantity detection vibration element according to claim 1, wherein the physical quantity detection vibration element is disposed so as to extend from the first connection portion to the first end portion side.   The physical quantity detection vibration element according to claim 5, wherein the constant potential terminal is further arranged to extend to the second end side from the second connection part. The vibrating body has a driving vibration unit,
A drive signal electrode provided in the drive vibration unit;
The drive signal terminal is provided between the constant potential terminal and the second end of the one main surface of the support portion, and is electrically connected to the drive signal electrode. 6. The physical quantity detection vibrating element according to 6.   The physical quantity detection vibration element according to claim 7, wherein the constant potential terminal is further disposed between the drive signal terminal and the second end portion of the support portion.   The physical quantity detection vibration element according to claim 7, wherein the constant potential terminal is further disposed in a portion overlapping the drive signal terminal on the other main surface of the support portion.   A physical quantity sensor comprising the physical quantity detection vibration element according to claim 1.   An electronic apparatus comprising the physical quantity detection vibration element according to claim 1.   A moving body comprising the physical quantity detection vibration element according to claim 1.

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